JP2020537328A - X線デバイスのための窓部材 - Google Patents
X線デバイスのための窓部材 Download PDFInfo
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- JP2020537328A JP2020537328A JP2020542210A JP2020542210A JP2020537328A JP 2020537328 A JP2020537328 A JP 2020537328A JP 2020542210 A JP2020542210 A JP 2020542210A JP 2020542210 A JP2020542210 A JP 2020542210A JP 2020537328 A JP2020537328 A JP 2020537328A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/488—Protection of windows for introduction of radiation into the coating chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/18—Windows, e.g. for X-ray transmission
- H01J2235/183—Multi-layer structures
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- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
(表1)
(表2)
307 結晶粒
308 粒界
特開昭57−82954号公報Aは、ベリリウム箔の表面上に窒化ケイ素又は炭化ケイ素の層を含むX線窓を開示している。米国特許出願公開第2015/0053640号明細書A1は、キャリアと固体層の間にエッチングストップ層が存在する層状構造を含む放射窓を製造する方法を開示している。
Claims (24)
- X線デバイスの内部環境を前記X線デバイスの外部環境から分離するための窓部材であって、前記窓部材は、基板と、この基板の表面の上に配置された被覆層と、を備え、
前記基板が、多結晶材料から形成され、低エネルギーX線に対して実質的に透明であり、
前記被覆層が、非多孔質であり、前記基板の表面にて結晶粒を覆い、この結晶粒間の粒界内に延びて、前記被覆層が、前記基板と前記外部環境との間に不浸透性障壁を形成するようになる、
ことを特徴とする窓部材。 - 前記被覆層は、前記表面の下方の少なくとも100nmの深さまで前記粒界内に延びる、請求項1に記載の窓部材。
- 前記被覆層は、前記粒界における前記結晶粒間の間隔が原子スケールである深さまで前記粒界の各結晶粒内に延びる、請求項1又は請求項2に記載の窓部材。
- 前記被覆層は、均一な厚みを有して前記基板の表面を覆う連続膜を形成する、請求項1〜3の何れか1項に記載の窓部材。
- 前記被覆層の前記厚みは、200nm未満である、請求項1〜4の何れか1項に記載の窓部材。
- 前記被覆層は、前記結晶粒及び粒界によって定められる前記基板の表面輪郭に共形となる、請求項1〜5の何れか1項に記載の窓部材。
- 前記被覆層の気孔率は、1%以下である、請求項1〜6の何れか1項に記載の窓部材。
- 前記被覆層のピンホール密度は、10cm-1未満である、請求項1〜7の何れか1項に記載の窓部材。
- 前記被覆層によって生じる低エネルギーX線の減衰は、前記基板によって生じる前記低エネルギーX線の減衰の5%以下である、請求項1〜8の何れか1項に記載の窓部材。
- 前記被覆層の厚み及び構成材料は、前記被覆層によって生じる前記低エネルギーX線の減衰が前記基板によって生じる前記低エネルギーX線の減衰の5%以下になるように、組み合わせて選択される、請求項1〜9の何れか1項に記載の窓部材。
- 前記被覆層は、8〜80の間の原子番号を有する元素を含む材料からのみ形成される、請求項1〜10の何れか1項に記載の窓部材。
- 前記被覆層は、接着層及び保護層を含み、前記接着層は、前記保護層を前記基板の表面に付着させ、前記保護層は非多孔質である、請求項1〜11の何れか1項に記載の窓部材。
- 前記保護層の気孔率は、前記基板の表面が大気ガス又は液体に露出されるのを阻止するのに十分に低い、請求項12に記載の窓部材。
- 前記接着層はAl2O3を含み、前記保護層はTiO2を含む、請求項12又は請求項13に記載の窓部材。
- 前記接着層及び前記保護層の各々の厚みは、200nm未満である、請求項12〜14の何れか1項に記載の窓部材。
- 前記被覆層は、原子層堆積によって前記基板上に配置される、請求項1〜15の何れか1項に記載の窓部材。
- 前記被覆層は、導電性材料を含む、請求項1〜16の何れか1項に記載の窓部材。
- 前記被覆層は、NbがドープされたTiO2を含む、請求項1〜17の何れか1項に記載の窓部材。
- 前記被覆層は、10-6Sm-1よりも大きい導電性を有する、請求項1〜18の何れか1項に記載の窓部材。
- 前記基板は、0.5〜10.0keVエネルギー帯域におけるX線に対して実質的に透明である、請求項1〜19の何れか1項に記載の窓部材。
- 前記基板は、0.5〜10.0keVエネルギー帯域におけるX線に対して90%よりも大きい透過率を有する、請求項1〜20の何れか1項に記載の窓部材。
- 前記基板と前記被覆層を組み合わせた前記透過率は、前記0.5〜10.0keVエネルギー帯域におけるX線に対して85%よりも大きい、請求項1〜21の何れか1項に記載の窓部材。
- 前記基板と前記被覆層を組み合わせた前記透過率は、前記基板単独の透過率の95%よりも大きい、請求項1〜22の何れか1項に記載の窓部材。
- 前記基板は、ベリリウムから形成される、請求項1〜23の何れか1項に記載の窓部材。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/783,457 | 2017-10-13 | ||
US15/783,457 US20180061608A1 (en) | 2017-09-28 | 2017-10-13 | Window member for an x-ray device |
PCT/GB2018/052945 WO2019073262A1 (en) | 2017-10-13 | 2018-10-12 | WINDOW ELEMENT FOR X-RAY DEVICE |
Publications (2)
Publication Number | Publication Date |
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JP2020537328A true JP2020537328A (ja) | 2020-12-17 |
JP7237974B2 JP7237974B2 (ja) | 2023-03-13 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2020542210A Active JP7237974B2 (ja) | 2017-10-13 | 2018-10-12 | X線デバイスのための窓部材 |
Country Status (4)
Country | Link |
---|---|
US (2) | US20180061608A1 (ja) |
EP (1) | EP3695432A1 (ja) |
JP (1) | JP7237974B2 (ja) |
WO (1) | WO2019073262A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI127409B (en) * | 2017-01-18 | 2018-05-15 | Oxford Instruments Tech Oy | radiation Window |
JP2023054443A (ja) * | 2021-10-04 | 2023-04-14 | 浜松ホトニクス株式会社 | 発光封体及び光源装置 |
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2017
- 2017-10-13 US US15/783,457 patent/US20180061608A1/en not_active Abandoned
-
2018
- 2018-10-12 JP JP2020542210A patent/JP7237974B2/ja active Active
- 2018-10-12 WO PCT/GB2018/052945 patent/WO2019073262A1/en active Search and Examination
- 2018-10-12 EP EP18788865.6A patent/EP3695432A1/en active Pending
-
2020
- 2020-02-11 US US16/788,028 patent/US11094494B2/en active Active
Patent Citations (9)
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WO2014054591A1 (ja) * | 2012-10-01 | 2014-04-10 | 日立ツール株式会社 | 硬質皮膜被覆工具及びその製造方法 |
CN105914121A (zh) * | 2016-04-26 | 2016-08-31 | 苏州原位芯片科技有限责任公司 | 三角形单晶硅支撑粱结构式x射线氮化硅窗口构造及其制备方法 |
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