JP2021018094A - Probe unit - Google Patents

Abstract

To provide a probe unit that is designed for miniaturization.SOLUTION: A probe unit comprises: a plate-like probe pin that has a first contact part and a second contact part on either end in a first direction; a housing that can accommodate the probe pin therein in a state where the first contact part is arranged outside through an opening in an opening surface; a swing member that is supported in a swingable state for the housing along the first direction and an extension direction of the opening, and has an accommodation hole that can accommodate the first contact part; and an urging unit that urges the swing member against the housing in the first direction toward an initial position, and urges the swing member against the housing in the extension direction of the opening toward a center of a swing range of the swing member.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a probe unit.

In electronic component modules such as cameras and liquid crystal panels, continuity inspection, operating characteristic inspection, and the like are generally performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body board installed in the electronic component module and the terminals of the inspection device using probe pins.

Examples of such probe pins include the pogo pin type probe pins described in Patent Document 1. This probe pin includes a contact terminal and a plunger portion having a plunger main body portion coaxially provided with the contact terminal, and a barrel portion provided on the outer peripheral side of the plunger portion.

Japanese Unexamined Patent Publication No. 2016-142644

In recent years, the miniaturization of electronic component modules has progressed, and it is required that inspection tools for inspecting electronic component modules also correspond to the miniaturization. In general, a pogo pin type probe pin such as the probe pin becomes less rigid and more easily damaged as it becomes smaller. Therefore, the inspection tool using the probe pin may not be able to cope with miniaturization.

An object of the present disclosure is to provide a probe unit capable of miniaturization.

The probe unit of the example of the present disclosure is
A plate-shaped probe pin having a first contact portion and a second contact portion at both ends in the first direction, respectively.
A housing having an opening surface intersecting in the first direction and capable of accommodating the probe pin inside in a state where the first contact portion is arranged outside through the opening of the opening surface.
It is supported in a swingable state with respect to the housing in the first direction and along the extending direction of the opening surface, and is accommodated so as to penetrate the first direction and accommodate the first contact portion. A swinging member with a hole and
In addition to being arranged inside the housing, in the first direction, the swinging member is urged against the housing toward an initial position farthest from the opening surface, and the extending direction of the opening surface. Provided with an urging portion for urging the swing member with respect to the housing toward the center of the swing range of the swing member.

According to the probe unit, a plate-shaped probe pin and a swing member having an accommodating hole capable of accommodating a first contact portion of the probe pin are provided. With such a configuration, a probe unit capable of miniaturization can be easily realized.

The perspective view which shows the probe unit of one Embodiment of this disclosure. Sectional drawing along line II-II of FIG. Sectional drawing along line III-III of FIG. The perspective view which shows the rocking member of the probe unit of FIG. The plan view of the rocking member of FIG. An enlarged plan view of the probe unit of FIG. The perspective view which shows the probe pin of the probe unit of FIG. The perspective view which shows the modification of the probe unit of FIG. FIG. 8 is a cross-sectional view taken along the line IX-IX of FIG. FIG. 8 is a cross-sectional view taken along the line VIII-VIII of FIG. An enlarged plan view of the probe unit of FIG. The perspective view which shows the probe pin of the probe unit of FIG.

Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. In the following description, terms indicating a specific direction or position (for example, terms including "top", "bottom", "right", and "left") are used as necessary, but the use of these terms is used. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the meaning of those terms does not limit the technical scope of the present disclosure. In addition, the following description is merely exemplary and is not intended to limit the disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratio of each dimension and the like do not always match the actual ones.

As shown in FIG. 1, the probe unit 1 of the embodiment of the present disclosure is swingably supported by the housing 10, the plate-shaped probe pin 20 housed inside the housing 10, and the housing 10. The swing member 30 is provided. In this embodiment, as an example, a plurality of probe pins 20 are housed inside the housing 10. As shown in FIGS. 2 and 3, each probe pin 20 has a first contact portion 21 and a second contact portion 22 at both ends of the first direction X, respectively, and intersects the first direction X (for example, orthogonally). They are arranged at intervals in the plate thickness direction Z. That is, the probe pins 20 are arranged side by side in a row with the plate surfaces facing each other.

