JP2019529895A5 - - Google Patents
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- Publication number
- JP2019529895A5 JP2019529895A5 JP2019512871A JP2019512871A JP2019529895A5 JP 2019529895 A5 JP2019529895 A5 JP 2019529895A5 JP 2019512871 A JP2019512871 A JP 2019512871A JP 2019512871 A JP2019512871 A JP 2019512871A JP 2019529895 A5 JP2019529895 A5 JP 2019529895A5
- Authority
- JP
- Japan
- Prior art keywords
- white light
- wafer
- sensors
- sensor body
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 6
- 239000013307 optical fiber Substances 0.000 claims 5
- 239000006185 dispersion Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000001228 spectrum Methods 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- YUZILKLGVPUFOT-YHPRVSEPSA-L disodium;5-[(6-anilino-4-oxo-1h-1,3,5-triazin-2-yl)amino]-2-[(e)-2-[4-[(6-anilino-4-oxo-1h-1,3,5-triazin-2-yl)amino]-2-sulfonatophenyl]ethenyl]benzenesulfonate Chemical compound [Na+].[Na+].C=1C=C(\C=C\C=2C(=CC(NC=3NC(NC=4C=CC=CC=4)=NC(=O)N=3)=CC=2)S([O-])(=O)=O)C(S(=O)(=O)[O-])=CC=1NC(N1)=NC(=O)N=C1NC1=CC=CC=C1 YUZILKLGVPUFOT-YHPRVSEPSA-L 0.000 claims 1
- 238000005516 engineering process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022585A JP2022081498A (ja) | 2016-09-07 | 2022-02-17 | 高さ計測装置及び方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662384324P | 2016-09-07 | 2016-09-07 | |
| US62/384,324 | 2016-09-07 | ||
| US15/690,969 US10317344B2 (en) | 2016-09-07 | 2017-08-30 | Speed enhancement of chromatic confocal metrology |
| US15/690,969 | 2017-08-30 | ||
| PCT/US2017/050326 WO2018048938A1 (en) | 2016-09-07 | 2017-09-06 | Speed enhancement of chromatic confocal metrology |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022585A Division JP2022081498A (ja) | 2016-09-07 | 2022-02-17 | 高さ計測装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019529895A JP2019529895A (ja) | 2019-10-17 |
| JP2019529895A5 true JP2019529895A5 (enExample) | 2020-10-15 |
Family
ID=61282067
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019512871A Pending JP2019529895A (ja) | 2016-09-07 | 2017-09-06 | クロマティック共焦点計量の速度向上 |
| JP2022022585A Pending JP2022081498A (ja) | 2016-09-07 | 2022-02-17 | 高さ計測装置及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022585A Pending JP2022081498A (ja) | 2016-09-07 | 2022-02-17 | 高さ計測装置及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10317344B2 (enExample) |
| EP (1) | EP3510350A4 (enExample) |
| JP (2) | JP2019529895A (enExample) |
| KR (1) | KR102236810B1 (enExample) |
| CN (1) | CN109690238B (enExample) |
| WO (1) | WO2018048938A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11441893B2 (en) * | 2018-04-27 | 2022-09-13 | Kla Corporation | Multi-spot analysis system with multiple optical probes |
| USD923121S1 (en) * | 2019-08-23 | 2021-06-22 | Air Box Co., Ltd. | Exercise mat combined hammock |
| EP4211726A4 (en) * | 2020-09-08 | 2024-11-27 | Massachusetts Institute Of Technology | PREDICTION OF SEMICONDUCTOR DEVICE PERFORMANCE |
| US11899375B2 (en) | 2020-11-20 | 2024-02-13 | Kla Corporation | Massive overlay metrology sampling with multiple measurement columns |
| FR3118175B1 (fr) * | 2020-12-18 | 2025-05-30 | Unity Semiconductor | Procede d’inspection d’une surface d’un objet |
| JP7532288B2 (ja) * | 2021-03-04 | 2024-08-13 | キオクシア株式会社 | 検査結果分析装置および検査結果分析プログラム |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4689491A (en) * | 1985-04-19 | 1987-08-25 | Datasonics Corp. | Semiconductor wafer scanning system |
| US4709144A (en) | 1986-04-02 | 1987-11-24 | Hewlett-Packard Company | Color imager utilizing novel trichromatic beamsplitter and photosensor |
| US4844617A (en) * | 1988-01-20 | 1989-07-04 | Tencor Instruments | Confocal measuring microscope with automatic focusing |
| US6552803B1 (en) | 1998-02-24 | 2003-04-22 | Kla-Tencor Corporation | Detection of film thickness through induced acoustic pulse-echos |
