CN112088483B - 静电致动器及物理量传感器 - Google Patents

静电致动器及物理量传感器 Download PDF

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Publication number
CN112088483B
CN112088483B CN201980030650.1A CN201980030650A CN112088483B CN 112088483 B CN112088483 B CN 112088483B CN 201980030650 A CN201980030650 A CN 201980030650A CN 112088483 B CN112088483 B CN 112088483B
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CN
China
Prior art keywords
electrode
fixed
movable electrode
fixed electrode
movable
Prior art date
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Active
Application number
CN201980030650.1A
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English (en)
Chinese (zh)
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CN112088483A (zh
Inventor
原田翔太
伊藤启太郎
城森知也
山田英雄
稻垣优辉
明石照久
畑良幸
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Denso Corp
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Denso Corp
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Publication date
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0013—Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/14—Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
CN201980030650.1A 2018-06-11 2019-06-06 静电致动器及物理量传感器 Active CN112088483B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018111336A JP2019215190A (ja) 2018-06-11 2018-06-11 静電アクチュエータおよび物理量センサ
JP2018-111336 2018-06-11
PCT/JP2019/022550 WO2019240007A1 (ja) 2018-06-11 2019-06-06 静電アクチュエータおよび物理量センサ

Publications (2)

Publication Number Publication Date
CN112088483A CN112088483A (zh) 2020-12-15
CN112088483B true CN112088483B (zh) 2024-04-02

Family

ID=68843366

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980030650.1A Active CN112088483B (zh) 2018-06-11 2019-06-06 静电致动器及物理量传感器

Country Status (4)

Country Link
US (1) US11846651B2 (https=)
JP (1) JP2019215190A (https=)
CN (1) CN112088483B (https=)
WO (1) WO2019240007A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102520722B1 (ko) * 2018-04-05 2023-04-11 삼성디스플레이 주식회사 압력 센서
JP7667758B2 (ja) 2022-03-03 2025-04-23 株式会社東芝 センサ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1661902A (zh) * 2004-02-27 2005-08-31 精工爱普生株式会社 微机械静电致动器
CN1977452A (zh) * 2004-08-05 2007-06-06 松下电器产业株式会社 扭转谐振器和采用其的滤波器
CN101785175A (zh) * 2007-10-25 2010-07-21 三洋电机株式会社 发电装置
CN105392733A (zh) * 2013-05-27 2016-03-09 弗朗霍夫应用科学研究促进协会 静电致动器和用于生产其的方法
EP2749841B1 (en) * 2011-08-26 2016-12-28 Toyota Jidosha Kabushiki Kaisha Displacement monitoring electrode structure
JP2016540972A (ja) * 2013-11-01 2016-12-28 株式会社村田製作所 改善された直交補償

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960945B1 (en) * 2003-05-15 2005-11-01 Wayne Bonin High-performance drive circuitry for capacitive transducers
CN204029730U (zh) * 2011-09-27 2014-12-17 西门子公司 接触器
JP6191151B2 (ja) 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
JP2014011531A (ja) * 2012-06-28 2014-01-20 Seiko Epson Corp 振動デバイス、電子機器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1661902A (zh) * 2004-02-27 2005-08-31 精工爱普生株式会社 微机械静电致动器
CN1977452A (zh) * 2004-08-05 2007-06-06 松下电器产业株式会社 扭转谐振器和采用其的滤波器
CN101785175A (zh) * 2007-10-25 2010-07-21 三洋电机株式会社 发电装置
EP2749841B1 (en) * 2011-08-26 2016-12-28 Toyota Jidosha Kabushiki Kaisha Displacement monitoring electrode structure
CN105392733A (zh) * 2013-05-27 2016-03-09 弗朗霍夫应用科学研究促进协会 静电致动器和用于生产其的方法
JP2016540972A (ja) * 2013-11-01 2016-12-28 株式会社村田製作所 改善された直交補償

Also Published As

Publication number Publication date
US11846651B2 (en) 2023-12-19
US20210041475A1 (en) 2021-02-11
JP2019215190A (ja) 2019-12-19
CN112088483A (zh) 2020-12-15
WO2019240007A1 (ja) 2019-12-19

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