JP2019215190A5 - - Google Patents

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Publication number
JP2019215190A5
JP2019215190A5 JP2018111336A JP2018111336A JP2019215190A5 JP 2019215190 A5 JP2019215190 A5 JP 2019215190A5 JP 2018111336 A JP2018111336 A JP 2018111336A JP 2018111336 A JP2018111336 A JP 2018111336A JP 2019215190 A5 JP2019215190 A5 JP 2019215190A5
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JP
Japan
Prior art keywords
electrode
fixed
movable
electrodes
movable electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018111336A
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English (en)
Japanese (ja)
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JP2019215190A (ja
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Publication date
Application filed filed Critical
Priority to JP2018111336A priority Critical patent/JP2019215190A/ja
Priority claimed from JP2018111336A external-priority patent/JP2019215190A/ja
Priority to PCT/JP2019/022550 priority patent/WO2019240007A1/ja
Priority to CN201980030650.1A priority patent/CN112088483B/zh
Publication of JP2019215190A publication Critical patent/JP2019215190A/ja
Publication of JP2019215190A5 publication Critical patent/JP2019215190A5/ja
Priority to US17/082,199 priority patent/US11846651B2/en
Pending legal-status Critical Current

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JP2018111336A 2018-06-11 2018-06-11 静電アクチュエータおよび物理量センサ Pending JP2019215190A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018111336A JP2019215190A (ja) 2018-06-11 2018-06-11 静電アクチュエータおよび物理量センサ
PCT/JP2019/022550 WO2019240007A1 (ja) 2018-06-11 2019-06-06 静電アクチュエータおよび物理量センサ
CN201980030650.1A CN112088483B (zh) 2018-06-11 2019-06-06 静电致动器及物理量传感器
US17/082,199 US11846651B2 (en) 2018-06-11 2020-10-28 Electrostatic actuator and physical quantity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018111336A JP2019215190A (ja) 2018-06-11 2018-06-11 静電アクチュエータおよび物理量センサ

Publications (2)

Publication Number Publication Date
JP2019215190A JP2019215190A (ja) 2019-12-19
JP2019215190A5 true JP2019215190A5 (https=) 2020-07-27

Family

ID=68843366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018111336A Pending JP2019215190A (ja) 2018-06-11 2018-06-11 静電アクチュエータおよび物理量センサ

Country Status (4)

Country Link
US (1) US11846651B2 (https=)
JP (1) JP2019215190A (https=)
CN (1) CN112088483B (https=)
WO (1) WO2019240007A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102520722B1 (ko) * 2018-04-05 2023-04-11 삼성디스플레이 주식회사 압력 센서
JP7667758B2 (ja) 2022-03-03 2025-04-23 株式会社東芝 センサ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960945B1 (en) * 2003-05-15 2005-11-01 Wayne Bonin High-performance drive circuitry for capacitive transducers
JP4161950B2 (ja) * 2004-02-27 2008-10-08 セイコーエプソン株式会社 マイクロメカニカル静電アクチュエータ
JP4728242B2 (ja) * 2004-08-05 2011-07-20 パナソニック株式会社 捩り共振器およびこれを用いたフィルタ
US8283834B2 (en) * 2007-10-25 2012-10-09 Sanyo Electric Co., Ltd. Power generating apparatus having ball bearings
WO2013030907A1 (ja) * 2011-08-26 2013-03-07 トヨタ自動車株式会社 変位量モニタ電極の構造
CN204029730U (zh) * 2011-09-27 2014-12-17 西门子公司 接触器
JP6191151B2 (ja) 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
JP2014011531A (ja) * 2012-06-28 2014-01-20 Seiko Epson Corp 振動デバイス、電子機器
DE102013209804A1 (de) * 2013-05-27 2014-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Elektrostatischer aktuator und verfahren zum herstellen desselben
FI127287B (en) 2013-11-01 2018-03-15 Murata Manufacturing Co Microelectromechanical sensor device with improved quadrature compensation

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