JP2020165770A - ガスセンサのセンサ素子 - Google Patents
ガスセンサのセンサ素子 Download PDFInfo
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- JP2020165770A JP2020165770A JP2019065762A JP2019065762A JP2020165770A JP 2020165770 A JP2020165770 A JP 2020165770A JP 2019065762 A JP2019065762 A JP 2019065762A JP 2019065762 A JP2019065762 A JP 2019065762A JP 2020165770 A JP2020165770 A JP 2020165770A
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- 239000011241 protective layer Substances 0.000 claims abstract description 120
- 239000010410 layer Substances 0.000 claims abstract description 81
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 37
- 230000035939 shock Effects 0.000 abstract description 9
- 230000008646 thermal stress Effects 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 60
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 27
- 238000009792 diffusion process Methods 0.000 description 23
- 238000005259 measurement Methods 0.000 description 19
- 238000011156 evaluation Methods 0.000 description 17
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 230000000694 effects Effects 0.000 description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000010030 laminating Methods 0.000 description 8
- 238000007639 printing Methods 0.000 description 8
- 230000035882 stress Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- -1 oxygen ion Chemical class 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 239000007784 solid electrolyte Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
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- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011195 cermet Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4077—Means for protecting the electrolyte or the electrodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/41—Oxygen pumping cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
図1は、本発明の実施の形態に係るセンサ素子(ガスセンサ素子)10の概略的な外観斜視図である。また、図2は、センサ素子10の長手方向に沿った断面図を含むガスセンサ100の構成の概略図である。センサ素子10は、被測定ガス中の所定ガス成分を検知しその濃度を測定するガスセンサ100の、主たる構成要素であるセラミックス構造体である。センサ素子10は、いわゆる限界電流型のガスセンサ素子である。センサ素子10は、いわゆる限界電流型のガスセンサ素子である。
センサ素子10においては、上述のような構成を有する素子基体1の一方端部E1から所定範囲の最外周部に、先端保護層2が設けられてなる。
次に、上述のような構成および特徴を有するセンサ素子10を製造するプロセスの一例について説明する。図3は、センサ素子10を作製する際の処理の流れを示す図である。
上述の実施の形態においては、3つの内部空室を備えたセンサ素子を対象としているが、センサ素子が3室構造であることは必須ではない。すなわち、センサ素子が、内部空室を2つあるいは1つ備える態様であってもよい。
2 先端保護層
3(3a、3b) 下地層
10 センサ素子
22 内側先端保護層
23 外側先端保護層
100 ガスセンサ
101 セラミックス体
102 第一の内部空室
103 第二の内部空室
104 第三の内部空室
105 ガス導入口
106 基準ガス導入口
110 第一の拡散律速部
115 緩衝空間
120 第二の拡散律速部
130 第三の拡散律速部
140 第四の拡散律速部
141 外部ポンプ電極
142 内部ポンプ電極
143 補助ポンプ電極
145 測定電極
147 基準電極
150 ヒータ
151 絶縁層
160 電極端子
170(170a、170b) 主面保護層
221 (内側先端保護層の)先端部
222 (内側先端保護層の)主面部
223 (内側先端保護層の)突出部
224 (内側先端保護層の)端面
231 (外側先端保護層の)先端部
232 (外側先端保護層の)主面部
P1 主ポンプセル
P2 補助ポンプセル
P3 測定用ポンプセル
Claims (4)
- ガスセンサのセンサ素子であって、
測定対象ガス成分の検知部を備えたセラミックス構造体である素子基体と、
前記素子基体のうち前記検知部が備わる側の先端部から所定範囲を囲繞するように設けられた、多孔質層である先端保護層と、
を備え、
前記先端保護層が、前記素子基体の長手方向において前記素子基体の前記先端部を囲繞する部分とは反対側の端部において突出してなり、
前記先端保護層の最大厚みをAとし、前記先端保護層のうち突出していない部分であるベース部における厚みをBとするときに、
A/B≧1.1である、
ことを特徴とする、ガスセンサのセンサ素子。 - 請求項1に記載のセンサ素子であって、
前記先端保護層が、
30%〜90%の気孔率を有する内側先端保護層と、
10%〜30%の気孔率を有する外側先端保護層と、
を備え、
前記内側先端保護層が突出部を有することで前記先端保護層が前記端部において突出してなり、
前記内側先端保護層が前記先端保護層の前記端部において外部に露出してなる、
ことを特徴とする、ガスセンサのセンサ素子。 - 請求項2に記載のセンサ素子であって、
前記ベース部の厚みは300μm以上であり、
