JP7262439B2 - 可変研磨剤分布を有するフロアパッド - Google Patents

可変研磨剤分布を有するフロアパッド Download PDF

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Publication number
JP7262439B2
JP7262439B2 JP2020504696A JP2020504696A JP7262439B2 JP 7262439 B2 JP7262439 B2 JP 7262439B2 JP 2020504696 A JP2020504696 A JP 2020504696A JP 2020504696 A JP2020504696 A JP 2020504696A JP 7262439 B2 JP7262439 B2 JP 7262439B2
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Prior art keywords
concentration
abrasive
radius
pad
treated article
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JP2020504696A
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English (en)
Japanese (ja)
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JP2020529329A5 (enExample
JP2020529329A (ja
Inventor
ジュ，リジュン
シー． アンダーソン，アンドリュー
エル． ハーゲン，サラ
ディー． ルンド，ジェシー
ニエ，チーホン
シー． ライセル，デイヴィッド
シー．ジュニア サックス，キム
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2020529329A publication Critical patent/JP2020529329A/ja
Publication of JP2020529329A5 publication Critical patent/JP2020529329A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04—Zonally-graded surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/06—Connecting the ends of materials, e.g. for making abrasive belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
JP2020504696A 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド Active JP7262439B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762539120P 2017-07-31 2017-07-31
US62/539,120 2017-07-31
PCT/IB2018/055037 WO2019025883A1 (en) 2017-07-31 2018-07-09 VARIABLE ABRASIVE DISTRIBUTION FLOOR MAT

Publications (3)

Publication Number Publication Date
JP2020529329A JP2020529329A (ja) 2020-10-08
JP2020529329A5 JP2020529329A5 (enExample) 2021-08-19
JP7262439B2 true JP7262439B2 (ja) 2023-04-21

Family

ID=63143295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020504696A Active JP7262439B2 (ja) 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド

Country Status (8)

Country Link
US (1) US11806838B2 (enExample)
EP (1) EP3661697B1 (enExample)
JP (1) JP7262439B2 (enExample)
KR (1) KR102619228B1 (enExample)
CA (1) CA3071501A1 (enExample)
MX (1) MX2020001195A (enExample)
TW (1) TWI826383B (enExample)
WO (1) WO2019025883A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115515752A (zh) * 2020-04-07 2022-12-23 圣戈班磨料磨具有限公司 固结磨料抛光轮
CN114378715B (zh) * 2020-10-16 2023-05-30 万华化学集团电子材料有限公司 一种化学机械抛光垫及抛光方法
US20240316724A1 (en) * 2023-03-21 2024-09-26 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-pattern in-pad surface for polish rate control

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007508153A (ja) 2003-10-10 2007-04-05 サンーゴバン アブレイシブズ，インコーポレイティド 自己回避砥粒配置によって作製された研磨工具
JP2008532781A (ja) 2005-03-15 2008-08-21 エイチティーシー スウェーデン エービー 硬い表面を維持するための方法及び工具、及びかかる工具の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1694594C3 (de) 1960-01-11 1975-05-28 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. (V.St.A.) Reinigungs- und Polierkörper
US6062958A (en) 1997-04-04 2000-05-16 Micron Technology, Inc. Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
ES2174590T3 (es) * 1998-03-27 2002-11-01 Norton Co Herramientas abrasivas.
US7201645B2 (en) 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
US20060059785A1 (en) * 2002-09-24 2006-03-23 Chien-Min Sung Methods of maximizing retention of superabrasive particles in a metal matrix
TWI238753B (en) * 2002-12-19 2005-09-01 Miyanaga Kk Diamond disk for grinding
US10065283B2 (en) * 2005-03-15 2018-09-04 Twister Cleaning Technology Ab Method and tool for maintenance of hard surfaces, and a method for manufacturing such a tool
ES2286730T3 (es) * 2005-03-15 2007-12-01 Htc Sweden Ab Procedimiento para el mantenimiento de superficies duras.
JP5680621B2 (ja) 2009-04-17 2015-03-04 スリーエム イノベイティブ プロパティズ カンパニー 転写物品を使用して作製される平面状の研磨物品及びその作製方法
EP2490066A4 (en) 2009-10-15 2013-04-17 Sharp Kk LIQUID CRYSTAL DISPLAY PANEL, METHOD FOR PRODUCING THE SAME, AND LIQUID CRYSTAL DISPLAY DEVICE
ITMI20110850A1 (it) 2011-05-16 2012-11-17 Nicola Fiore Utensile multi-abrasivo
WO2013181582A1 (en) 2012-05-31 2013-12-05 Ryan Webster Diamond impregnated polishing pad with diamond pucks
TWI589404B (zh) 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
KR102591496B1 (ko) 2015-09-08 2023-10-18 쓰리엠 이노베이티브 프로퍼티즈 컴파니 연마 응집체를 가진 연마 회전 공구
USD843672S1 (en) 2017-07-31 2019-03-19 3M Innovative Properties Company Floor pad
USD844272S1 (en) 2017-08-09 2019-03-26 3M Innovative Properties Company Floor pad
USD843673S1 (en) 2017-08-09 2019-03-19 3M Innovtive Properties Company Floor pad

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007508153A (ja) 2003-10-10 2007-04-05 サンーゴバン アブレイシブズ，インコーポレイティド 自己回避砥粒配置によって作製された研磨工具
JP2008532781A (ja) 2005-03-15 2008-08-21 エイチティーシー スウェーデン エービー 硬い表面を維持するための方法及び工具、及びかかる工具の製造方法

Also Published As

Publication number Publication date
BR112020002026A2 (pt) 2020-10-06
JP2020529329A (ja) 2020-10-08
KR102619228B1 (ko) 2024-01-02
TW201909828A (zh) 2019-03-16
US11806838B2 (en) 2023-11-07
EP3661697B1 (en) 2025-02-19
EP3661697A1 (en) 2020-06-10
KR20200036911A (ko) 2020-04-07
TWI826383B (zh) 2023-12-21
US20200156216A1 (en) 2020-05-21
WO2019025883A1 (en) 2019-02-07
MX2020001195A (es) 2020-03-20
CA3071501A1 (en) 2019-02-07

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