JP2019507031A - 反転型tij - Google Patents
反転型tij Download PDFInfo
- Publication number
- JP2019507031A JP2019507031A JP2018539289A JP2018539289A JP2019507031A JP 2019507031 A JP2019507031 A JP 2019507031A JP 2018539289 A JP2018539289 A JP 2018539289A JP 2018539289 A JP2018539289 A JP 2018539289A JP 2019507031 A JP2019507031 A JP 2019507031A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- die
- nozzle
- thin film
- film layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000012530 fluid Substances 0.000 claims abstract description 185
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 239000010409 thin film Substances 0.000 claims description 75
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000004806 packaging method and process Methods 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14056—Plural heating elements per ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
Abstract
【選択図】なし
Description
Claims (15)
- 基板を通って延びるノズルの配列を有する該基板と、
前記基板上の薄膜層であって、前記ノズルに関連付けられた流体噴射アクチュエータを有する薄膜層
を備える流体噴射ダイ。 - 前記薄膜層は、前記ノズルに関連付けられた噴射チャンバを備える、請求項1の流体噴射ダイ。
- 前記薄膜層は、前記チャンバに流体を供給するための流体入口の配列を備える、請求項2の流体噴射ダイ。
- 前記基板は、前記噴射チャンバの壁を形成するかまたは該壁を支持し、前記壁にノズル入口開口を有する、請求項3の流体噴射ダイ。
- それぞれのアクチュエータは、前記壁上に配置される、請求項4の流体噴射ダイ。
- それぞれのアクチュエータは、前記ノズル入口開口に隣接して配置される、請求項5の流体噴射ダイ。
- それぞれのアクチュエータは、前記ノズル入口開口の複数の側面の周囲に少なくとも部分的に配置されるか、または、該複数の側面に配置される、請求項6の流体噴射ダイ。
- 2つの平行なノズル列を備える請求項3の流体噴射ダイであって、噴射チャンバと流体供給入口とのそれぞれの組が、それぞれのノズル列に関連付けられており、噴射チャンバと流体供給入口との前記それぞれの組が、前記ダイ内において、互いに流体的に分離されている、流体噴射ダイ。
- 前記噴射チャンバへの前記流体供給入口は、前記噴射チャンバの横方向外側に延びる、請求項3の流体噴射ダイ。
- 前記薄膜層は電気回路を備え、
前記ダイの外部の駆動回路への接続用の、前記電気回路に接続された電気接点が、前記基板の前記薄膜層の側面に設けられる、請求項1の流体噴射ダイ。 - 前記ノズルの深さが前記薄膜層の厚さよりも大きく、該深さと該厚さの和が、前記ダイの全厚とほぼ等しい、請求項1の流体噴射ダイ。
- 前記ダイの厚さが、約300マイクロメートルより小さい、請求項1の流体噴射ダイ。
- 前記流体供給入口に流体を供給するための少なくとも1つの流体供給スロットを備える前記ダイをパッケージ化するためのパッケージを備え、
前記薄膜層は、前記パッケージと前記基板の間と、前記流体供給スロットと前記基板の間との少なくとも一方を延びることからなる、請求項3の流体噴射ダイを備える流体噴射装置。 - 流体を噴射するための一対の平行なノズル列と、
前記ダイに流体を入れて、前記一対のノズル列の第1のノズル列に関連付けられた少なくとも1つの噴射チャンバに流体を供給するための少なくとも1つの第1の流体供給孔と、
前記ダイに流体を入れて、前記一対のノズル列の第2のノズル列に関連付けられた噴射チャンバに流体を供給するための少なくとも1つの第2の供給孔
を備え、
前記第1及び第2の流体供給孔は、同じ少なくとも1つの流体供給スロットに流体的に接続され、前記ノズル列間の横方向距離は、前記第1の流体供給孔と前記第2の流体供給孔の間の横方向距離よりも小さい、請求項13の流体噴射装置。 - 流体噴射ダイを製造する方法であって、
ウェーハの厚みの一部を貫通する孔配列を該ウェーハ内に形成するステップと、
前記ウェーハの上に少なくとも1つの薄膜層を配置するステップと、
前記孔配列に流体的に接続するために、前記少なくとも1つの薄膜層内に流体アクチュエータ並びに流体チャンバ及び/又は流路の配列をパターン形成するステップと、
孔が、前記ウェーハを貫通して噴射ノズルを形成するまで、前記少なくとも1つの薄膜層の反対側にある前記ウェーハの厚みを小さくするステップと、
複数の流体噴射ダイを形成するために前記ウェーハをダイシングするステップ
を含む方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2016/040161 WO2018004573A1 (en) | 2016-06-29 | 2016-06-29 | Inverted tij |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019507031A true JP2019507031A (ja) | 2019-03-14 |
JP6654249B2 JP6654249B2 (ja) | 2020-02-26 |
Family
ID=60786160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018539289A Expired - Fee Related JP6654249B2 (ja) | 2016-06-29 | 2016-06-29 | 反転型tij |
Country Status (5)
Country | Link |
---|---|
US (1) | US10780698B2 (ja) |
EP (1) | EP3386755B1 (ja) |
JP (1) | JP6654249B2 (ja) |
CN (1) | CN108698401B (ja) |
WO (1) | WO2018004573A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02184451A (ja) * | 1988-11-25 | 1990-07-18 | Xerox Corp | 熱インクジェットプリントヘッドを形成する方法 |
JPH04146153A (ja) * | 1990-10-08 | 1992-05-20 | Seiko Epson Corp | インクジェット記録ヘッド |
JPH068442A (ja) * | 1992-06-29 | 1994-01-18 | Canon Inc | インクジェット記録ヘッド、その製造方法、及びインクジェット記録ヘッドを備えた記録装置 |
