JP2020136416A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
Description
本発明にかかる半導体装置は、ワイドバンドギャップ半導体を用いて構成される。実施の形態1においては、ワイドバンドギャップ半導体として例えば炭化珪素(SiC)を用いて作製された炭化珪素半導体装置について、MOSFETを例に説明する。図1は、実施の形態1にかかる炭化珪素半導体装置の構造を示す図3AのA−A’断面図である。図2は、実施の形態1にかかる炭化珪素半導体装置の構造を示す図3AのB−B’断面図である。図1〜図3Bは、トレンチ型MOSFET50の例を示す。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について説明する。図4〜図9は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を模式的に示す断面図である。ここで、図5A、図6Aおよび図7Aは、実施の形態にかかる炭化珪素半導体装置の図1に対応する製造途中の状態を模式的に示す断面図である。図5B、図6Bおよび図7Bは、実施の形態にかかる炭化珪素半導体装置の図2に対応する製造途中の状態を模式的に示す断面図である。
図10は、実施の形態2にかかる炭化珪素半導体装置の構造を示す図12のA−A’断面図である。図11は、実施の形態2にかかる炭化珪素半導体装置の構造を示す図12のB−B’断面図である。図12は、実施の形態2にかかる炭化珪素半導体装置の構造を示す平面断面図である。実施の形態2にかかる炭化珪素半導体装置が実施の形態1にかかる炭化珪素半導体装置と異なるのは、トレンチ16の底部に接するトレンチ16のストライプ状に延びる方向と平行な第2p+型ベース領域3を備えている点である。
実施の形態2にかかる炭化珪素半導体装置は、実施の形態1にかかる炭化珪素半導体装置の製造方法において、第1p+型ベース領域4を形成する際に、第2p+型ベース領域3を同時に形成することで、製造することが可能である。
図13は、実施の形態3にかかる炭化珪素半導体装置の構造を示す断面図である。実施の形態3では、平面断面図は実施の形態1と同様であるため、図示を省略する(図3A参照)。また、第1p+型ベース領域4が設けられていない部分の断面図は実施の形態1と同様であるため、図示を省略する(図2参照)。
実施の形態3にかかる炭化珪素半導体装置は、実施の形態1にかかる炭化珪素半導体装置の製造方法において、n+型領域17を形成する際に、p++型コンタクト領域8が形成される領域の下方のみにn+型領域17を形成することで、製造することが可能である。
図14は、実施の形態4にかかる炭化珪素半導体装置の構造を示す図15のB−B’断面図である。図15は、実施の形態4にかかる炭化珪素半導体装置の構造を示す平面断面図である。また、第1p+型ベース領域4が設けられている図15のA−A’断面図は実施の形態1と同様であるため、図示を省略する(図1参照)。
実施の形態4にかかる炭化珪素半導体装置は、実施の形態1にかかる炭化珪素半導体装置の製造方法において、n+型領域17を形成する際に、トレンチ16のストライプ状に延びる方向と平行にストライプ状に形成することで、製造することが可能である。
図16は、実施の形態4にかかる炭化珪素半導体装置の構造を示す断面図である。第1p+型ベース領域4が設けられていない部分の断面図は実施の形態1と同様であるため、図示を省略する(図2参照)。実施の形態5にかかる炭化珪素半導体装置の構造を示す平面断面図は実施の形態1と同様であるため、図示を省略する(図3A参照)。
実施の形態5にかかる炭化珪素半導体装置は、実施の形態1にかかる炭化珪素半導体装置の製造方法において、n+型領域17を形成する際に、n型高濃度領域5(2)の内部に形成することで、製造することが可能である。
2、102 n-型炭化珪素エピタキシャル層
3、103 第2p+型ベース領域
4、104 第1p+型ベース領域
5、105 n型高濃度領域
5a 第1n型領域
5b 第2n型領域
6、106 p型ベース層
7、107 n+型ソース領域
8、108 p++型コンタクト領域
9、109 ゲート絶縁膜
10、110 ゲート電極
11、111 層間絶縁膜
12、112 ソース電極
13、113 裏面電極
14、114 ソース電極パッド
15、115 ドレイン電極パッド
16、116 トレンチ
17 n+型領域
50、150 トレンチ型MOSFET
Claims (15)
- 第1導電型の半導体基板と、
前記半導体基板のおもて面に設けられた、前記半導体基板より低不純物濃度の第1導電型の第1半導体層と、
前記第1半導体層の内部に選択的に設けられた、前記第1半導体層よりピーク不純物濃度が高い第1導電型の第1半導体領域と、
