JP2019091858A - Method for manufacturing print wiring board, print wiring board and, photosensitive resin composition used in the manufacturing method - Google Patents

Method for manufacturing print wiring board, print wiring board and, photosensitive resin composition used in the manufacturing method Download PDF

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JP2019091858A
JP2019091858A JP2017221167A JP2017221167A JP2019091858A JP 2019091858 A JP2019091858 A JP 2019091858A JP 2017221167 A JP2017221167 A JP 2017221167A JP 2017221167 A JP2017221167 A JP 2017221167A JP 2019091858 A JP2019091858 A JP 2019091858A
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wiring board
plating
resin composition
photosensitive resin
manufacturing
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JP6979336B2 (en
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伸行 柳田
Nobuyuki Yanagida
伸行 柳田
完 二田
Kan Nita
完 二田
響 市川
Hibiki Ichikawa
響 市川
賢一 白川
Kenichi Shirakawa
賢一 白川
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Taiyo Holdings Co Ltd
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Taiyo Ink Mfg Co Ltd
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Abstract

To provide a method for manufacturing a print wiring board, which enables the formation of a mountable copper surface by a simpler step and which does not include the step of applying a plating resist.SOLUTION: A method for manufacturing a print wiring board comprises the steps of: forming a coating film 3 of a photosensitive resin composition on a wiring board 1 with a conductor circuit 2; providing, on the coating film 3 of the photosensitive resin composition, an unreacted portion 33, an imperfectly reacted portion 32 and a perfectly reacted portion 31; forming, by developing, a first pad part 51 and an opening for a second pad part 52, having a developing residual film 32A; performing a plating treatment on the first pad part 51; and removing the developing residual film 32A to form the second pad part 52 after the plating treatment.SELECTED DRAWING: Figure 1

Description

本発明は、プリント配線板の製造方法、プリント配線板およびその製造方法に用いる感光性樹脂組成物に関する。   The present invention relates to a method of manufacturing a printed wiring board, a printed wiring board, and a photosensitive resin composition used for the method of manufacturing the same.

近年、モバイル機器などに代表される携帯することに便利な情報通信端末は、その使用用途から軽量でコンパクトな商品が好まれている。それに伴い、その情報通信端末の内部に使用されている半導体電子部品のパッケージング方式も、より小型で高密度なCSP(チップサイズパッケージ)が多く使用されるようになっており、加えて、当該CSPを実装する際のプリント配線板への技術的な要求も一段と高くなっている。   BACKGROUND ART In recent years, information communication terminals convenient for carrying, represented by mobile devices, etc., are favored from lightweight and compact products due to their use. Along with that, the packaging method of the semiconductor electronic component used inside the information communication terminal is also that more compact and high density CSP (chip size package) is used, and in addition, The technical requirements for printed wiring boards when mounting CSPs are also becoming higher.

プリント配線板の表面の導体部へニッケル/金めっき処理することは、酸化防止やキー接点箇所においては必要であり、加えて、携帯電話などに代表する高密度なプリント配線板においては、リード配線を必要としない無電解ニッケル/金めっき処理が有効である。しかしながら、CSPのような高密度な電子部品で、特にはんだ接続により導通が形成される箇所においては、ニッケル/金めっき処理をしないこと、すなわち部分的に必要とする箇所のみに、ニッケル/金めっき処理を行なうことが望ましい。   Conducting nickel / gold plating on the conductor on the surface of the printed wiring board is necessary for oxidation prevention and key contact points, and in addition, for high density printed wiring boards represented by mobile phones etc., lead wiring An electroless nickel / gold plating process that does not require However, in high density electronic components such as CSP, especially where there is continuity due to solder connection, nickel / gold plating should not be performed, that is, nickel / gold plating only on partially required places. It is desirable to carry out the treatment.

例えば、特許文献1には、所望の形状に回路配線を形成し、ソルダーレジストを被覆したプリント配線板の表層部に、熱硬化型又は紫外線硬化型のめっきレジストを部分的に塗布する工程と、当該めっきレジストを加熱又は紫外線照射により硬化せしめる工程と、当該めっきレジストが被覆されていないプリント配線板の表層部の導体表面にニッケル/金めっきを処理する工程と、前記めっきレジストを剥離する工程とを具備するプリント配線板の表面処理方法が、品質の良い部分的ニッケル/金めっき状態を、短い工程かつ製造時間で、しかも低コストで形成することができるとの効果とともに開示されている。   For example, in Patent Document 1, a circuit wiring is formed in a desired shape, and a thermosetting or ultraviolet curing plating resist is partially applied to a surface layer portion of a printed wiring board coated with a solder resist; A step of curing the plating resist by heating or ultraviolet irradiation, a step of treating nickel / gold plating on a conductor surface of a surface layer portion of the printed wiring board not coated with the plating resist, a step of peeling the plating resist A method of surface treatment of a printed wiring board comprising the above is disclosed together with the effect that a good quality partial nickel / gold plating state can be formed in a short process and manufacturing time and at low cost.

特開2007−12735号公報Japanese Patent Application Publication No. 2007-12735

しかし、特許文献1に記載のプリント配線板の製造方法では、めっきレジストを部分的に塗布する工程が含まれるため、工程が複雑であった。   However, in the method of manufacturing a printed wiring board described in Patent Document 1, the process is complicated because the process of partially applying the plating resist is included.

そこで本発明の目的は、めっきレジストを塗布する工程を含まない、より簡単な工程により、めっき処理しない実装可能なパッド部と、めっき処理したパッド部とをそれぞれ形成することができるプリント配線板の製造方法、およびプリント配線板その製造方法に用いる感光性樹脂組成物を提供することにある。   Therefore, an object of the present invention is a printed wiring board capable of forming a mountable pad portion not subjected to a plating process and a pad portion subjected to a plating process by a simpler process that does not include the step of applying a plating resist. It is an object of the present invention to provide a photosensitive resin composition used in a method of manufacturing and a method of manufacturing a printed wiring board.

