JP2019191154A - ガス分析装置 - Google Patents
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- 238000005259 measurement Methods 0.000 claims abstract description 150
- 239000000523 sample Substances 0.000 claims abstract description 122
- 238000004458 analytical method Methods 0.000 claims abstract description 109
- 238000003780 insertion Methods 0.000 claims abstract description 8
- 230000037431 insertion Effects 0.000 claims abstract description 8
- 238000004891 communication Methods 0.000 claims description 37
- 239000005388 borosilicate glass Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 8
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 238000004868 gas analysis Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 199
- 230000000452 restraining effect Effects 0.000 description 16
- 230000003287 optical effect Effects 0.000 description 13
- 230000000704 physical effect Effects 0.000 description 10
- 238000000862 absorption spectrum Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 5
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01—MEASURING; TESTING
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G01—MEASURING; TESTING
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
- G01N2021/8514—Probe photometers, i.e. with optical measuring part dipped into fluid sample with immersed mirror
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- G01N21/85—Investigating moving fluids or granular solids
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- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
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Abstract
Description
10:プローブ部材
11:取り付け部
12:開口
13:リブ
14:切欠き
15:反射部
16:第1接続部
17:プローブ窓部
18:基端開口
19:拘束ねじ
20:溝部
30:分析部材
31:発光部
32:受光部
33:表示部
34:演算部
35:第2接続部
36:分析窓部
37:第1連通孔
38:突起部
39:ダルマ穴
50:校正部材
51:第3接続部
52:第4接続部
53:校正反射部
54:校正窓部
55:第1連通孔
56:第2連通孔
57:拘束ねじ
58:溝部
59:突起部
60:ダルマ穴
E:プローブ部材の挿入方向
G:被測定ガス
L1:出射光
L2:反射光
L3:出射光
L4:反射光
P:流路
R1:測定領域
R2、R3:領域
R4:校正領域
R5:校正領域
S:流路壁
T:流路壁の開口
Claims (9)
- 被測定ガスが流動する流路の流路壁に設けられた開口から一部が挿入された状態で前記流路壁に取り付け可能なプローブ部材と、
前記プローブ部材の前記流路への挿入方向と反対側の基端に位置する第1接続部に着脱可能な第2接続部を有する分析部材と、を備え、
前記プローブ部材は、反射部を有し、かつ、前記被測定ガスを導入可能な測定領域を内部に区画し、
前記分析部材は、発光部と、受光部と、を有し、
前記分析部材が前記プローブ部材に装着された状態で、前記発光部は測定光を前記測定領域に向けて照射し、前記反射部は前記測定領域に入射した前記測定光を反射させ、前記受光部は前記反射部で反射した前記測定光を受光し、
前記プローブ部材は、前記測定領域を前記基端側の外部から隔離し、かつ、前記測定光を透過させる、窓部を有する、ガス分析装置。 - 前記分析部材の前記第2接続部に着脱可能な第3接続部と、校正反射部と、を有し、かつ、校正ガスを導入可能な校正領域を内部に区画する、校正部材を更に備え、
前記校正部材が前記分析部材に装着された状態で、前記発光部は前記測定光を前記校正領域に向けて照射し、前記校正反射部は前記校正領域に入射した前記測定光を反射させ、前記受光部は前記校正反射部で反射した前記測定光を受光する、請求項1に記載のガス分析装置。 - 前記校正部材は、前記プローブ部材の前記第1接続部に着脱可能な第4接続部を更に有し、前記プローブ部材及び前記分析部材に同時に装着可能である、請求項2に記載のガス分析装置。
- 前記分析部材は、前記発光部及び前記受光部を前記第2接続部側の外部から隔離し、かつ、前記測定光を透過させる、分析窓部を有する、請求項3に記載のガス分析装置。
- 前記分析窓部は、サファイアガラス又はボロシリケートガラスを含む、請求項4に記載のガス分析装置。
- 前記校正部材が前記分析部材に装着された状態で、前記校正領域は、前記校正反射部から前記分析窓部までの領域に亘って延在する、請求項4に記載のガス分析装置。
- 前記分析部材は、前記校正領域と外部とを連通させる第1連通孔を区画し、
前記校正部材は、前記校正領域と外部とを連通させる第2連通孔を区画する、請求項6に記載のガス分析装置。 - 前記校正部材は、前記校正反射部を前記第3接続部側の外部から隔離し、かつ、前記測定光を透過させる、校正窓部を有し、
前記校正領域は、前記校正反射部から前記校正窓部までの領域に亘って延在する、請求項3に記載のガス分析装置。 - 前記校正部材は、前記校正領域と外部とを連通させる第1連通孔と、前記校正領域の延在方向における前記第1連通孔とは異なる位置で前記校正領域と外部とを連通させる第2連通孔と、を区画する、請求項8に記載のガス分析装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862662231P | 2018-04-25 | 2018-04-25 | |
US62/662,231 | 2018-04-25 | ||
US16/284,906 US10788420B2 (en) | 2018-04-25 | 2019-02-25 | Gas analyzer |
US16/284,906 | 2019-02-25 |
Publications (2)
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JP2019191154A true JP2019191154A (ja) | 2019-10-31 |
JP7192583B2 JP7192583B2 (ja) | 2022-12-20 |
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US (1) | US10788420B2 (ja) |
EP (1) | EP3561488B1 (ja) |
JP (1) | JP7192583B2 (ja) |
CN (1) | CN110398474B (ja) |
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JP2023511168A (ja) * | 2020-01-20 | 2023-03-16 | ケイリックス インコーポレイテッド | 気体と浮遊物質を検出するための光学検出器 |
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DE102020120718A1 (de) | 2020-08-05 | 2022-02-10 | Endress+Hauser Conducta Gmbh+Co. Kg | Optischer Prozesssensor, Messkopf, Messsystem umfassend die beiden und Verfahren zum Kalibrieren und/oder Validieren |
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- 2019-02-25 US US16/284,906 patent/US10788420B2/en active Active
- 2019-03-11 JP JP2019044180A patent/JP7192583B2/ja active Active
- 2019-03-20 EP EP19163925.1A patent/EP3561488B1/en active Active
- 2019-03-28 CN CN201910242314.5A patent/CN110398474B/zh active Active
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US20190331595A1 (en) | 2019-10-31 |
US10788420B2 (en) | 2020-09-29 |
CN110398474A (zh) | 2019-11-01 |
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EP3561488B1 (en) | 2020-08-12 |
JP7192583B2 (ja) | 2022-12-20 |
EP3561488A1 (en) | 2019-10-30 |
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