JP2019110168A - 光半導体素子 - Google Patents
光半導体素子 Download PDFInfo
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- JP2019110168A JP2019110168A JP2017240978A JP2017240978A JP2019110168A JP 2019110168 A JP2019110168 A JP 2019110168A JP 2017240978 A JP2017240978 A JP 2017240978A JP 2017240978 A JP2017240978 A JP 2017240978A JP 2019110168 A JP2019110168 A JP 2019110168A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 161
- 230000003287 optical effect Effects 0.000 title claims abstract description 52
- 239000000203 mixture Substances 0.000 claims abstract description 188
- 239000000758 substrate Substances 0.000 claims abstract description 114
- 229910002704 AlGaN Inorganic materials 0.000 claims abstract 5
- 230000007423 decrease Effects 0.000 claims description 27
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 398
- 239000013078 crystal Substances 0.000 description 24
- 230000004888 barrier function Effects 0.000 description 9
- 239000002019 doping agent Substances 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000005253 cladding Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
- H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
11 AlN基板(成長用基板)
12 AlNバッファ層
13 n型半導体層
13A 第1の組成傾斜層
13B 第2の組成傾斜層
14 活性層
15 p型半導体層
Claims (10)
- AlN基板と、
前記AlN基板上に成長され、前記AlN基板に擬似格子整合し、前記AlN基板から離れるに従ってAl組成が小さくなるAlGaN層からなるn型半導体層と、
前記n型半導体層上に成長された活性層と、
前記活性層上に成長されたp型半導体層と、を有することを特徴とする光半導体素子。 - 前記n型半導体層は、前記AlN基板上に成長され、前記AlN基板から前記活性層に向かって第1の比率で徐々にAl組成が小さくなる第1の組成傾斜層と、前記第1の組成傾斜層上に成長され、前記第1の組成傾斜層以下のAl組成を有し、前記第1の組成傾斜層から前記活性層に向かって前記第1の比率よりも小さな第2の比率で徐々にAl組成が小さくなる第2の組成傾斜層と、を有することを特徴とする請求項1に記載の光半導体素子。
- 前記第1の組成傾斜層は、Alx1Ga1-x1N(0.7≦x1≦1)の組成を有し、
前記Al組成x1は、前記AlN基板から前記活性層に向かって線形的に小さくなるように構成されていることを特徴とする請求項2に記載の光半導体素子。 - 前記第1の組成傾斜層は、前記第2の組成傾斜層よりも小さな層厚を有することを特徴とする請求項3に記載の光半導体素子。
- 前記第1の組成傾斜層は、前記活性層からの放出光又は前記活性層が受光する光の前記第1の組成傾斜層における光学波長以上の層厚を有することを特徴とする請求項2乃至4のいずれか1つに記載の光半導体素子。
- 前記第1の組成傾斜層は、200nm以上の層厚を有することを特徴とする請求項2乃至4のいずれか1つに記載の光半導体素子。
- 前記第1の比率は、0.5〜2/μmの範囲内であり、
前記第2の比率は、0.1〜1/μmの範囲内であることを特徴とする請求項2乃至6のいずれか1つに記載の光半導体素子。 - 前記第1の組成傾斜層は、前記AlN基板側において0.95〜1の範囲内のAl組成を有し、
前記第2の組成傾斜層は、前記第1の組成傾斜層側において前記第1の組成傾斜層と同一のAl組成を有することを特徴とする請求項1乃至7のいずれか1つに記載の光半導体素子。 - AlN基板と、
前記AlN基板上に成長され、前記AlN基板に擬似格子整合し、前記AlN基板から離れるに従ってAl組成が小さくなるAlGaN層からなるn型半導体層と、
前記n型半導体層上に成長された活性層と、
前記活性層上に成長されたp型半導体層と、を有し、
前記n型半導体層は、
前記AlN基板上に成長され、前記AlN基板側において0.95〜1の範囲内のAl組成を有し、前記AlN基板から前記活性層に向かって第1の比率で徐々にAl組成が0.7〜0.8まで小さくなる第1の組成傾斜層と、
前記第1の組成傾斜層上に成長され、前記第1の組成傾斜層から前記活性層に向かって前記第1の比率よりも小さな第2の比率で徐々にAl組成が小さくなる第2の組成傾斜層と、有することを特徴とする光半導体素子。 - AlN基板と、
前記AlN基板上に成長され、前記AlN基板に擬似格子整合し、前記AlN基板から離れるに従ってAl組成が小さくなるAlGaN層からなるn型半導体層と、
前記n型半導体層上に成長された活性層と、
前記活性層上に成長されたp型半導体層と、を有し、
前記n型半導体層は、
前記AlN基板上に成長され、前記AlN基板側において0.95〜1の範囲内のAl組成を有し、前記AlN基板から前記活性層に向かって0.5〜2/μmの範囲内の比率で徐々にAl組成が小さくなる第1の組成傾斜層と、
前記第1の組成傾斜層上に成長され、前記第1の組成傾斜層から前記活性層に向かって0.1〜1/μmの比率で徐々にAl組成が小さくなる第2の組成傾斜層と、有することを特徴とする光半導体素子。
