JP2020194902A - Communication system - Google Patents

Abstract

To transmit processing device information to a worker faster and more clearly than a case of using a signal tower.SOLUTION: When the processing device recognizes that processing is about to end, the processing is suspended, and a cutting blade replacement time is imminent, the processing device transmits the information to a communication terminal 5. Then, the communication terminal 5 displays the information on a touch panel 53. Therefore, an operator can grasp the state of the processing device regarding the end of processing, error stop, or replacement of the cutting blade through the own communication terminal 5 even when the operator is away from the processing device. Therefore, the operator can grasp the state of the processing device without going in front of the processing device and looking at the screen.SELECTED DRAWING: Figure 2

Description

The present invention relates to a communication system.

A plurality of cutting devices for cutting a wafer with a cutting blade are installed in a clean room, and an operator uses a plurality of cutting devices.

In the cutting apparatus, wafers are taken out one by one from a cassette containing a plurality of wafers, held on a chuck table, and cut. The machined wafer is stored in the cassette again.

When all the raw wafers stored in the cassette have been cut, the lamp that notifies that the cutting at the signal tower has been completed lights up. As a result, the operator is notified that the cutting process has been completed.

Further, the cutting device is provided with a blade breakage detecting means for detecting that the cutting blade has been damaged. When the blade breakage detecting means detects that the cutting blade is damaged during cutting, the cutting is paused and the abnormal stop lamp in the signal tower (notifies that the cutting blade is paused due to an abnormality). Turn on the lamp). As a result, the operator is notified that the cutting device has been abnormally stopped.
Such a technique is disclosed in, for example, Patent Document 1.

Japanese Unexamined Patent Publication No. 2012-089853

As described above, in the cutting apparatus, the information is notified to the operator by using the lamp of the signal tower after the machining is completed and after the abnormality occurs. Therefore, the operator needs to confirm the signal tower in order to grasp the state of the cutting device. Therefore, the cutting device is in a standby state until the operator notices the signal tower and takes measures, resulting in waste.

An object of the present invention is to transmit information on a processing device such as a cutting device to an operator more clearly than using a signal tower.

The communication system (this system) of the present invention is a communication system including a processing device for processing an object to be processed with a processing tool and a communication terminal for grasping the state of the processing device by communicating with the processing device. Therefore, during the processing of the workpieces provided in the processing apparatus and taken out one by one from the cassette containing the plurality of workpieces, the processing of all the workpieces contained in the cassette is completed. Prior to this, a first recognition unit that recognizes that the processing is about to end, a second recognition unit that recognizes that processing is temporarily stopped due to some abnormality during processing of the workpiece, and the processing tool. A third recognition unit that recognizes that the replacement time is imminent, at least one recognition unit, and information indicating the state of the processing device provided in the processing device and recognized by the recognition unit. It includes a device control unit that transmits to a communication terminal, and a terminal control unit that is provided in the communication terminal and displays information indicating the state of the processing device transmitted from the processing device on a display unit.

In this system, when the information indicating the state of the processing device displayed on the display unit is selected, the terminal control unit requests the processing device that has notified the information of the detailed content of the information. May be configured to display the detailed contents transmitted from the processing device on the display unit, and the device control unit has details corresponding to the detailed confirmation command from the terminal control unit. The content may be configured to be transmitted to the communication terminal.

In this system, the operator can grasp the state of the processing device related to the end of processing, abnormal stop, or replacement of the processing tool through the communication terminal even if he / she is away from the processing device and cannot see it. Therefore, the operator can grasp the state of the processing apparatus faster and more clearly than using the signal tower provided in the processing apparatus.

Further, the operator does not need to interrupt the work and approach the processing apparatus in order to grasp the state of the processing apparatus, and does not need to check the signal tower of the processing apparatus. As a result, the worker can continue the work and prepare for the next processing depending on the state of the processing apparatus. As a result, productivity can be increased.

Further, when a plurality of processing devices are included in the system, the operator can grasp the state of each processing device without visiting each of the processing devices. As a result, the efficiency of grasping the state of the processing apparatus can be significantly improved.