As an example, the housing 10 has a substantially rectangular parallelepiped base housing 11 and a core housing 12 housed inside the base housing 11, as shown in FIG.

As an example, the base housing 11 has a pair of opening surfaces 111 and 112 (hereinafter, referred to as a first opening surface 111 and a second opening surface 112) intersecting the first direction X, as shown in FIG. There is. Approximately rectangular openings 113 and 114 are provided at substantially the center of the first opening surface 111 and the second opening surface 112 in the longitudinal direction (that is, the plate thickness direction Z), respectively. Inside the base housing 11, a housing accommodating portion 13 accommodating the core housing 12 is provided. The openings 113 and 114 are connected to the housing housing portion 13, respectively. The first contact portion 21 and the second contact portion 22 of the probe pin 20 are arranged outside the base housing 11 via the openings 113 and 114, respectively. In this embodiment, as shown in FIG. 1, the base housing 11 is composed of three substantially rectangular plate members 116, 117, and 118 laminated in the first direction X. Each plate member 116, 117, 118 is integrated by a pin member 17.

A housing groove 115 is provided around the core housing 12 of the base housing 11. The accommodating grooves 115 are provided on both sides of the core housing 12 in the base housing 11 in the plate thickness direction Z, respectively. Each accommodating groove 115 extends inside the base housing 11 in the plate thickness direction Z and in a direction away from the core housing 12. Inside each accommodating groove 115, a support portion 32 of a swing member 30, which will be described later, and the support portion 32 are urged in the first direction X and in the direction from the second opening surface 112 to the first opening surface 111. A coil spring 50 (an example of an urging portion) is housed in each.

As an example, the core housing 12 has a first core housing 121 and a second core housing 122 in which a plurality of probe accommodating portions 123 capable of accommodating probe pins 20 are provided, respectively, as shown in FIG. There is. The core housings 121 and 122 are arranged adjacent to each other in the second direction Y in which the probe accommodating portions 123 intersect (for example, orthogonally) in the first direction X and the plate thickness direction Z, and are independent of each other by the base housing 11. It is positioned and held integrally. As shown in FIG. 2, the probe accommodating portions 123 are arranged side by side in a row at intervals in the plate thickness direction Z. In each probe accommodating portion 123, one probe pin 20 is electrically independent of the other probe pins 20, and contact portions 21 and 22 at both ends of the first direction X are core housings. It is housed in a state where it is located outside 121 and 122.

Further, as shown in FIG. 1, the probe unit 1 includes a swing member 30 arranged outside the housing 10. The rocking member 30 includes a rocking plate portion 31 arranged so as to face the first opening surface 111, and a pair of supports extending in the first direction X from both ends of the rocking plate portion 31 in the plate thickness direction Z. It has a unit 32. The swing plate portion 31 is supported in a swingable state with respect to the housing 10 via a pair of support portions 32.

As shown in FIG. 3, the rocking plate portion 31 is provided on a recess 33 provided on a surface opposite to the surface facing the first opening surface 111 in the first direction X and on the bottom surface of the recess 33. It has a plurality of accommodating holes 34. The recess 33 accommodates a part of the connector and determines the position of the connector with respect to the swing member 30 when, for example, the connector of the inspection object or the inspection device as an example of the contact object is brought into contact with the probe unit 1. It is configured as follows. Each accommodating hole 34 penetrates the swing plate portion 31 in the first direction X and accommodates the first contact portion 21 of the probe pin 20. In this embodiment, the number of accommodating holes 34 is provided corresponding to the number of accommodating probe pins 20.