JP2003145772A (ja) * | 2001-10-31 | 2003-05-21 | Hewlett Packard Co <Hp> | インクジェットプリントヘッド及びその形成方法 |
US20040125171A1 (en) * | 2002-12-27 | 2004-07-01 | Fa-Yuan Hsu | Packaging structure of an inkjet print head chip and method for making the same |
JP2006036865A (ja) * | 2004-07-23 | 2006-02-09 | Konica Minolta Holdings Inc | 基材の接着方法及びインクジェットヘッドの製造方法 |
JP2006187922A (ja) * | 2005-01-05 | 2006-07-20 | Ricoh Co Ltd | 液滴吐出ヘッド、これを備えたインクカートリッジ及びインクジェット記録装置 |
JP2013538446A (ja) * | 2010-07-26 | 2013-10-10 | 富士フイルム株式会社 | 湾曲圧電膜を有するデバイスの形成 |
Family Cites Families (9)
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US6705705B2 (en) | 1998-12-17 | 2004-03-16 | Hewlett-Packard Development Company, L.P. | Substrate for fluid ejection devices |
US6520628B2 (en) | 2001-01-30 | 2003-02-18 | Hewlett-Packard Company | Fluid ejection device with substrate having a fluid firing device and a fluid reservoir on a first surface thereof |
TW504462B (en) | 2001-03-08 | 2002-10-01 | Ind Tech Res Inst | Backside jetting ink-jet printer head |
US6922203B2 (en) | 2001-06-06 | 2005-07-26 | Hewlett-Packard Development Company, L.P. | Barrier/orifice design for improved printhead performance |
JP2008143132A (ja) | 2006-12-13 | 2008-06-26 | Canon Inc | インクジェット記録ヘッド |
US8500242B2 (en) | 2010-12-21 | 2013-08-06 | Funai Electric Co., Ltd. | Micro-fluid ejection head |
BR112013031746B1 (pt) * | 2011-06-29 | 2020-10-20 | Hewlett-Packard Development Company, L.P | pilha de pastilhas piezelétricas de jato de tinta e cabeçote impressor piezelétrico |
WO2014098855A1 (en) | 2012-12-20 | 2014-06-26 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with particle tolerant layer extension |
RU2651259C1 (ru) | 2014-04-24 | 2018-04-18 | Хьюлетт-Паккард Дивелопмент Компани, Л.П. | Наформованное устройство подачи чернил |
-
2016
- 2016-06-29 EP EP16907536.3A patent/EP3386755B1/en active Active
- 2016-06-29 US US16/073,146 patent/US10780698B2/en active Active
- 2016-06-29 WO PCT/US2016/040161 patent/WO2018004573A1/en active Application Filing
- 2016-06-29 JP JP2018539289A patent/JP6654249B2/ja not_active Expired - Fee Related
- 2016-06-29 CN CN201680080659.XA patent/CN108698401B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02184451A (ja) * | 1988-11-25 | 1990-07-18 | Xerox Corp | 熱インクジェットプリントヘッドを形成する方法 |
JPH04146153A (ja) * | 1990-10-08 | 1992-05-20 | Seiko Epson Corp | インクジェット記録ヘッド |
JPH068442A (ja) * | 1992-06-29 | 1994-01-18 | Canon Inc | インクジェット記録ヘッド、その製造方法、及びインクジェット記録ヘッドを備えた記録装置 |
JP2003145772A (ja) * | 2001-10-31 | 2003-05-21 | Hewlett Packard Co <Hp> | インクジェットプリントヘッド及びその形成方法 |
US20040125171A1 (en) * | 2002-12-27 | 2004-07-01 | Fa-Yuan Hsu | Packaging structure of an inkjet print head chip and method for making the same |
JP2006036865A (ja) * | 2004-07-23 | 2006-02-09 | Konica Minolta Holdings Inc | 基材の接着方法及びインクジェットヘッドの製造方法 |
JP2006187922A (ja) * | 2005-01-05 | 2006-07-20 | Ricoh Co Ltd | 液滴吐出ヘッド、これを備えたインクカートリッジ及びインクジェット記録装置 |
JP2013538446A (ja) * | 2010-07-26 | 2013-10-10 | 富士フイルム株式会社 | 湾曲圧電膜を有するデバイスの形成 |
Also Published As
Publication number | Publication date |
---|---|
EP3386755B1 (en) | 2022-10-26 |
CN108698401B (zh) | 2020-08-18 |
JP6654249B2 (ja) | 2020-02-26 |
CN108698401A (zh) | 2018-10-23 |
US10780698B2 (en) | 2020-09-22 |
WO2018004573A1 (en) | 2018-01-04 |
EP3386755A4 (en) | 2019-07-10 |
EP3386755A1 (en) | 2018-10-17 |
US20190111680A1 (en) | 2019-04-18 |
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