本発明者等は鋭意検討した結果、配線基板上に感光性樹脂組成物の塗膜を形成し、その塗膜に、未反応部、不完全反応部、完全反応部を設け、現像により、第1パッド部および第2パッド部用開口を形成したレジスト膜を設け、めっき処理後、第2パッド部用開口の現像残膜を除去することで、めっき処理した第1パッド部と、めっき処理していない第2パッド部と、をそれぞれ有するプリント配線板を製造することができることを見出し、本発明を完成するに至った。   As a result of intensive investigations by the present inventors, the present inventors formed a coating of a photosensitive resin composition on a wiring substrate, provided an unreacted part, an incompletely reacted part and a completely reacted part in the coated film, A resist film is formed in which the first pad portion and the second pad portion opening are formed, and after plating, the development residual film in the second pad portion opening is removed, and the first pad portion that has been plated is plated It has been found that it is possible to manufacture printed wiring boards each having a second pad portion which is not formed, and the present invention has been completed.

即ち、本発明のプリント配線板の製造方法は、導体回路を有する配線基板上に感光性樹脂組成物の塗膜を形成する工程と、前記感光性樹脂組成物の塗膜に、未反応部、不完全反応部および完全反応部を設ける工程と、現像により、第1パッド部を形成するとともに、現像残膜を有する第2パッド部用開口を形成する工程と、前記第1パッド部にめっき処理を行う工程と、前記めっき処理後、前記現像残膜を除去して、前記第2パッド部を形成する工程と、を含むことを特徴とするものである。   That is, the method for producing a printed wiring board according to the present invention comprises the steps of forming a coating of a photosensitive resin composition on a wiring substrate having a conductor circuit, an unreacted portion on the coating of the photosensitive resin composition, A step of providing an incomplete reaction portion and a complete reaction portion, a step of forming a first pad portion by development, and a step of forming an opening for a second pad portion having a development residual film, and plating the first pad portion And a step of forming the second pad portion by removing the development residual film after the plating process.

本発明のプリント配線板の製造方法は、前記現像による残膜率が1%以上50%未満であることが好ましい。   It is preferable that the manufacturing method of the printed wiring board of this invention is 1 to 50% of the residual film ratio by said development.

本発明のプリント配線板は、前記製造方法により得られるものである。   The printed wiring board of the present invention is obtained by the above-mentioned manufacturing method.

本発明の感光性樹脂組成物は、前記プリント配線板の製造方法に用いられるものである。   The photosensitive resin composition of this invention is used for the manufacturing method of the said printed wiring board.

本発明によれば、めっきレジストを塗布する工程を含まない、より簡単な工程により、部分的に必要とするパッド部のみに、ニッケル/金めっき等のめっき処理を行なうことができる。即ち、本発明により、めっき処理したパッド部と、めっき処理していないパッド部とをそれぞれ形成することができるプリント配線板の製造方法、およびその製造方法に用いる感光性樹脂組成物を提供することができる。   According to the present invention, it is possible to perform the plating process such as the nickel / gold plating only on the partially required pad portion by the simpler process which does not include the process of applying the plating resist. That is, according to the present invention, a method of manufacturing a printed wiring board capable of forming a plated pad portion and a non-plated pad portion can be provided, and a photosensitive resin composition used for the method. Can.

本発明の工程の説明図である。It is explanatory drawing of the process of this invention.

本発明のプリント配線板の製造方法は、導体回路を有する配線基板上に感光性樹脂組成物の塗膜を形成する工程と、前記感光性樹脂組成物の塗膜に、未反応部、不完全反応部および完全反応部を設ける工程と、現像により、第1パッド部を形成するとともに、現像残膜を有する第2パッド部用開口を形成する工程と、前記第1パッド部にめっき処理を行う工程と、前記めっき処理後、前記現像残膜を除去して、前記第2パッド部を形成する工程とを含むことを特徴とするものである。
従来は、ソルダーレジストを被覆したプリント配線板の表層部に、熱硬化型又は紫外線硬化型のめっきレジストを部分的に塗布していたが、本発明では、感光性樹脂組成物の塗膜に、未反応部、不完全反応部および完全反応部を設け、現像後不完全反応部に形成された現像残膜がめっきレジストの働きをし、めっき処理後は不完全反応部の現像残膜を除去してめっき処理されていない第2パッド部を形成する。このため、めっきレジストを使用することなく、部分めっき処理されたプリント配線板を簡単な工程で得ることができる。
なお、本発明のプリント配線板の製造方法において、未反応部、不完全反応部、完全反応部は、それぞれ未露光部、半露光部、露光部とも言い、第1パッド部へのめっき処理は、下地めっき処理とも言い、第1パッド部は、めっき形成用パッド部とも言う。
In the method for producing a printed wiring board according to the present invention, a step of forming a coating of a photosensitive resin composition on a wiring substrate having a conductor circuit, and a non-reacted portion or incomplete on the coating of the photosensitive resin composition. A step of providing a reaction portion and a complete reaction portion, a step of forming a first pad portion by development and a step of forming an opening for a second pad portion having a development residual film, and plating the first pad portion And a step of forming the second pad portion by removing the development residual film after the plating process.
Conventionally, a thermosetting or ultraviolet curing plating resist has been partially applied to the surface layer portion of a printed wiring board coated with a solder resist, but in the present invention, a coating film of a photosensitive resin composition is used. Unreacted, incompletely reacted, and completely reacted areas are provided, and the developed residual film formed on the incompletely reacted area after development acts as a plating resist, and after plating, the residual film from the incompletely reacted area is removed Then, a second pad portion not plated is formed. Therefore, the partially plated printed wiring board can be obtained by a simple process without using a plating resist.
In the method for producing a printed wiring board according to the present invention, the unreacted portion, the incompletely reacted portion, and the completely reacted portion are also referred to as an unexposed portion, a semi-exposed portion, and an exposed portion, respectively. The first pad portion is also referred to as a plating formation pad portion.

