JP2020124804A5 - - Google Patents
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- JP2020124804A5 JP2020124804A5 JP2020075214A JP2020075214A JP2020124804A5 JP 2020124804 A5 JP2020124804 A5 JP 2020124804A5 JP 2020075214 A JP2020075214 A JP 2020075214A JP 2020075214 A JP2020075214 A JP 2020075214A JP 2020124804 A5 JP2020124804 A5 JP 2020124804A5
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- JP
- Japan
- Prior art keywords
- shaped glass
- polishing
- disk
- glass substrate
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 claims 36
- 238000005498 polishing Methods 0.000 claims 24
- 239000000758 substrate Substances 0.000 claims 21
- 238000004519 manufacturing process Methods 0.000 claims 12
- 230000002093 peripheral Effects 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
Claims (11)
円形の２つの主表面を有するガラス素板である円盤状ガラス素板を準備することと、
前記円盤状ガラス素板の前記２つの主表面の各々の外縁部を面取りすることと、
面取りされた前記円盤状ガラス素板の前記２つの主表面を両面研削装置で研削することと、
研削された前記円盤状ガラス素板の前記２つの主表面を両面研磨装置で研磨することによって板厚が５０〜５００μｍの円盤状ガラス基板を作製することとを含む
ことを特徴とする円盤状ガラス基板の製造方法。 A method for manufacturing a disk-shaped glass substrate for cutting out one or more thin glass substrates.
To prepare a disk-shaped glass base plate, which is a glass base plate having two circular main surfaces,
Chamfering the outer edges of each of the two main surfaces of the disk-shaped glass base plate
Grinding the two main surfaces of the chamfered disk-shaped glass base plate with a double-sided grinding device, and
A disc-shaped glass characterized in that a disc- shaped glass substrate having a plate thickness of 50 to 500 μm is produced by polishing the two main surfaces of the ground disc-shaped glass base plate with a double-sided polishing device. Substrate manufacturing method.
ことを特徴とする請求項１に記載の円盤状ガラス基板の製造方法。 Method for producing a disk-shaped glass substrate of claim 1, the thickness of the pre-Kien discotic glass substrate is characterized in that at 350μm or less.
ことを特徴とする請求項１又は２に記載の円盤状ガラス基板の製造方法。 The polishing according to claim 1 or 2, wherein a disc-shaped glass substrate having a diameter of 70 to 210 mm is produced by polishing the two main surfaces of the ground disc-shaped glass base plate. The method for manufacturing a disk-shaped glass substrate according to the description.
ことを特徴とする請求項１から３のいずれか１項に記載の円盤状ガラス基板の製造方法。 The polishing is characterized in that a disk-shaped glass substrate having a root mean square roughness Rq of 0.4 nm or less is produced by polishing the two main surfaces of the ground disk-shaped glass base plate. The method for manufacturing a disk-shaped glass substrate according to any one of claims 1 to 3.
ことを特徴とする請求項１から４のいずれか１項に記載の円盤状ガラス基板の製造方法。 From claim 1, the polishing is characterized in that a disk-shaped glass substrate having a parallelism of less than 1.0 μm is produced by polishing two main surfaces of the ground disk-shaped glass base plate. The method for manufacturing a disk-shaped glass substrate according to any one of 4.
ことを特徴とする請求項５に記載の円盤状ガラス基板の製造方法。 5. The method of polishing is characterized in that a disk-shaped glass substrate having a parallelism of 0.5 μm or less is produced by polishing two main surfaces of the ground disk-shaped glass base plate. The method for manufacturing a disk-shaped glass substrate according to.
前記面取りされた円盤状ガラス素板の外周端面の板厚をｔ２ミリメートル、
としたとき、
ｔ１×０．１５＜ｔ２＜ｔ１×０．４を満たす
ことを特徴とする請求項１から６のいずれか１項に記載の円盤状ガラス基板の製造方法。 The thickness of the chamfered disc-shaped glass base plate other than the outer peripheral end surface and the chamfered surface is t1 mm.
The thickness of the outer peripheral end face of the chamfered disk-shaped glass base plate is t2 mm.
