JP2021016905A - Dressing member and dressing method - Google Patents

Abstract

To provide a dressing member that can maintain high processing efficiency when processing a work using a cutting blade to which abrasive grains are fixed with a binder.SOLUTION: A dressing member is used in processing a work including a space opened at the surface thereof using an annular cutting blade to which abrasive grains are fixed with a binder. The dressing member includes: a dressing abrasive grain suitable for dressing a cutting blade; and a binder for fixing the abrasive grain. The dressing member has a shape capable of being inserted into the space of the work.SELECTED DRAWING: Figure 1

Description

The present invention relates to a dressing member used for dressing a cutting blade in which abrasive grains are fixed with a binder.

When processing various workpieces typified by semiconductor wafers, for example, an annular cutting blade in which abrasive grains such as diamond are fixed with a binder such as resin is used (see, for example, Patent Document 1). ). By moving the cutting blade and the workpiece relative to each other while cutting the cutting blade rotated at high speed into the workpiece, the workpiece can be cut along the path of this movement.

By the way, when the cutting of the workpiece is advanced by the method as described above, the worn old abrasive grains fall off from the tip of the cutting blade, and new abrasive grains appear on the surface thereof. Due to this action called self-generated blade, eye spills (dropping of abrasive grains at an early timing), clogging (adhesion of debris generated by cutting to the surface), blinding (flattening of abrasive grains due to wear), etc. Good cutting is realized by preventing the performance of the cutting blade from deteriorating.

On the other hand, when cutting a hard-to-cut workpiece with high hardness, the load acting on the tip of the cutting blade becomes high and blinding tends to occur. Therefore, in order to maintain the performance of the cutting blade, a work called dressing in which the cutting blade is cut into a plate-shaped dressing member to express new abrasive grains is performed at an appropriate timing.

JP-A-2010-129623

However, since the work piece cannot be processed during this dressing, if the dressing frequency is high, the work piece cannot be processed for a long time, and the processing efficiency is lowered.

The present invention has been made in view of such problems, and an object of the present invention is to process a workpiece when processing a workpiece using a cutting blade in which abrasive grains are fixed with a binder. It is to provide a dressing member and a dressing method which can maintain high efficiency.

According to one aspect of the present invention, it is a dressing member used when processing a workpiece having an open space on the surface by using an annular cutting blade in which abrasive grains are fixed with a binder. Provided is a dressing member having a shape which includes a dressing abrasive grain suitable for dressing of the cutting blade and a binder for fixing the abrasive grain and which can be inserted into the space of the workpiece.

According to another aspect of the present invention, a dressing method used for dressing an annular cutting blade in which abrasive grains are fixed with a binder, and a dressing abrasive grain suitable for dressing the cutting blade. A dressing member containing a binder for fixing the abrasive grains and having a shape that can be inserted into the space of the work piece having an open space on the surface is inserted into the space of the work piece. Provided is a dressing method in which a work piece into which the dressing member is inserted is cut together with the dressing member by the cutting blade, and the cutting blade is dressed while processing the work piece.

The dressing member according to one aspect of the present invention contains abrasive grains for dressing suitable for dressing of a cutting blade and a binder for fixing the abrasive grains, and has a shape that can be inserted into the inner space of the workpiece. I have. Therefore, by inserting this dressing member into the space of the workpiece and cutting the workpiece together with the dressing member with the cutting blade, the dressing of the cutting blade can be performed while processing the workpiece.

That is, if the dressing member according to one aspect of the present invention is used, the cutting blade can be dressed while processing the workpiece, so that the time during which the workpiece cannot be processed becomes long due to this dressing. There is no. Therefore, when the workpiece is machined using a cutting blade in which the abrasive grains are fixed with a binder, the machining efficiency can be maintained high.