前記ベース部における前記内側先端保護層の厚みは50μm〜1500μmであり、
前記ベース部における前記外側先端保護層の厚みは20μm〜300μmである、
ことを特徴とする、ガスセンサのセンサ素子。 - 請求項3に記載のセンサ素子であって、
前記ベース部の厚みが400μm以上である、
ことを特徴とする、ガスセンサのセンサ素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019065762A JP7195996B2 (ja) | 2019-03-29 | 2019-03-29 | ガスセンサのセンサ素子 |
DE102020001745.2A DE102020001745A1 (de) | 2019-03-29 | 2020-03-16 | Sensorelement für einen gassensor |
CN202010180267.9A CN111751425A (zh) | 2019-03-29 | 2020-03-16 | 气体传感器的传感器元件 |
US16/827,753 US11592419B2 (en) | 2019-03-29 | 2020-03-24 | Sensor element for gas sensor |
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JP2019065762A JP7195996B2 (ja) | 2019-03-29 | 2019-03-29 | ガスセンサのセンサ素子 |
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JP2020165770A true JP2020165770A (ja) | 2020-10-08 |
JP7195996B2 JP7195996B2 (ja) | 2022-12-26 |
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JP2019065762A Active JP7195996B2 (ja) | 2019-03-29 | 2019-03-29 | ガスセンサのセンサ素子 |
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US (1) | US11592419B2 (ja) |
JP (1) | JP7195996B2 (ja) |
CN (1) | CN111751425A (ja) |
DE (1) | DE102020001745A1 (ja) |
Families Citing this family (1)
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WO2020071239A1 (ja) * | 2018-10-03 | 2020-04-09 | 日本碍子株式会社 | センサ素子 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040117974A1 (en) * | 2002-12-19 | 2004-06-24 | Clyde Eric P. | Methods of making gas sensors and sensors formed therefrom |
JP2012093330A (ja) * | 2010-09-27 | 2012-05-17 | Denso Corp | ガスセンサ素子及びガスセンサ |
JP2013104706A (ja) * | 2011-11-11 | 2013-05-30 | Ngk Spark Plug Co Ltd | ガスセンサ素子及びガスセンサ |
JP2019039693A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社デンソー | ガスセンサ素子及びガスセンサ |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6565723B1 (en) * | 2000-12-04 | 2003-05-20 | Delphi Technologies, Inc. | Isolated ground sensor achieved using alumina coating over spinel coating |
JP2009080099A (ja) * | 2007-09-07 | 2009-04-16 | Denso Corp | ガスセンサ素子及びその製造方法 |
JP4762338B2 (ja) * | 2008-12-22 | 2011-08-31 | 株式会社日本自動車部品総合研究所 | ガスセンサ素子及びこれを備えたガスセンサ |
JP5416757B2 (ja) * | 2011-02-22 | 2014-02-12 | 日本特殊陶業株式会社 | ガスセンサ素子及びガスセンサ |
JP6359373B2 (ja) * | 2013-09-05 | 2018-07-18 | 日本特殊陶業株式会社 | ガスセンサ素子及びガスセンサ |
JP6708184B2 (ja) * | 2017-08-22 | 2020-06-10 | 株式会社デンソー | ガスセンサ素子及びガスセンサ |
-
2019
- 2019-03-29 JP JP2019065762A patent/JP7195996B2/ja active Active
-
2020
- 2020-03-16 CN CN202010180267.9A patent/CN111751425A/zh active Pending
- 2020-03-16 DE DE102020001745.2A patent/DE102020001745A1/de active Pending
- 2020-03-24 US US16/827,753 patent/US11592419B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040117974A1 (en) * | 2002-12-19 | 2004-06-24 | Clyde Eric P. | Methods of making gas sensors and sensors formed therefrom |
JP2012093330A (ja) * | 2010-09-27 | 2012-05-17 | Denso Corp | ガスセンサ素子及びガスセンサ |
JP2013104706A (ja) * | 2011-11-11 | 2013-05-30 | Ngk Spark Plug Co Ltd | ガスセンサ素子及びガスセンサ |
JP2019039693A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社デンソー | ガスセンサ素子及びガスセンサ |
Also Published As
Publication number | Publication date |
---|---|
DE102020001745A1 (de) | 2020-10-01 |
US20200309732A1 (en) | 2020-10-01 |
CN111751425A (zh) | 2020-10-09 |
US11592419B2 (en) | 2023-02-28 |
JP7195996B2 (ja) | 2022-12-26 |
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