JP2020502524A5 - - Google Patents
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- JP2020502524A5 JP2020502524A5 JP2019532951A JP2019532951A JP2020502524A5 JP 2020502524 A5 JP2020502524 A5 JP 2020502524A5 JP 2019532951 A JP2019532951 A JP 2019532951A JP 2019532951 A JP2019532951 A JP 2019532951A JP 2020502524 A5 JP2020502524 A5 JP 2020502524A5
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- opening
- electrode layer
- substrate
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16206130.3 | 2016-12-22 | ||
| EP16206130.3A EP3339833B1 (de) | 2016-12-22 | 2016-12-22 | Sensor, insbesondere russsensor, verfahren zur herstellung eines sensors, insbesondere eines russsensors, und verwendung |
| PCT/EP2017/083701 WO2018115054A1 (de) | 2016-12-22 | 2017-12-20 | Sensor, insbesondere russsensor, und verfahren zur herstellung eines sensors, insbesondere eines russsensors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020502524A JP2020502524A (ja) | 2020-01-23 |
| JP2020502524A5 true JP2020502524A5 (https=) | 2020-03-05 |
| JP6997189B2 JP6997189B2 (ja) | 2022-01-17 |
Family
ID=57629376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019532951A Expired - Fee Related JP6997189B2 (ja) | 2016-12-22 | 2017-12-20 | センサ特に煤センサおよびセンサ特に煤センサの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11243157B2 (https=) |
| EP (1) | EP3339833B1 (https=) |
| JP (1) | JP6997189B2 (https=) |
| KR (1) | KR102221044B1 (https=) |
| CN (1) | CN110402381B (https=) |
| WO (1) | WO2018115054A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11480542B2 (en) * | 2019-11-26 | 2022-10-25 | Delphi Technologies Ip Limited | Particulate matter sensor and electrode pattern thereof |
| EP3992607A1 (en) | 2020-10-28 | 2022-05-04 | Heraeus Nexensos GmbH | Sensor for detecting conductive particles |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002357579A (ja) * | 2001-05-31 | 2002-12-13 | Ngk Spark Plug Co Ltd | 湿度センサ |
| EP1376111A1 (en) * | 2002-06-24 | 2004-01-02 | Universite Catholique De Louvain | Method and device for high sensitivity detection of the presence of DNA and other probes |
| JP2004269295A (ja) | 2003-03-06 | 2004-09-30 | Matsushita Electric Ind Co Ltd | 酸素ポンプ素子および該素子を搭載した酸素ポンプ装置 |
| DE102004043121A1 (de) * | 2004-09-07 | 2006-03-09 | Robert Bosch Gmbh | Sensorelement für Partikelsensoren und Verfahren zum Betrieb desselben |
| EP1872115A1 (de) | 2005-04-20 | 2008-01-02 | Heraeus Sensor Technology Gmbh | Russsensor |
| CN101682310B (zh) * | 2007-06-28 | 2012-11-28 | 京瓷株式会社 | 弹性表面波装置及其制造方法 |
| DE102007047078A1 (de) * | 2007-10-01 | 2009-04-02 | Robert Bosch Gmbh | Sensorelement zur Detektion von Partikeln in einem Gas und Verfahren zu dessen Herstellung |
| JP2009089869A (ja) * | 2007-10-09 | 2009-04-30 | Moritex Corp | 静電容量式水分センサ及びその製造方法 |
| EP2539561B1 (en) * | 2010-02-25 | 2024-07-17 | Standard Motor Products, Inc. | Soot sensor system |
| JP5206726B2 (ja) * | 2010-04-12 | 2013-06-12 | 株式会社デンソー | 力学量検出装置およびその製造方法 |
| JP2012083210A (ja) * | 2010-10-12 | 2012-04-26 | Denso Corp | 粒子状物質検出センサ |
| JP2012127907A (ja) * | 2010-12-17 | 2012-07-05 | Nippon Soken Inc | 粒子状物質検出センサ |
| US8823400B2 (en) * | 2011-06-29 | 2014-09-02 | Delphi Technologies, Inc. | Method and system for contamination signature detection diagnostics of a particulate matter sensor |
| US9523632B2 (en) | 2011-08-29 | 2016-12-20 | Toyota Jidosha Kabushiki Kaisha | Particulate matter sensor and method for manufacturing particulate matter sensor |
| EP2708878B1 (en) * | 2012-09-12 | 2020-04-22 | ams international AG | Method of manufacturing an integrated circuit comprising a gas sensor |
| CN104007860B (zh) * | 2013-02-22 | 2017-02-08 | 宸美（厦门）光电有限公司 | 触摸板结构及其制造方法 |
| DE102013110291A1 (de) | 2013-03-06 | 2014-09-11 | Heraeus Sensor Technology Gmbh | Verfahren zur Herstellung eines Rußsensors mit einem Laserstrahl |
| JP6608819B2 (ja) | 2013-11-13 | 2019-11-20 | ストーンリッジ・インコーポレッド | 煤センサシステム |
| DE102014220791A1 (de) * | 2014-10-14 | 2016-04-14 | Robert Bosch Gmbh | Sensor zur Bestimmung einer Konzentration von Partikeln in einem Gasstrom |
| JP6424616B2 (ja) * | 2014-10-24 | 2018-11-21 | 株式会社豊田自動織機 | 電極の製造装置 |
| EP3237879B1 (de) * | 2014-12-23 | 2021-02-03 | Heraeus Nexensos GmbH | Sensor zur detektion von russpartikel und verfahren zur herstellung eines derartigen sensors |
| DE102016107888A1 (de) | 2016-04-28 | 2017-11-02 | Heraeus Sensor Technology Gmbh | Sensor zur Detektion elektrisch leitfähiger und/oder polarisierbarer Partikel, Sensorsystem, Verfahren zum Betreiben eines Sensors und Verwendung eines derartigen Sensors |
-
2016
- 2016-12-22 EP EP16206130.3A patent/EP3339833B1/de not_active Not-in-force
-
2017
- 2017-12-20 US US16/472,530 patent/US11243157B2/en not_active Expired - Fee Related
- 2017-12-20 KR KR1020197021064A patent/KR102221044B1/ko not_active Expired - Fee Related
- 2017-12-20 WO PCT/EP2017/083701 patent/WO2018115054A1/de not_active Ceased
- 2017-12-20 CN CN201780079623.4A patent/CN110402381B/zh not_active Expired - Fee Related
- 2017-12-20 JP JP2019532951A patent/JP6997189B2/ja not_active Expired - Fee Related
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