JP2019106424A5 - - Google Patents

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Publication number
JP2019106424A5
JP2019106424A5 JP2017236998A JP2017236998A JP2019106424A5 JP 2019106424 A5 JP2019106424 A5 JP 2019106424A5 JP 2017236998 A JP2017236998 A JP 2017236998A JP 2017236998 A JP2017236998 A JP 2017236998A JP 2019106424 A5 JP2019106424 A5 JP 2019106424A5
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JP
Japan
Prior art keywords
chemical solution
nozzle
cleaning
chemical
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2017236998A
Other languages
English (en)
Japanese (ja)
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JP6978918B2 (ja
JP2019106424A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2017236998A external-priority patent/JP6978918B2/ja
Priority to JP2017236998A priority Critical patent/JP6978918B2/ja
Priority to US16/470,096 priority patent/US11358253B2/en
Priority to KR1020197016980A priority patent/KR102433049B1/ko
Priority to PCT/JP2017/044843 priority patent/WO2018110631A1/ja
Priority to CN202310554901.4A priority patent/CN116469811A/zh
Priority to CN201780076793.7A priority patent/CN110073471B/zh
Priority to KR1020227002733A priority patent/KR102452928B1/ko
Priority to SG10202013099RA priority patent/SG10202013099RA/en
Priority to TW106144054A priority patent/TWI753066B/zh
Publication of JP2019106424A publication Critical patent/JP2019106424A/ja
Publication of JP2019106424A5 publication Critical patent/JP2019106424A5/ja
Publication of JP6978918B2 publication Critical patent/JP6978918B2/ja
Application granted granted Critical
Priority to US17/740,190 priority patent/US12042901B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2017236998A 2016-12-16 2017-12-11 洗浄薬液供給装置、洗浄ユニット、及びプログラムを格納した記憶媒体 Active JP6978918B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2017236998A JP6978918B2 (ja) 2017-12-11 2017-12-11 洗浄薬液供給装置、洗浄ユニット、及びプログラムを格納した記憶媒体
KR1020227002733A KR102452928B1 (ko) 2016-12-16 2017-12-14 세정 약액 공급 장치 및 세정 유닛
KR1020197016980A KR102433049B1 (ko) 2016-12-16 2017-12-14 세정 유닛 및 프로그램을 저장한 기억 매체
PCT/JP2017/044843 WO2018110631A1 (ja) 2016-12-16 2017-12-14 洗浄薬液供給装置、洗浄ユニット、及びプログラムを格納した記憶媒体
CN202310554901.4A CN116469811A (zh) 2016-12-16 2017-12-14 清洗药液供给装置、清洗单元及储存有程序的存储媒介
CN201780076793.7A CN110073471B (zh) 2016-12-16 2017-12-14 清洗单元
US16/470,096 US11358253B2 (en) 2016-12-16 2017-12-14 Cleaning liquid supply device, cleaning unit, and storage medium storing program
SG10202013099RA SG10202013099RA (en) 2016-12-16 2017-12-14 Cleaning liquid supply device, cleaning unit, and storage medium storing program
TW106144054A TWI753066B (zh) 2016-12-16 2017-12-15 洗淨藥液供給裝置、洗淨單元、及儲存有程式之記憶媒介
US17/740,190 US12042901B2 (en) 2016-12-16 2022-05-09 Cleaning liquid supply device, cleaning unit, and storage medium storing program

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017236998A JP6978918B2 (ja) 2017-12-11 2017-12-11 洗浄薬液供給装置、洗浄ユニット、及びプログラムを格納した記憶媒体

Publications (3)

Publication Number Publication Date
JP2019106424A JP2019106424A (ja) 2019-06-27
JP2019106424A5 true JP2019106424A5 (zh) 2020-06-18
JP6978918B2 JP6978918B2 (ja) 2021-12-08

Family

ID=67061575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017236998A Active JP6978918B2 (ja) 2016-12-16 2017-12-11 洗浄薬液供給装置、洗浄ユニット、及びプログラムを格納した記憶媒体

Country Status (1)

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JP (1) JP6978918B2 (zh)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4984348B2 (ja) * 2001-03-15 2012-07-25 パナソニック株式会社 流量計測装置
JP6378555B2 (ja) * 2014-06-26 2018-08-22 株式会社荏原製作所 洗浄ユニット

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