| US6248988B1 (en) * | 1998-05-05 | 2001-06-19 | Kla-Tencor Corporation | Conventional and confocal multi-spot scanning optical microscope |
| US6636310B1 (en) * | 1998-05-12 | 2003-10-21 | Metroptic Technologies, Ltd. | Wavelength-dependent surface contour measurement system and method |
| WO2001037025A1 (en) * | 1999-11-16 | 2001-05-25 | Agilent Technologies, Inc. | Confocal imaging |
| JP3726028B2 (ja) * | 2001-03-30 | 2005-12-14 | 住友重機械工業株式会社 | ３次元形状計測装置 |
| JP3210654B1 (ja) | 2001-05-02 | 2001-09-17 | レーザーテック株式会社 | 光学式走査装置及び欠陥検出装置 |
| US6917421B1 (en) | 2001-10-12 | 2005-07-12 | Kla-Tencor Technologies Corp. | Systems and methods for multi-dimensional inspection and/or metrology of a specimen |
| IL146174A (en) | 2001-10-25 | 2007-08-19 | Camtek Ltd | Confocal system for testing woofers |
| US7633616B2 (en) | 2003-06-02 | 2009-12-15 | Sensovation Ag | Apparatus and method for photo-electric measurement |
| DE102005023351A1 (de) * | 2005-05-17 | 2006-11-30 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Vorrichtung und Verfahren zum Vermessen von Oberflächen |
| TWI432698B (zh) | 2006-07-11 | 2014-04-01 | Camtek Ltd | 用於探針標記分析之系統及方法 |
| DE102006036504A1 (de) | 2006-08-04 | 2008-02-07 | Vistec Semiconductor Systems Gmbh | Vorrichtung und Verfahren zur Messung des Höhenprofils eines strukturierten Substrats |
| KR100807218B1 (ko) * | 2007-02-02 | 2008-02-28 | 삼성전자주식회사 | 웨이퍼 검사 장치 및 방법 |
| US7791712B2 (en) * | 2007-03-27 | 2010-09-07 | Mitutoyo Corporation | Chromatic confocal sensor fiber interface |
| US8194301B2 (en) * | 2008-03-04 | 2012-06-05 | Kla-Tencor Corporation | Multi-spot scanning system and method |
| CN101588209B (zh) | 2008-05-23 | 2011-11-30 | 中兴通讯股份有限公司 | 一种自适应色散补偿方法 |
| DE102008062879B4 (de) * | 2008-10-10 | 2010-10-28 | Universität Stuttgart | Verfahren und Anordnung zur skalierbaren Interferometrie |
| US7876456B2 (en) * | 2009-05-11 | 2011-01-25 | Mitutoyo Corporation | Intensity compensation for interchangeable chromatic point sensor components |
| DE102009025815A1 (de) | 2009-05-15 | 2010-11-25 | Degudent Gmbh | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objektes |
| JP2011017552A (ja) * | 2009-07-07 | 2011-01-27 | Oputouea Kk | 多点変位検出装置 |
| FR2950441B1 (fr) | 2009-09-23 | 2012-05-18 | Sabban Youssef Cohen | Capteur optique dote de champ lateral pour la numerisation 3d |
| TWI414817B (zh) * | 2010-07-23 | 2013-11-11 | Univ Nat Taipei Technology | 線型彩色共焦顯微系統 |
| JP5790178B2 (ja) * | 2011-03-14 | 2015-10-07 | オムロン株式会社 | 共焦点計測装置 |
| JP2013061185A (ja) * | 2011-09-12 | 2013-04-04 | Toshiba Corp | パターン検査装置およびパターン検査方法 |
| CN102506754B (zh) * | 2011-11-09 | 2013-11-06 | 西安工业大学 | 物体表面形貌与颜色同时测量的共聚焦测量装置及其使用方法 |
| JP5834979B2 (ja) * | 2012-02-03 | 2015-12-24 | オムロン株式会社 | 共焦点計測装置 |
| US8817240B2 (en) * | 2012-05-25 | 2014-08-26 | Mitutoyo Corporation | Interchangeable optics configuration for a chromatic range sensor optical pen |
| KR101882591B1 (ko) * | 2013-06-17 | 2018-08-24 | 프레시텍 옵트로닉 게엠베하 | 거리에 있어서 차이들을 기록하기 위한 광학 측정 장치 및 광학 측정 방법 |
| JP2016024009A (ja) * | 2014-07-18 | 2016-02-08 | 株式会社ミツトヨ | 厚さ測定装置及び厚さ測定方法 |
| EP3222964B1 (en) * | 2016-03-25 | 2020-01-15 | Fogale Nanotech | Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer |
| CN106931911A (zh) | 2017-04-01 | 2017-07-07 | 浙江协同光电科技有限公司 | 白光光谱共焦线扫描装置 |
-
2017
- 2017-08-30 US US15/690,969 patent/US10317344B2/en active Active
- 2017-09-06 JP JP2019512871A patent/JP2019529895A/ja active Pending
- 2017-09-06 CN CN201780055076.6A patent/CN109690238B/zh active Active
- 2017-09-06 WO PCT/US2017/050326 patent/WO2018048938A1/en not_active Ceased
- 2017-09-06 EP EP17849475.3A patent/EP3510350A4/en not_active Withdrawn
- 2017-09-06 KR KR1020197009858A patent/KR102236810B1/ko active Active
-
2022
- 2022-02-17 JP JP2022022585A patent/JP2022081498A/ja active Pending
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