As shown in FIG. 2, the tip of each support portion 32 farther from the rocking plate portion 31 in the first direction X is accommodated in the accommodating groove 115 of the base housing 11. A flange portion 38 extending in a direction away from each support portion 32 is provided at the tip end portion of each support portion 32. Each flange portion 38 is arranged so as to be in contact with the inner surface of the base housing 11 forming the accommodating groove 115 in the first direction X, and is urged against the base housing 11 by the coil spring 50.

In the probe unit 1, as shown in FIGS. 4 and 5, each flange portion 38 is urged against the base housing 11 by four coil springs 50. Specifically, each flange portion 38 has a substantially rectangular shape in which the second direction Y is longitudinal in a plan view seen along the first direction X, and each flange portion 38 has a substantially rectangular shape at both ends of the second direction Y of each flange portion 38. The coil spring 50 is arranged. In other words, each coil spring 50 is arranged so as to be located at each apex of the quadrangle surrounding the probe pin 20 in a plan view along the first direction X.

Further, as shown in FIG. 5, in a plan view taken along the first direction X, the center of gravity GP of the swinging member 30 is an arbitrary of two coil springs 50 adjacent to the first direction X and the second direction Y. It is located inside a quadrangle whose side is each of the four virtual straight lines L1 to L4 passing through the point (for example, the center). In other words, each coil spring 50 is arranged so that the center of gravity GP of the swing member 30 is located inside the polygon having each coil spring 50 as the apex.

As shown in FIGS. 2 and 3, the movement of the swing member 30 in the first direction X is restricted between the initial position P1 and the operating position P2 by the flange portion 38 and the accommodating groove 115. The initial position P1 is the position farthest from the first opening surface 111 among the positions in the first direction X where the swing member 30 can move. The rocking member 30 is held at the initial position P1 by the urging force of the coil spring 50 in a state where an external force in the first direction X is not applied. The operating position P2 is the position closest to the first opening surface 111 among the positions in the first direction X where the swing member 30 can move.

Further, as shown in FIG. 6, in a plan view taken along the first direction X, a gap 35 and a plate in the second direction Y are provided between each support portion 32 of the swing member 30 and the accommodating groove 115. A gap 36 in the thickness direction Z is provided. Note that FIG. 6 shows only one support portion 32. The movement of the rocking member 30 in the second direction Y and the plate thickness direction Z is restricted to the range of the gaps 35 and 36. In the extending direction of the first opening surface 111 (that is, the extending direction of the plane including the second direction Y and the plate thickness direction Z), the position where the gaps 35 and 36 are formed with the accommodating groove 115 is swung. As the center of the range, the swing member 30 is urged toward the center of the swing range by four coil springs 50 in the extending direction of the first opening surface 111.

As an example, each probe pin 20 has an elongated thin plate shape in the first direction X and has conductivity, as shown in FIG. Each probe pin 20 has a first contact portion 202 provided with an elastic portion 201 that can be elastically deformed along the first direction X and one end of the elastic portion 201 in the first direction X and a first contact portion 21. And a second contact portion 203 to which the other end of the elastic portion 201 in the first direction X is connected and a second contact portion 22 is provided. Each probe pin 20 is formed by, for example, electroforming, and the elastic portion 201, the first contact portion 202, and the second contact portion 203 are arranged in series and integrally formed along the first direction X. There is.

As an example, the elastic portion 201 is composed of a plurality of strip-shaped elastic pieces arranged so as to be spaced apart from each other. Each strip-shaped elastic piece is elongated strip-shaped and has substantially the same cross-sectional shape.

As an example, the first contact portion 202 extends from the main body portion 23 connected from the direction in which the elastic portion 201 intersects the first direction X in the direction X in the first direction X and away from the elastic portion 201. It has a pair of legs 24 and 25.

The main body 23 has a contact portion 231 provided at an end closer to the elastic portion 201 in the first direction X and extending in the second direction Y.