FIG. 1A is a perspective view showing the appearance of a work piece formed in a cylindrical shape, and FIG. 1B is a perspective view showing a state in which a dressing member is inserted into the cylindrical work piece. 1 (C) is a perspective view showing a cylindrical workpiece into which a dressing member is inserted. FIG. 2A is a side view showing how the workpiece is being cut, and FIG. 2B is a side view of the state shown in FIG. 2A as viewed from another direction. FIG. 3A is a perspective view showing the appearance of a work piece formed in a square tube shape, and FIG. 3B shows a state in which a dressing member is inserted into the work piece in a square tube shape. It is a perspective view, and FIG. 3C is a perspective view showing a square tubular workpiece into which a dressing member is inserted. FIG. 4 (A) is a perspective view showing how the dressing member is inserted into the workpiece having the recess, and FIG. 4 (B) is a perspective view showing the workpiece into which the dressing member is inserted. ..

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1A is a perspective view showing the appearance of the workpiece 1 used in the present embodiment. The workpiece 1 is formed in a cylindrical shape using, for example, a conductive material, and has a columnar space 1a opened on the surface (outer surface) inside.

The workpiece 1 is cut to a desired length, for example, and becomes a waveguide for transmitting microwaves and the like. The conductive material constituting the workpiece 1 is typically a metal such as copper or aluminum. However, there are no particular restrictions on the conductive material, and ceramics or the like to which conductivity is imparted may be used.

The wall thickness of the workpiece 1 is substantially constant over the entire workpiece 1. That is, the cylindrical space 1a is arranged substantially concentrically with respect to the cylindrical workpiece 1. The outer diameter (diameter) a1 of the workpiece 1 is, for example, about 3 mm to 7 mm, typically 5 mm, and the inner diameter (diameter) a2 of the workpiece 1 is, for example, about 1 mm to 5 mm, typically. Is 3 mm.

The wall thickness of the workpiece 1 is represented by (outer diameter a1-inner diameter a2) / 2. Therefore, for example, when the outer diameter a1 is 5 mm and the inner diameter a2 is 3 mm, the wall thickness is 1 mm. The length of the workpiece 1 (the length corresponding to the cylindrical height) is at least long enough to cut the workpiece 1 to obtain a plurality of short waveguides.

When the workpiece 1 is machined using an annular cutting blade in which abrasive grains are fixed with a binder, the dressing member of the present embodiment is inserted into the space 1a inside the workpiece 1. FIG. 1B is a perspective view showing how the dressing member 3 is inserted into the workpiece 1, and FIG. 1C is a perspective view showing the workpiece 1 into which the dressing member 3 is inserted. is there.

The dressing member 3 contains abrasive grains for dressing suitable for dressing of a cutting blade used for processing the workpiece 1 and a binder for fixing the abrasive grains. As the abrasive grains of the dressing member 3, those containing alumina (white random), silicon carbide (green carbonundum), or the like are used.

On the other hand, as the binder of the dressing member 3, those containing ceramics (vitrified), resin (resinoid), metal and the like are used. For example, by filling a mold with abrasive grains and a binder and heating (sintering), a dressing member 3 having a shape corresponding to the mold can be obtained. However, the types of abrasive grains and binders constituting the dressing member 3, the manufacturing method of the dressing member 3, and the like are changed according to the specifications of the cutting blade.

As shown in FIG. 1B, the dressing member 3 is formed into a columnar shape that can be inserted into the space 1a of the workpiece 1. The outer diameter a3 of the dressing member 3 is the same as the inner diameter a2 of the workpiece 1, or slightly smaller than the inner diameter a2 of the workpiece 1, for example, about 1 mm to 5 mm, typically 3 mm.

It is desirable that the length of the dressing member 3 is about the same as or longer than the length of the workpiece 1. As a result, the space 1a can be filled with the dressing member 3 over the entire length direction of the workpiece 1. However, the length of the dressing member 3 may be shorter than that of the workpiece 1.

