JP2020016255A - 伸縮装置 - Google Patents
伸縮装置 Download PDFInfo
- Publication number
- JP2020016255A JP2020016255A JP2018137807A JP2018137807A JP2020016255A JP 2020016255 A JP2020016255 A JP 2020016255A JP 2018137807 A JP2018137807 A JP 2018137807A JP 2018137807 A JP2018137807 A JP 2018137807A JP 2020016255 A JP2020016255 A JP 2020016255A
- Authority
- JP
- Japan
- Prior art keywords
- movable member
- ball screw
- screw shaft
- screw
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
- F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/2018—Screw mechanisms with both screw and nut being driven, i.e. screw and nut are both rotating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
- F16H37/12—Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types
- F16H37/14—Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types the movements of two or more independently-moving members being combined into a single movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
- F16H55/32—Friction members
- F16H55/36—Pulleys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H7/00—Gearings for conveying rotary motion by endless flexible members
- F16H7/02—Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2081—Parallel arrangement of drive motor to screw axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2096—Arrangements for driving the actuator using endless flexible members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Transmission Devices (AREA)
- Manipulator (AREA)
- Vehicle Body Suspensions (AREA)
- Seal Device For Vehicle (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
Abstract
Description
101 モータ
102 連結機構
110 ベース部材
120 第1のボールねじ
121、142、151 ねじ軸
122、141、152 ナット
130 第1の可動部材
131 貫通孔
140 第2のボールねじ
150 第3のボールねじ
160 伝達機構
161 第1のプーリ
162 第2のプーリ
163 伝達ベルト
170 第2の可動部材
171 面状部
180 第1のガイド機構
181、182 ガイドレール
183、184 ガイドブロック
190 第2のガイド機構
191、192 ガイドレール
193、194 ガイドブロック
Claims (7)
- ベース部材と、
前記ベース部材に設けられ、駆動源から供給される駆動力によって回転する第1のボールねじと、
前記第1のボールねじを介して前記ベース部材に連結され、前記第1のボールねじの回転に伴い、前記ベース部材に対して相対的に移動する第1の可動部材と、
前記第1の可動部材に設けられ、前記第1の可動部材の移動に伴い、回転する第2のボールねじと、
前記第1の可動部材に設けられた第3のボールねじと、
前記第2のボールねじの回転を前記第3のボールねじへ伝達する伝達機構と、
前記第3のボールねじを介して前記第1の可動部材に連結され、前記第3のボールねじの回転に伴い、前記第1の可動部材に対して相対的に移動する第2の可動部材と
を有する、伸縮装置。 - 前記駆動源は、前記第1の可動部材及び前記第2の可動部材とは独立して配置される、請求項1に記載の伸縮装置。
- 前記第1のボールねじは、
前記ベース部材に回転自在に固定され、前記駆動源から供給される駆動力によって回転するねじ軸と、
前記ねじ軸に取り付けられるとともに、前記第1の可動部材に固定され、前記ねじ軸の回転に伴い、前記ねじ軸に沿って前記第1の可動部材を移動させるナットとを有する、請求項1又は2に記載の伸縮装置。 - 前記第2のボールねじは、
前記ベース部材に固定されたナットと、
前記ナットに取り付けられるととともに、前記第1の可動部材に回転自在に固定され、前記第1の可動部材の移動に伴い、回転するねじ軸とを有し、
前記第3のボールねじは、
前記第1の可動部材に回転自在に固定され、前記第2のボールねじのねじ軸の回転が前記伝達機構によって伝達されることにより、回転するねじ軸と、
前記ねじ軸に取り付けられるとともに、前記第2の可動部材に固定され、前記ねじ軸の回転に伴い、前記ねじ軸に沿って前記第2の可動部材を移動させるナットとを有し、
前記伝達機構は、
前記第2のボールねじのねじ軸に取り付けられた第1のプーリと、
前記第3のボールねじのねじ軸に取り付けられた第2のプーリと、
前記第1のプーリと前記第2のプーリとを連結するベルトとを有する、請求項1〜3のいずれか一つに記載の伸縮装置。 - 前記第1のプーリと前記第2のプーリとは、直径が異なる、請求項4に記載の伸縮装置。
- 前記第2のボールねじのねじ軸と、前記第3のボールねじのねじ軸とは、ねじ溝のピッチが異なる、請求項4又は5に記載の伸縮装置。
- 前記ベース部材に対する前記第1の可動部材の移動を案内する第1のガイド機構と、
前記第1の可動部材に対する前記第2の可動部材の移動を案内する第2のガイド機構と
をさらに有する、請求項1〜6のいずれか一つに記載の伸縮装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018137807A JP7182928B2 (ja) | 2018-07-23 | 2018-07-23 | 伸縮装置 |
CN201980016526.XA CN111801516A (zh) | 2018-07-23 | 2019-07-12 | 伸缩装置 |
PCT/JP2019/027719 WO2020022107A1 (ja) | 2018-07-23 | 2019-07-12 | 伸縮装置 |
KR1020207025168A KR20210032301A (ko) | 2018-07-23 | 2019-07-12 | 신축 장치 |
US16/977,473 US11491639B2 (en) | 2018-07-23 | 2019-07-12 | Extendable device |
