JP2019507471A - 統合された保護層ツールを用いたリチウム堆積 - Google Patents
統合された保護層ツールを用いたリチウム堆積 Download PDFInfo
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- JP2019507471A JP2019507471A JP2018539037A JP2018539037A JP2019507471A JP 2019507471 A JP2019507471 A JP 2019507471A JP 2018539037 A JP2018539037 A JP 2018539037A JP 2018539037 A JP2018539037 A JP 2018539037A JP 2019507471 A JP2019507471 A JP 2019507471A
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- film
- lithium metal
- lithium
- negative electrode
- chamber
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Abstract
【選択図】図1A
Description
からなる群から選択される。
Claims (15)
- 負電極であって、
シリコングラファイトアノードと、
前記シリコングラファイトアノード上に形成されたリチウム金属膜と、
前記リチウム金属の薄膜上に形成された保護膜であって、リチウムイオン導電性材料又は間紙膜である、保護膜と
を備える負電極。 - 前記リチウム金属膜と前記保護膜との間に形成された界面膜をさらに備え、前記界面膜は、約0.1ミクロンから約5ミクロンの厚さを有する、請求項1に記載の負電極。
- 前記界面膜は、LiF、Al2O3、LiAlO2、LiAl5O8、ZrO2、Li2ZrO3、Li2O、Li2S、及びこれらの混合物からなる群から選択される、請求項2に記載の負電極。
- 前記界面膜は、ポリオレフィン、ポリフルオロカーボン、ポリアミド、ポリエステル、ポリカーボネート、ポリウレタン、ポリスチレン、ポリカプロラクトン、及びこれらの混合物及びコポリマーからなる群から選択される、請求項2に記載の負電極。
- 前記リチウム金属膜は、約1ミクロンから約20ミクロンの厚みを有する、請求項1に記載の負電極。
- 前記保護膜はリチウムイオン導電性材料であり、前記リチウムイオン導電性材料は、LiPON、ガーネットタイプのLi7La3Zr2O12の結晶相又はアモルファス相、0<x<1であるLi2+2xZn1−xGeO4、0<x<3であるNa1+xZr2SixP3−xO12、水素化ホウ素リチウム(LiBH4)、ドープされた抗ペロブスカイト組成物、及びxがCl、Br又はIであるLiPS5Xからなる群から選択される、請求項1に記載の負電極。
- 前記間紙膜は、ポリエチレン、ポリプロピレン、ポリ(エチレンテレフタレート)、ポリ(ブチレンテレフタレート)、ポリエステル、ポリアミド、ポリアラミド、ポリアクリレート、ポリカーボネート、ポリ(エステルカーボネート)、ポリベンゾイミダゾール、ポリイミド、ポリエーテルイミド、ポリアミドイミド、及びこれらの組合せからなる群から選択される、請求項1に記載の負電極。
- 前記間紙膜は、ポリプロピレンである、請求項7に記載の負電極。
- 請求項1に記載の負電極を組み込んだリチウムイオンバッテリ。
- 負電極を形成する方法であって、
負電極上にリチウム金属膜を形成することと、
前記リチウム金属膜上に界面膜を形成することと、
前記界面膜上に保護膜を形成することと
を含み、前記界面膜は、剥離膜、金属フッ化物膜または金属酸化物膜のいずれかである、方法。 - 前記界面膜は剥離膜であり、前記剥離膜は、ポリオレフィン、ポリフルオロカーボン、ポリアミド、ポリエステル、ポリカーボネート、ポリウレタン、ポリスチレン、ポリカプロラクトン、及びこれらの混合物及びコポリマーからなる群から選択される、請求項10に記載の方法。
- 前記界面膜は、LiF、Al2O3、LiAlO2、LiAl5O8、ZrO2、Li2ZrO3、Li2O、及びこれらの混合物からなる群から選択される、請求項10に記載の方法。
- 前記界面膜と前記保護膜とを前記リチウム金属膜から除去することをさらに含む、請求項10に記載の方法。
- 前記リチウム金属膜は、前記負電極上に積層される、請求項10に記載の方法。
- リチウムでコーティングされた負電極を形成するための統合型処理ツールであって、
連続的な材料シート上にリチウム金属の薄膜を堆積させるためのチャンバと、
前記リチウム金属の薄膜の表面上に保護膜を堆積させるためのチャンバと
を通して、連続的な材料シートを移送するためのリールツーリールシステムを備え、
リチウム金属の薄膜を堆積させるための前記チャンバは、物理的気相堆積(PVD)システム、薄膜転写システム、積層システム、及びスロットダイ堆積システムからなる群から選択され、
リチウム金属膜上に保護膜を堆積させるための前記チャンバは、間紙膜を堆積させるためのチャンバ、及び前記リチウム金属膜上にリチウムイオン導電性ポリマーを堆積させるためのチャンバからなる群から選択される、統合型処理ツール。
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