Further, in this system, the terminal control unit of the communication terminal sends a detailed confirmation command for requesting the detailed content of the information to the processing device as described above, and displays the detailed content transmitted from the processing device on the display unit. You may. As a result, the worker can easily grasp the detailed contents of the information. In addition, the worker can determine the priority of the work after confirming the detailed contents of the information.

It is explanatory drawing which shows the processing apparatus and communication terminal which concerns on the communication system which concerns on this Embodiment. It is explanatory drawing which shows the display example of the processing apparatus information transmitted from the processing apparatus. It is explanatory drawing which shows the display example of the detailed content transmitted from a processing apparatus. It is explanatory drawing which shows the detailed confirmation command from a communication terminal, and the display example of the detailed content from a processing apparatus corresponding to this detailed confirmation command.

As shown in FIG. 1, the communication system 1 according to the present embodiment is a communication device 3 for processing a wafer W as a workpiece, and a communication for grasping a state of the processing device 3 by communicating with the processing device 3. It is equipped with a terminal 5. In the communication system 1, communication between the processing device 3 and the communication terminal 5 is realized.
Although one processing device 3 is shown in FIG. 1, the communication system 1 can include a plurality of processing devices 3, and in this case, the communication terminal 5 is a plurality of processing devices. Communicate with 3.

The wafer W to be processed has a substantially circular shape, and a grid-like division schedule line L is formed on the surface thereof. Various devices (not shown) are formed in each region partitioned by the scheduled division line L.

A dicing tape T is attached to the back surface of the wafer W. A ring frame F is attached to the outer circumference of the dicing tape T. In this way, the wafer W is processed in the processing apparatus 3 in the state of the work set W1 supported by the ring frame F via the dicing tape T. Further, the work set W1 is housed in a cassette (not shown) and carried into the processing apparatus 3.

The configurations of the processing apparatus 3 and the communication terminal 5 will be described below.

The processing apparatus 3 is capable of fully automatic processing of the work set W1 (wafer W). The processing device 3 is a support base 10, a rectangular parallelepiped housing 12 erected on the support base 10, a device control unit 14 built in the housing 12, and controlling each member of the processing device 3, and a housing 12. It has an antenna 15 provided on the front surface of the. The antenna 15 is used for communication between the processing device 3 and an external device such as a communication terminal 5.
Further, the antenna 15 does not have to be provided in the processing device 3, and may be arranged in the communication device (router) 19 wiredly connected to the processing device 3. Further, a plurality of communication devices 19 may be arranged.

A cassette stage 16 on which a cassette (not shown) for holding a plurality of work sets W1 is placed is provided on one end side of the support base 10.

A push-pull means 17 for transporting the work set W1 is provided between the cassette stage 16 and the holding table 20. Further, on the housing 12 side of the holding table 20, a temporary placing means 18 for temporarily placing the work set W1 is provided. The push-pull means 17 conveys and places the work set W1 before processing from the cassette on the cassette stage 16 to the temporary placing means 18. The temporary placement means 18 positions the work set W1 in the X-axis direction.

The push-pull means 17 monitors whether or not the processing of all the wafers W in the cassette is about to be completed during the processing of the wafers W (workset W1) taken out from the cassette one by one. There is. Then, when the processing is about to end, the push-pull means 17 is in a state of the processing apparatus 3 before the processing of all the wafers W housed in the cassette is completed, and the processing is about to end. Recognize that. The push-pull means 17 corresponds to an example of the first recognition unit.
For example, the push-pull means 17 recognizes that the processing is about to end when the last piece of work set W1 remaining in the cassette is taken out and placed on the temporary placing means 18.

The work set W1 on the temporary placing means 18 is conveyed and placed on the holding table 20 by a conveying means (not shown).

The holding table 20 is fixed on the moving plate 21. The moving plate 21 covers the opening in the center of the upper surface of the support base 10 together with the bellows-shaped waterproof cover C. Below the moving plate 21 and the waterproof cover C, for example, a ball screw type cutting feed mechanism (not shown) for moving the moving plate 21 and the holding table 20 in the X-axis direction is provided.

The holding table 20 has a holding surface made of a porous ceramic material. The wafer W of the work set W1 is suction-held by the negative pressure generated on the holding surface. Four clamps 22 are provided around the holding table 20. The ring frame F of the work set W1 is clamped and fixed from all sides by each clamp 22.

