JP2020505727A5 - - Google Patents
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- JP2020505727A5 JP2020505727A5 JP2019538433A JP2019538433A JP2020505727A5 JP 2020505727 A5 JP2020505727 A5 JP 2020505727A5 JP 2019538433 A JP2019538433 A JP 2019538433A JP 2019538433 A JP2019538433 A JP 2019538433A JP 2020505727 A5 JP2020505727 A5 JP 2020505727A5
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- inorganic
- inorganic layer
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- 239000010410 layer Substances 0.000 claims description 339
- 238000007789 sealing Methods 0.000 claims description 60
- 239000010409 thin film Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 22
- 239000012044 organic layer Substances 0.000 claims description 20
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 9
- 238000005538 encapsulation Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 13
- 238000003860 storage Methods 0.000 description 10
- 230000000903 blocking effect Effects 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 230000007547 defect Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 5
- 229910010272 inorganic material Inorganic materials 0.000 description 4
- 239000011147 inorganic material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710752001.5 | 2017-08-28 | ||
| CN201710752001.5A CN109427992B (zh) | 2017-08-28 | 2017-08-28 | 薄膜封装结构及具有其的显示装置 |
| PCT/CN2018/085172 WO2019041866A1 (zh) | 2017-08-28 | 2018-04-28 | 薄膜封装结构及具有其的显示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020505727A JP2020505727A (ja) | 2020-02-20 |
| JP2020505727A5 true JP2020505727A5 (enExample) | 2020-04-02 |
| JP6873249B2 JP6873249B2 (ja) | 2021-05-19 |
Family
ID=63960618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019538433A Active JP6873249B2 (ja) | 2017-08-28 | 2018-04-28 | 薄膜封止構造、製造方法及び当該構造の表示装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11251402B2 (enExample) |
| EP (1) | EP3557645B1 (enExample) |
| JP (1) | JP6873249B2 (enExample) |
| KR (1) | KR102263856B1 (enExample) |
| CN (1) | CN109427992B (enExample) |
| TW (1) | TWI695462B (enExample) |
| WO (1) | WO2019041866A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109103222A (zh) * | 2018-08-20 | 2018-12-28 | 武汉华星光电半导体显示技术有限公司 | 一种oled显示面板以及显示装置 |
| CN111384282B (zh) * | 2018-12-27 | 2021-10-01 | Tcl科技集团股份有限公司 | 封装薄膜及其制备方法和发光显示装置 |
| KR102785782B1 (ko) * | 2019-02-07 | 2025-03-24 | 삼성디스플레이 주식회사 | 양자점 색 변환 필터를 구비하는 유기발광 표시장치 |
| CN110048019A (zh) * | 2019-04-12 | 2019-07-23 | 深圳市华星光电半导体显示技术有限公司 | 柔性oled显示装置及制备方法 |
| CN110504382B (zh) * | 2019-08-26 | 2021-09-28 | 昆山国显光电有限公司 | 一种显示面板和显示装置 |
| CN110970572B (zh) * | 2019-11-14 | 2025-06-17 | 京东方科技集团股份有限公司 | 封装结构、显示面板及显示装置 |
| CN111224016A (zh) * | 2020-01-16 | 2020-06-02 | Oppo广东移动通信有限公司 | 封装膜层、显示屏及电子设备 |
| CN111785768A (zh) * | 2020-08-25 | 2020-10-16 | 京东方科技集团股份有限公司 | 有机发光显示面板、制备方法和显示装置 |
| CN112670331B (zh) * | 2020-12-24 | 2022-08-19 | 武汉天马微电子有限公司 | 一种有机发光显示面板及其封装层制备方法、显示装置 |
| CN115207241A (zh) * | 2021-04-08 | 2022-10-18 | 广东聚华印刷显示技术有限公司 | 封装结构及显示面板 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2005027582A1 (ja) * | 2003-09-10 | 2006-11-24 | 富士通株式会社 | 表示装置及びその製造方法 |
| US7202504B2 (en) | 2004-05-20 | 2007-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element and display device |