本発明の感光性樹脂組成物は、ネガ型でもポジ型でもよいが、ネガ型であることが好ましい。ネガ型であると、現像残膜を容易に形成することができる。
感光性樹脂組成物がネガ型、ポジ型いずれの場合でも、本発明の製造方法においては、配線基板上に感光性樹脂組成物を塗布したうえで、例えば、マスクのグレースケールの濃淡により、活性エネルギー線の露光量を調整してコントラストを形成して、未反応部、不完全反応部、完全反応部を設ける。
ここで、本発明の製造方法に用いられる感光性樹脂組成物がネガ型の場合、現像により除去される未反応部と、現像により現像残膜として残り、めっきレジスト代替として機能する不完全反応部と、現像残膜よりも厚膜として残り、めっきレジストとして機能し得る完全反応部とを設ける。
一方、本発明の製造方法に用いられる感光性樹脂組成物がポジ型の場合、現像により除去される完全反応部と、現像により現像残膜として残り、めっきレジスト代替として機能する不完全反応部と、現像残膜よりも厚膜として残り、めっきレジストとして機能する未反応部とを設ける。
その現像後、第1パッド部に少なくともめっきを含む下地処理を行ない、めっき処理後、不完全反応部の現像残膜を除去し、実装可能な表面を有する第2パッド部を形成する。
The photosensitive resin composition of the present invention may be negative or positive, but is preferably negative. If it is a negative type, a development residual film can be easily formed.
Whether the photosensitive resin composition is negative or positive, in the production method of the present invention, after the photosensitive resin composition is applied on the wiring substrate, for example, it is activated by the shade of gray scale of the mask. The exposure amount of the energy ray is adjusted to form a contrast to provide an unreacted portion, an incompletely reacted portion, and a completely reacted portion.
Here, when the photosensitive resin composition used in the production method of the present invention is a negative type, an unreacted portion removed by development and an incompletely reacted portion remaining as a development residual film by development and functioning as a plating resist substitute And a completely reacted portion which remains as a thicker film than the development residual film and can function as a plating resist.
On the other hand, when the photosensitive resin composition used in the production method of the present invention is a positive type, a completely reacted portion removed by development and an incompletely reacted portion remaining as a development residual film by development and functioning as a plating resist substitute And an unreacted portion which remains as a thick film than the development residual film and functions as a plating resist.
After the development, the first pad portion is subjected to a surface treatment including at least plating, and after the plating treatment, the development residual film in the incomplete reaction portion is removed to form a second pad portion having a mountable surface.

すなわち、本発明は、組成物の塗膜の開口中に形成した現像残膜をめっきレジストの代替として用いる点で、特許文献1に記載の従来技術と異なる。このため、めっきレジストを塗布する工程が不要となり、工程が簡単になる。工程が簡単になることで、製造時間の短縮化、製造コストの低減化が可能となる。   That is, the present invention differs from the prior art described in Patent Document 1 in that the development residual film formed in the opening of the coating film of the composition is used as a substitute for the plating resist. For this reason, the process of apply | coating a plating resist becomes unnecessary and a process becomes simple. By simplifying the process, it is possible to shorten the manufacturing time and reduce the manufacturing cost.

本発明の利点は、工程が簡単になることにとどまらない。従来のめっきレジストでは、無電解めっき液に侵されて無電解めっき液中に溶出して無電解めっき液を分解したり、外部接続パッドの表面にめっき金属層を良好に被着できなくしたりする問題があったが、本発明では、そのようなめっきレジストを形成しないので、そのような問題が生じないようにすることができる。   The advantage of the present invention goes beyond the simplification of the process. In the conventional plating resist, it is attacked by the electroless plating solution and eluted in the electroless plating solution to decompose the electroless plating solution or prevent the plating metal layer from being favorably deposited on the surface of the external connection pad. Although there was a problem, in the present invention, such a plating resist is not formed, so that such a problem can be prevented.

以下に、本発明によるプリント配線板の製造方法を、図1を参照しながら説明する。本発明によるプリント配線板の製造方法は、(1)感光性樹脂組成物の塗膜形成工程、(2)乾燥工程、(3)不完全反応部形成工程、(4)現像工程、(5)熱硬化、光硬化工程、(6)めっき処理工程、(7)第2パッド部形成工程を含むことが好ましいが、少なくとも(1)塗膜形成工程と、(3)不完全反応部形成工程と、(4)現像工程と、(6)めっき処理工程と、(7)第2パッド部形成工程と、を含むものである。   Below, the manufacturing method of the printed wiring board by this invention is demonstrated, referring FIG. The method for producing a printed wiring board according to the present invention comprises (1) coating film forming step of photosensitive resin composition, (2) drying step, (3) incomplete reaction portion forming step, (4) developing step, (5) Although it is preferable to include a thermosetting process, a photocuring process, (6) a plating process, and (7) a second pad forming process, at least (1) a coating forming process, and (3) an incomplete reaction forming process, And (4) a development step, (6) a plating treatment step, and (7) a second pad portion formation step.

[(1)感光性樹脂組成物の塗膜形成工程]
本発明では、めっきレジストとして機能し得る感光性樹脂組成物を使用する。感光性樹脂組成物は、アルカリ水溶液に可溶な感光性樹脂組成物でも、有機溶剤に可溶な感光性樹脂組成物でもよいが、アルカリ水溶液に可溶な感光性樹脂組成物であることが好ましい。本発明の感光性樹脂組成物がネガ型である場合、アルカリ可溶性樹脂および光重合開始剤を含むことが好ましく、例えば、太陽インキ製造株式会社製現像型ソルダーレジストPSR−4000シリーズ製品を好適に用いることができる。一方、本発明の感光性樹脂組成物がポジ型である場合、アルカリ可溶性樹脂およびジアゾナフトキノン等の光酸発生剤を含む組成物を用いることができる。
[(1) Coating film formation process of photosensitive resin composition]
In the present invention, a photosensitive resin composition that can function as a plating resist is used. The photosensitive resin composition may be a photosensitive resin composition soluble in an aqueous alkaline solution or a photosensitive resin composition soluble in an organic solvent, but it is a photosensitive resin composition soluble in an aqueous alkaline solution preferable. When the photosensitive resin composition of the present invention is a negative type, it preferably contains an alkali-soluble resin and a photopolymerization initiator. For example, a development-type solder resist PSR-4000 series product manufactured by Solar Ink Mfg. Co., Ltd. is suitably used. be able to. On the other hand, when the photosensitive resin composition of the present invention is a positive type, a composition containing an alkali-soluble resin and a photoacid generator such as diazonaphthoquinone can be used.

