JP2019220503A5 - - Google Patents
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- Publication number
- JP2019220503A5 JP2019220503A5 JP2018114381A JP2018114381A JP2019220503A5 JP 2019220503 A5 JP2019220503 A5 JP 2019220503A5 JP 2018114381 A JP2018114381 A JP 2018114381A JP 2018114381 A JP2018114381 A JP 2018114381A JP 2019220503 A5 JP2019220503 A5 JP 2019220503A5
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- primer
- tubular insulating
- chuck according
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 239000012790 adhesive layer Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000010410 layer Substances 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018114381A JP7090481B2 (ja) | 2018-06-15 | 2018-06-15 | 静電チャック及びその製造方法 |
| US16/430,569 US11088006B2 (en) | 2018-06-15 | 2019-06-04 | Electrostatic chuck |
| KR1020190066516A KR102744643B1 (ko) | 2018-06-15 | 2019-06-05 | 정전 척 및 그 제조 방법 |
| TW108119861A TWI820147B (zh) | 2018-06-15 | 2019-06-10 | 靜電夾盤及其製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018114381A JP7090481B2 (ja) | 2018-06-15 | 2018-06-15 | 静電チャック及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019220503A JP2019220503A (ja) | 2019-12-26 |
| JP2019220503A5 true JP2019220503A5 (OSRAM) | 2021-04-22 |
| JP7090481B2 JP7090481B2 (ja) | 2022-06-24 |
Family
ID=68840316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018114381A Active JP7090481B2 (ja) | 2018-06-15 | 2018-06-15 | 静電チャック及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11088006B2 (OSRAM) |
| JP (1) | JP7090481B2 (OSRAM) |
| KR (1) | KR102744643B1 (OSRAM) |
| TW (1) | TWI820147B (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102441256B1 (ko) * | 2018-01-29 | 2022-09-07 | 교세라 가부시키가이샤 | 시료 유지구 |
| CN115244678B (zh) * | 2020-03-26 | 2025-11-18 | 巴川集团股份有限公司 | 静电吸盘装置、静电吸盘装置用套筒 |
| KR20220103046A (ko) * | 2021-01-14 | 2022-07-21 | 신꼬오덴기 고교 가부시키가이샤 | 기판 고정 장치 |
| KR20250044914A (ko) * | 2022-09-14 | 2025-04-01 | 교세라 가부시키가이샤 | 흡착 기판 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6071630A (en) * | 1996-03-04 | 2000-06-06 | Shin-Etsu Chemical Co., Ltd. | Electrostatic chuck |
| US6151203A (en) * | 1998-12-14 | 2000-11-21 | Applied Materials, Inc. | Connectors for an electrostatic chuck and combination thereof |
| US20050042881A1 (en) * | 2003-05-12 | 2005-02-24 | Tokyo Electron Limited | Processing apparatus |
| JP5053696B2 (ja) * | 2007-04-26 | 2012-10-17 | 信越化学工業株式会社 | 静電チャック |
| KR101553423B1 (ko) | 2007-12-19 | 2015-09-15 | 램 리써치 코포레이션 | 반도체 진공 프로세싱 장치용 필름 점착제 |
| US9520314B2 (en) * | 2008-12-19 | 2016-12-13 | Applied Materials, Inc. | High temperature electrostatic chuck bonding adhesive |
| JP5936361B2 (ja) * | 2012-01-12 | 2016-06-22 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
| JP6006972B2 (ja) | 2012-04-26 | 2016-10-12 | 新光電気工業株式会社 | 静電チャック |
| JP6162428B2 (ja) | 2013-02-27 | 2017-07-12 | 日本特殊陶業株式会社 | 支持装置 |
| US10923381B2 (en) * | 2016-01-19 | 2021-02-16 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck device |
| JP7259765B2 (ja) * | 2017-12-28 | 2023-04-18 | 住友大阪セメント株式会社 | 静電チャック装置 |
-
2018
- 2018-06-15 JP JP2018114381A patent/JP7090481B2/ja active Active
-
2019
- 2019-06-04 US US16/430,569 patent/US11088006B2/en active Active
- 2019-06-05 KR KR1020190066516A patent/KR102744643B1/ko active Active
- 2019-06-10 TW TW108119861A patent/TWI820147B/zh active
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