| JP5124083B2 (ja) * | 2004-06-09 | 2013-01-23 | 三星ディスプレイ株式會社 | 有機電界発光表示装置及びその製造方法 |
| KR100615221B1 (ko) * | 2004-06-09 | 2006-08-25 | 삼성에스디아이 주식회사 | 유기 전계 발광 표시 장치 및 이의 제조 방법 |
| US7259055B2 (en) * | 2005-02-24 | 2007-08-21 | Sharp Laboratories Of America, Inc. | Method of forming high-luminescence silicon electroluminescence device |
| US7297642B2 (en) | 2005-02-14 | 2007-11-20 | Sharp Laboratories Of America, Inc. | Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications |
| JP4887473B2 (ja) | 2005-06-30 | 2012-02-29 | エルジー ディスプレイ カンパニー リミテッド | 有機ｅｌ素子及びそれを用いた有機ｅｌディスプレイ並びに有機ｅｌディスプレイの製造方法 |
| FR2936651B1 (fr) * | 2008-09-30 | 2011-04-08 | Commissariat Energie Atomique | Dispositif optoelectronique organique et son procede d'encapsulation. |
| JP2010244697A (ja) * | 2009-04-01 | 2010-10-28 | Seiko Epson Corp | 有機ｅｌ装置、有機ｅｌ装置の製造方法、電子機器 |
| CN101697343B (zh) | 2009-10-27 | 2011-06-15 | 苏州纳科显示技术有限公司 | 一种薄膜封装方法 |
| JP2012216452A (ja) | 2011-04-01 | 2012-11-08 | Hitachi High-Technologies Corp | 光半導体装置およびその製造方法 |
| WO2013065213A1 (ja) | 2011-11-02 | 2013-05-10 | パナソニック株式会社 | 有機発光パネルおよびその製造方法 |
| TWI429526B (zh) | 2011-12-15 | 2014-03-11 | Ind Tech Res Inst | 水氣阻障複合膜及封裝結構 |
| KR20140022683A (ko) | 2012-08-14 | 2014-02-25 | 삼성디스플레이 주식회사 | 유기 발광 장치 및 그 제조 방법 |
| KR102048926B1 (ko) | 2012-11-19 | 2019-11-27 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
| KR102010849B1 (ko) * | 2012-12-26 | 2019-08-14 | 엘지디스플레이 주식회사 | 유기발광소자 |
| WO2015029608A1 (ja) * | 2013-08-28 | 2015-03-05 | シャープ株式会社 | エレクトロルミネッセンス装置、及びその製造方法 |
| KR20150052490A (ko) | 2013-11-06 | 2015-05-14 | 삼성디스플레이 주식회사 | 유기발광 표시장치 및 그 제조방법 |
| CN104750285B (zh) | 2013-12-27 | 2019-01-18 | 昆山工研院新型平板显示技术中心有限公司 | 一种触控显示装置及其制备方法 |
| TWI545827B (zh) | 2014-05-23 | 2016-08-11 | 群創光電股份有限公司 | 有機發光二極體顯示面板 |
| TWI565118B (zh) | 2014-11-25 | 2017-01-01 | 財團法人工業技術研究院 | 封裝膜材與電子元件封裝體 |
| EP3034548A1 (en) | 2014-12-18 | 2016-06-22 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Barrier film laminate comprising submicron getter particles and electronic device comprising such a laminate |
| KR20160082864A (ko) | 2014-12-29 | 2016-07-11 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
| TWI570965B (zh) | 2015-02-26 | 2017-02-11 | 友達光電股份有限公司 | 發光裝置和顯示器 |
| CN106158905A (zh) | 2015-04-21 | 2016-11-23 | 上海和辉光电有限公司 | 发光器件结构及有机发光面板 |
| KR102407115B1 (ko) * | 2015-06-25 | 2022-06-09 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
| KR102201296B1 (ko) * | 2015-10-29 | 2021-01-08 | 엘지디스플레이 주식회사 | 플렉서블 유기발광다이오드 표시장치 및 그 제조 방법 |
| JP2017147191A (ja) * | 2016-02-19 | 2017-08-24 | 株式会社ジャパンディスプレイ | 表示装置、及び表示装置の製造方法 |
| CN106887530B (zh) | 2017-01-20 | 2019-06-21 | 南京国兆光电科技有限公司 | 一种有机电致发光器件的薄膜封装结构及制备方法 |
| CN106816462B (zh) * | 2017-03-28 | 2019-08-02 | 上海天马有机发光显示技术有限公司 | 有机发光二极管显示装置及制造方法 |
-
2017
- 2017-08-28 CN CN201710752001.5A patent/CN109427992B/zh active Active
-
2018
- 2018-04-28 EP EP18849544.4A patent/EP3557645B1/en active Active
- 2018-04-28 JP JP2019538433A patent/JP6873249B2/ja active Active
- 2018-04-28 US US16/328,734 patent/US11251402B2/en active Active
- 2018-04-28 KR KR1020197021219A patent/KR102263856B1/ko active Active
- 2018-04-28 WO PCT/CN2018/085172 patent/WO2019041866A1/zh not_active Ceased
- 2018-05-14 TW TW107116227A patent/TWI695462B/zh active
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