When dressing the cutting blade while processing the workpiece 1 using the dressing member 3 described above, first, as shown in FIG. 1 (B), the dressing member 3 is used as the space of the workpiece 1. Insert into 1a (insertion step). As a result, as shown in FIG. 1C, the space 1a inside the workpiece 1 is filled with the dressing member 3.

After the dressing member 3 is inserted into the space 1a of the workpiece 1, the workpiece 1 into which the dressing member 3 is inserted is cut together with the dressing member 3 with a cutting blade. FIG. 2A is a side view showing how the workpiece 1 is cut, and FIG. 2B is a side view of the state shown in FIG. 2A as viewed from another direction. .. The work piece 1 and the dressing member 3 are cut by using, for example, the cutting device 2 shown in FIGS. 2 (A) and 2 (B).

The cutting device 2 includes a chuck table 4 for holding the workpiece 1. The chuck table 4 includes, for example, a cylindrical frame made of a metal material typified by stainless steel (not shown) and a holding plate made of a porous material and arranged on the upper part of the frame (not shown). .. The frame is connected to a rotary drive source (not shown) such as a motor. The chuck table 4 rotates around a rotation axis that is substantially perpendicular to the upper surface of the holding plate (generally parallel to the vertical direction) due to the force generated by this rotation drive source.

Further, the frame body is supported by a processing feed mechanism (not shown). The chuck table 4 is moved in the machining feed direction substantially parallel to the upper surface of the holding plate by this machining feed mechanism. Further, the lower surface side of the holding plate is connected to the suction source via a flow path (not shown) provided inside the frame body.

A cutting unit 6 is arranged above the chuck table 4. The cutting unit 6 includes a spindle 8 which is a rotation axis substantially parallel to the upper surface of the holding plate. An annular cutting blade 10 in which abrasive grains such as diamond are fixed with a binder such as metal is mounted on one end side of the spindle 8.

A rotary drive source (not shown) such as a motor is connected to the other end side of the spindle 8, and the cutting blade 10 mounted on one end side of the spindle 8 rotates by the force generated by the rotary drive source. Further, the spindle 8 is supported by an elevating mechanism (not shown) and an indexing feed mechanism (not shown). The cutting unit 6 is moved in the vertical direction substantially perpendicular to the upper surface of the holding plate by the elevating mechanism, and is moved in the indexing feed direction substantially perpendicular to the vertical direction and the machining feed direction by the indexing feed mechanism.

When processing the workpiece 1 and the dressing member 3, first, the workpiece 1 is held by the chuck table 4. Specifically, as shown in FIGS. 2 (A) and 2 (B), the workpiece 1 is attached to the adhesive surface side of the adhesive tape 21 having a size covering the upper surface of the holding plate. Then, the non-adhesive surface of the adhesive tape 21 is brought into contact with the upper surface of the holding plate, and the negative pressure of the suction source is applied to the holding plate. As a result, the workpiece 1 is held on the chuck table 4 via the adhesive tape 21.

A plate-shaped member that defines the position of the workpiece 1 with respect to the adhesive tape 21 may be attached to the position of the adhesive tape 21 adjacent to the workpiece 1. This makes it possible to prevent the position of the workpiece 1 from shifting. As the plate-shaped member, for example, a carbon member or the like that does not hinder the processing of the workpiece 1 by the cutting blade 10 is used.

After the workpiece 1 is held by the chuck table 4, the rotated cutting blade 10 is cut to machine the workpiece 1. In the present embodiment, first, the orientation of the chuck table 4 (the orientation around the rotation axis of the chuck table 4) is adjusted by the rotation drive source, and the length direction of the workpiece 1 and the machining feed direction of the chuck table 4 are adjusted. Make it almost vertical.