前記第1半導体層の内部に選択的に設けられた第2導電型の第1ベース領域と、
前記第1半導体層の前記半導体基板に対して反対側の表面に設けられた、第2導電型の第2半導体層と、
前記第2半導体層の表面層に選択的に設けられた第1導電型の第2半導体領域と、
前記第2半導体層および前記第2半導体領域を貫通して前記第1半導体層に達するトレンチと、
前記トレンチ内部にゲート絶縁膜を介して設けられたゲート電極と、
前記ゲート電極上に設けられた層間絶縁膜と、
前記第2半導体層および前記第2半導体領域に接触する第1電極と、
前記半導体基板の裏面に設けられた第2電極と、
を備え、
前記トレンチは、ストライプ状の平面パターンを有し、
前記第1半導体領域は、前記トレンチ間で前記第1ベース領域より前記第2電極側に設けられ、
前記第1ベース領域は、前記トレンチのストライプ状に延びる方向と交差する方向に、前記トレンチの底部と同じ深さに、または、前記トレンチの底部より前記第2電極側に設けられることを特徴とする半導体装置。 - 前記第1ベース領域間の間隔は、前記トレンチ間の間隔より狭いことを特徴とする請求項1に記載の半導体装置。
- 前記第1ベース領域間の間隔は、0.8μm以上5μm以下であることを特徴とする請求項1または2に記載の半導体装置。
- 前記トレンチのストライプ状に延びる方向と平行する方向に、前記トレンチの底部と接する第2ベース領域を備えることを特徴とする請求項1〜3のいずれか一つに記載の半導体装置。
- 前記第2ベース領域は、前記第1ベース領域と同じ不純物濃度で設けられていることを特徴とする請求項4に記載の半導体装置。
- 前記第2ベース領域間の間隔は、前記第1ベース領域の間隔と同じ幅で設けられていることを特徴とする請求項4または5に記載の半導体装置。
- 前記第1ベース領域の幅、または前記第2ベース領域の幅は、前記第1半導体領域の幅より広いことを特徴とする請求項1〜6のいずれか一つに記載の半導体装置。
- 前記第2半導体層の内部に選択的に設けられた第2導電型の第3半導体領域を備え、
前記第1半導体領域は、前記第3半導体領域と深さ方向に対向する位置に設けられていることを特徴とする請求項1〜7のいずれか一つに記載の半導体装置。 - 前記第1半導体領域は、前記トレンチのストライプ状に延びる方向と平行な方向にストライプ状の平面パターンを有することを特徴とする請求項1〜8のいずれか一つに記載の半導体装置。
- 前記第1半導体領域は、前記第1ベース領域と離して設けられていることを特徴とする請求項1〜9のいずれか一つに記載の半導体装置。
- 前記第1半導体領域の不純物濃度は、前記第1ベース領域の不純物濃度より低いことを特徴とする請求項1〜10のいずれか一つに記載の半導体装置。
- 前記第1半導体領域の不純物濃度は、1×1017/cm3以上1×1020/cm3以下であることを特徴とする請求項1〜11のいずれか一つに記載の半導体装置。
- 前記第1ベース領域が、前記トレンチのストライプ状に延びる方向と交差する方向は、30度、60度、90度、120度又は150度のいずれかの角度であることを特徴とする請求項1〜12のいずれか一つに記載の半導体装置。
- 前記角度は±4度以内であることを特徴とする請求項13に記載の半導体装置。
- 第1導電型の半導体基板のおもて面に、前記半導体基板より低不純物濃度の第1導電型の第1半導体層を形成する第1工程と、
前記第1半導体層の内部に選択的に、前記第1半導体層よりピーク不純物濃度が高い第1導電型の第1半導体領域を形成する第2工程と、
前記第1半導体層の内部に選択的に第2導電型の第1ベース領域を形成する第3工程と、
前記第1半導体層の前記半導体基板に対して反対側の表面に、第2導電型の第2半導体層を形成する第4工程と、
前記第2半導体層の表面層に選択的に第1導電型の第2半導体領域を形成する第5工程と、
前記第2半導体層および前記第2半導体領域を貫通して前記第1半導体層に達するトレンチを形成する第6工程と、
前記トレンチ内部にゲート絶縁膜を介してゲート電極を形成する第7工程と、
前記ゲート電極上に層間絶縁膜を形成する第8工程と、
前記第2半導体層および前記第2半導体領域に接触する第1電極を形成する第9工程と、
前記半導体基板の裏面に第2電極を形成する第10工程と、
を含み、
前記第2工程では、前記第1半導体領域を前記トレンチ間で前記第1ベース領域より前記第2電極側に形成し、
前記第3工程では、前記第1ベース領域を前記トレンチのストライプ状に延びる方向と交差する方向に、前記トレンチの底部と同じ深さに、または、前記トレンチの底部より前記第2電極側に形成し、
前記第6工程では、前記トレンチをストライプ状の平面パターンに形成することを特徴とする半導体装置の製造方法。
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