JP2020085572A - 変位検出装置 - Google Patents
変位検出装置 Download PDFInfo
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 119
- 230000010287 polarization Effects 0.000 claims abstract description 223
- 239000000835 fiber Substances 0.000 claims abstract description 149
- 238000001514 detection method Methods 0.000 claims description 49
- 230000010355 oscillation Effects 0.000 claims description 8
- 230000002452 interceptive effect Effects 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 4
- 230000013011 mating Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 32
- 239000013307 optical fiber Substances 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 11
- 230000008033 biological extinction Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002999 depolarising effect Effects 0.000 description 2
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- 230000001902 propagating effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
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- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000013139 quantization Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/168—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of polarisation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
Description
図1は、被測定面の変位に連動して、回析格子を変位させる変位検出装置100の構成例を示す。
図2は、被測定面の変位に連動して、ターゲットミラー214を移動させるマイケルソン干渉計型の変位検出装置200の構成例を示す。
図3は、ターゲットミラー315とリファレンスミラー316とを平行に配置した変位検出装置300の構成例を示す。
変位検出装置100,200,300は、いずれも光源101,102,103と変位検出器110,210,310との間のビームの伝送に、偏波保持ファイバ150,250,350を使用する。
次に、偏波保持ファイバ150,250,350の長さを決める条件について説明する。この偏波保持ファイバ150,250,350の長さを決める条件は、光源101,201,301としてマルチモードレーザを使用する場合の条件と、光源101,201,301として可干渉性が悪い帯域が広い光源を使用する場合の条件の、2つである。
可干渉距離を持つ可干渉性の低い光源には、前述した共振器長に伴う複数の発振スペクトルを持たず、特定の波長幅を持ち波長に対しブロードに強度が変化する光源もある。例えば、スーパールミネッセンスダイオードやLED(発光ダイオード)がある。あるいは、固体レーザでは、チタンササファイアレーザ等が挙げられる。
変位検出装置100,200,300が備える偏波保持ファイバ150,250,350は、複数本の偏波保持ファイバを接続するようにしてもよい。
なお、本発明が適用される変位検出装置は、図1,図2,図3に示す3つの変位検出装置100,200,300とは異なる構成や原理で、変位を検出するものでもよい。すなわち、光源からの光を偏波保持ファイバを介して変位検出器に導く構成の変位検出装置であれば、その他の構成にも適用可能である。
Claims (3)
- 光を出射する共振器長に伴う複数の発振スペクトルを持つ可干渉性の低いレーザ光源と、
前記レーザ光源からの光を集光させるレンズと、
前記共振器長の2倍に共振器の屈折率をかけた長さの整数倍と2つの偏波モードの伝搬定数の差から求められるビート長の積を光源の波長で割った長さと同一となることを含まない長さが、その同一となる長さが含まれる範囲の中から選定され、前記レンズで集光された光を伝送する偏波保持ファイバと、
前記偏波保持ファイバによって伝送されたビームを2分割させ、その各ビームに乗じられた位相の変化を変位量とするために、前記各ビームを干渉させることで干渉信号に変換する変位検出器とを含み、
前記偏波保持ファイバは、脱着可能なコネクタで複数本が勘合されており、複数の勘合部が存在するとき、偏波保持ファイバの接続順序として、最後の偏波保持ファイバと、それを除いた偏波保持ファイバのあらゆる組み合わせとの、偏波保持ファイバの総長が、前記共振器長の2倍に共振器の屈折率をかけた長さの整数倍と前記偏波保持ファイバのX,Y偏波モードの伝搬定数の差から求められるビート長の積を光源の波長で割った長さと同一となることを避けるようにした
変位検出装置。 - 光を出射する可干渉距離をもつ可干渉性の低い光源と、
前記光源からの光を集光させるレンズと、
前記可干渉距離と2つの偏波モードの伝搬定数の差から求められるビート長の積から前記光源の波長を割った長さよりも大きな長さで製作され、前記レンズで集光された光を伝送する偏波保持ファイバと、
上記偏波保持ファイバによって伝送されたビームを2分割させ、その各ビームに乗じられた位相の変化を変位量とするために、前記各ビームを干渉させることで干渉信号に変換する変位検出器とを含み、
前記偏波保持ファイバは、脱着可能なコネクタで複数本が勘合されており、各々の偏波保持ファイバの長さは、2m×L(但しmは0以上の整数、Lは最も短い偏波保持ファイバの長さ)で構成され、かつ各々の偏波保持ファイバの長さは同じ組合せが無いようにした