The legs 24 and 25 are arranged with a gap 26 in the second direction Y and are configured to be elastically deformable in the second direction Y. First contact portions 21 are provided at the tips of the legs 24 and 25, respectively. Each first contact portion 21 is configured to be able to contact an object to be contacted (for example, a convex contact of an object to be inspected) from the first direction X. Further, each of the leg portions 24 and 25 has protrusions 241 and 251 provided on the side surfaces facing the second direction Y. The protrusions 241, 251 project so as to close the gap 26 between the pair of legs 24, 25, and prevent excessive insertion of the contact object into the gap 26.

As shown in FIGS. 2 and 3, each first contact portion 21 is housed in the accommodating hole 34 of the corresponding rocking member 30, and the rocking member 30 is located at the initial position P1. , A part of which protrudes from the bottom surface of the recess 33.

As an example, the second contact portion 203 has a main body portion 27 to which the elastic portion 201 is connected from the second direction Y. The main body portion 27 has a contact portion 271 extending in the second direction Y from the end portion on the elastic portion 201 side in the first direction X. The tip of the main body 27 in the first direction X has a substantially triangular shape that tapers in the first direction X as the distance from the elastic portion 201, and constitutes the second contact portion 22.

Each of the first contact portion 202 and the second contact portion 203 is arranged on a virtual straight line L5 that passes through the center of the second direction Y in the pair of legs 24 and 25 of the first contact portion 202 and extends in the first direction X. Has been done. The elastic portion 201 and each of the contact portions 231 and 271 are arranged on the same side in the second direction Y with respect to the virtual straight line L5.

As shown in FIG. 3, in a state where the probe pin 20 is housed in each probe housing portion 123 of the core housing 12, each of the contact portion 231 of the first contact portion 202 and the contact portion 271 of the second contact portion 203 , It is configured to abut on the inner surfaces of the first core housing 121 and the second core housing 122 constituting each probe accommodating portion 123 in the first direction X. That is, the positions of the contact portions 21 and 22 of the probe pin 20 in the first direction X are determined by the contact portions 231 and 271.

The elastic portion 201 is provided with respect to one end 232 in the width direction (that is, the second direction Y) of the main body 23 of the first contact portion 202 and one end 272 in the width direction of the main body 27 of the second contact portion 203. It is located on one side. In this embodiment, one end 232 of the main body 23 of the first contact portion 202 and one end 272 of the main body 27 of the second contact portion 203 are arranged on a straight line parallel to the virtual straight line L5. There is.

The probe unit 1 includes, for example, a module having a BtoB (Business-to-Business) connector as a connection medium such as a camera module, a SOP (Small Outline Package), a QFP (Quad Flat Package), a BGA (Ball grid array), and the like. It is used for continuity inspection or operation characteristic inspection of semiconductor packages. In such an inspection, each probe pin 20 is generally required to have durability because the contact and release of the contact object or the inspection device, which is an example of the contact object, are frequently repeated. As the probe pin 20 becomes smaller, this demand for durability becomes even stronger.

Further, the frequency of repeating contact and release of contact with the first contact portion 21 of the inspection object is higher than the frequency of repetition of contact and release of contact with the second contact portion 22 of the inspection device. Therefore, in order to reduce the size of the probe unit 1, it is an important factor to secure the durability of the first contact portion 21.

By the way, as one of the methods for ensuring the durability of the probe pin 20, it is conceivable to change the material of the probe pin 20. If the probe pin 20 is formed of a material having a high hardness such as a nickel alloy or a titanium alloy, the contact object may be damaged. On the contrary, if the probe pin 20 is formed of a material having a low hardness such as beryllium steel or phosphor bronze, the probe pin 20 cannot have sufficient durability, and sliding due to repeated contact and release with the contact object. The contact part may deteriorate due to the wear of. Therefore, it is not easy to secure the durability of the probe pin 20 by changing the material.