TW108125798A TWI803669B (zh) | 2018-07-23 | 2019-07-22 | 伸縮裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018137807A JP7182928B2 (ja) | 2018-07-23 | 2018-07-23 | 伸縮装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020016255A true JP2020016255A (ja) | 2020-01-30 |
JP7182928B2 JP7182928B2 (ja) | 2022-12-05 |
Family
ID=69181020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018137807A Active JP7182928B2 (ja) | 2018-07-23 | 2018-07-23 | 伸縮装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11491639B2 (ja) |
JP (1) | JP7182928B2 (ja) |
KR (1) | KR20210032301A (ja) |
CN (1) | CN111801516A (ja) |
TW (1) | TWI803669B (ja) |
WO (1) | WO2020022107A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7470586B2 (ja) * | 2020-07-14 | 2024-04-18 | 東京エレクトロン株式会社 | 基板搬送システム及び基板搬送方法 |
TWM624166U (zh) * | 2021-11-17 | 2022-03-01 | 正崴精密工業股份有限公司 | 電機控制手臂伸縮及模組化 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010090987A (ja) * | 2008-10-08 | 2010-04-22 | Nke Corp | スライド駆動装置 |
JP2010131199A (ja) * | 2008-12-04 | 2010-06-17 | Toshiba Corp | 医療用寝台装置 |
US20150075306A1 (en) * | 2012-03-08 | 2015-03-19 | Thomson Industries, Inc. | Telescoping linear actuator with screw drives |
JP2015143525A (ja) * | 2014-01-31 | 2015-08-06 | 日本精工株式会社 | 直動案内装置 |
JP2016211666A (ja) * | 2015-05-11 | 2016-12-15 | 宇部興産機械株式会社 | 駆動装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1748948A (en) * | 1927-11-04 | 1930-03-04 | Schloemann Ag | Ingot-pushing device |
FR2724208B1 (fr) * | 1994-09-07 | 1996-10-18 | Commissariat Energie Atomique | Systeme telescopique |
JPH0929670A (ja) | 1995-07-18 | 1997-02-04 | Shin Meiwa Ind Co Ltd | 円筒座標型ロボット |
JP3429200B2 (ja) * | 1998-07-14 | 2003-07-22 | 助次郎 永田 | 直線移動装置 |
JP2000117667A (ja) | 1998-10-19 | 2000-04-25 | Komatsu Ltd | 円筒座標型ロボット |
KR100594390B1 (ko) * | 2000-01-28 | 2006-07-03 | 삼성전자주식회사 | 텔레스코픽 시스템을 구비한 로봇 |
US7712389B2 (en) * | 2006-05-16 | 2010-05-11 | T-Motion Technology Co., Ltd. | Lifting device having parallel double screw rods |
ES2596712T3 (es) * | 2010-08-17 | 2017-01-11 | Jlg Industries Inc. | Elevador de mástil que utiliza módulo de mástil multietapa |
CN202241311U (zh) * | 2011-10-20 | 2012-05-30 | 宁波力匠机械制造有限公司 | 3级伸缩式操作臂 |
JP6032028B2 (ja) * | 2013-01-28 | 2016-11-24 | 日本精工株式会社 | 直動案内装置 |
-
2018
- 2018-07-23 JP JP2018137807A patent/JP7182928B2/ja active Active
-
2019
- 2019-07-12 WO PCT/JP2019/027719 patent/WO2020022107A1/ja active Application Filing
- 2019-07-12 KR KR1020207025168A patent/KR20210032301A/ko not_active Application Discontinuation
- 2019-07-12 CN CN201980016526.XA patent/CN111801516A/zh active Pending
- 2019-07-12 US US16/977,473 patent/US11491639B2/en active Active
- 2019-07-22 TW TW108125798A patent/TWI803669B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010090987A (ja) * | 2008-10-08 | 2010-04-22 | Nke Corp | スライド駆動装置 |
JP2010131199A (ja) * | 2008-12-04 | 2010-06-17 | Toshiba Corp | 医療用寝台装置 |
US20150075306A1 (en) * | 2012-03-08 | 2015-03-19 | Thomson Industries, Inc. | Telescoping linear actuator with screw drives |
JP2015143525A (ja) * | 2014-01-31 | 2015-08-06 | 日本精工株式会社 | 直動案内装置 |
JP2016211666A (ja) * | 2015-05-11 | 2016-12-15 | 宇部興産機械株式会社 | 駆動装置 |
Also Published As
Publication number | Publication date |
---|---|
JP7182928B2 (ja) | 2022-12-05 |
US11491639B2 (en) | 2022-11-08 |
US20210220989A1 (en) | 2021-07-22 |
TW202012127A (zh) | 2020-04-01 |
TWI803669B (zh) | 2023-06-01 |
CN111801516A (zh) | 2020-10-20 |
WO2020022107A1 (ja) | 2020-01-30 |
KR20210032301A (ko) | 2021-03-24 |
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