JP2019516259A5 - - Google Patents
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- Publication number
- JP2019516259A5 JP2019516259A5 JP2018534731A JP2018534731A JP2019516259A5 JP 2019516259 A5 JP2019516259 A5 JP 2019516259A5 JP 2018534731 A JP2018534731 A JP 2018534731A JP 2018534731 A JP2018534731 A JP 2018534731A JP 2019516259 A5 JP2019516259 A5 JP 2019516259A5
- Authority
- JP
- Japan
- Prior art keywords
- level
- cavity opening
- semiconductor substrate
- antenna
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 15
- 239000004020 conductor Substances 0.000 claims 10
- 238000000034 method Methods 0.000 claims 9
- 239000002184 metal Substances 0.000 claims 7
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000010363 phase shift Effects 0.000 claims 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/982,932 US9985335B2 (en) | 2015-12-29 | 2015-12-29 | Methods and apparatus for backside integrated circuit high frequency signal radiation, reception and interconnects |
| US14/982,932 | 2015-12-29 | ||
| PCT/US2016/069137 WO2017117362A2 (en) | 2015-12-29 | 2016-12-29 | Method and apparatus for backside integrated circuit high frequency signal radiation, reception and interconnects |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019516259A JP2019516259A (ja) | 2019-06-13 |
| JP2019516259A5 true JP2019516259A5 (enExample) | 2020-01-30 |
| JP7082318B2 JP7082318B2 (ja) | 2022-06-08 |
Family
ID=59086642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018534731A Active JP7082318B2 (ja) | 2015-12-29 | 2016-12-29 | 裏側集積回路高周波数信号の放射、受信、及び相互接続のための方法及び装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9985335B2 (enExample) |
| EP (1) | EP3398230A4 (enExample) |
| JP (1) | JP7082318B2 (enExample) |
| CN (1) | CN109478710B (enExample) |
| WO (1) | WO2017117362A2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10199336B2 (en) * | 2017-05-24 | 2019-02-05 | Advanced Semiconductor Engineering, Inc. | Antenna package device |
| CN110931938B (zh) * | 2018-09-20 | 2021-04-16 | 宏碁股份有限公司 | 电子装置 |
| US10840197B2 (en) * | 2018-10-30 | 2020-11-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structure and manufacturing method thereof |
| EP3796466B8 (en) * | 2019-09-18 | 2024-04-03 | Beijing BOE Sensor Technology Co., Ltd. | Radio frequency device |
| CN110783685B (zh) * | 2019-10-30 | 2021-08-17 | 深圳捷豹电波科技有限公司 | 毫米波天线及毫米波天线制程设计 |
| CN113130316B (zh) * | 2021-04-08 | 2022-07-01 | 华进半导体封装先导技术研发中心有限公司 | 一种半导体结构及其制备方法 |
| US20240380102A1 (en) * | 2023-05-08 | 2024-11-14 | City University Of Hong Kong | Radiator for providing terahertz electromagnetic radiation |
| FI20236116A1 (en) * | 2023-10-09 | 2025-04-10 | Teknologian Tutkimuskeskus Vtt Oy | On-chip antenna arrangement and manufacturing thereof |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2790033B2 (ja) * | 1993-04-07 | 1998-08-27 | 松下電器産業株式会社 | 半導体装置 |
| JPH10224141A (ja) * | 1997-02-10 | 1998-08-21 | Toshiba Corp | モノリシックアンテナ |
| EP1063723A1 (en) * | 1999-06-22 | 2000-12-27 | Interuniversitair Micro-Elektronica Centrum Vzw | Slot coupled micromachined waveguide antenna |
| TW523920B (en) * | 2000-11-18 | 2003-03-11 | Lenghways Technology Co Ltd | Integrated multi-channel communication passive device manufactured by using micro-electromechanical technique |
| US6752931B2 (en) | 2001-12-21 | 2004-06-22 | Texas Instruments Incorporated | Method for using DRIE with reduced lateral etching |
| EP1398676A1 (fr) * | 2002-09-10 | 2004-03-17 | The Swatch Group Management Services AG | Montre comportant un module électronique pour la mémorisation d'informations logé dans le fond de la boíte |
| JP4080981B2 (ja) * | 2003-09-30 | 2008-04-23 | 三菱電機株式会社 | 変換回路 |
| EP1720213B1 (en) * | 2004-02-27 | 2009-09-02 | Mitsubishi Electric Corporation | Transducer circuit |
| FR2908931B1 (fr) | 2006-11-21 | 2009-02-13 | Centre Nat Rech Scient | Antenne et emetteur/recepteur terahertz integres,et procede pour leur fabrication. |
| WO2008111914A1 (en) * | 2007-03-09 | 2008-09-18 | Nanyang Technological University | An integrated circuit structure and a method of forming the same |
| WO2009111839A1 (en) | 2008-03-14 | 2009-09-17 | National Ict Australia Limited | Integration of microstrip antenna with cmos transceiver |
| US8952857B2 (en) * | 2008-08-29 | 2015-02-10 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Antennas with broadband operating bandwidths |
| JP5556072B2 (ja) * | 2009-01-07 | 2014-07-23 | ソニー株式会社 | 半導体装置、その製造方法、ミリ波誘電体内伝送装置 |
| US8187920B2 (en) * | 2009-02-20 | 2012-05-29 | Texas Instruments Incorporated | Integrated circuit micro-module |
| JP5812462B2 (ja) * | 2011-03-17 | 2015-11-11 | 国立大学法人広島大学 | チップ間通信システム及び半導体装置 |
| US8693468B2 (en) | 2011-09-06 | 2014-04-08 | Texas Instruments Incorporated | Wireless bridge IC |
| US8648454B2 (en) * | 2012-02-14 | 2014-02-11 | International Business Machines Corporation | Wafer-scale package structures with integrated antennas |
| ITTO20120174A1 (it) * | 2012-02-27 | 2013-08-28 | St Microelectronics Srl | Dispositivo elettronico incapsulato comprendente circuiti elettronici integrati dotati di antenne di ricetrasmissione |
| US9196951B2 (en) * | 2012-11-26 | 2015-11-24 | International Business Machines Corporation | Millimeter-wave radio frequency integrated circuit packages with integrated antennas |
| US9478458B2 (en) | 2013-03-08 | 2016-10-25 | Northrop Grumman Systems Corporation | Waveguide and semiconductor packaging |
| JP2016036128A (ja) * | 2014-07-31 | 2016-03-17 | キヤノン株式会社 | 発振素子 |
-
2015
- 2015-12-29 US US14/982,932 patent/US9985335B2/en active Active
-
2016
- 2016-12-29 EP EP16882647.7A patent/EP3398230A4/en not_active Withdrawn
- 2016-12-29 CN CN201680061528.7A patent/CN109478710B/zh active Active
- 2016-12-29 JP JP2018534731A patent/JP7082318B2/ja active Active
- 2016-12-29 WO PCT/US2016/069137 patent/WO2017117362A2/en not_active Ceased
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