According to the probe unit 1, a plate-shaped probe pin 20 and a swing member 30 having an accommodating hole 34 capable of accommodating the first contact portion 21 of the probe pin 20 are provided. Since the probe pin 20 has a plate shape, for example, as compared with a pogo pin type probe pin, it is possible to suppress a decrease in the rigidity of the probe pin 20 and secure durability even if the size is reduced. Further, since the first contact portion 21 of the probe pin 20 is accommodated in the accommodating hole 34 of the swing member 30, even if the probe pin 20 is miniaturized, damage to the first contact portion 21 may occur. Can be reduced. That is, with such a configuration, the probe unit 1 that can be miniaturized can be easily realized.

Further, the swing member 30 extends in the extending direction of the first direction X and the first opening surface 111 (that is, the extension of the plane including the second direction Y and the plate thickness direction Z) with respect to the housing 10 by the coil spring 50. It is supported in a state where it can swing along the direction). With such a configuration, even if the position of the probe unit 1 with respect to the contact object is deviated, the probe pin 20 can be more accurately positioned according to the contact object.

Further, the urging portion is composed of at least three coil springs 50, and the center of gravity of the swinging member 30 has many vertices of each of the coil springs 50 in a plan view seen along the first direction X. It is located inside the square. With this configuration, the swing member 30 can be more reliably swung along a plane including not only the first direction X but also the second direction Y and the plate thickness direction Z.

Further, the urging portion has four coil springs 50 arranged at each apex of the quadrangle surrounding the probe pin 20 in a plan view viewed along the first direction X. With such a configuration, the swing member 30 can be more reliably swung along a plane including not only the first direction X but also the second direction Y and the plate thickness direction Z.

Further, the probe pin 20 is a first contact portion in which an elastic portion 201 that can be elastically deformed along the first direction X and one end of the elastic portion 201 in the first direction X are connected to provide a first contact portion 21. It includes 202 and a second contact portion 203 in which the other end of the elastic portion 201 in the first direction X is connected and a second contact portion 22 is provided. Each of the first contact portion 202 and the second contact portion 203 extends along the second direction Y and abuts on the inner surface of the housing 10 in the first direction X to the first direction X of the probe pin 20. It has contact portions 231 and 271 that regulate the movement of the. With such a configuration, the probe unit 1 that can be miniaturized can be realized more easily.

Further, the first core housing 121 and the second core housing 122 in which the housing 10 has the probe accommodating portion 123 capable of accommodating and holding the probe pin 20, and the probe accommodating portion 123 of the core housings 121 and 122 are in the second direction Y. It has a base housing 11 that positions the core housings 121 and 122 independently of each other and holds them integrally in a state of being arranged adjacent to each other. With such a configuration, for example, the base housing 11 and the core housing 12 are generalized, and a plurality of different types of core housings 12 determined in advance are independently positioned and integrated with respect to one base housing 11. The productivity of the probe unit 1 can be improved by configuring the probe unit 1 so that it can be held in the housing.

The urging portion is not limited to the case where it is composed of four coil springs 50, and may be composed of at least three coil springs 50. For example, when the urging portion is composed of three coil springs 50, one coil spring 50 is arranged at the center of one flange portion 38 in the second direction Y, and one coil spring 50 is arranged at both ends of the other flange portion 38 in the second direction. One coil spring 50 may be arranged for each.

Further, the probe unit 1 can be configured as shown in FIGS. 8 to 12, for example. In the probe unit 1 shown in FIGS. 8 to 12, the swing member 30 is arranged inside the housing 10 instead of outside the housing 10. As shown in FIGS. 9 and 10, in addition to the core housing 12, the housing accommodating portion 13 of the base housing 11 surrounds the swing member 30 around the first direction X and can swing in the first direction X. It is housed in. The first opening surface 111 of the base housing 11 is provided with a groove 18 extending in the second direction Y and communicating with the opening 113 and the outside of the base housing 11.

As shown in FIGS. 9 and 10, the swing member 30 is arranged in the opening 113 that opens in the first opening surface 111 of the base housing 11. As shown in FIG. 11, in a plan view taken along the first direction X, there is a gap 35 and a plate thickness in the second direction Y between the rocking plate portion 31 and the opening 113 of the rocking member 30. A gap 36 in the direction Z is provided.