以下、本発明のネガ型の感光性樹脂組成物を使用したプリント配線板の製造方法について、図1(A)〜(E)を参照しつつ説明する。
まず、図1(A)に示すように、導体回路2を有する配線基板1上に、感光性樹脂組成物を塗布して塗膜3を形成する。感光性樹脂組成物の塗布方法は、公知のインキ塗布方法、例えばスクリーン印刷法、スプレーコート法、ロールコート法、浸漬法、スピンコート法およびカーテンコート法がすべて使用できる。導体回路の材料としては、銅、銀、金等の導電性の材料であればよい。
Hereinafter, the manufacturing method of the printed wiring board using the negative photosensitive resin composition of this invention is demonstrated, referring FIG.1 (A)-(E).
First, as shown in FIG. 1A, a photosensitive resin composition is applied onto a wiring substrate 1 having a conductor circuit 2 to form a coating film 3. As the coating method of the photosensitive resin composition, all known ink coating methods such as screen printing method, spray coating method, roll coating method, immersion method, spin coating method and curtain coating method can be used. The material of the conductor circuit may be any conductive material such as copper, silver, gold or the like.

塗膜3の膜厚は、5μm以上50μm以下であることが好ましく、10μm以上40μm以下であることがより好ましい。5μm以上50μm以下であることにより、第2パッド部の形成工程により除去しやすい現像残膜32Aを不完全反応部32に容易に形成することができる。
感光性樹脂組成物の塗膜3は、少なくともめっきレジストとして機能し得るものであればよいが、ソルダーレジストとしても機能し得るものであることが好ましい。
The film thickness of the coating film 3 is preferably 5 μm or more and 50 μm or less, and more preferably 10 μm or more and 40 μm or less. When the thickness is 5 μm or more and 50 μm or less, the development residual film 32A that can be easily removed in the step of forming the second pad portion can be easily formed in the incomplete reaction portion 32.
The coating 3 of the photosensitive resin composition may be at least one that can function as a plating resist, but is preferably one that can also function as a solder resist.

[(2)乾燥工程]
続いて、塗膜3の乾燥を必要に応じて行う。感光性樹脂組成物中の有機溶剤を揮発させるために例えば60〜100℃の範囲内の温度下で予備乾燥を行うことで、感光性樹脂組成物の塗膜3を乾燥させる。
[(2) Drying process]
Subsequently, the coating film 3 is dried if necessary. In order to volatilize the organic solvent in the photosensitive resin composition, the coating film 3 of the photosensitive resin composition is dried, for example, by performing preliminary drying at a temperature in the range of 60 to 100 ° C.

配線基板1上に塗膜3を形成するにあたっては、予め適宜の支持体上に感光性樹脂組成物を塗布してから乾燥することで塗膜3(ドライフィルムの樹脂層)を形成し、このドライフィルムの樹脂層を配線基板1に重ねてから、ドライフィルムと配線基板1に圧力をかけることで、配線基板1上にドライフィルムの樹脂層を転着させてもよい(ドライフィルム法)。この場合、乾燥工程が省略されてもよい。   In forming the coating film 3 on the wiring substrate 1, the photosensitive resin composition is applied to a suitable support in advance and then dried to form the coating film 3 (resin layer of dry film). The resin layer of the dry film may be transferred to the wiring substrate 1 by applying pressure to the dry film and the wiring substrate 1 after overlapping the resin layer of the dry film on the wiring substrate 1 (dry film method). In this case, the drying step may be omitted.

[(3)不完全反応部形成工程]
続いて、図1(B)に示すように、塗膜3に、マスク4を介して活性エネルギー線を照射することで、塗膜3をパターン露光する。
[(3) Incomplete reaction part formation process]
Subsequently, as shown in FIG. 1B, the coating film 3 is pattern-exposed by irradiating the coating film 3 with an active energy ray through the mask 4.

露光用の活性エネルギー線は、その活性エネルギー線の照射を受けて感光性樹脂組成物の硬化反応が進行するように選択される。露光用の活性エネルギー線としては、例えば紫外線、可視光、又は近赤外線が選択される。紫外線が選択される場合、紫外線源は、例えばケミカルランプ、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプおよびメタルハライドランプから選択される。   The active energy ray for exposure is selected so that the curing reaction of the photosensitive resin composition proceeds upon irradiation with the active energy ray. As the active energy ray for exposure, for example, ultraviolet light, visible light or near infrared light is selected. When ultraviolet light is selected, the ultraviolet light source is selected from, for example, chemical lamps, low pressure mercury lamps, medium pressure mercury lamps, high pressure mercury lamps, ultra high pressure mercury lamps, xenon lamps and metal halide lamps.

マスク4は、互いに光透過性の程度が異なる三種類の部分を備える。マスク4は、例えば、グレースケールの濃淡により、光透過性を有する部分(以下、透過性部41という)と、透過性部41よりも低い光透過性を有する部分(以下、半透過性部42という)と、光透過性を有しない部分(以下、非透過性部43という)とを備える。   The mask 4 includes three types of portions having different degrees of light transmittance. The mask 4 has, for example, a portion having light transmittance (hereinafter referred to as a light transmitting portion 41) and a portion having light transmittance lower than the light transmitting portion 41 (hereinafter referred to as a semitransparent portion 42) by gray scale shading. And a non-light transmitting portion (hereinafter referred to as non-transmitting portion 43).

このマスク4を介して塗膜3がパターン露光されると、塗膜3における透過性部41に対応する部分(露光部)には活性エネルギー線が照射され、完全反応部31が設けられる。塗膜3における半透過性部42に対応する部分(半露光部)には、露光部よりも低い露光量で活性エネルギー線が照射され、不完全反応部32が設けられる。塗膜3における非透過性部43に対応する部分(未露光部)には、活性エネルギー線が照射されず、未反応部33が設けられる。すなわち、完全反応部31は露光時に活性エネルギー線が照射される部分であり、不完全反応部32は活性エネルギー線の照射時に完全反応部31よりも低い露光量で活性エネルギー線が照射される部分であり、未反応部33は露光時に活性エネルギー線が照射されない部分である。マスク4を、完全反応部31、不完全反応部32および未反応部33が、塗膜3における所定の箇所に位置するように設計することで、感光性樹脂組成物への活性エネルギー線照射量を調節することができる。   When the coating film 3 is pattern-exposed through the mask 4, active energy rays are irradiated to a portion (exposure portion) corresponding to the transmissive portion 41 in the coating film 3, and the complete reaction portion 31 is provided. An active energy ray is irradiated to the portion (semi-exposed portion) corresponding to the semi-transmissive portion 42 in the coating film 3 with an exposure amount lower than that of the exposed portion, and the incompletely reacted portion 32 is provided. In the part (unexposed part) corresponding to the non-permeable part 43 in the coating film 3, the active energy ray is not irradiated, and the unreacted part 33 is provided. That is, the complete reaction part 31 is a part to which the active energy ray is irradiated at the time of exposure, and the incomplete reaction part 32 is a part to which the active energy ray is irradiated at a lower exposure amount than the complete reaction part 31 at the irradiation of the active energy ray. The non-reacted portion 33 is a portion which is not irradiated with active energy rays at the time of exposure. By designing the mask 4 so that the complete reaction part 31, the incomplete reaction part 32, and the unreacted part 33 are located at predetermined positions in the coating film 3, the amount of active energy ray irradiation to the photosensitive resin composition is obtained. Can be adjusted.

