JP2020141003A - スイッチング素子とその製造方法 - Google Patents
スイッチング素子とその製造方法 Download PDFInfo
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- JP2020141003A JP2020141003A JP2019033990A JP2019033990A JP2020141003A JP 2020141003 A JP2020141003 A JP 2020141003A JP 2019033990 A JP2019033990 A JP 2019033990A JP 2019033990 A JP2019033990 A JP 2019033990A JP 2020141003 A JP2020141003 A JP 2020141003A
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- gallium oxide
- oxide substrate
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims abstract description 155
- 229910001195 gallium oxide Inorganic materials 0.000 claims abstract description 155
- 239000000758 substrate Substances 0.000 claims abstract description 113
- 239000013078 crystal Substances 0.000 claims abstract description 47
- 238000000034 method Methods 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 3
- 210000000746 body region Anatomy 0.000 description 17
- 239000012535 impurity Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
- H01L29/7828—Vertical transistors without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs
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- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
12 :酸化ガリウム基板
12a :上面
12b :下面
12c〜12f:側面
20 :ゲート絶縁膜
22 :ゲート電極
24 :ソース電極
26 :ドレイン電極
30 :ソース領域
32 :ボディコンタクト領域
34 :ボディ領域
36 :ドリフト領域
38 :ドレイン領域
40 :ゲート配線
42 :ゲートパッド
Claims (6)
- スイッチング素子であって、
酸化ガリウム結晶により構成されている酸化ガリウム基板と、
前記酸化ガリウム基板に対してゲート絶縁膜を介して対向する複数のゲート電極、
を有しており、
前記酸化ガリウム基板の上面が、前記酸化ガリウム結晶の(010)面と平行であり、
前記酸化ガリウム基板の前記上面を平面視したときに、前記各ゲート電極の長手方向が前記酸化ガリウム結晶の(100)面が伸びる方向と交差している、
スイッチング素子。 - 前記酸化ガリウム基板の前記上面に、複数のトレンチが設けられており、
前記酸化ガリウム基板の前記上面を平面視したときに、前記各トレンチの長手方向が前記(100)面が伸びる方向と交差しており、
複数の前記ゲート電極が、複数の前記トレンチ内に配置されている、
請求項1のスイッチング素子。 - 前記酸化ガリウム基板の前記上面の上部に配置されており、前記各ゲート電極に接続されているゲートパッドをさらに有しており、
前記酸化ガリウム基板が、
前記(100)面により構成されている第1側面と、
前記酸化ガリウム結晶の(001)面により構成されている第2側面、
を有しており、
前記酸化ガリウム基板の前記上面を平面視したときに、前記ゲートパッドが、前記第1側面と前記第2側面の接続部から前記第2側面に対して垂直な方向に伸びる直線と前記第1側面の間の範囲に配置されている、
請求項1または2のスイッチング素子。 - 前記酸化ガリウム基板の前記上面の上部に配置されている主電極と、
前記酸化ガリウム基板の前記上面の上部に配置されており、前記各ゲート電極に接続されているゲートパッド、
をさらに有しており、
前記酸化ガリウム基板が、
前記(100)面と平行な第3側面と、
前記(100)面及び前記(010)面の両方に対して垂直な第4側面、
を有しており、
前記酸化ガリウム基板の前記上面を平面視したときに、前記主電極と前記ゲートパッドが、前記(100)面が伸びる方向に間隔を空けて配置されている、
請求項1または2のスイッチング素子。 - 前記酸化ガリウム基板の前記上面を平面視したときに、前記(100)面に垂直な方向における前記酸化ガリウム基板の長さが、前記(100)面が伸びる方向における前記酸化ガリウム基板の長さよりも短い、請求項1〜4のいずれか一項のスイッチング素子。
- 請求項1〜5のいずれか一項のスイッチング素子の製造方法であって、
酸化ガリウム結晶により構成されているとともに2インチ以上の直径を有する酸化ガリウムウエハの表面を研磨することによって、前記酸化ガリウムウエハを薄板化する工程と、
前記酸化ガリウムウエハから前記スイッチング素子を製造する工程、
を有する製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019033990A JP7185875B2 (ja) | 2019-02-27 | 2019-02-27 | スイッチング素子 |
US16/750,739 US20200273954A1 (en) | 2019-02-27 | 2020-01-23 | Switching element and method of manufacturing the same |
CN202010115774.4A CN111627999B (zh) | 2019-02-27 | 2020-02-25 | 开关元件及其制造方法 |
DE102020104861.0A DE102020104861A1 (de) | 2019-02-27 | 2020-02-25 | Schaltelement und verfahren zum herstellen desselben |
Applications Claiming Priority (1)
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JP2019033990A JP7185875B2 (ja) | 2019-02-27 | 2019-02-27 | スイッチング素子 |
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JP2020141003A true JP2020141003A (ja) | 2020-09-03 |
JP7185875B2 JP7185875B2 (ja) | 2022-12-08 |
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US (1) | US20200273954A1 (ja) |
JP (1) | JP7185875B2 (ja) |
CN (1) | CN111627999B (ja) |
DE (1) | DE102020104861A1 (ja) |
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JP2021160999A (ja) * | 2020-04-01 | 2021-10-11 | 株式会社ノベルクリスタルテクノロジー | 半導体基板及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004266289A (ja) * | 1995-03-30 | 2004-09-24 | Toshiba Corp | 半導体発光素子 |
JP2015002343A (ja) * | 2013-06-18 | 2015-01-05 | 株式会社タムラ製作所 | 半導体素子及びその製造方法 |
JP2018198266A (ja) * | 2017-05-24 | 2018-12-13 | 株式会社東芝 | 半導体装置 |
Family Cites Families (2)
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US20070134833A1 (en) * | 2005-12-14 | 2007-06-14 | Toyoda Gosei Co., Ltd. | Semiconductor element and method of making same |
US9881853B2 (en) * | 2016-04-04 | 2018-01-30 | Infineon Technologies Ag | Semiconductor package having a source-down configured transistor die and a drain-down configured transistor die |
-
2019
- 2019-02-27 JP JP2019033990A patent/JP7185875B2/ja active Active
-
2020
- 2020-01-23 US US16/750,739 patent/US20200273954A1/en not_active Abandoned
- 2020-02-25 CN CN202010115774.4A patent/CN111627999B/zh active Active
- 2020-02-25 DE DE102020104861.0A patent/DE102020104861A1/de active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004266289A (ja) * | 1995-03-30 | 2004-09-24 | Toshiba Corp | 半導体発光素子 |
JP2015002343A (ja) * | 2013-06-18 | 2015-01-05 | 株式会社タムラ製作所 | 半導体素子及びその製造方法 |
JP2018198266A (ja) * | 2017-05-24 | 2018-12-13 | 株式会社東芝 | 半導体装置 |
Non-Patent Citations (2)
Title |
---|
WONG, MAN HOI ET AL.: "Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 55, JPN7022002233, 31 October 2016 (2016-10-31), pages 9 - 1, ISSN: 0004773232 * |
東脇正高 他: "酸化ガリウム(Ga2O3)結晶成長およびデバイス応用", 表面科学, vol. 35, no. 2, JPN7022002232, 16 October 2013 (2013-10-16), pages 102 - 107, ISSN: 0004773233 * |
Also Published As
Publication number | Publication date |
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CN111627999A (zh) | 2020-09-04 |
CN111627999B (zh) | 2023-11-07 |
US20200273954A1 (en) | 2020-08-27 |
JP7185875B2 (ja) | 2022-12-08 |
DE102020104861A1 (de) | 2020-08-27 |
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