JP2019200748A - 流体制御装置、及び、流量比率制御装置 - Google Patents
流体制御装置、及び、流量比率制御装置 Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/52—Means for additional adjustment of the rate of flow
- F16K1/523—Means for additional adjustment of the rate of flow for limiting the maximum flow rate, using a stop
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/54—Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/025—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side and remaining open after return of the normal pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Fluid Mechanics (AREA)
- Flow Control (AREA)
Abstract
Description
P ・・・圧力センサ
2 ・・・流量センサ
3 ・・・バルブ
5 ・・・バルブ制御部
6 ・・・設定流量生成器
61 ・・・マップ記憶部
62 ・・・設定流量決定部
63 ・・・目標総流量決定部
64 ・・・流量分配部
Claims (12)
- 流体の流れる流路に設けられたバルブと、
前記バルブの上流側に設けられた圧力センサと、
前記圧力センサの下流側に設けられた流量センサと、
前記圧力センサで測定される測定圧力が入力され、圧力−流量マップに基づいて前記測定圧力に応じた設定流量を出力する設定流量生成器と、
前記設定流量生成器から出力される前記設定流量が入力され、当該設定流量と前記流量センサで測定されている測定流量との偏差が小さくなるように前記バルブの開度を制御するバルブ制御部と、を備え、
前記測定圧力が制限圧力以下の値となるように前記設定流量生成器が前記設定流量を制御することを特徴とする流体制御装置。 - 前記測定圧力の値が所定圧力以上前記制限圧力以下の値を取り得るように前記設定流量生成器が前記設定流量を制御する請求項1記載の流体制御装置。
- 前記設定流量と前記測定流量の偏差が許容差内に収束するまでの収束時間が所定時間以下となるように前記設定流量生成器が前記設定流量を制御する請求項1又は2記載の流体制御装置。
- 前記設定流量生成器が、前記測定圧力の値が大きくなるほど前記設定流量の値を大きく設定する請求項1乃至3いずれかに記載の流体制御装置。
- 前記圧力センサで測定される前記測定圧力が、前記バルブの上流側の流路に形成されるガス溜まりの圧力を示すものであり、
前記ガス溜まりに上流側から流入する流入流量と、前記バルブで実現される流出流量との偏差に応じて前記測定圧力が変化するように構成されており、
前記設定流量生成器が、前記流入流量と前記流出流量との偏差により生じる前記測定圧力の変化に応じた前記設定流量を前記バルブ制御部へ出力するように構成されている請求項1乃至4いずれかに記載の流体制御装置。 - 前記設定流量生成器が、
前記測定圧力に応じた前記設定流量が定められた圧力−流量マップを記憶するマップ記憶部と、
前記測定圧力、及び、前記圧力−流量マップに基づいて、前記バルブ制御部へ出力される前記設定流量を決定する設定流量決定部と、を備え、
前記圧力−流量マップにおいて対となる前記測定流量と前記設定流量が、圧力と流量を変数とする圧力−流量平面において前記制限圧力を示す制限圧力関数と、前記流量センサが動作可能な最低動作圧力を示す最低動作圧力関数と、前記バルブの最大コンダクタンスを示す最大コンダクタンス関数と、で囲われる領域内に含まれるように定められている請求項1乃至5いずれかに記載の流体制御装置。 - 前記流量センサが、熱式の流量センサである請求項6記載の流体制御装置。
- 流体が供給される供給ガス流路の末端部から分岐する複数の分岐流路に流れる流体の流量比率を制御する流量比率制御装置であって、
各分岐流路にそれぞれ設けられた、バルブ、流量センサ、及び、入力されている設定流量と前記流量センサの測定流量との偏差が小さくなるようにバルブの開度を制御するバルブ制御部を備えた複数の流体制御装置と、
前記供給ガス流路、又は、各分岐流路において各流体制御装置のバルブよりも上流側に設けられた圧力センサと、
前記圧力センサで測定される測定圧力が入力され、圧力−流量マップに基づいて前記測定圧力に応じた設定流量を出力する設定流量生成器と、を備え、
前記設定流量生成器が、
前記測定圧力及び前記圧力−流量マップに基づいて、各分岐流路に流れる流量の総和の目標値である目標総流量を決定する目標総流量決定部と、
前記目標総流量と、予め定められた各分岐流路に流す流体の目標流量比率とに基づいて、各分岐流路に設けられた流体制御装置に入力する設定流量を決定する流量分配器と、を備え、
前記測定圧力が制限圧力以下の値となるように前記設定流量生成器が前記設定流量を制御することを特徴とする流量比率制御装置。 - 前記設定流量と前記測定流量の偏差が許容差内に収束するまでの収束時間が所定時間以下となるように前記設定流量生成器が前記設定流量を制御する請求項8記載の流量比率制御装置。
- ある1つの分岐流路に設けられた前記流体制御装置と、前記設定流量生成器と、が別体として構成されている請求項8又は9記載の流量比率制御装置。
- ある1つの分岐流路に設けられた前記流体制御装置が、前記設定流量生成器をさらに備えた請求項8又は9記載の流量比率制御装置。
- 前記圧力センサが、少なくとも1つの分岐流路に設けられている、あるいは、各流体制御装置がそれぞれ前記圧力センサを備えている請求項8乃至11いずれかに記載の流量比率制御装置。
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JP2018096639A JP7044629B2 (ja) | 2018-05-18 | 2018-05-18 | 流体制御装置、及び、流量比率制御装置 |
US16/413,312 US10705545B2 (en) | 2018-05-18 | 2019-05-15 | Fluid control device and flow rate ratio control device |
KR1020190057660A KR102615958B1 (ko) | 2018-05-18 | 2019-05-17 | 유체 제어 장치, 및 유량 비율 제어 장치 |
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JP2018096639A JP7044629B2 (ja) | 2018-05-18 | 2018-05-18 | 流体制御装置、及び、流量比率制御装置 |
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JP7044629B2 JP7044629B2 (ja) | 2022-03-30 |
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IL269235A (en) * | 2019-09-09 | 2021-03-25 | Sherlock Leaks & Floods Ltd | Multi-range flowmeter |
EP3848579B1 (de) * | 2020-01-13 | 2023-08-02 | Promix Solutions AG | System und verfahren zur dosierung eines flüssigen oder gasförmigen mediums |
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JP6804874B2 (ja) * | 2016-05-31 | 2020-12-23 | 株式会社堀場エステック | 流量制御装置、流量制御装置に用いられるプログラム、及び、流量制御方法 |
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JP2011090405A (ja) * | 2009-10-20 | 2011-05-06 | Hitachi Metals Ltd | 流量制御装置 |
US20130218352A1 (en) * | 2011-08-24 | 2013-08-22 | Bio-Rad Laboratories, Inc. | Modular automated chromatography system |
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