As described above, in the probe unit 1 shown in FIGS. 8 to 12, substantially the entire first contact portion 21 is covered by the housing 10 and the swing member 30 in the initial state P1. Therefore, since the occurrence of damage in the first contact portion 21 can be further reduced, the probe unit 1 that can be miniaturized can be realized more easily.

Further, as shown in FIG. 8, a flat portion 37 arranged between the first opening surface 111 and the bottom surface of the groove portion 18 in the first direction X is provided around the recess 33 of the rocking plate portion 31. There is.

As shown in FIG. 9, the pin member 17 that integrates the plate members 116, 117, and 118 of the base housing 11 protrudes from the second opening surface 112 in the first direction X, and a part thereof is the housing 10. It is located outside of.

As shown in FIG. 12, the elastic portion 201 is composed of a plurality of elastic pieces (in this embodiment, two strip-shaped elastic pieces) arranged with a gap between them. Each elastic piece has a meandering shape composed of four extending portions extending in the second direction Y and three curved portions connected to adjacent extending portions. The extending portions arranged at both ends of the first direction X constitute the contact portions 204 and 205, respectively. As shown in FIG. 10, the contact portions 204 and 205 are housed in the core housing 12, and the first core housing 121 and the second core housing 122 constituting the probe accommodating portions 123 in the first direction X. It is configured to abut on the inner surface of the.

That is, the housing 10 is not limited to the above embodiment, and has an opening surface 111 that intersects the first direction X, and the first contact portion 21 is arranged outside through the opening 113 of the opening surface 111. The probe pin 20 may be accommodated inside.

Further, the probe pin 20 is not limited to the above embodiment, and may have a plate shape having a first contact portion 21 and a second contact portion 22 at both ends in the first direction X, respectively. For example, the probe pin 20 of FIG. 12 may be used for the probe unit 1 of FIG. 1, or the probe pin 20 of FIG. 7 may be used for the probe unit 1 of FIG.

As for the contact portions 204 and 205, the contact portions 204 and 205 may be provided on only one of both ends of the first direction X, or both may be omitted. In this case, instead of providing the elastic portions 201 with the contact portions 204 and 205, the contact portions 231 and 271 extending in the second direction Y from the first contact portion 202 or the second contact portion 203 may be provided.

Further, the urging portion is not limited to the coil spring 50, and the swing member 30 is moved toward the initial position P1 in the first direction X and toward the center of the swing range in the extending direction of the opening surface 111. Any configuration that can be urged can be adopted.

The various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In the following description, a reference reference numeral is also provided as an example.

The probe unit 1 of the first aspect of the present disclosure is
A plate-shaped probe pin 20 having a first contact portion 21 and a second contact portion 22 at both ends of the first direction X, respectively.
The probe pin 20 can be housed inside with the opening surface 111 intersecting the first direction X and the first contact portion 21 being arranged outside through the opening 113 of the opening surface 111. Housing 10 and
The housing 10 is supported in a swingable state along the extending direction of the first direction X and the opening surface 111, and penetrates the first direction X to penetrate the first contact portion 21. A swing member 30 having a housing hole 34 capable of accommodating the
The swing member 30 is urged against the housing 10 toward the initial position P1 farthest from the opening surface 111 in the first direction X while being arranged inside the housing 10. In the extending direction of the opening surface 111, an urging portion 50 for urging the swing member 30 with respect to the housing 10 toward the center of the swing range of the swing member 30 is provided.

According to the probe unit 1 of the first aspect, a plate-shaped probe pin 20 and a swing member 30 having an accommodating hole 34 capable of accommodating the first contact portion 21 of the probe pin 20 are provided. With such a configuration, the probe unit 1 that can be miniaturized can be easily realized.

The probe unit 1 of the second aspect of the present disclosure is
The urging portion is composed of at least three coil springs 50.
In a plan view along the first direction X, the center of gravity of the swinging member 30 is located inside a polygon having each of the coil springs 50 as an apex.