このように塗膜3を露光すると、塗膜3における完全反応部31では感光性樹脂組成物の硬化反応が進行し、不完全反応部32でも、完全反応部31よりも光反応率が低いものの、感光性樹脂組成物の硬化反応が進行する。一方、未反応部33では、感光性樹脂組成物の硬化反応は進行しない。   When the coating film 3 is exposed in this manner, the curing reaction of the photosensitive resin composition proceeds in the complete reaction portion 31 of the coating film 3 and the photoreaction rate in the incomplete reaction portion 32 is lower than that in the complete reaction portion 31. The curing reaction of the photosensitive resin composition proceeds. On the other hand, in the unreacted portion 33, the curing reaction of the photosensitive resin composition does not proceed.

完全反応部31、不完全反応部32および未反応部33における露光量を所望の値にコントロールするためには、マスク4が、上記のように光透過性の程度が異なる三種類の部分を備えていなくてもよい。例えば、まず塗膜3に、未反応部33を遮蔽すると共に完全反応部31および不完全反応部32を遮蔽しないマスク(第一のマスク)を介して、活性エネルギー線を照射し、続いて第一のマスクに、不完全反応部32を遮蔽すると共に完全反応部31は遮蔽しないマスク(第二のマスク)を重ね、この第一のマスクと第二のマスクを介して、更に活性エネルギー線を照射してもよい。この場合でも、完全反応部31には活性エネルギー線が照射され、不完全反応部32には、完全反応部31よりも低い露光量で活性エネルギー線が照射され、未反応部33には、活性エネルギー線が照射されないこととなる。   In order to control the exposure amount in the complete reaction area 31, the incomplete reaction area 32, and the unreacted area 33 to a desired value, the mask 4 is provided with three types of portions having different degrees of light transmittance as described above. You do not have to. For example, first, the coating film 3 is irradiated with active energy rays through a mask (first mask) that shields the unreacted portion 33 and does not shield the complete reaction portion 31 and the incomplete reaction portion 32, and A mask (second mask) covering the incomplete reaction part 32 and the complete reaction part 31 is superimposed on one mask, and the active energy ray is further transmitted through the first mask and the second mask. It may be irradiated. Even in this case, the complete reaction portion 31 is irradiated with the active energy ray, and the incomplete reaction portion 32 is irradiated with the active energy ray at a lower exposure amount than the complete reaction portion 31, and the unreacted portion 33 is activated. It means that energy rays are not irradiated.

また、完全反応部31、不完全反応部32および未反応部33における露光量を所望の値にコントロールするためには、マスク4を用いなくてもよい。例えば、完全反応部31、不完全反応部32および未反応部33それぞれで、露光波長を変化させてもよい。また、塗膜3上の完全反応部31、不完全反応部32および未反応部33ごとの露光量をプログラムにて調整するダイレクトイメージング(DI)を用いてもよい。   Further, the mask 4 may not be used in order to control the exposure amount in the complete reaction area 31, the incomplete reaction area 32, and the unreacted area 33 to a desired value. For example, the exposure wavelength may be changed in each of the complete reaction area 31, the incomplete reaction area 32, and the unreacted area 33. Alternatively, direct imaging (DI) may be used in which the exposure amount of each of the completely reacted portion 31, the incompletely reacted portion 32, and the unreacted portion 33 on the coating film 3 is adjusted by a program.

完全反応部31における組成物の光反応率が、50%以上となるように活性エネルギー線を照射することが好ましく、60%以上であることがより好ましい。50%以上であると、現像工程および第2パッド部形成工程で除去されない塗膜3を、完全反応部31に良好に形成することができる。   It is preferable to irradiate an active energy ray so that the photoreaction rate of the composition in the complete reaction part 31 is 50% or more, and more preferably 60% or more. The coating film 3 which is not removed in the developing step and the second pad portion forming step can be favorably formed on the completely reacted portion 31 as it is 50% or more.

不完全反応部32における組成物の光反応率が、1%以上50%未満となるように活性エネルギー線を照射することが好ましく、5%以上30%以下であることがより好ましい。1%以上50%未満であることにより、第2パッド形成工程により除去しやすい現像残膜32Aを、不完全反応部32に容易に形成することができる。
また、残膜率は、1%以上50%未満であることが好ましく、5%以上30%以下であることがより好ましい。なお、残膜率(%)は、100×(現像残膜の厚み/現像前の塗膜の厚み)にて算出することができ、現像残膜の厚みとは、第2パッド部52の全面を覆った状態での厚みを意味する。
It is preferable to irradiate an active energy ray so that the photoreaction rate of the composition in the incomplete reaction part 32 is 1% or more and less than 50%, and more preferably 5% or more and 30% or less. When the content is 1% or more and less than 50%, the development residual film 32A that can be easily removed in the second pad formation step can be easily formed in the incomplete reaction part 32.
The residual film ratio is preferably 1% or more and less than 50%, and more preferably 5% or more and 30% or less. The residual film rate (%) can be calculated by 100 × (thickness of residual film after development / thickness of coating before development), and the thickness of residual film after development is the entire surface of the second pad portion 52. Means the thickness in the state of covering the

