JP7092825B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP7092825B2
JP7092825B2 JP2020085580A JP2020085580A JP7092825B2 JP 7092825 B2 JP7092825 B2 JP 7092825B2 JP 2020085580 A JP2020085580 A JP 2020085580A JP 2020085580 A JP2020085580 A JP 2020085580A JP 7092825 B2 JP7092825 B2 JP 7092825B2
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JP
Japan
Prior art keywords
pump
vacuum
board
channel
gas barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2020085580A
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English (en)
Japanese (ja)
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JP2021038745A5 (enrdf_load_stackoverflow
JP2021038745A (ja
Inventor
ジノウ・ワン
ディルク・ホプフ
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JP2021038745A publication Critical patent/JP2021038745A/ja
Publication of JP2021038745A5 publication Critical patent/JP2021038745A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2020085580A 2019-08-30 2020-05-15 真空ポンプ Active JP7092825B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19194646 2019-08-30
EP19194646.6A EP3626971B1 (de) 2019-08-30 2019-08-30 Vakuumpumpe

Publications (3)

Publication Number Publication Date
JP2021038745A JP2021038745A (ja) 2021-03-11
JP2021038745A5 JP2021038745A5 (enrdf_load_stackoverflow) 2021-11-04
JP7092825B2 true JP7092825B2 (ja) 2022-06-28

Family

ID=67810495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020085580A Active JP7092825B2 (ja) 2019-08-30 2020-05-15 真空ポンプ

Country Status (2)

Country Link
EP (1) EP3626971B1 (enrdf_load_stackoverflow)
JP (1) JP7092825B2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017155709A (ja) 2016-03-04 2017-09-07 エドワーズ株式会社 真空ポンプ
JP2019023469A (ja) 2017-07-21 2019-02-14 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe
JP2014011120A (ja) * 2012-07-02 2014-01-20 Shimadzu Corp 電気フィードスルー、真空ポンプおよびプリント基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017155709A (ja) 2016-03-04 2017-09-07 エドワーズ株式会社 真空ポンプ
JP2019023469A (ja) 2017-07-21 2019-02-14 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Also Published As

Publication number Publication date
EP3626971B1 (de) 2022-05-11
EP3626971A1 (de) 2020-03-25
JP2021038745A (ja) 2021-03-11

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