JP6654249B2 - 反転型tij - Google Patents
反転型tij Download PDFInfo
- Publication number
- JP6654249B2 JP6654249B2 JP2018539289A JP2018539289A JP6654249B2 JP 6654249 B2 JP6654249 B2 JP 6654249B2 JP 2018539289 A JP2018539289 A JP 2018539289A JP 2018539289 A JP2018539289 A JP 2018539289A JP 6654249 B2 JP6654249 B2 JP 6654249B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- die
- substrate
- ejection
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000012530 fluid Substances 0.000 claims description 180
- 239000000758 substrate Substances 0.000 claims description 78
- 239000010409 thin film Substances 0.000 claims description 73
- 238000000034 method Methods 0.000 claims description 11
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 238000004806 packaging method and process Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14056—Plural heating elements per ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Description
Claims (13)
- 基板を通って延びるノズルの配列を含み、シリコン又はガラスから形成されている該基板と、
前記基板上の少なくとも1つの薄膜層であって、前記ノズルに流体的に接続された噴射チャンバを含む少なくとも1つの薄膜層と、
前記噴射チャンバ内に配置された流体噴射アクチュエータとを含み、
前記基板の厚さが前記少なくとも1つの薄膜層の全厚よりも大きく、該基板の厚さと該少なくとも1つの薄膜層の全厚の和が、前記ダイの全厚を形成する、流体噴射ダイ。 - 前記少なくとも1つの薄膜層は、前記噴射チャンバに流体を供給するための流体入口の配列を含む、請求項1に記載の流体噴射ダイ。
- 前記基板は、前記噴射チャンバの壁を形成するかまたは該壁を支持し、前記壁にノズル入口開口を有する、請求項1又は2に記載の流体噴射ダイ。
- それぞれの流体噴射アクチュエータは、前記壁上に配置される、請求項3に記載の流体噴射ダイ。
- それぞれの流体噴射アクチュエータは、前記ノズル入口開口に隣接して配置される、請求項4に記載の流体噴射ダイ。
- それぞれの流体噴射アクチュエータは、前記ノズル入口開口の複数の側面の周囲に少なくとも部分的に配置されるか、または該複数の側面に配置される、請求項5に記載の流体噴射ダイ。
- 2つの平行なノズル列を含む請求項2及び請求項2に直接的または間接的に従属する請求項3〜6の何れか1項に記載の流体噴射ダイであって、噴射チャンバと流体入口とのそれぞれの組が、それぞれのノズル列に関連付けられており、噴射チャンバと流体入口との前記それぞれの組が、前記ダイ内において、互いに流体的に分離されている、流体噴射ダイ。
- 前記噴射チャンバへの前記流体入口は、前記噴射チャンバの横方向外側に延びる、請求項2及び請求項2に直接的または間接的に従属する請求項3〜7の何れか1項に記載の流体噴射ダイ。
- 前記少なくとも1つの薄膜層は電気回路を含み、
前記ダイの外部の駆動回路への接続用の、前記電気回路に接続された電気接点が、前記基板の上流側に配置されるか、または前記少なくとも1つの薄膜層上に配置される、請求項1〜8の何れか1項に記載の流体噴射ダイ。 - 前記ダイの全厚が、約300マイクロメートルより小さい、請求項1〜9の何れか1項に記載の流体噴射ダイ。
- 前記流体入口に流体を供給するための少なくとも1つの流体供給スロットを含む前記ダイをパッケージ化するためのパッケージを含み、
前記少なくとも1つの薄膜層は、前記パッケージと前記基板の間と、前記少なくとも1つの流体供給スロットと前記基板の間との少なくとも一方を延びる、請求項2及び請求項2に直接的または間接的に従属する請求項3〜10の何れか1項に記載の流体噴射ダイを含む流体噴射装置。 - 前記ダイが、前記パッケージに埋め込まれる又はオーバーモールドされる、請求項11に記載の流体噴射装置。
- 流体を噴射するための一対の平行なノズル列と、
前記ダイに流体を入れて、前記一対のノズル列の第1のノズル列に関連付けられた少なくとも1つの噴射チャンバに流体を供給するための少なくとも1つの第1の流体供給孔と、
前記ダイに流体を入れて、前記一対のノズル列の第2のノズル列に関連付けられた噴射チャンバに流体を供給するための少なくとも1つの第2の流体供給孔とを含み、
前記第1及び第2の流体供給孔は、同じ少なくとも1つの流体供給スロットに流体的に接続され、前記ノズル列間の横方向距離は、前記第1の流体供給孔と前記第2の流体供給孔の間の横方向距離よりも小さい、請求項11又は12に記載の流体噴射装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2016/040161 WO2018004573A1 (en) | 2016-06-29 | 2016-06-29 | Inverted tij |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019507031A JP2019507031A (ja) | 2019-03-14 |
JP6654249B2 true JP6654249B2 (ja) | 2020-02-26 |
Family
ID=60786160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018539289A Expired - Fee Related JP6654249B2 (ja) | 2016-06-29 | 2016-06-29 | 反転型tij |
Country Status (5)
Country | Link |
---|---|
US (1) | US10780698B2 (ja) |
EP (1) | EP3386755B1 (ja) |