[(4)現像工程]
完全反応部31、不完全反応部32および未反応部33を設けた後、塗膜3を現像液で現像する。現像工程では、アルカリ性の現像液で現像することが好ましいが、有機溶剤で現像してもよい。現像後の塗膜3を図1(C)に示す。塗膜3の未反応部33が配線基板1上から除去されて第1パッド部51を形成する一方、塗膜3の完全反応部31および不完全反応部32は、配線基板1上に残存する。すなわち、未反応部33は現像により除去されてめっき用の第1パッド部51が形成される一方、不完全反応部32においては現像により現像残膜32Aを有する開口が形成され、現像残膜32Aはめっきレジストとして機能し、また、完全反応部31は現像にて現像残膜32Aよりも厚膜として残り、めっきレジストとして機能する。
[(4) Development step]
After the complete reaction area 31, the incomplete reaction area 32, and the unreacted area 33 are provided, the coating film 3 is developed with a developer. In the development step, it is preferable to develop with an alkaline developer, but it may be developed with an organic solvent. The coating 3 after development is shown in FIG. 1 (C). Unreacted portion 33 of coating film 3 is removed from above wiring substrate 1 to form first pad portion 51, while completely reacted portion 31 and incompletely reacted portion 32 of coating film 3 remain on wiring substrate 1. . That is, the non-reacted portion 33 is removed by development to form the first pad portion 51 for plating, while in the incompletely reacted portion 32, an opening having the development residual film 32A is formed by development, and the development residual film 32A Functions as a plating resist, and the complete reaction portion 31 remains as a thicker film than the development residual film 32A in development and functions as a plating resist.

アルカリ性現像液の具体例として、炭酸ナトリウム水溶液、炭酸カリウム水溶液、炭酸アンモニウム水溶液、炭酸水素ナトリウム水溶液、炭酸水素カリウム水溶液、炭酸水素アンモニウム水溶液、水酸化ナトリウム水溶液、水酸化カリウム水溶液、水酸化アンモニウム水溶液、水酸化テトラメチルアンモニウム水溶液、および水酸化リチウム水溶液が挙げられる。現像液として、モノエタノールアミン、ジエタノールアミン、トリエタノールアミン、モノイソプロパノールアミン、ジイソプロパノールアミン、トリイソプロパノールアミン等の有機アミンを使用することもできる。アルカリ性現像液中の溶媒は、水のみであっても、水と低級アルコール類等の親水性有機溶媒との混合物であってもよい。   Specific examples of the alkaline developer include sodium carbonate aqueous solution, potassium carbonate aqueous solution, ammonium carbonate aqueous solution, sodium hydrogencarbonate aqueous solution, potassium hydrogencarbonate aqueous solution, ammonium hydrogencarbonate aqueous solution, sodium hydroxide aqueous solution, potassium hydroxide aqueous solution, ammonium hydroxide aqueous solution, Examples include aqueous tetramethyl ammonium hydroxide and aqueous lithium hydroxide. As the developer, organic amines such as monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine and the like can also be used. The solvent in the alkaline developer may be water alone or a mixture of water and a hydrophilic organic solvent such as lower alcohols.

現像工程後の不完全反応部32、即ち現像残膜32Aの膜厚は0.1μm以上4μm以下が好ましく、0.2μm以上2μm以下であることが特に好ましい。0.1μm以上4μm以下であることにより、第2パッド部形成工程により除去しやすくなるとともに、めっきレジストとしても良好に機能する。   The film thickness of the incompletely reacted portion 32 after the development step, that is, the development residual film 32A is preferably 0.1 μm to 4 μm, and particularly preferably 0.2 μm to 2 μm. By being 0.1 micrometer or more and 4 micrometers or less, while becoming easy to remove by a 2nd pad part formation process, it functions well also as a plating resist.

[(5)熱硬化、光硬化工程]
現像処理後の塗膜3に、必要に応じて熱硬化処理および光硬化処理のいずれかの処理を行う。熱硬化処理および光硬化処理は、後のめっき処理に耐えられる条件であればよい。
[(5) heat curing, light curing process]
The coating film 3 after the development treatment is subjected to either a heat curing treatment or a light curing treatment, as necessary. The heat curing treatment and the light curing treatment may be any conditions that can withstand the later plating treatment.

完全反応部31および現像残膜32Aの加熱後に、完全反応部31および現像残膜32Aの全体に活性エネルギー線を照射してもよい。この場合、完全反応部31および現像残膜32A内に未反応のまま残存する感光性樹脂組成物の硬化反応が進行する。なお、光硬化処理後に熱硬化処理を行なってもよく、それぞれ複数回処理してもよい。   After heating the complete reaction area 31 and the development residual film 32A, the whole of the complete reaction area 31 and the development residual film 32A may be irradiated with active energy rays. In this case, the curing reaction of the photosensitive resin composition remaining unreacted in the completely reacted portion 31 and the development residual film 32A proceeds. In addition, a thermosetting process may be performed after a photocuring process, and you may process each in multiple times.

[(6)めっき処理工程]
次いで、図1(D)に示すように、第1パッド部51に、ニッケル/金めっき処理等の、少なくともめっき6を含む下地処理を行う。ここでのめっき処理には、ニッケル/金めっき処理のほか、錫めっき処理、OSP処理等のいずれも使用できる。このうち、ニッケル/金めっき処理については、無電解ニッケル/金めっき処理や電解ニッケル/金めっき処理のいずれも使用できるが、特に携帯電話やスマートフォンなどに使用される高密度な配線基板にめっき処理する際には、信頼性の観点から、無電解ニッケル/金めっき処理が好適に使用される。
[(6) plating process]
Next, as shown in FIG. 1D, the first pad portion 51 is subjected to a surface treatment including at least plating 6 such as a nickel / gold plating treatment. As the plating treatment here, any of tin plating treatment, OSP treatment and the like can be used besides nickel / gold plating treatment. Among these, as the nickel / gold plating process, any of electroless nickel / gold plating process and electrolytic nickel / gold plating process can be used, but in particular, plating process on high density wiring board used for mobile phones, smartphones, etc. In the process, from the viewpoint of reliability, electroless nickel / gold plating is preferably used.