On the front surface of the housing 12 above the holding table 20, a cutting mechanism 30 for cutting the wafer W of the work set W1 held by the holding table 20 is provided. The cutting mechanism 30 has a Y-axis for index-feeding the first cutting device 31 and the second cutting device 33, and the first cutting device 31 and the second cutting device 33, which have similar structures to each other, along the Y-axis direction. The directional moving means 35 is provided.

The first cutting device 31 and the second cutting device 33 are provided with a cutting portion 37 having a cutting blade at the lower end thereof, and the cutting portion 37 can be moved along the Z-axis direction.

In the cutting mechanism 30 having such a configuration, the position of the cutting portion 37 in the YZ plane is adjusted by the first cutting device 31, the second cutting device 33, and the Y-axis direction moving means 35. Then, the wafer W in the workpiece W1 held on the holding table 20 that is cut and fed (machined) in the X-axis direction by the cutting blade of the cutting portion 37 is cut along the scheduled division line L.

The cutting unit 37 is provided with a blade state detecting unit 38 that detects the state of the cutting blade. The cutting blade is an example of a processing tool. The state of the cutting blade is, for example, the state of wear of the cutting blade. Then, the blade state detection unit 38 recognizes that the cutting blade replacement time is imminent as the state of the processing device 3. The blade state detection unit 38 corresponds to an example of the third recognition unit. For example, the blade state detection unit 38 detects the amount of wear of the cutting blade, and recognizes that the cutting blade replacement time is imminent when the amount of wear exceeds a predetermined value.

After the cutting process, the work set W1 is sent from the holding table 20 to the spinner cleaning means 24 on the back side of the holding table 20 by a conveying means (not shown). The spinner cleaning means 24 injects cleaning water toward the work set W1 rotated at high speed to clean the work set W1, and then injects drying air to dry the work set W1.

A touch panel 40 is installed on the side surface of the housing 12. Various information such as processing conditions related to the processing apparatus 3 is displayed on the touch panel 40. The touch panel 40 is also used to set various information such as processing conditions. As described above, the touch panel 40 functions as an input means for inputting information and also as a display means for displaying the input information.

The device control unit 14 executes various processes and controls each component of the processing device 3 in an integrated manner. For example, detection results from various detectors (not shown) are input to the device control unit 14. Further, the device control unit 14 controls the cutting feed mechanism, the first cutting device 31, the second cutting device 33, and the Y-axis direction moving means 35 to perform cutting on the wafer W of the work set W1 by the cutting unit 37. To do.

Further, if any abnormality occurs during the processing of the wafer W, the apparatus control unit 14 suspends the processing by the processing apparatus 3 as necessary. That is, the device control unit 14 also functions as a second recognition unit that recognizes that the machining is temporarily stopped due to some abnormality (error) as the state of the machining device 3 during the machining of the wafer W.
The device control unit 14 also functions as a communication control unit for communicating with the communication terminal 5.

The communication terminal 5 is a portable terminal device such as a smartphone or a tablet, and is carried by a worker of the processing device 3. As shown in FIG. 1, the communication terminal 5 includes a housing 51, a touch panel 53, and a terminal control unit 55 built in the housing 51 to control each member of the communication terminal 5.

Similar to the touch panel 40 of the processing device 3, the touch panel 53 of the communication terminal 5 functions as a display unit for displaying information to the operator and as an input unit for inputting information by the operator.
The terminal control unit 55 executes various processes and controls each component of the communication terminal 5 in an integrated manner.

Next, communication between the processing device 3 and the communication terminal 5 will be described.
The device control unit 14 is in the state of the processing device 3 recognized by any of the device control unit 14, the push-pull means 17 and the blade state detection unit 38, that is, the processing is temporarily stopped, and the processing is about to end. It is transmitted to the communication terminal 5 via the antenna 15 as information indicating the state of the processing device 3 (processing device information) that there is or the cutting blade is about to be replaced.

The terminal control unit 55 displays the processing device information transmitted from the processing device 3 on the touch panel 53, which is a display unit.
When the communication system 1 includes a plurality of processing devices 3, the terminal control unit 55 displays the processing device information from all or part of the processing devices 3 on the touch panel 53.