JP (1) | JP6654249B2 (ja) |
CN (1) | CN108698401B (ja) |
WO (1) | WO2018004573A1 (ja) |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4878992A (en) * | 1988-11-25 | 1989-11-07 | Xerox Corporation | Method of fabricating thermal ink jet printheads |
JP3000652B2 (ja) * | 1990-10-08 | 2000-01-17 | セイコーエプソン株式会社 | インクジェット記録ヘッド |
JP2997132B2 (ja) * | 1992-06-29 | 2000-01-11 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US6705705B2 (en) | 1998-12-17 | 2004-03-16 | Hewlett-Packard Development Company, L.P. | Substrate for fluid ejection devices |
US6520628B2 (en) | 2001-01-30 | 2003-02-18 | Hewlett-Packard Company | Fluid ejection device with substrate having a fluid firing device and a fluid reservoir on a first surface thereof |
TW504462B (en) * | 2001-03-08 | 2002-10-01 | Ind Tech Res Inst | Backside jetting ink-jet printer head |
US6922203B2 (en) | 2001-06-06 | 2005-07-26 | Hewlett-Packard Development Company, L.P. | Barrier/orifice design for improved printhead performance |
US6746107B2 (en) | 2001-10-31 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | Inkjet printhead having ink feed channels defined by thin-film structure and orifice layer |
TW571412B (en) * | 2002-12-27 | 2004-01-11 | Ind Tech Res Inst | Ink jet head chip package structure and manufacturing method thereof |
JP4569201B2 (ja) | 2004-07-23 | 2010-10-27 | コニカミノルタホールディングス株式会社 | 基材の接着方法及びインクジェットヘッドの製造方法 |
JP2006187922A (ja) * | 2005-01-05 | 2006-07-20 | Ricoh Co Ltd | 液滴吐出ヘッド、これを備えたインクカートリッジ及びインクジェット記録装置 |
JP2008143132A (ja) | 2006-12-13 | 2008-06-26 | Canon Inc | インクジェット記録ヘッド |
KR20130130681A (ko) * | 2010-07-26 | 2013-12-02 | 후지필름 가부시키가이샤 | 만곡된 압전막을 갖는 장치의 형성 |
US8500242B2 (en) | 2010-12-21 | 2013-08-06 | Funai Electric Co., Ltd. | Micro-fluid ejection head |
EP3427960B1 (en) * | 2011-06-29 | 2020-05-13 | Hewlett-Packard Development Company, L.P. | Piezoelectric inkjet die stack |
WO2014098855A1 (en) | 2012-12-20 | 2014-06-26 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with particle tolerant layer extension |
BR112016024535B1 (pt) | 2014-04-24 | 2021-11-03 | Hewlett-Packard Development Company,L.P. | Dispositivo e sistema de fornecimento de tinta sobremoldado e método de fabricação de um dispositivo de fornecimento de tinta |
-
2016
- 2016-06-29 EP EP16907536.3A patent/EP3386755B1/en active Active
- 2016-06-29 CN CN201680080659.XA patent/CN108698401B/zh active Active
- 2016-06-29 JP JP2018539289A patent/JP6654249B2/ja not_active Expired - Fee Related
- 2016-06-29 US US16/073,146 patent/US10780698B2/en active Active
- 2016-06-29 WO PCT/US2016/040161 patent/WO2018004573A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2018004573A1 (en) | 2018-01-04 |
US20190111680A1 (en) | 2019-04-18 |
CN108698401A (zh) | 2018-10-23 |
JP2019507031A (ja) | 2019-03-14 |
EP3386755A4 (en) | 2019-07-10 |
EP3386755A1 (en) | 2018-10-17 |
CN108698401B (zh) | 2020-08-18 |
US10780698B2 (en) | 2020-09-22 |
EP3386755B1 (en) | 2022-10-26 |
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