JP2020519864A - 自動ドリフト制御機能および高ダイナミックレンジを具備する補償光学アナライザ - Google Patents
自動ドリフト制御機能および高ダイナミックレンジを具備する補償光学アナライザ Download PDFInfo
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- JP2020519864A JP2020519864A JP2019559745A JP2019559745A JP2020519864A JP 2020519864 A JP2020519864 A JP 2020519864A JP 2019559745 A JP2019559745 A JP 2019559745A JP 2019559745 A JP2019559745 A JP 2019559745A JP 2020519864 A JP2020519864 A JP 2020519864A
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- 230000003044 adaptive effect Effects 0.000 title claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 65
- 238000001228 spectrum Methods 0.000 claims abstract description 8
- 230000003068 static effect Effects 0.000 claims abstract 8
- 230000003595 spectral effect Effects 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000002235 transmission spectroscopy Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000001055 reflectance spectroscopy Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000035899 viability Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0294—Multi-channel spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
- G01J2003/1217—Indexed discrete filters or choppers
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
Claims (22)
- 分光器であって:
スペクトルを持つ光線を放射する光源、
光の操作もしくは構造化に用いる少なくとも1つの静的光学エレメント、
ルーティング、減衰、エンコードの群から選択される少なくとも1つの光学的機能から、スペクトルソーティングの光学的機能を分けるために構成される少なくとも2つの補償光学エレメント、および
少なくとも1つの検出器を含み、
前記光源、少なくとも1つの静的光学エレメント、少なくとも2つの補償光学エレメントは、光源からの光を第1および第2の別個の光チャネルに導くように構成され、第1の光チャネルは、分析対象サンプルを含む、前記分光器。 - 前記少なくとも1つの検出器が、少なくとも2つの検出器を含み、少なくとも2つの補償光学エレメントが、スペクトルバンドを前記第1および第2の光チャネルへルーティングするように構成される、請求項1に記載の分光器。
- 前記少なくとも1つの検出器が、シングル検出器を含み、少なくとも2つの補償光学エレメントが、スペクトルバンドを第1および第2の光チャネルへルーティングおよびエンコードするように構成される、請求項1に記載の分光器。
- 光源が広帯域光源である、請求項1に記載の分光器。
- 光源が狭帯域光源である、請求項1に記載の分光器。
- 第2の光チャネルが、分析対象サンプルを含まない、請求項1に記載の分光器。
- 前記第2の光チャネルからの出力が、その他の別個の光チャネルの出力のための参照に用いられる、請求項1に記載の分光器。
- 少なくとも1つの静的光学エレメントが、スリットおよび格子を含む、請求項1に記載の分光器。
- 少なくとも1つの静的光学エレメントが、マスクおよび格子を含む、請求項1に記載の分光器。
- 少なくとも1つの静的光学エレメントが、屈折用光学エレメントを含む、請求項1に記載の分光器。
- 屈折用光学エレメントが、レンズを含む、請求項10に記載の分光器。
- 少なくとも1つの静的光学エレメントが、反射用光学エレメントを含む、請求項1に記載の分光器。
- 反射用光学エレメントが、ミラーを含む、請求項1に記載の分光器。
- 補償光学エレメントが、マイクロミラーアレイを含む、請求項1に記載の分光器。
- 補償光学エレメントが、ピエゾ素子型ミラーを含む、請求項1に記載の分光器。
- 補償光学エレメントが、ファブリ・ペロー干渉計を含む、請求項1に記載の分光器。
- 補償光学エレメントが、動的な格子を含む、請求項1に記載の分光器。
- 動的な格子が、シリコン格子光弁を含む、請求項17に記載の分光器。
- 動的な格子が、ピエゾ素子型チルト格子を含む、請求項17に記載の分光器。
- 補償光学エレメントが、機械的に動作するバルク光学デバイスを含む、請求項1に記載の分光器。
- 機械的に動作するバルク光学デバイスが、回転フィルターホイールを含む、請求項20に記載の分光器。
- 機械的に動作するバルク光学デバイスが、スキャンモノクロメータを含む、請求項20に記載の分光器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762504942P | 2017-05-11 | 2017-05-11 | |
US62/504,942 | 2017-05-11 | ||
PCT/US2018/032344 WO2018209251A1 (en) | 2017-05-11 | 2018-05-11 | Adaptive optical analyzer with automatic drift control and high dynamic range |
Publications (3)
Publication Number | Publication Date |
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JP2020519864A true JP2020519864A (ja) | 2020-07-02 |
JPWO2018209251A5 JPWO2018209251A5 (ja) | 2023-06-28 |
JP7394319B2 JP7394319B2 (ja) | 2023-12-08 |
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JP2019559745A Active JP7394319B2 (ja) | 2017-05-11 | 2018-05-11 | 自動ドリフト制御機能および高ダイナミックレンジを具備する補償光学アナライザ |
Country Status (7)
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US (2) | US11067444B2 (ja) |
EP (1) | EP3622269A1 (ja) |
JP (1) | JP7394319B2 (ja) |
CN (1) | CN110582696A (ja) |
AU (2) | AU2018265567A1 (ja) |
CA (1) | CA3061374A1 (ja) |
WO (1) | WO2018209251A1 (ja) |
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2018
- 2018-05-11 JP JP2019559745A patent/JP7394319B2/ja active Active
- 2018-05-11 EP EP18799090.8A patent/EP3622269A1/en not_active Withdrawn
- 2018-05-11 WO PCT/US2018/032344 patent/WO2018209251A1/en unknown
- 2018-05-11 CA CA3061374A patent/CA3061374A1/en active Pending
- 2018-05-11 AU AU2018265567A patent/AU2018265567A1/en not_active Abandoned
- 2018-05-11 US US15/977,425 patent/US11067444B2/en active Active
- 2018-05-11 CN CN201880028824.6A patent/CN110582696A/zh active Pending
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2021
- 2021-07-20 US US17/380,911 patent/US20220113188A1/en not_active Abandoned
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- 2024-03-22 AU AU2024201875A patent/AU2024201875A1/en active Pending
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JP2004245973A (ja) * | 2003-02-12 | 2004-09-02 | Sony Corp | 光学mems素子とその製造方法、回折型mems素子 |
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Also Published As
Publication number | Publication date |
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AU2024201875A1 (en) | 2024-05-02 |
EP3622269A1 (en) | 2020-03-18 |
WO2018209251A1 (en) | 2018-11-15 |
CA3061374A1 (en) | 2018-11-15 |
US20220113188A1 (en) | 2022-04-14 |
AU2018265567A1 (en) | 2019-12-12 |
US20200249089A1 (en) | 2020-08-06 |
CN110582696A (zh) | 2019-12-17 |
US11067444B2 (en) | 2021-07-20 |
JP7394319B2 (ja) | 2023-12-08 |
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