Next, the relative positions of the chuck table 4 and the cutting unit 6 are adjusted by the machining feed mechanism and the indexing feed mechanism, and the cutting blade is set at a predetermined position away from the planned machining position of the workpiece 1 in the machining feed direction. Position 10. Further, the height of the cutting unit 6 is adjusted by an elevating mechanism, and the lower end of the cutting blade 10 is positioned at a position lower than, for example, the upper surface (adhesive surface) of the adhesive tape 21 and higher than the upper surface of the chuck table 4.

After that, the chuck table 4 is moved in the machining feed direction while rotating the cutting blade 10. As a result, as shown in FIGS. 2A and 2B, the rotated cutting blade 10 can be cut into the planned machining position, and the workpiece 1 can be cut together with the dressing member 3 by the cutting blade 10. .. As a result, in the present embodiment, the workpiece 1 is cut together with the dressing member 3. When the above-mentioned plate-shaped member is attached to the adhesive tape 21, the plate-shaped member is also cut.

In the present embodiment, the first planned machining position is set at a position l from the end of the workpiece 1 so that the waveguide having a desired length can be cut out from the workpiece 1. .. The length of the waveguide cut out from the workpiece 1 is, for example, 1 mm to 10 mm, typically 5 mm. The above procedure is repeated until the workpiece 1 is cut at all the scheduled machining positions set in the workpiece 1.

After that, the dressing member 3 in a state of being inserted into the waveguide obtained by cutting the workpiece 1 is removed from the waveguide (removal step). For example, the dressing member 3 can be removed by extruding the dressing member 3 from the waveguide with a rod-shaped member thinner than the inner diameter a2 of the waveguide. There are no particular restrictions on the method of removing the dressing member 3.

As described above, the dressing member 3 according to the present embodiment contains the dressing abrasive grains suitable for dressing the cutting blade 10 and the binder for fixing the abrasive grains, and is inside the workpiece 1. It has a shape that can be inserted into the space 1a. Therefore, by inserting the dressing member 3 into the space 1a of the work piece 1 and cutting the work piece 1 together with the dressing member 3 with the cutting blade 10, the dressing of the cutting blade 10 is performed while processing the work piece 1. It can be carried out.

That is, if the dressing member 3 according to the present embodiment is used, the cutting blade 10 can be dressed while processing the workpiece 1, so that the workpiece 1 cannot be processed for a long time due to this dressing. It will never be. Therefore, when the workpiece 1 is machined using the cutting blade 10 in which the abrasive grains are fixed with a binder, the machining efficiency can be maintained high.

Further, in the present embodiment, after the dressing member 3 is inserted into the space 1a of the workpiece 1, the rotated cutting blade 10 is cut to process the workpiece 1 together with the dressing member 3, so that the space 1a The dressing member 3 inserted into the work piece 1 is less likely to be deformed, and the work piece 1 is suppressed from bending and vibrating when the cutting blade 10 is cut. That is, defects such as cracks and chips due to bending and vibration of the workpiece 1 are less likely to occur.

The present invention is not limited to the description of the above-described embodiment, and can be implemented with various modifications. For example, in the above-described embodiment, the dressing member 3 used when processing the cylindrical work piece 1 is exemplified, but the same dressing member is also used when processing the work piece of any other shape. Can be used.

FIG. 3A is a perspective view showing the appearance of the work piece 5 having a square tubular shape, and FIG. 3B shows a dressing member 7 being inserted into the work piece 5 having a square tubular shape. FIG. 3C is a perspective view showing a state, and FIG. 3C is a perspective view showing a square tubular workpiece 5 into which a dressing member 7 is inserted. The workpiece 5 according to the first modification is formed in a square tube shape using, for example, a conductive material, and has a prismatic space 5a opened on the surface (outer surface) inside. ..

The wall thickness of the workpiece 5 is substantially constant over the entire workpiece 5. Further, the cross section of the workpiece 5 in the direction perpendicular to the length direction (the direction corresponding to the height direction of the square cylinder) is rectangular. The length b1 of the first side of the outer rectangle constituting the cross section of the workpiece 5 is, for example, about 3 mm to 7 mm, typically 6 mm, and is the outer rectangle constituting the cross section of the workpiece 5. The length c1 of the second side is, for example, about 3 mm to 7 mm, typically 4 mm.

