JP2020020025A - 金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置 - Google Patents
金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置 Download PDFInfo
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- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
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- C01G37/00—Compounds of chromium
- C01G37/003—Preparation involving a liquid-liquid extraction, an adsorption or an ion-exchange
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Abstract
Description
前記金属部品の表面を覆う前記不動態膜に塩酸を供給し、前記酸化クロムと前記塩酸とを反応させ、塩化クロム(III)六水和物を生成させる工程と、
該塩化クロム(III)六水和物を蒸発させることにより、前記不動態膜からクロムを除去する工程と、
前記金属塩化物ガス内に含まれる金属を含む化合物で前記不動態膜の表面を覆う工程と、を有する。
ここで、水は、供給配管60の表面に存在していたり、空気中に存在していたりする水分で十分であり、AlCl3を供給すると、自然的に存在する水と塩化アルミニウムが反応し、自動的に(1)式の反応が発生する。(1)式が起こることにより、塩酸と酸化アルミニウムが発生する。
かかる反応により、不動態膜20を構成していたCrO3が、CrCl3・6H2O(塩化クロム(III)六水和物)21に変化し、置換されてゆく。また、(1)式により生成された酸化アルミニウム(Al2O3)30が不動態膜20上に堆積する。
20 不動態膜
21 塩化クロム(III)六水和物
30 酸化アルミニウム
40 金属塩化物供給源
41 金属塩化物収納容器
50、51、130 ヒータ
60 供給配管
70、71、150 バルブ
80、160 流量制御器
90 インジェクタ
100 処理容器
110 ウエハボート
120 蓋体
140 排気配管
170 真空ポンプ
Claims (20)
- 酸化クロムからなる不動態膜で表面が被覆された金属部品に金属塩化物ガスを通気させて行う金属汚染防止方法であって、
前記金属部品の表面を覆う前記不動態膜に塩酸を供給し、前記酸化クロムと前記塩酸とを反応させ、塩化クロム(III)六水和物を生成させる工程と、
該塩化クロム(III)六水和物を蒸発させることにより、前記不動態膜からクロムを除去する工程と、
前記金属塩化物ガス内に含まれる金属を含む化合物で前記不動態膜の表面を覆う工程と、を有する金属汚染防止方法。 - 前記不動態膜からクロムを除去する深さは1nm以上であり、
前記不動態膜の表面を覆う厚さは2nm以上である請求項1に記載の金属汚染防止方法。 - 前記金属塩化物ガス内に含まれる金属を含む化合物は前記金属塩化物ガス内に含まれる金属の酸化物である請求項1又は2に記載の金属汚染防止方法。
- 前記塩酸は、前記金属塩化物ガスに水を反応させることにより生成される請求項3に記載の金属汚染防止方法。
- 前記金属塩化物ガス内に含まれる金属の酸化物は、前記金属塩化物ガスに水を反応させることにより前記塩酸とともに生成され、前記塩化クロム(III)六水和物を生成させる工程と前記不動態膜の表面を覆う工程とは同時に行われる請求項4に記載の金属汚染防止方法。
- 前記水は空気中に含まれる水分、又は前記金属部品に付着又は内在している水分である請求項4又は5に記載の金属汚染防止方法。
- 前記水の濃度は、1ppb〜2.5%の範囲に設定されている請求項4乃至6のいずれか一項に記載の金属汚染防止方法。
- 前記不動態膜からクロムを除去する工程は、前記金属部品の周囲の雰囲気を減圧する工程を含む請求項1乃至7のいずれか一項に記載の金属汚染防止方法。
- 前記不動態膜からクロムを除去する工程は、前記金属部品の周囲の雰囲気を加熱する工程を含む請求項1乃至8のいずれか一項に記載の金属汚染防止方法。
- 前記金属部品は配管であり、
前記表面は該配管の内周面である請求項1乃至9のいずれか一項に記載の金属汚染防止方法。 - 前記配管はステンレスからなる請求項10に記載の金属汚染防止方法。
- 前記配管は金属塩化物ガス供給用の配管である請求項10又は11に記載の金属汚染防止方法。
- 前記金属塩化物ガスは、固体であるAlCl3, WCl5, WCl6, HfCl4, TaCl5, ZrCl4, MoCl5, AgCl, GaCl3, PdCl2,MgCl2・6H2O, InCl3・4H2O, NiCl2・6H2O, CuCl2・2H2O, CoCl2・6H2O, CrCl3・6H2O, SnCl2・6H2O, RhCl3・3H2O, RuCl3・xH2O, WOCl4, NbCl5又はInCl3を気化したガス、液体であるSnCl4又はTiCl4を気化したガス、又は元から気体のSiH2Cl2, POCl3, SiHCl3, Si2Cl6, CH2Cl2, TiCl4, SiCl4, Si3Cl8のいずれかである請求項1乃至12のいずれか一項に記載の金属汚染防止方法。
- 前記配管は、基板処理装置の処理室に接続されており、
請求項10乃至12のいずれか一項に記載の金属汚染防止方法を実施した後、前記配管から前記処理室に処理ガスを供給して基板処理を行う工程を更に有する基板処理方法。 - 酸化クロムからなる不動態膜で表面が被覆された金属部品に金属塩化物ガスを通気させて金属汚染防止処理を施す金属汚染防止装置であって、
前記金属部品の表面を覆う前記不動態膜に塩酸を供給する塩酸供給手段と、
該塩酸供給手段により供給された前記塩酸と前記酸化クロムとの反応により生成した塩化クロム(III)六水和物を蒸発させる蒸発部と、を有する金属汚染防止装置。 - 前記蒸発部は、前記金属部品の周囲の雰囲気を減圧する減圧手段を含む請求項15に記載の金属汚染防止装置。
- 前記蒸発部は、前記金属部品の周囲の雰囲気を加熱する加熱手段を含む請求項15又は16に記載の金属汚染防止装置。
- 前記金属部品は配管であり、
前記表面は該配管の内周面である請求項15乃至17のいずれか一項に記載の金属汚染防止装置。 - 前記配管はステンレスからなる請求項18に記載の金属汚染防止装置。
- 請求項18又は19に記載された金属汚染防止装置と、
該金属汚染防止装置が接続された前記配管と、
前記配管が接続され、前記配管を介して処理ガスを供給することにより、収容した基板の処理が可能な処理室と、を有する基板処理装置。
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JP2018146996A JP2020020025A (ja) | 2018-08-03 | 2018-08-03 | 金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置 |
KR1020190091115A KR102533580B1 (ko) | 2018-08-03 | 2019-07-26 | 금속 오염 방지 방법 및 금속 오염 방지 장치, 그리고 이들을 이용한 기판 처리 방법 및 기판 처리 장치 |
US16/526,088 US11486043B2 (en) | 2018-08-03 | 2019-07-30 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor |
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JPS49122435A (ja) * | 1973-03-26 | 1974-11-22 | ||
JP2017155314A (ja) * | 2016-03-04 | 2017-09-07 | 東京エレクトロン株式会社 | 金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置 |
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CN107002240B (zh) * | 2014-12-12 | 2020-01-03 | 东洋钢钣株式会社 | 镀金属覆盖不锈钢材料的制造方法 |
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JPS49122435A (ja) * | 1973-03-26 | 1974-11-22 | ||
JP2017155314A (ja) * | 2016-03-04 | 2017-09-07 | 東京エレクトロン株式会社 | 金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置 |
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US11486043B2 (en) | 2022-11-01 |
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KR102533580B1 (ko) | 2023-05-18 |
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