JP2019534937A5 - - Google Patents
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- Publication number
- JP2019534937A5 JP2019534937A5 JP2017563294A JP2017563294A JP2019534937A5 JP 2019534937 A5 JP2019534937 A5 JP 2019534937A5 JP 2017563294 A JP2017563294 A JP 2017563294A JP 2017563294 A JP2017563294 A JP 2017563294A JP 2019534937 A5 JP2019534937 A5 JP 2019534937A5
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- storage chamber
- heating
- vapor deposition
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610850525.3A CN106191785B (zh) | 2016-09-27 | 2016-09-27 | 坩埚、蒸镀装置及蒸镀系统 |
| CN201610850525.3 | 2016-09-27 | ||
| PCT/CN2017/089355 WO2018059019A1 (zh) | 2016-09-27 | 2017-06-21 | 坩埚、蒸镀装置及蒸镀系统 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019534937A JP2019534937A (ja) | 2019-12-05 |
| JP2019534937A5 true JP2019534937A5 (cg-RX-API-DMAC7.html) | 2020-06-25 |
Family
ID=57520791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017563294A Pending JP2019534937A (ja) | 2016-09-27 | 2017-06-21 | 坩堝、蒸着装置及び蒸着システム |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20180298487A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2019534937A (cg-RX-API-DMAC7.html) |
| CN (1) | CN106191785B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2018059019A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191785B (zh) * | 2016-09-27 | 2018-09-18 | 京东方科技集团股份有限公司 | 坩埚、蒸镀装置及蒸镀系统 |
| CN109722633B (zh) * | 2017-10-31 | 2021-07-06 | 上海和辉光电股份有限公司 | 一种坩埚及蒸镀装置 |
| CN109355628B (zh) * | 2018-12-05 | 2020-01-21 | 深圳市华星光电技术有限公司 | 蒸镀坩埚 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
| US6237529B1 (en) * | 2000-03-03 | 2001-05-29 | Eastman Kodak Company | Source for thermal physical vapor deposition of organic electroluminescent layers |
| CN102605194A (zh) * | 2012-03-16 | 2012-07-25 | 葫芦岛锌业股份有限公司 | 一种真空蒸馏制备高纯锌的方法 |
| CN203451609U (zh) * | 2013-09-26 | 2014-02-26 | 京东方科技集团股份有限公司 | 一种蒸镀坩埚 |
| CN203582959U (zh) * | 2013-12-06 | 2014-05-07 | 京东方科技集团股份有限公司 | 一种蒸镀装置 |
| JP6162625B2 (ja) * | 2014-02-27 | 2017-07-12 | 株式会社日立製作所 | 結晶育成用るつぼおよびそれを備えた結晶育成装置ならびに結晶育成方法 |
| CN104018122B (zh) * | 2014-06-10 | 2016-04-20 | 京东方科技集团股份有限公司 | 一种收集装置 |
| CN105755432B (zh) * | 2016-04-13 | 2019-04-09 | 京东方科技集团股份有限公司 | 一种蒸镀罩和蒸镀设备 |
| CN106191785B (zh) * | 2016-09-27 | 2018-09-18 | 京东方科技集团股份有限公司 | 坩埚、蒸镀装置及蒸镀系统 |
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2016
- 2016-09-27 CN CN201610850525.3A patent/CN106191785B/zh active Active
-
2017
- 2017-06-21 US US15/580,123 patent/US20180298487A1/en not_active Abandoned
- 2017-06-21 WO PCT/CN2017/089355 patent/WO2018059019A1/zh not_active Ceased
- 2017-06-21 JP JP2017563294A patent/JP2019534937A/ja active Pending