JP2020529329A5 - - Google Patents

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Publication number
JP2020529329A5
JP2020529329A5 JP2020504696A JP2020504696A JP2020529329A5 JP 2020529329 A5 JP2020529329 A5 JP 2020529329A5 JP 2020504696 A JP2020504696 A JP 2020504696A JP 2020504696 A JP2020504696 A JP 2020504696A JP 2020529329 A5 JP2020529329 A5 JP 2020529329A5
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JP
Japan
Prior art keywords
concentration
radius
treated article
abrasive
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020504696A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020529329A (ja
JP7262439B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/IB2018/055037 external-priority patent/WO2019025883A1/en
Publication of JP2020529329A publication Critical patent/JP2020529329A/ja
Publication of JP2020529329A5 publication Critical patent/JP2020529329A5/ja
Application granted granted Critical
Publication of JP7262439B2 publication Critical patent/JP7262439B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020504696A 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド Active JP7262439B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762539120P 2017-07-31 2017-07-31
US62/539,120 2017-07-31
PCT/IB2018/055037 WO2019025883A1 (en) 2017-07-31 2018-07-09 VARIABLE ABRASIVE DISTRIBUTION FLOOR MAT

Publications (3)

Publication Number Publication Date
JP2020529329A JP2020529329A (ja) 2020-10-08
JP2020529329A5 true JP2020529329A5 (enExample) 2021-08-19
JP7262439B2 JP7262439B2 (ja) 2023-04-21

Family

ID=63143295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020504696A Active JP7262439B2 (ja) 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド

Country Status (8)

Country Link
US (1) US11806838B2 (enExample)
EP (1) EP3661697B1 (enExample)
JP (1) JP7262439B2 (enExample)
KR (1) KR102619228B1 (enExample)
CA (1) CA3071501A1 (enExample)
MX (1) MX2020001195A (enExample)
TW (1) TWI826383B (enExample)
WO (1) WO2019025883A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023521096A (ja) * 2020-04-07 2023-05-23 サンーゴバン アブレイシブズ,インコーポレイティド 固定研磨バフ
CN114378715B (zh) * 2020-10-16 2023-05-30 万华化学集团电子材料有限公司 一种化学机械抛光垫及抛光方法
US20240316724A1 (en) * 2023-03-21 2024-09-26 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-pattern in-pad surface for polish rate control

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1694594C3 (de) 1960-01-11 1975-05-28 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. (V.St.A.) Reinigungs- und Polierkörper
US6062958A (en) 1997-04-04 2000-05-16 Micron Technology, Inc. Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
CZ20003542A3 (cs) * 1998-03-27 2001-12-12 Norton Company Brusný nástroj
US7201645B2 (en) 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
US20060059785A1 (en) * 2002-09-24 2006-03-23 Chien-Min Sung Methods of maximizing retention of superabrasive particles in a metal matrix
TWI238753B (en) * 2002-12-19 2005-09-01 Miyanaga Kk Diamond disk for grinding
US20050076577A1 (en) 2003-10-10 2005-04-14 Hall Richard W.J. Abrasive tools made with a self-avoiding abrasive grain array
US10065283B2 (en) * 2005-03-15 2018-09-04 Twister Cleaning Technology Ab Method and tool for maintenance of hard surfaces, and a method for manufacturing such a tool
DE602005001110T2 (de) 2005-03-15 2008-01-10 Htc Sweden Ab Verfahren zur Instandhaltung harter Oberflächen
DK1877219T3 (da) * 2005-03-15 2011-10-03 Htc Sweden Ab Fremgangsmåde til at vedligeholde en hård, glat gulvoverfladse omfattende et polymermateriale
US20100266812A1 (en) 2009-04-17 2010-10-21 3M Innovative Properties Company Planar abrasive articles made using transfer articles and method of making the same
CN102483540B (zh) 2009-10-15 2014-10-15 夏普株式会社 液晶显示面板及其制造方法、液晶显示装置
ITMI20110850A1 (it) * 2011-05-16 2012-11-17 Nicola Fiore Utensile multi-abrasivo
WO2013181582A1 (en) 2012-05-31 2013-12-05 Ryan Webster Diamond impregnated polishing pad with diamond pucks
TWI589404B (zh) 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
JP6964588B2 (ja) 2015-09-08 2021-11-10 スリーエム イノベイティブ プロパティズ カンパニー 砥粒凝集体を伴う砥粒回転ツール
USD843672S1 (en) 2017-07-31 2019-03-19 3M Innovative Properties Company Floor pad
USD843673S1 (en) 2017-08-09 2019-03-19 3M Innovtive Properties Company Floor pad
USD844272S1 (en) 2017-08-09 2019-03-26 3M Innovative Properties Company Floor pad

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