When you and,
t1 × 0.15 <t2 <t1 × 0. The method for manufacturing a disk-shaped glass substrate according to any one of claims 1 to 6, wherein the method 4 is satisfied.
前記研磨することによって作製される円盤状ガラス基板の外周端面及び面取り面以外の板厚をｔ３ミリメートル、としたとき、 When the plate thickness other than the outer peripheral end surface and the chamfered surface of the disk-shaped glass substrate produced by the polishing is t3 mm.
ｔ３×０．５＜ｔ２ を満たす Satisfy t3 × 0.5 <t2
ことを特徴とする請求項１から７のいずれか１項に記載の円盤状ガラス基板の製造方法。 The method for manufacturing a disk-shaped glass substrate according to any one of claims 1 to 7, wherein the disk-shaped glass substrate is manufactured.
ことを特徴とする請求項１から８のいずれか１項に記載の円盤状ガラス基板の製造方法。 Is by that and the polishing pre Symbol grinding, characterized in that at least a portion of the chamfered surface at the allowance range remaining, the two major surfaces of the disc-shaped glass workpieces are polished are ground The method for manufacturing a disk-shaped glass substrate according to any one of claims 1 to 8 .
ことを特徴とする請求項１から９のいずれか１項に記載の円盤状ガラス基板の製造方法。 The allowance due to polishing is disc-shaped glass substrate manufacturing method according to any one of claims 1 9, characterized in that a. 10 to 150 [mu] m.
前記研削された円盤状ガラス素板の前記２つの主表面を前記両面研磨装置で研磨する第１研磨を施すことと、
前記第１研磨が施された円盤状ガラス素板の前記２つの主表面を前記両面研磨装置で研磨する第２研磨を施すこととを含み、
前記第１研磨と前記第２研磨とでは、それぞれの前記両面研磨装置に適用される研磨パッドと研磨スラリとの組み合わせが互いに異なる
ことを特徴とする請求項１から１０のいずれか１項に記載の円盤状ガラス基板の製造方法。 The polishing is
The first polishing of polishing the two main surfaces of the ground disc-shaped glass base plate with the double-sided polishing device is performed.
The present invention includes performing a second polishing in which the two main surfaces of the disk-shaped glass base plate subjected to the first polishing are polished by the double-sided polishing apparatus.
Wherein said first and polishing in the second polishing, according to any one of claims 1 to 10 in combination with a polishing pad and a polishing slurry is applied to each of the double-side polishing apparatus are different from each other to each other How to manufacture a disk-shaped glass substrate.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020075214A JP7003178B2 (en) | 2020-04-21 | 2020-04-21 | Manufacturing method of disk-shaped glass substrate, manufacturing method of thin glass substrate, manufacturing method of light guide plate and disk-shaped glass substrate |
| JP2021214297A JP7397844B2 (en) | 2020-04-21 | 2021-12-28 | Method for manufacturing a disc-shaped glass substrate, method for manufacturing a thin glass substrate, method for manufacturing a light guide plate, and disc-shaped glass substrate |
| JP2023147348A JP2023165755A (en) | 2020-04-21 | 2023-09-12 | Disk-shaped glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020075214A JP7003178B2 (en) | 2020-04-21 | 2020-04-21 | Manufacturing method of disk-shaped glass substrate, manufacturing method of thin glass substrate, manufacturing method of light guide plate and disk-shaped glass substrate |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017251419A Division JP6695318B2 (en) | 2017-12-27 | 2017-12-27 | Disk-shaped glass substrate manufacturing method, thin glass substrate manufacturing method, light guide plate manufacturing method, and disk-shaped glass substrate |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021214297A Division JP7397844B2 (en) | 2020-04-21 | 2021-12-28 | Method for manufacturing a disc-shaped glass substrate, method for manufacturing a thin glass substrate, method for manufacturing a light guide plate, and disc-shaped glass substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020124804A JP2020124804A (en) | 2020-08-20 |
