JP2019102618A5 - - Google Patents
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- Publication number
- JP2019102618A5 JP2019102618A5 JP2017230987A JP2017230987A JP2019102618A5 JP 2019102618 A5 JP2019102618 A5 JP 2019102618A5 JP 2017230987 A JP2017230987 A JP 2017230987A JP 2017230987 A JP2017230987 A JP 2017230987A JP 2019102618 A5 JP2019102618 A5 JP 2019102618A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor region
- conductive type
- semiconductor
- depth
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims 109
- 239000000758 substrate Substances 0.000 claims 17
- 239000012535 impurity Substances 0.000 claims 16
- 238000000926 separation method Methods 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017230987A JP7114244B2 (ja) | 2017-11-30 | 2017-11-30 | 光検出装置、光検出システム、及び移動体 |
| US16/203,251 US10971644B2 (en) | 2017-11-30 | 2018-11-28 | Photodetection device, photodetection system, and moving body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017230987A JP7114244B2 (ja) | 2017-11-30 | 2017-11-30 | 光検出装置、光検出システム、及び移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019102618A JP2019102618A (ja) | 2019-06-24 |
| JP2019102618A5 true JP2019102618A5 (enExample) | 2021-01-14 |
| JP7114244B2 JP7114244B2 (ja) | 2022-08-08 |
Family
ID=66977133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017230987A Active JP7114244B2 (ja) | 2017-11-30 | 2017-11-30 | 光検出装置、光検出システム、及び移動体 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US10971644B2 (enExample) |
| JP (1) | JP7114244B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7129199B2 (ja) * | 2018-04-11 | 2022-09-01 | キヤノン株式会社 | 光検出装置、光検出システム及び移動体 |
| JP7182978B2 (ja) * | 2018-09-28 | 2022-12-05 | キヤノン株式会社 | 光検出装置、光検出システム |
| TWI890397B (zh) * | 2019-02-21 | 2025-07-11 | 日商索尼半導體解決方案公司 | 崩潰光二極體感測器及測距裝置 |
| JP7422451B2 (ja) * | 2019-07-19 | 2024-01-26 | キヤノン株式会社 | 光電変換装置、光電変換システム、および移動体 |
| JP7638664B2 (ja) * | 2020-01-31 | 2025-03-04 | キヤノン株式会社 | 光電変換装置、光電変換システム、および移動体 |
| US11316063B2 (en) * | 2020-03-13 | 2022-04-26 | Globalfoundries Singapore Pte. Ltd. | Diode devices and methods of forming a diode device |
| JP7653793B2 (ja) * | 2021-01-22 | 2025-03-31 | キヤノン株式会社 | 光電変換装置、光電変換システムおよび移動体 |
| JP2023099395A (ja) | 2022-01-01 | 2023-07-13 | キヤノン株式会社 | 光電変換装置、光電変換システム、および機器 |
| US11967664B2 (en) * | 2022-04-20 | 2024-04-23 | Globalfoundries Singapore Pte. Ltd. | Photodiodes with serpentine shaped electrical junction |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004022948B4 (de) | 2004-05-10 | 2006-06-01 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Avalanche-Strahlungsdetektor |
| ITTO20080046A1 (it) | 2008-01-18 | 2009-07-19 | St Microelectronics Srl | Schiera di fotodiodi operanti in modalita' geiger reciprocamente isolati e relativo procedimento di fabbricazione |
| IT1393781B1 (it) * | 2009-04-23 | 2012-05-08 | St Microelectronics Rousset | Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione |
| US8779543B2 (en) | 2011-09-19 | 2014-07-15 | Technion Research And Development Foundation Ltd. | Device having an avalanche photo diode and a method for sensing photons |
| JP6351097B2 (ja) | 2014-06-20 | 2018-07-04 | 国立大学法人静岡大学 | 電磁波検出素子及び固体撮像装置 |
| JP2017112169A (ja) | 2015-12-15 | 2017-06-22 | ソニー株式会社 | イメージセンサ、撮像システム及びイメージセンサの製造方法 |
| US10014340B2 (en) | 2015-12-28 | 2018-07-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stacked SPAD image sensor |
| KR102547651B1 (ko) * | 2016-09-20 | 2023-06-26 | 이노비즈 테크놀로지스 엘티디 | Lidar 시스템 및 방법 |
| EP3309847B1 (en) | 2016-10-13 | 2024-06-05 | Canon Kabushiki Kaisha | Photo-detection apparatus and photo-detection system |
| US10312275B2 (en) * | 2017-04-25 | 2019-06-04 | Semiconductor Components Industries, Llc | Single-photon avalanche diode image sensor with photon counting and time-of-flight detection capabilities |
-
2017
- 2017-11-30 JP JP2017230987A patent/JP7114244B2/ja active Active
-
2018
- 2018-11-28 US US16/203,251 patent/US10971644B2/en active Active
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