Further, the length b2 of the first side of the inner rectangle constituting the cross section of the workpiece 5 is, for example, about 1 mm to 5 mm, typically 4 mm, and is inside the workpiece 5 constituting the cross section. The length c2 of the second side of the rectangle is, for example, about 1 mm to 5 mm, typically 2 mm. The wall thickness of the workpiece 5 is represented by (length b1-length b2) / 2 or (length c1-length c2) / 2.

As shown in FIGS. 3B and 3C, the dressing member 7 inserted into the workpiece 5 is formed in a prismatic shape corresponding to the space 5a. That is, the length b3 of the first side of the rectangle constituting the cross section of the dressing member 7 is, for example, about 1 mm to 5 mm, typically 4 mm, and is the second side of the rectangle constituting the cross section of the dressing member 7. The length c3 is, for example, about 1 mm to 5 mm, typically 2 mm.

By using this dressing member 7, it becomes possible to dress the cutting blade while processing the square tubular workpiece 5 in the same procedure as in the above-described embodiment. The material, manufacturing method, and the like of the dressing member 7 are the same as those of the dressing member 3 of the above-described embodiment.

FIG. 4 (A) is a perspective view showing how the dressing member 13 is inserted into the workpiece 11 having the recess 11a, and FIG. 4 (B) shows the workpiece 11 into which the dressing member 13 is inserted. It is a perspective view which shows. The workpiece 11 according to the second modification is formed in a rectangular parallelepiped shape using, for example, a semiconductor material such as silicon, and has a rectangular parallelepiped recess (space) opened on the surface (upper surface of FIG. 4A). ) 11a is inside. There is no particular limitation on the size of the workpiece 11 and the recess 11a.

As shown in FIGS. 4 (A) and 4 (B), the dressing member 13 inserted into the workpiece 11 is formed in a rectangular parallelepiped shape corresponding to the recess 11a. That is, the length d2 of the first side of the dressing member 13 is equal to or less than the length d1 of the first side of the corresponding recess 11a, and the length e2 of the second side of the dressing member 13 is the length e2 of the corresponding recess 11a. The length of the two sides is e1 or less, and the length f2 of the third side of the dressing member 13 is the length f1 or less of the third side of the corresponding recess 11a.

By using this dressing member 13, it becomes possible to dress the cutting blade while processing the workpiece 5 having the recess 11a in the same procedure as in the above-described embodiment. The material, manufacturing method, and the like of the dressing member 13 may be the same as those of the dressing member 3 of the above-described embodiment.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as the scope of the object of the present invention is not deviated.

1: Work piece 1a: Space 3: Dressing member 5: Work piece 5a: Space 7: Dressing member 11: Work piece 11a: Recess (space)
13: Dressing member 21: Adhesive tape 2: Cutting device 4: Chuck table 6: Cutting unit 8: Spindle 10: Cutting blade

Claims (2)

A dressing member used when processing a workpiece having an open space on the surface using an annular cutting blade in which abrasive grains are fixed with a binder.
It contains dressing abrasive grains suitable for dressing of the cutting blade and a binder for fixing the abrasive grains.
A dressing member having a shape that can be inserted into the space of the work piece. A dressing method used for dressing an annular cutting blade in which abrasive grains are fixed with a binder.
It has a shape that includes dressing abrasive grains suitable for dressing of the cutting blade and a binder for fixing the abrasive grains, and can be inserted into the space of the workpiece having a space open on the surface inside. The dressing member is inserted into the space of the work piece,
A dressing method characterized by cutting the work piece into which the dressing member is inserted with the cutting blade together with the dressing member, and dressing the cutting blade while processing the work piece.

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