JP2019064001A - 離型処理方法、型および反射防止膜 - Google Patents
離型処理方法、型および反射防止膜 Download PDFInfo
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- JP2019064001A JP2019064001A JP2017188256A JP2017188256A JP2019064001A JP 2019064001 A JP2019064001 A JP 2019064001A JP 2017188256 A JP2017188256 A JP 2017188256A JP 2017188256 A JP2017188256 A JP 2017188256A JP 2019064001 A JP2019064001 A JP 2019064001A
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/60—Releasing, lubricating or separating agents
- B29C33/62—Releasing, lubricating or separating agents based on polymers or oligomers
- B29C33/64—Silicone
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/34—Component parts, details or accessories; Auxiliary operations
- B29C41/38—Moulds, cores or other substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
工程A:表面にポーラスアルミナ層を有する型と、酸化珪素前駆体と溶媒とを含む前駆体溶液と、フッ素系シランカップリング剤を含む離型剤とを用意する工程
工程B:型の表面に前駆体溶液を付与する工程
工程C:工程Bの後に、型の表面に付与された前駆体溶液に含まれる溶媒を少なくとも減少させる工程
工程D:工程Bの後に、型の表面に付与された前駆体溶液に含まれる酸化珪素前駆体を焼成することによって、酸化珪素を含み、炭素を実質的に含まない絶縁層を形成する工程
工程E:工程Cおよび工程Dの後に、型の表面に離型剤を付与する工程
以下のように、実験例1の型試料を得た。
・反射防止膜の表面に水を滴下した直後の、反射防止膜の表面に対する水の接触角(表1中、「水の接触角(滴下直後)」)
・反射防止膜の表面にヘキサデカンを滴下した直後の、反射防止膜の表面に対するヘキサデカンの接触角(表1中、「ヘキサデカンの接触角(滴下直後)」)
・反射防止膜の表面にヘキサデカンを滴下してから10秒後の、反射防止膜の表面に対するヘキサデカンの接触角(表1中、「ヘキサデカンの接触角(10秒後)」)
比較例1は、小片型に対する離型処理として、表面に酸化珪素前駆体を含む前駆体溶液を付与しなかった点において実験例1と異なる。
実験例2では、フッ素系シランカップリングを含む離型剤として、実験例1とは異なる離型剤を用いて、同様の効果が得られることを確かめた。
比較例2の型試料は、実験例2と同じ離型剤を用いて離型処理を行った点において、比較例1と異なる。比較例2の型試料を用いて、比較例1と同様に評価を行った。評価結果を下記の表4に示す。
実験例3(実験例3a〜実験例3h)では、絶縁層の前駆体溶液として、絶縁層前駆体として無機材料および有機材料のハイブリッド材料を含む前駆体溶液を用いて離型処理を行い、炭素を含まない酸化珪素前駆体を含む前駆体溶液を用いた実験例1および2と比較した。また、前駆体の有機材料の含有率が異なる前駆体溶液を用いて離型処理を行い、前駆体に含まれる有機材料の影響および形成された絶縁層に含まれる有機材料について考察した。
12 アルミニウム基材
14 ポーラスアルミナ層
14p 凹部
16 無機材料層
18 アルミニウム膜
18r アルミニウム残存層
21 前駆体溶液
22 絶縁層
34 反射防止膜
42 ベースフィルム
100 型
Claims (15)
- 表面にポーラスアルミナ層を有する型と、酸化珪素前駆体と溶媒とを含む前駆体溶液と、フッ素系シランカップリング剤を含む離型剤とを用意する工程Aと、
前記表面に前記前駆体溶液を付与する工程Bと、
前記工程Bの後に、前記表面に付与された前記前駆体溶液に含まれる前記溶媒を少なくとも減少させる工程Cと、
前記工程Bの後に、前記表面に付与された前記前駆体溶液に含まれる前記酸化珪素前駆体を焼成することによって、酸化珪素を含み、炭素を実質的に含まない絶縁層を形成する工程Dと、
前記工程Cおよび前記工程Dの後に、前記表面に前記離型剤を付与する工程Eと
を包含する、離型処理方法。 - 前記工程Bにおいて、前記表面に付与された前記前駆体溶液は、前記酸化珪素前駆体を5質量%以上20質量%以下含む、請求項1に記載の離型処理方法。
- 前記工程Dは、前記表面に付与された前記前駆体溶液に含まれる前記酸化珪素前駆体を100℃以上1000℃以下の温度で焼成する工程を包含する、請求項1または2に記載の離型処理方法。
- 前記工程Dは、前記表面に付与された前記前駆体溶液に含まれる前記酸化珪素前駆体を5分以上60分以下の時間焼成する工程を包含する、請求項1から3のいずれかに記載の離型処理方法。
- 前記工程Bは、前記前駆体溶液を1000rpm以上3000rpm以下の回転数でスピンコートすることによって前記表面に付与する工程を包含する、請求項1から4のいずれかに記載の離型処理方法。
- 前記工程Cおよび前記工程Dの後、かつ、前記工程Eの前に、前記絶縁層の表面をアッシングする工程Fをさらに包含する、請求項1から5のいずれかに記載の離型処理方法。
- 前記工程Eの後に、前記表面に付与された前記離型剤に含まれる溶媒を除去する工程Gをさらに包含する、請求項1から6のいずれかに記載の離型処理方法。
- 前記工程Gは、前記表面に付与された前記離型剤を100℃以上200℃以下の温度で焼成する工程を包含する、請求項7に記載の離型処理方法。
- 前記酸化珪素前駆体は、ポリシロキサン系化合物またはポリシルセスキオキサン系化合物を含む、請求項1から8のいずれかに記載の離型処理方法。
- 前記酸化珪素前駆体は、炭素を実質的に含まないポリシルセスキオキサン系化合物を含む、請求項1から9のいずれかに記載の離型処理方法。
- 請求項1から10のいずれかに記載の離型処理方法で離型処理された、表面にポーラスアルミナ層を有する型であって、
前記ポーラスアルミナ層は、前記表面の法線方向から見たときの2次元的な大きさが10nm以上500nm未満である複数の凹部を有し、
前記複数の凹部内に形成された絶縁層であって、酸化珪素を含み、炭素を実質的に含まない絶縁層をさらに有する、型。 - 前記絶縁層の厚さは、前記複数の凹部の深さの5%以上50%以下である、請求項11に記載の型。
- 前記絶縁層は、シロキサン結合を含む重合体を含む、請求項11または12に記載の型。
- 前記複数の凹部の側面は、前記絶縁層から露出されている、請求項11から13のいずれかに記載の型。
- 表面の法線方向から見たときの2次元的な大きさが10nm以上500nm未満である複数の凸部を表面に有し、
前記表面にヘキサデカンを滴下した直後における、前記表面に対するヘキサデカンの静的接触角が90°以上であり、
前記表面にヘキサデカンを滴下してから10秒以上経過した後の、前記表面に対するヘキサデカンの静的接触角と、前記滴下直後の静的接触角との差が6.0°未満である、反射防止膜。
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