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JP2017240978A JP2019110168A (ja) | 2017-12-15 | 2017-12-15 | 光半導体素子 |
US16/213,287 US11031522B2 (en) | 2017-12-15 | 2018-12-07 | Optical semiconductor element comprising n-type algan graded layer |
US17/245,210 US11600742B2 (en) | 2017-12-15 | 2021-04-30 | Optical semiconductor element comprising n-type AlGaN graded layer |
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JP2017240978A JP2019110168A (ja) | 2017-12-15 | 2017-12-15 | 光半導体素子 |
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WO2021149623A1 (ja) * | 2020-01-20 | 2021-07-29 | Dowaホールディングス株式会社 | 紫外線受光素子 |
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JP2019110168A (ja) * | 2017-12-15 | 2019-07-04 | スタンレー電気株式会社 | 光半導体素子 |
JP6698925B1 (ja) * | 2019-08-06 | 2020-05-27 | 日機装株式会社 | 窒化物半導体発光素子 |
CN111146318A (zh) * | 2020-01-20 | 2020-05-12 | 江苏晶曌半导体有限公司 | 一种基于MoS2的薄层紫外发光二极管及其制作方法 |
CN114497297B (zh) * | 2021-12-21 | 2023-02-24 | 重庆康佳光电技术研究院有限公司 | 红光外延层及其生长方法、红光led芯片及显示面板 |
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JP2012146847A (ja) * | 2011-01-13 | 2012-08-02 | Sharp Corp | 窒化物半導体発光素子および半導体光学装置 |
US20150041755A1 (en) * | 2013-08-09 | 2015-02-12 | Qingdao Jason Electric Co., Ltd. | Light-emitting device with improved light extraction efficiency |
WO2017057149A1 (ja) * | 2015-09-28 | 2017-04-06 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
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JP4063520B2 (ja) | 2000-11-30 | 2008-03-19 | 日本碍子株式会社 | 半導体発光素子 |
JP5730484B2 (ja) | 2007-01-26 | 2015-06-10 | クリスタル アイエス インコーポレイテッド | 厚みのある擬似格子整合型の窒化物エピタキシャル層 |
JP4592742B2 (ja) * | 2007-12-27 | 2010-12-08 | Dowaエレクトロニクス株式会社 | 半導体材料、半導体材料の製造方法及び半導体素子 |
JP5641173B2 (ja) | 2009-02-27 | 2014-12-17 | 独立行政法人理化学研究所 | 光半導体素子及びその製造方法 |
JP6934473B2 (ja) | 2016-06-24 | 2021-09-15 | スタンレー電気株式会社 | Iii族窒化物半導体発光素子 |
US10644199B2 (en) | 2016-09-14 | 2020-05-05 | Stanley Electric Co., Ltd. | Group III nitride stacked body, and semiconductor device having the stacked body |
JP2019110168A (ja) * | 2017-12-15 | 2019-07-04 | スタンレー電気株式会社 | 光半導体素子 |
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Patent Citations (3)
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JP2012146847A (ja) * | 2011-01-13 | 2012-08-02 | Sharp Corp | 窒化物半導体発光素子および半導体光学装置 |
US20150041755A1 (en) * | 2013-08-09 | 2015-02-12 | Qingdao Jason Electric Co., Ltd. | Light-emitting device with improved light extraction efficiency |
WO2017057149A1 (ja) * | 2015-09-28 | 2017-04-06 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
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WO2021149623A1 (ja) * | 2020-01-20 | 2021-07-29 | Dowaホールディングス株式会社 | 紫外線受光素子 |
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US20210249555A1 (en) | 2021-08-12 |
US20190189834A1 (en) | 2019-06-20 |
US11600742B2 (en) | 2023-03-07 |
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