FIG. 2 shows a display example of processing device information. In the example shown in this figure, the communication terminal 5 communicates with eight processing devices 3 (DICER-1 to DICER-8), and receives processing device information from these.

The "LANG" button displayed on the upper right of this screen is for switching the language of the displayed characters. At the bottom of the screen, three buttons, "time order", "name order", and "priority order", are arranged. These are for determining the display order in the processing device information transmitted from each processing device 3.

When the "time order" button is selected, the display order of each processing device information becomes an order according to the time transmitted to the communication terminal 5. When the "device name" button is selected, the display order of each processing device information is in the order corresponding to the name of the processing device 3 (one of DICER-1 to DICER-8) that transmitted them. Further, when the "priority order" button is selected, the display order of the processing apparatus information becomes the order according to those priorities.

Furthermore, a button "↓" is displayed in the area to the right of "priority order". This area is for determining the arrangement direction (ascending / descending order) in the determined display order.
In the example shown in FIG. 2, "priority order" and "descending order (↓)" are selected. Therefore, the higher the priority of the processing device information, the higher it is shown. When "ascending order" is selected, "↑" is displayed instead of "↓".

Then, in the example shown in this figure, the processing apparatus showing that DICE R-1 and DICE R5 to 8 are stopped due to an error, that is, that the processing is temporarily stopped due to some error in DICE R-1 and DICE R 5 to 8. The information is displayed at the top of the screen as high priority information.

Further below, the processing device information indicating that the blade replacement time of DICE R-4 is imminent, and the processing device information indicating that the fully automatic processing of DICE R-3 is imminent are in this order. It is displayed in.

The operator can select one processing device information from the plurality of processing device information displayed on the touch panel 53 by touching it. When the processing device information displayed on the touch panel 53 is selected, the terminal control unit 55 (see FIG. 1) of the communication terminal 5 notifies the processing device 3 that has notified the selected processing device information of the details of the processing device information. Send a detailed confirmation command requesting the contents.

Upon receiving the detailed confirmation command, the device control unit 14 of the processing device 3 transmits the detailed contents corresponding to the detailed confirmation command from the terminal control unit 55 to the communication terminal 5.
Further, the terminal control unit 55 of the communication terminal 5 that has sent the detailed confirmation command displays the detailed contents transmitted from the processing device 3 on the touch panel 53.

For example, suppose that the operator uses the touch panel 53 of the communication terminal 5 to touch the processing device information regarding the error stop of the DICE R-1 at the top of the example shown in FIG. In this case, the terminal control unit 55 of the communication terminal 5 sends a detailed confirmation command for requesting detailed contents regarding error stop to the processing device 3 as DICE R-1.

In response to this, the apparatus control unit 14 of the processing apparatus 3 as DICE R-1 transmits the detailed contents regarding the error stop to the processing apparatus 3. Then, the terminal control unit 55 of the communication terminal 5 displays the detailed contents transmitted from the processing device 3 on the touch panel 53 as shown in FIG.

The detailed contents shown in FIG. 3 are three errors of "V0193 work vacuum error", "E0567 wafer cleaning water is abnormal", and "K0039 calf check: off-center error" in the processing apparatus 3 as DICE R-1. Contains a string indicating that is occurring. The details also include image G1 indicating that an off-center error has occurred.

Alternatively, it is assumed that the operator uses the touch panel 53 of the communication terminal 5 to touch the processing device information regarding the blade replacement timing of the DICE R-4, which is the second stage from the bottom in the example shown in FIG. In this case, the terminal control unit 55 sends a detailed confirmation command for requesting detailed contents regarding the blade replacement time to the processing device 3 as the DICE R-4.

In this embodiment, in this case, as shown in FIG. 4, the terminal control unit 55 of the communication terminal 5 transmits a detailed confirmation command asking for "blade wear amount (%)" as a detailed confirmation command. Further, in this case, the terminal control unit 55 displays the transmission / reception contents with and from the processing device 3 including the detailed confirmation command on the touch panel 53 together with the transmission / reception time on the touch panel 53.

In response to this detailed confirmation command, the device control unit 14 of the processing device 3 as the DICE R-4 transmits detailed contents regarding the blade replacement time to the communication terminal 5. Then, the terminal control unit 55 of the communication terminal 5 displays the detailed contents transmitted from the processing device 3 on the touch panel 53 as shown in FIG.