変位検出装置。 - 前記偏波保持ファイバの勘合において、偏波保持ファイバのX,Y偏波モード軸が接続先の偏波保持ファイバの異なるX,Y偏波モード軸に接続されるものを含む
請求項1又は請求項2に記載の変位検出装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2018217762A JP2020085572A (ja) | 2018-11-20 | 2018-11-20 | 変位検出装置 |
US16/690,000 US11512942B2 (en) | 2018-11-20 | 2019-11-20 | Displacement detection device |
EP19210265.5A EP3663705B1 (en) | 2018-11-20 | 2019-11-20 | Displacement detection device |
JP2023059920A JP2023078475A (ja) | 2018-11-20 | 2023-04-03 | 変位検出装置 |
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JP2018217762A JP2020085572A (ja) | 2018-11-20 | 2018-11-20 | 変位検出装置 |
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JP2023059920A Pending JP2023078475A (ja) | 2018-11-20 | 2023-04-03 | 変位検出装置 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6147513A (ja) * | 1984-08-13 | 1986-03-08 | Fujikura Ltd | 光フアイバセンサ |
JPH02193126A (ja) * | 1989-01-23 | 1990-07-30 | Nippon Telegr & Teleph Corp <Ntt> | 光カー・スイッチ |
JP2003014956A (ja) * | 2001-06-28 | 2003-01-15 | Fujikura Ltd | 偏波面保持型光ファイバグレーティング、光モジュール及び光通信システム |
JP2016142552A (ja) * | 2015-01-30 | 2016-08-08 | Dmg森精機株式会社 | 変位検出装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US5120130A (en) * | 1983-04-26 | 1992-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Apparatus and method for reducing phase errors in an interferometer |
JP3307091B2 (ja) | 1994-06-09 | 2002-07-24 | キヤノン株式会社 | 真直度測定方法及びそれを用いた真直度測定装置 |
JP4969057B2 (ja) | 2004-12-13 | 2012-07-04 | 株式会社森精機製作所 | 変位検出装置及び変位計測装置並びに定点検出装置 |
US7864336B2 (en) * | 2008-04-28 | 2011-01-04 | Agilent Technologies, Inc. | Compact Littrow encoder |
JP6076589B2 (ja) * | 2011-05-11 | 2017-02-08 | Dmg森精機株式会社 | 変位検出装置 |
JP6820091B2 (ja) | 2016-08-01 | 2021-01-27 | 株式会社ミツトヨ | 測定器 |
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2018
- 2018-11-20 JP JP2018217762A patent/JP2020085572A/ja active Pending
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2019
- 2019-11-20 EP EP19210265.5A patent/EP3663705B1/en active Active
- 2019-11-20 US US16/690,000 patent/US11512942B2/en active Active
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- 2023-04-03 JP JP2023059920A patent/JP2023078475A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6147513A (ja) * | 1984-08-13 | 1986-03-08 | Fujikura Ltd | 光フアイバセンサ |
JPH02193126A (ja) * | 1989-01-23 | 1990-07-30 | Nippon Telegr & Teleph Corp <Ntt> | 光カー・スイッチ |
JP2003014956A (ja) * | 2001-06-28 | 2003-01-15 | Fujikura Ltd | 偏波面保持型光ファイバグレーティング、光モジュール及び光通信システム |
JP2016142552A (ja) * | 2015-01-30 | 2016-08-08 | Dmg森精機株式会社 | 変位検出装置 |
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JP2023078475A (ja) | 2023-06-06 |
EP3663705B1 (en) | 2021-08-25 |
EP3663705A1 (en) | 2020-06-10 |
US11512942B2 (en) | 2022-11-29 |
US20200158494A1 (en) | 2020-05-21 |
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