According to the probe unit 1 of the second aspect, the swing member 30 can be reliably supported in a swingable state by the first direction X and the extending direction of the opening surface 111. As a result, even if the position of the probe unit 1 with respect to the contact object is displaced, the probe pin 20 can be more accurately positioned according to the contact object.

The probe unit 1 of the third aspect of the present disclosure is
The urging portion has four coil springs 50 arranged at each apex of a quadrangle surrounding the probe pin 20 in a plan view along the first direction X.

According to the probe unit 1 of the third aspect, the swing member 30 can be reliably supported in a swingable state by the first direction X and the extending direction of the opening surface 111. Even if the position of the probe unit 1 with respect to the contact object is displaced, the probe pin 20 can be positioned more accurately according to the contact object.

The probe unit 1 of the fourth aspect of the present disclosure is
The probe pin 20
An elastic portion 201 that can be elastically deformed along the first direction X,
A first contact portion 202 to which one end of the elastic portion 201 in the first direction X is connected and the first contact portion 21 is provided.
The elastic portion 201 includes a second contact portion 203 to which the other end of the first direction X is connected and the second contact portion 22 is provided.
The elastic portion 201
It extends along a second direction Y that intersects the plate thickness direction Z of the first direction X and the probe pin 20, and one end of the first direction X of the elastic portion 201 and the first of the elastic portion 201. It has a first contact portion 204 that constitutes at least one of the other ends of one direction X.
The first contact portion 204 contacts the inner surface of the housing 10 in the first direction X to restrict the movement of the probe pin 20 in the first direction X.

According to the probe unit 1 of the fourth aspect, the probe unit 1 capable of being miniaturized can be realized more easily.

The probe unit 1 of the fifth aspect of the present disclosure is
The probe pin 20
An elastic portion 201 that can be elastically deformed along the first direction X,
A first contact portion 202 to which one end of the elastic portion 201 in the first direction X is connected and the first contact portion 21 is provided.
The elastic portion 201 includes a second contact portion 203 to which the other end of the first direction X is connected and the second contact portion 22 is provided.
At least one of the first contact portion 202 and the second contact portion 203
The probe pin 20 extends along a second direction Y intersecting the plate thickness direction Z of the first direction X and the probe pin 20 and abuts on the inner surface of the housing 10 in the first direction X. It has second contact portions 231 and 271 that regulate the movement of the above in the first direction X.

According to the probe unit 1 of the fifth aspect, the probe unit 1 capable of being miniaturized can be realized more easily.

The probe unit 1 of the sixth aspect of the present disclosure is
The housing 10
A first core housing 121 and a second core housing 122 each having a probe accommodating portion 123 capable of accommodating and holding the probe pin 20.
With the probe accommodating portion 123 of the first core housing 121 and the probe accommodating portion 123 of the second core housing 122 adjacent to each other in the second direction Y, the first core housing 121 and the first core housing 121 and the first. It has a base housing 11 that positions the two-core housing 122 independently of each other and holds them integrally.

According to the probe unit 1 of the sixth aspect, for example, the base housing 11 and the core housing 12 are generalized, and a plurality of different types of core housings 12 predetermined are independent of each other for one base housing 11. The productivity of the probe unit 1 can be improved by positioning the probe unit 1 so that it can be held integrally.

The probe unit 1 of the seventh aspect of the present disclosure is
The base housing 11
It has a housing accommodating portion 13 that accommodates the swing member 30 in a state of being swingable in the first direction X and surrounds the swing member 30 around the first direction X.

According to the probe unit 1 of the seventh aspect, the occurrence of damage in the first contact portion 21 can be further reduced, so that the probe unit 1 capable of being miniaturized can be more easily realized.

In addition, by appropriately combining any of the various embodiments or modifications, the effects of each can be achieved. In addition, combinations of embodiments or examples or combinations of embodiments and examples are possible, and features in different embodiments or examples are also possible.

