JP2019529895A - クロマティック共焦点計量の速度向上 - Google Patents
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- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
Description
本願は2016年9月7日付米国仮特許出願第62/384324に基づく優先権主張を伴うものであり、この参照を以てその開示内容が本願に繰り入れられるものとする。
Claims (13)
- 白色光を発する白色光源と、
複数個のレンズであり、上記白色光源からの白色光を組成する波長それぞれの焦点距離がそれらレンズの屈折率により変わり、その白色光を組成する波長それぞれがそれらレンズから見て別々の距離にて集束する複数個のレンズと、
ピンホールアパーチャと、
上記白色光を受光する検出器と、
複数個のセンサを有するセンサ体であり、それらセンサが複数本のロー及びカラムをなしてそのセンサ体内に配置されており、それらロー及びカラムのそれぞれがそれらセンサのうち少なくとも2個を有するセンサ体と、
上記白色光源及び上記検出器を上記複数個のセンサに結合させる複数本の光ファイバと、
を備える装置。 - 請求項1に記載の装置であって、更に、上記検出器と電子通信するコントローラを備え、クロマティック共焦点技術を用いウェハについての高さデータを提供するようそのコントローラが構成されている装置。
- 請求項1に記載の装置であって、更に、上記センサ体と上記白色光を反射するウェハとを互いに対し走査させるよう構成されたアクチュエータを備える装置。
- 請求項3に記載の装置であって、ロー及びカラム内の上記センサが線をなし配列されており、上記ウェハに対する上記センサ体の上記走査がそれらの線のうちいずれかに対し非平行な方向に沿っている装置。
- 請求項4に記載の装置であって、上記ウェハに対する上記センサ体の走査方向が上記線のうち少なくとも1本に対し45°角をなす装置。
- 請求項1に記載の装置であって、更に、上記白色光を反射するウェハを保持するよう構成されたチャックを備える装置。
- 請求項1に記載の装置であって、上記検出器がCMOSイメージセンサ又はCCDイメージセンサでありスペクトル分散素子を有する装置。
- 請求項7に記載の装置であって、上記スペクトル分散素子が格子を有する装置。
- 請求項1に記載の装置であって、上記ピンホールアパーチャが上記光ファイバの一部分である装置。
- 複数個のレンズを介しウェハに白色光を差し向けるステップであり、その白色光を組成する波長それぞれの焦点距離がそれらレンズの屈折率により変わり、その白色光を組成する波長それぞれがそれらレンズから見て別々の距離にて集束するステップと、
上記ウェハによって反射された白色光のうち一部をセンサ体内の複数個のセンサにて受光するステップであり、それらセンサが複数本のロー及びカラムをなしてそのセンサ体内に配置されており、それらロー及びカラムのそれぞれがそれらセンサのうち少なくとも2個を有するステップと、
コントローラを用い、クロマティック共焦点技術を用いて、ウェハについての高さデータを求めるステップと、
を有する方法。 - 請求項10に記載の方法であって、更に、上記ウェハ及び上記センサ体を互いに対し走査させるステップを有する方法。
- 請求項11に記載の方法であって、ロー及びカラム内の上記センサが線に沿っており、上記ウェハに対する上記センサ体の上記走査がそれらの線のうちいずれかに対し非平行な方向に沿っている方法。
- 請求項12に記載の方法であって、上記ウェハに対する上記センサ体の走査方向が上記線のうち少なくとも1本に対し45°角をなす方法。
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US201662384324P | 2016-09-07 | 2016-09-07 | |
US62/384,324 | 2016-09-07 | ||
US15/690,969 | 2017-08-30 | ||
US15/690,969 US10317344B2 (en) | 2016-09-07 | 2017-08-30 | Speed enhancement of chromatic confocal metrology |
PCT/US2017/050326 WO2018048938A1 (en) | 2016-09-07 | 2017-09-06 | Speed enhancement of chromatic confocal metrology |
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JP2019512871A Pending JP2019529895A (ja) | 2016-09-07 | 2017-09-06 | クロマティック共焦点計量の速度向上 |
JP2022022585A Pending JP2022081498A (ja) | 2016-09-07 | 2022-02-17 | 高さ計測装置及び方法 |
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US (1) | US10317344B2 (ja) |
EP (1) | EP3510350A4 (ja) |
JP (2) | JP2019529895A (ja) |
KR (1) | KR102236810B1 (ja) |
CN (1) | CN109690238B (ja) |
WO (1) | WO2018048938A1 (ja) |
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USD923121S1 (en) * | 2019-08-23 | 2021-06-22 | Air Box Co., Ltd. | Exercise mat combined hammock |
US11899375B2 (en) * | 2020-11-20 | 2024-02-13 | Kla Corporation | Massive overlay metrology sampling with multiple measurement columns |
FR3118175A1 (fr) * | 2020-12-18 | 2022-06-24 | Unity Semiconductor | Procede d’inspection d’une surface d’un objet |
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JP2002296018A (ja) * | 2001-03-30 | 2002-10-09 | Sumitomo Heavy Ind Ltd | 3次元形状計測装置 |
US20090225399A1 (en) * | 2008-03-04 | 2009-09-10 | Kla-Tencor Corporation | Multi-spot scanning system and method |
JP2011017552A (ja) * | 2009-07-07 | 2011-01-27 | Oputouea Kk | 多点変位検出装置 |
US20120019821A1 (en) * | 2010-07-23 | 2012-01-26 | National Taipei University Of Technology | Linear chromatic confocal microscopic system |
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CN109690238A (zh) | 2019-04-26 |
US20180067058A1 (en) | 2018-03-08 |
CN109690238B (zh) | 2020-11-06 |
KR102236810B1 (ko) | 2021-04-08 |
EP3510350A4 (en) | 2020-03-18 |
WO2018048938A1 (en) | 2018-03-15 |
KR20190040356A (ko) | 2019-04-17 |
EP3510350A1 (en) | 2019-07-17 |
JP2022081498A (ja) | 2022-05-31 |
US10317344B2 (en) | 2019-06-11 |
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