無電解ニッケル/金めっき処理は、例えば次のような条件の下に行なわれる。始めに、塗膜3を有する配線基板1を主に洗浄する目的で、脱脂、水洗、酸洗、ソフトエッチング、水洗を順に行なう。次いで、触媒を表面に処理した後に、90℃のニッケルめっき液の浴槽に投入し、1μmあたり3〜5分のめっき速度にて5μm程度の無電解ニッケルめっきを付着させる。次いで、水洗後に90℃の金めっき液の浴槽に投入し、0.03μm程度の無電解金めっきを3〜5分のめっき速度にて付着させる。   The electroless nickel / gold plating process is performed, for example, under the following conditions. First, for the purpose of mainly cleaning the wiring substrate 1 having the coating film 3, degreasing, water washing, acid washing, soft etching and water washing are sequentially performed. Next, the catalyst is treated on the surface, and then put into a bath of a nickel plating solution at 90 ° C. to deposit about 5 μm of electroless nickel plating at a plating rate of 3 to 5 minutes per 1 μm. Then, after washing with water, it is poured into a bath of a gold plating solution at 90 ° C., and electroless gold plating of about 0.03 μm is attached at a plating rate of 3 to 5 minutes.

めっき処理は90℃のめっき温度にて処理されるため、従来の技術においてはめっきレジストが溶出し、めっき液を汚染するなどの問題を生じ、加えて、汚染しためっき液により配線基板に表面処理されるニッケル/金めっきは質が悪く、良品なプリント配線板を得ることが困難であったのに対し、本発明では、めっきレジストを使用しないので、めっき液を汚染することはない。   Since the plating process is carried out at a plating temperature of 90 ° C., in the prior art, the plating resist elutes, causing problems such as contamination of the plating solution, and additionally, the surface of the wiring substrate is treated with the contaminated plating solution. While the quality of the nickel / gold plating used is poor and it has been difficult to obtain a good printed wiring board, in the present invention, since the plating resist is not used, the plating solution is not contaminated.

[(7)第2パッド形成工程]
次いで、図1(E)に示すように、現像残膜32Aを除去して、第2パッド部52を形成する。図1(E)に示すように、現像残膜32Aの除去処理後には、実装可能な表面を有する第2パッド部52が形成される。現像残膜32Aの除去処理には、酸、アルカリ、溶剤等を用いる化学処理、レーザーやプラズマ等を用いる物理処理があり、具体的には、例えば約5%の水酸化ナトリウム水溶液等用いる方法がある。
[(7) Second Pad Forming Step]
Next, as shown in FIG. 1E, the development residual film 32A is removed to form a second pad portion 52. As shown in FIG. 1E, after the removal process of the development residual film 32A, a second pad portion 52 having a mountable surface is formed. Removal processing of the development residual film 32A includes chemical treatment using acid, alkali, solvent, etc., physical treatment using laser, plasma, etc. Specifically, for example, a method using sodium hydroxide aqueous solution etc. of about 5% is used. is there.

また、実装可能な表面が形成された第2パッド部52に、更に水溶性プリフラックス処理やはんだレベラーなどのはんだ表面処理を行なうのが、部品実装パッドの表面を酸化から保護する上で望ましい。
なお、図1では、第1パッド部用開口および第2パッド部用開口の幅は、導体回路の幅よりも狭いが、広くてもよい。
Further, it is desirable to further perform a solder surface treatment such as a water-soluble preflux treatment or a solder leveler on the second pad portion 52 on which the mountable surface is formed in order to protect the surface of the component mounting pad from oxidation.
In FIG. 1, the widths of the first pad opening and the second pad opening are narrower than the width of the conductor circuit, but may be wider.

以下に実施例を示して本発明について具体的に説明するが、本発明が下記実施例に限定されるものではない。   EXAMPLES The present invention will be specifically described with reference to examples but the present invention is not limited to the following examples.

太陽インキ製造株式会社製 現像型スプレー塗布用ソルダーレジスト PSR−4000 EG30を、パターン形成された銅箔基板(配線基板)上にスクリーン印刷で全面塗布し、80℃で20分間乾燥した。この乾燥塗膜の膜厚は、20μmであった。次いで、この基板に、不完全反応部への光透過率が50%、完全反応部への光透過率が100%のフォトマスクを当て、露光量が600mJ/cmにて紫外線をパターン露光した。完全反応部の組成物の光反応率は、70%であり、不完全反応部での組成物の光反応率は、30%であった。なお、光反応率の測定には、パーキンエルマー社製FT−IRを用いた。
その後、スプレー圧1.5kg/cmの1質量%炭酸ナトリウム水溶液で現像し、第1パッド部と現像残膜を有する第2パッド部用開口とを形成したレジストパターンを形成した。ここで、現像残膜は1μmであり、残膜率は、5%であった。そして、基板を、密閉されたオーブンにて150℃×60分間の熱硬化条件で加熱した。
A solder resist PSR-4000 EG30 for developing type spray coating, manufactured by Solar Ink Mfg. Co., Ltd., was coated on the entire surface of the patterned copper foil substrate (wiring substrate) by screen printing, and dried at 80 ° C. for 20 minutes. The film thickness of this dried coating film was 20 μm. Then, a photomask was applied to this substrate with a light transmittance of 50% to the incompletely reacted portion and a light transmittance of 100% to the completely reacted portion, and pattern exposure was performed with ultraviolet light at an exposure amount of 600 mJ / cm 2 . The photoreaction rate of the composition of the complete reaction part was 70%, and the photoreaction rate of the composition in the incomplete reaction part was 30%. In addition, FT-IR by Perkin-Elmer company was used for the measurement of a photoreaction rate.
Thereafter, development was performed with a 1% by mass aqueous solution of sodium carbonate at a spray pressure of 1.5 kg / cm 2 to form a resist pattern in which a first pad portion and an opening for a second pad portion having a development residual film were formed. Here, the development residual film was 1 μm, and the residual film ratio was 5%. Then, the substrate was heated in a closed oven under heat curing conditions of 150 ° C. × 60 minutes.

