JP2020161631A - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- JP2020161631A JP2020161631A JP2019059209A JP2019059209A JP2020161631A JP 2020161631 A JP2020161631 A JP 2020161631A JP 2019059209 A JP2019059209 A JP 2019059209A JP 2019059209 A JP2019059209 A JP 2019059209A JP 2020161631 A JP2020161631 A JP 2020161631A
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- JP
- Japan
- Prior art keywords
- test head
- frame
- inspection device
- probe card
- slide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007689 inspection Methods 0.000 title claims description 55
- 239000000523 sample Substances 0.000 claims abstract description 46
- 238000000034 method Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 13
- 230000032258 transport Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Description
最初に、半導体デバイスの検査を行う検査装置の構成について説明する。図1は、実施形態に係る検査装置1の外観構成の一例を示す斜視図である。
2 本体筺体
5 テストヘッド筐体
7 ヒンジ機構
12 インサートリング
20 プローブカード
40 テストヘッド
46 ポゴブロック
70 第1フレーム
90 第2フレーム
Claims (4)
- プローブカードと導通するためのインターフェース部が上面に設けられた筐体と、
前記インターフェース部の上部を覆う接続位置とインターフェース部の上部から退避した退避位置とに移動可能とされた第1フレームと、
テストヘッドを支持し、前記第1フレーム内に配置され、前記第1フレームに対して固定した固定状態と、前記接続位置における前記インターフェース部に対する平行方向に少なくとも移動可能な移動可能状態とに切り替え可能に前記第1フレームに保持された第2フレームと、
を有する検査装置。 - 前記テストヘッドは、前記移動可能状態において、前記接続位置における前記インターフェース部に対する垂直方向にも移動可能に前記第1フレームに保持された
請求項1に記載の検査装置。 - 前記テストヘッドは、前記第1フレームを移動させる際、前記固定状態とされ、前記接続位置において前記テストヘッドと前記インターフェース部とを接続する際、前記移動可能状態とされる
請求項1または2に記載の検査装置。 - 前記インターフェース部は、前記テストヘッドを真空吸着により接続する
請求項1〜3の何れか1つに記載の検査装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019059209A JP7267058B2 (ja) | 2019-03-26 | 2019-03-26 | 検査装置 |
KR1020200032583A KR102413393B1 (ko) | 2019-03-26 | 2020-03-17 | 검사 장치 |
US16/821,573 US11467099B2 (en) | 2019-03-26 | 2020-03-17 | Inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019059209A JP7267058B2 (ja) | 2019-03-26 | 2019-03-26 | 検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020161631A true JP2020161631A (ja) | 2020-10-01 |
JP7267058B2 JP7267058B2 (ja) | 2023-05-01 |
Family
ID=72604119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019059209A Active JP7267058B2 (ja) | 2019-03-26 | 2019-03-26 | 検査装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11467099B2 (ja) |
JP (1) | JP7267058B2 (ja) |
KR (1) | KR102413393B1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022080881A (ja) * | 2020-11-18 | 2022-05-30 | 致茂電子股▲分▼有限公司 | テストヘッド接続方法 |
US11693049B2 (en) * | 2018-12-14 | 2023-07-04 | Advantest Corporation | Sensor test apparatus |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008311313A (ja) * | 2007-06-12 | 2008-12-25 | Santo Technology Kk | 半導体試験装置 |
JP2009060037A (ja) * | 2007-09-03 | 2009-03-19 | Tokyo Electron Ltd | プローブ装置及びプローブ方法 |
JP2010074091A (ja) * | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | プローブ装置 |
JP2014179379A (ja) * | 2013-03-13 | 2014-09-25 | Tokyo Electron Ltd | ウエハ検査装置及び該装置の整備方法 |
JP2016058506A (ja) * | 2014-09-09 | 2016-04-21 | 東京エレクトロン株式会社 | ウエハ検査装置における検査用圧力設定値決定方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100682738B1 (ko) * | 2005-07-01 | 2007-02-15 | 주식회사 아이피에스 | 반도체 처리 장치 |
-
2019
- 2019-03-26 JP JP2019059209A patent/JP7267058B2/ja active Active
-
2020
- 2020-03-17 US US16/821,573 patent/US11467099B2/en active Active
- 2020-03-17 KR KR1020200032583A patent/KR102413393B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008311313A (ja) * | 2007-06-12 | 2008-12-25 | Santo Technology Kk | 半導体試験装置 |
JP2009060037A (ja) * | 2007-09-03 | 2009-03-19 | Tokyo Electron Ltd | プローブ装置及びプローブ方法 |
JP2010074091A (ja) * | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | プローブ装置 |
JP2014179379A (ja) * | 2013-03-13 | 2014-09-25 | Tokyo Electron Ltd | ウエハ検査装置及び該装置の整備方法 |
JP2016058506A (ja) * | 2014-09-09 | 2016-04-21 | 東京エレクトロン株式会社 | ウエハ検査装置における検査用圧力設定値決定方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11693049B2 (en) * | 2018-12-14 | 2023-07-04 | Advantest Corporation | Sensor test apparatus |
JP2022080881A (ja) * | 2020-11-18 | 2022-05-30 | 致茂電子股▲分▼有限公司 | テストヘッド接続方法 |
JP7297034B2 (ja) | 2020-11-18 | 2023-06-23 | 致茂電子股▲分▼有限公司 | テストヘッド接続方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102413393B1 (ko) | 2022-06-27 |
US20200309717A1 (en) | 2020-10-01 |
KR20200115180A (ko) | 2020-10-07 |
JP7267058B2 (ja) | 2023-05-01 |
US11467099B2 (en) | 2022-10-11 |
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