In the detailed contents shown in FIG. 4, the cutting blades of the two cutting portions 37 shown in FIG. 1 are distinguished as Z1 and Z2, respectively. The detailed contents include the model number "27HEED" and the amount of wear "33%" of the cutting blade of Z1 and the model number "27HEED" and the amount of wear "67%" of the cutting blade of Z2.

As described above, in the communication system 1 of the present embodiment, the processing apparatus 3 temporarily processes the wafer W due to the push-pull means 17 as the first recognition unit that recognizes that the processing is about to end and some abnormality. It includes a device control unit 14 as a second recognition unit that recognizes that the cutting blade has been stopped, and a blade state detection unit 38 as a third recognition unit that recognizes that the cutting blade replacement time is imminent.

Further, in the processing device 3, the device control unit 14 transmits the processing device information indicating the state of the processing device 3 recognized by any of the recognition units to the communication terminal 5. Then, the terminal control unit 55 of the communication terminal 5 displays the processing device information transmitted from the processing device 3 on the touch panel 53.

As described above, in the communication system 1, the operator of the processing device 3 carries the state of the processing device 3 with respect to the end of processing, error stop, or replacement of the cutting blade even if he / she is away from the processing device 3. It can be grasped via the communication terminal 5. Therefore, the operator can grasp the state of the processing apparatus 3 faster and more clearly than using the signal tower. Further, the operator can grasp the state of the processing device 3 without going in front of the processing device 3 and looking at the touch panel 40.

Further, the operator does not need to interrupt the work and approach the processing device 3 in order to grasp the state of the processing device 3, and does not need to check the signal tower of the processing device 3. As a result, the operator can continue the work and prepare for the next processing according to the state of the processing apparatus 3. As a result, productivity can be increased.

Further, when the communication system 1 includes a plurality of processing devices 3, the operator can grasp the state of each processing device 3 without visiting each of the processing devices 3. As a result, the efficiency of grasping the state of the processing apparatus 3 can be significantly improved.

Further, in the communication system 1 of the present embodiment, when the processing device information displayed on the touch panel 53 is selected, the terminal control unit 55 of the communication terminal 5 informs the processing device 3 that has notified this information of the details of this information. Send a detailed confirmation command requesting the contents. Further, the terminal control unit 55 displays the detailed contents transmitted from the processing device 3 on the touch panel 53.

As a result, the operator can easily grasp the detailed contents of the processing device information. In addition, the worker can determine the priority of work related to each processing device information after confirming the detailed contents of the processing device information.

It is assumed that the operator uses the touch panel 53 to touch the processing device information regarding the end of the fully automatic processing of the DICE R-3 at the bottom of the example shown in FIG. In this case, the terminal control unit 55 sends a detailed confirmation command for requesting detailed contents regarding the end of the fully automatic processing to the processing device 3 as the DICE R-3.

In this case, the terminal control unit 55 sends, for example, a detailed confirmation command asking "time required for completion". In response to this detailed confirmation command, the device control unit 14 of the processing device 3 as the DICER-3 calculates the time required for completion, and transmits the detailed contents including this time to the communication terminal 5. Then, the terminal control unit 55 of the communication terminal 5 displays the detailed contents transmitted from the processing device 3 on the touch panel 53.

That is, the device control unit 14 of the processing device 3 calculates and obtains in advance the time required for cutting one wafer W from the size of the wafer W, the amount of index feed, and the speed of the processing feed. There is. That is, the apparatus control unit 14 has a time to transfer the wafer W from the cassette to the holding table 20, a time to cut the wafer W, a time to transfer the wafer W from the holding table 20 to the spinner cleaning means 24, and a time to clean the spinner. In addition, the time for transporting the wafer W from the spinner cleaning means 24 and storing it in the cassette is acquired in advance. The device control unit 14 calculates the time required for the end based on these times and the timing of receiving the detailed confirmation command, and transmits the detailed contents to the communication terminal 5.