The probe unit of the present disclosure includes, for example, a module having a BtoB (Business-to-Business) connector as a connection medium such as a camera module, and a SOP (Small Outline Package), a QFP (Quad Flat Package), and a BGA (Ball grid array). ) Can be used for inspection of semiconductor packages.

1 Probe unit 10 Housing 11 Base housing 111 First opening surface 112 Second opening surface 113, 114 Opening 115 Storage groove 116, 117, 118 Plate member 12 Core housing 121 First core housing 122 Second core housing 123 Probe housing 13 Housing accommodating part 17 Pin member 18 Groove part 20 Probe pin 201 Elastic part 202 First contact part 203 Second contact part 204, 205 Contact part 21 First contact part 22 Second contact part 23, 27 Main body part 231, 271 Contact parts 24, 25 Leg parts 241, 251 Protrusions 26 Gap 30 Swing member 31 Swing plate part 32 Support part 33 Recession 34 Housing holes 35, 36 Gap 37 Flat part 38 Flange part 50 Coil spring P1 Initial position P2 Operating position L1 to L5 virtual straight line

Claims (7)

A plate-shaped probe pin having a first contact portion and a second contact portion at both ends in the first direction, respectively.
A housing having an opening surface intersecting in the first direction and capable of accommodating the probe pin inside in a state where the first contact portion is arranged outside through the opening of the opening surface.
It is supported in a swingable state with respect to the housing in the first direction and along the extending direction of the opening surface, and is accommodated so as to penetrate the first direction and accommodate the first contact portion. A swinging member with a hole and
In addition to being arranged inside the housing, in the first direction, the swinging member is urged against the housing toward an initial position farthest from the opening surface, and the extending direction of the opening surface. A probe unit comprising an urging portion for urging the swing member with respect to the housing toward the center of the swing range of the swing member. The urging portion has at least three coil springs.
The probe unit according to claim 1, wherein the center of gravity of the swinging member is located inside a polygon having each of the coil springs as an apex in a plan view viewed along the first direction. The probe unit according to claim 2, wherein the urging portion has four coil springs arranged at each apex of a quadrangle surrounding the probe pin in a plan view viewed along the first direction. The probe pin
An elastic portion that can be elastically deformed along the first direction,
A first contact portion to which one end of the elastic portion in the first direction is connected and the first contact portion is provided.
It is provided with a second contact portion to which the other end of the elastic portion in the first direction is connected and the second contact portion is provided.
The elastic part
At least one end of the elastic portion in the first direction and the other end of the elastic portion in the first direction extend along a second direction intersecting the first direction and the plate thickness direction of the probe pin. It has a first contact portion that constitutes one side,
The probe unit according to any one of claims 1 to 3, wherein the first contact portion contacts the inner surface of the housing in the first direction to restrict the movement of the probe pin in the first direction. The probe pin
An elastic portion that can be elastically deformed along the first direction,
A first contact portion to which one end of the elastic portion in the first direction is connected and the first contact portion is provided.
It is provided with a second contact portion to which the other end of the elastic portion in the first direction is connected and the second contact portion is provided.
At least one of the first contact portion and the second contact portion
It extends along a second direction that intersects the first direction and the plate thickness direction of the probe pin, and abuts on the inner surface of the housing in the first direction to the probe pin in the first direction. The probe unit according to any one of claims 1 to 3, which has a second contact portion for restricting movement. The housing
A first core housing and a second core housing each having a probe accommodating portion capable of accommodating and holding the probe pin,
In a state where the probe accommodating portion of the first core housing and the probe accommodating portion of the second core housing are arranged adjacent to each other in the first direction and the second direction intersecting the plate thickness direction of the probe pin. The probe unit according to any one of claims 1 to 5, further comprising a first core housing and a base housing that independently positions and integrally holds the second core housing. The base housing
The probe unit according to claim 6, further comprising a housing accommodating portion that accommodates the swinging member in a state capable of swinging in the first direction and surrounds the swinging member around the first direction.

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