| JP2020124804A5 true JP2020124804A5 (en) | 2021-02-12 |
| JP7003178B2 JP7003178B2 (en) | 2022-01-20 |
Family
ID=72083379
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020075214A Active JP7003178B2 (en) | 2020-04-21 | 2020-04-21 | Manufacturing method of disk-shaped glass substrate, manufacturing method of thin glass substrate, manufacturing method of light guide plate and disk-shaped glass substrate |
| JP2021214297A Active JP7397844B2 (en) | 2020-04-21 | 2021-12-28 | Method for manufacturing a disc-shaped glass substrate, method for manufacturing a thin glass substrate, method for manufacturing a light guide plate, and disc-shaped glass substrate |
| JP2023147348A Pending JP2023165755A (en) | 2020-04-21 | 2023-09-12 | Disk-shaped glass substrate |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021214297A Active JP7397844B2 (en) | 2020-04-21 | 2021-12-28 | Method for manufacturing a disc-shaped glass substrate, method for manufacturing a thin glass substrate, method for manufacturing a light guide plate, and disc-shaped glass substrate |
| JP2023147348A Pending JP2023165755A (en) | 2020-04-21 | 2023-09-12 | Disk-shaped glass substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (3) | JP7003178B2 (en) |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10340056A (en) * | 1997-06-06 | 1998-12-22 | Canon Inc | Head mounted video display device |
| JP2005263569A (en) | 2004-03-19 | 2005-09-29 | Asahi Glass Co Ltd | Method for manufacturing synthetic quartz glass substrate for polysilicon tft |
| JP5090633B2 (en) | 2004-06-22 | 2012-12-05 | 旭硝子株式会社 | Glass substrate polishing method |
| JP4184384B2 (en) * | 2006-03-16 | 2008-11-19 | Ｈｏｙａ株式会社 | Glass substrate for magnetic recording medium and magnetic recording medium |
| JP2008216835A (en) * | 2007-03-07 | 2008-09-18 | Epson Imaging Devices Corp | Manufacturing method of thin substrate |
| JP2009035461A (en) * | 2007-08-03 | 2009-02-19 | Asahi Glass Co Ltd | Method for manufacturing glass substrate for magnetic disk |
| US9753317B2 (en) * | 2012-12-21 | 2017-09-05 | Apple Inc. | Methods for trimming polarizers in displays using edge protection structures |
| WO2014103986A1 (en) * | 2012-12-28 | 2014-07-03 | Hoya株式会社 | Glass substrate for use in information recording medium and manufacturing method thereof |
| SG10201708325TA (en) | 2013-02-08 | 2017-11-29 | Hoya Corp | Method for manufacturing magnetic-disk substrate, and polishing pad used in manufacture of magnetic-disk substrate |
| JP6129029B2 (en) * | 2013-08-30 | 2017-05-17 | 株式会社ディスコ | Wafer processing method |
| JP2015064920A (en) * | 2013-09-25 | 2015-04-09 | Hoya株式会社 | Manufacturing method of glass substrate for magnetic disk |
| JP6287095B2 (en) | 2013-11-19 | 2018-03-07 | セイコーエプソン株式会社 | Optical device and electronic apparatus |
| JP6441088B2 (en) | 2015-01-13 | 2018-12-19 | 株式会社Sumco | Silicon wafer manufacturing method and semiconductor device manufacturing method |
| JP6881301B2 (en) * | 2015-06-12 | 2021-06-02 | Ａｇｃ株式会社 | Glass plate manufacturing method |
| JP6628646B2 (en) | 2016-03-11 | 2020-01-15 | Hoya株式会社 | Method of manufacturing substrate, method of manufacturing mask blank, and method of manufacturing transfer mask |
| JP6560155B2 (en) | 2016-04-20 | 2019-08-14 | 信越化学工業株式会社 | Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate |
| TWI771375B (en) | 2017-02-24 | 2022-07-21 | 美商康寧公司 | High aspect ratio glass wafer |
-
2020
- 2020-04-21 JP JP2020075214A patent/JP7003178B2/en active Active
-
2021
- 2021-12-28 JP JP2021214297A patent/JP7397844B2/en active Active
-
2023
- 2023-09-12 JP JP2023147348A patent/JP2023165755A/en active Pending
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