上記のようにして作製した試験基板を、30℃の酸性脱脂液((株)日本マクダーミッド製、Metex L−5Bの20体積%水溶液)に3分間浸漬して脱脂し、次いで流水中に3分間浸漬して水洗した。次に、試験基板を14.3質量%過硫酸アンモン水溶液に室温で3分間浸漬し、ソフトエッチを行い、次いで流水中に3分間浸漬して水洗した。10体積%硫酸水溶液に室温で試験基板を1分間浸漬した後、流水中に30秒〜1分間浸漬して水洗した。次いで、試験基板を30℃の触媒液((株)メルテックス製、メタルプレートアクチベーター350の10体積%水溶液)に7分間浸漬し、触媒付与を行った後、流水中に3分間浸漬して水洗した。触媒付与を行った試験基板を、85℃のニッケルめっき液((株)メルテックス製、メルプレートNi−865Mの20体積%水溶液、pH4.6)に20分間浸漬して、無電解ニッケルめっきを行った。10体積%硫酸水溶液に室温で試験基板を1分間浸漬した後、流水中に30秒〜1分間浸漬して水洗した。次いで、試験基板を95℃の金めっき液((株)メルテックス製、オウロレクトロレスUP 15体積%とシアン化金カリウム3体積%の水溶液、pH6)に10分間浸漬して無電解金めっきを行った後、流水中に3分間浸漬して水洗し、また60℃の温水に3分間浸漬して湯洗した。充分に水洗後、水をよくきり、乾燥し、開口部に対応する位置の銅パッド部上に無電解金めっきした試験基板を得た。
その後、水酸化ナトリウム水溶液(3質量%、液温50℃)の剥離液にて現像残膜を除去して、めっき処理した実装可能な銅パッド部と、めっき処理していない銅パッド部を有するプリント配線板を得た。
The test substrate prepared as described above is degreased by immersion for 3 minutes in an acidic degreasing solution (Meteix L-5B, 20% by volume aqueous solution manufactured by Nippon McDarmid Co., Ltd.) at 30 ° C. for 3 minutes in flowing water. It was immersed and washed with water. Next, the test substrate was immersed in a 14.3% by mass aqueous solution of ammonium persulfate for 3 minutes at room temperature for soft etching, and then immersed in running water for 3 minutes and washed with water. The test substrate was immersed in a 10% by volume aqueous sulfuric acid solution at room temperature for 1 minute, and then immersed in running water for 30 seconds to 1 minute to wash with water. Next, the test substrate is immersed for 7 minutes in a 30 ° C. catalyst solution (Meltex Co., Ltd., 10% by volume aqueous solution of metal plate activator 350), catalyst is applied, and then immersed in flowing water for 3 minutes. It was washed with water. The test substrate on which the catalyst was applied was immersed in a nickel plating solution at 85 ° C. (Meltex Co., Ltd., 20% by volume aqueous solution of Melplate Ni-865M, pH 4.6) for 20 minutes to perform electroless nickel plating. went. The test substrate was immersed in a 10% by volume aqueous sulfuric acid solution at room temperature for 1 minute, and then immersed in running water for 30 seconds to 1 minute to wash with water. Next, the test substrate is immersed in a 95 ° C. gold plating solution (made by Meltex Co., Ltd., an aqueous solution of 15% by volume of Auuro Lectrores UP and 3% by volume of gold potassium cyanide, pH 6) for 10 minutes for electroless gold plating. After carrying out, it was immersed in running water for 3 minutes, washed with water, and immersed in warm water of 60 ° C. for 3 minutes and washed with hot water. After sufficient washing with water, the water was thoroughly drained and dried to obtain a test substrate electroless gold-plated on the copper pad portion at a position corresponding to the opening.
Thereafter, the development residual film is removed with a peeling solution of sodium hydroxide aqueous solution (3% by mass, liquid temperature 50 ° C.), and a mountable copper pad portion plated and a copper pad portion not plated are provided. I got a printed circuit board.

上記の通り、本発明のプリント配線板の製造方法によれば、めっきレジストを用いずに、より簡単な工程により、金めっきを含む下地処理が施された銅パッド部と、金めっきを含む下地処理をしていない銅パッド部を有するプリント配線板を製造することができることがわかる。   As described above, according to the method for producing a printed wiring board of the present invention, a copper pad portion to which an undercoating treatment including gold plating is applied by a simpler process without using a plating resist, and an undercoating including gold plating It can be seen that a printed wiring board can be manufactured that has an untreated copper pad portion.

1 配線基板
2 導体回路
3 塗膜
31 完全反応部
32 不完全反応部
32A 現像残膜
33 未反応部
4 マスク
41 透過性部
42 半透過性部
43 非透過性部
51 第1パッド部
52 第2パッド部
6 めっき
DESCRIPTION OF SYMBOLS 1 wiring board 2 conductor circuit 3 coating film 31 complete reaction part 32 incomplete reaction part 32 A development residual film 33 unreacted part 4 mask 41 transparent part 42 semi-transparent part 43 non-transparent part 51 first pad part 52 second Pad part 6 plating

Claims (4)

導体回路を有する配線基板上に感光性樹脂組成物の塗膜を形成する工程と、
前記感光性樹脂組成物の塗膜に、未反応部、不完全反応部および完全反応部を設ける工程と、
現像により、第1パッド部を形成するとともに、現像残膜を有する第2パッド部用開口を形成する工程と、
前記第1パッド部にめっき処理を行う工程と、
前記めっき処理後、前記現像残膜を除去して、前記第2パッド部を形成する工程と、
を含むことを特徴とするプリント配線板の製造方法。
Forming a coating of a photosensitive resin composition on a wiring substrate having a conductor circuit;
Providing an unreacted portion, an incompletely reacted portion and a completely reacted portion on the coating of the photosensitive resin composition,
A step of forming a first pad portion by development and forming an opening for a second pad portion having a development residual film;
Plating the first pad portion;
After the plating process, removing the development residual film to form the second pad portion;
A method of manufacturing a printed wiring board, comprising:
前記現像による残膜率が1%以上50%未満であることを特徴とする請求項1に記載のプリント配線板の製造方法。   The method for manufacturing a printed wiring board according to claim 1, wherein a residual film ratio by the development is 1% or more and less than 50%. 請求項1または2に記載の製造方法により得られるプリント配線板。   The printed wiring board obtained by the manufacturing method of Claim 1 or 2. 請求項1または2に記載のプリント配線板の製造方法に用いられる感光性樹脂組成物。
The photosensitive resin composition used for the manufacturing method of the printed wiring board of Claim 1 or 2.
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