For example, when the device control unit 14 receives the detailed confirmation command from the communication terminal 5 while the last wafer W is being cleaned by the spinner, the apparatus control unit 14 conveys the remaining time of the spinner cleaning and the wafer W from the spinner cleaning means 24. The total time including the time for storing in the cassette is transmitted to the communication terminal 5 as the time required for completion. The terminal control unit 55 of the communication terminal 5 displays this time on the touch panel 53.

In this regard, when the processing device 3 receives the processing device information that the processing of a certain processing device 3 is nearing completion, the operator may not be able to respond immediately. In the present embodiment, even in such a case, it is possible to inform the worker of the time required for completion. As a result, the work efficiency of the worker can be improved.

Further, in the present embodiment, the processing device 3 includes a push-pull means 17 as a first recognition unit, a device control unit 14 as a second recognition unit, and a blade state detection unit 38. Instead of this, the processing apparatus 3 may separately include a sensor that functions as a first recognition unit, a second recognition unit, and a third recognition unit. Further, the processing apparatus 3 does not have to include all of the first recognition unit, the second recognition unit, and the third recognition unit, and may include at least one of the recognition units.

Further, in the present embodiment, the terminal control unit 55 of the communication terminal 5 provides processing device information indicating that the processing end is imminent, an error stop has occurred, and the blade replacement time is imminent. When transmitted from 3, the processing device information is displayed on the touch panel 53. In addition to this, the terminal control unit 55 may be set to make the communication terminal 5 sound or vibrate when, for example, receiving processing device information regarding error stop. As a result, the worker can be more strongly alerted.

Further, in the present embodiment, the communication terminal 5 is a terminal device that can be carried by an operator. Instead of this, the communication terminal 5 may be a terminal device installed in the work place of the worker, such as a desktop computer.

Further, in the present embodiment, the device control unit 14 of the processing device 3 and the terminal control unit 55 of the communication terminal 5 carry out wireless communication via the antenna 15 and the antenna 57. Instead of this, the device control unit 14 of the processing device 3 and the terminal control unit 55 of the communication terminal 5 may carry out wired communication.

Further, the processing device 3 and the communication terminal 5 may communicate directly with each other by wireless or wired communication, or may communicate with each other via a network such as the Internet or an intranet. In this case, the worker grasps the state of the processing device 3 by connecting the processing device 3 and the communication terminal 5 to the network even when the worker is in a remote place such as a facility different from the installation location of the processing device 3. be able to.

Further, in the present embodiment, as a processing apparatus for processing an workpiece, a processing apparatus 3 for cutting a wafer W is exemplified. Instead of this, the processing device to which the communication system 1 of the present embodiment is applied is, for example, a grinding device for grinding a work piece, a laser processing device for processing a work piece with a laser beam, and a bite for a work piece. It may be a cutting tool for cutting, a cleaning device for cleaning and drying the workpiece, an expanding apparatus for dividing the workpiece into chips, or a tape mounter for attaching a tape to the workpiece.

1: Communication system,
3: Processing equipment, 15: Antenna, 37: Cutting part,
40: Touch panel, 14: Device control unit,
5: Communication terminal, 53: Touch panel, 57: Antenna, 55: Terminal control unit

Claims (2)

A communication system including a processing device for processing a work piece with a processing tool and a communication terminal for grasping the state of the processing device by communicating with the processing device.
During the processing of the workpieces provided in the processing apparatus and taken out one by one from the cassette containing the plurality of workpieces, before the processing of all the workpieces contained in the cassette is completed. , The first recognition unit that recognizes that the processing is about to end, the second recognition unit that recognizes that the processing is temporarily stopped due to some abnormality during the processing of the workpiece, and the replacement of the processing tool. A third recognition unit that recognizes that the time is imminent, and at least one recognition unit of
A device control unit provided in the processing device and transmitting information indicating the state of the processing device recognized by the recognition unit to the communication terminal.
A communication system including a terminal control unit provided in the communication terminal and displaying information indicating a state of the processing device transmitted from the processing device on a display unit. When the information indicating the state of the processing device displayed on the display unit is selected, the terminal control unit sends a detailed confirmation command for requesting the detailed contents of the information to the processing device that has notified the information. , It is configured to display the detailed contents transmitted from the processing apparatus on the display unit.
The device control unit is configured to transmit detailed contents corresponding to the detailed confirmation command from the terminal control unit to the communication terminal.
The communication system according to claim 1.