JP2019058909A - シロキサン汚染物質の除去のための材料、方法、およびデバイス - Google Patents
シロキサン汚染物質の除去のための材料、方法、およびデバイス Download PDFInfo
- Publication number
- JP2019058909A JP2019058909A JP2018225318A JP2018225318A JP2019058909A JP 2019058909 A JP2019058909 A JP 2019058909A JP 2018225318 A JP2018225318 A JP 2018225318A JP 2018225318 A JP2018225318 A JP 2018225318A JP 2019058909 A JP2019058909 A JP 2019058909A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- adsorbent
- gas
- adsorbent material
- filter medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims abstract description 54
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 239000000356 contaminant Substances 0.000 title abstract description 19
- 239000003463 adsorbent Substances 0.000 claims abstract description 195
- 239000002253 acid Substances 0.000 claims abstract description 177
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 93
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 34
- 229910017604 nitric acid Inorganic materials 0.000 claims description 34
- -1 siloxanes Chemical class 0.000 claims description 30
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 24
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 21
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 18
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 claims description 17
- 239000003795 chemical substances by application Substances 0.000 claims description 14
- 238000001914 filtration Methods 0.000 claims description 14
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000000741 silica gel Substances 0.000 claims description 11
- 229910002027 silica gel Inorganic materials 0.000 claims description 11
- 150000007513 acids Chemical class 0.000 claims description 10
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims description 8
- 239000007864 aqueous solution Substances 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 239000010457 zeolite Substances 0.000 claims description 5
- 239000012080 ambient air Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000002594 sorbent Substances 0.000 claims 5
- 229910000027 potassium carbonate Inorganic materials 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 description 67
- 239000007789 gas Substances 0.000 description 57
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 30
- 239000000243 solution Substances 0.000 description 29
- 239000010410 layer Substances 0.000 description 19
- 229910021529 ammonia Inorganic materials 0.000 description 15
- 238000010306 acid treatment Methods 0.000 description 11
- 230000002378 acidificating effect Effects 0.000 description 7
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000003570 air Substances 0.000 description 4
- 239000011260 aqueous acid Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 150000002835 noble gases Chemical class 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- HTDJPCNNEPUOOQ-UHFFFAOYSA-N hexamethylcyclotrisiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O1 HTDJPCNNEPUOOQ-UHFFFAOYSA-N 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- AAPLIUHOKVUFCC-UHFFFAOYSA-N trimethylsilanol Chemical compound C[Si](C)(C)O AAPLIUHOKVUFCC-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/025—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with wetted adsorbents; Chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
- B01J20/08—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04 comprising aluminium oxide or hydroxide; comprising bauxite
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/103—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate comprising silica
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
- B01J20/186—Chemical treatments in view of modifying the properties of the sieve, e.g. increasing the stability or the activity, also decreasing the activity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/22—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
- B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
- B01J20/28052—Several layers of identical or different sorbents stacked in a housing, e.g. in a column
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/104—Alumina
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/25—Coated, impregnated or composite adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/556—Organic compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/06—Polluted air
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
Abstract
Description
さらなる吸着剤材料としては、活性炭、ならびにシリカゲル、活性アルミナ、ゼオライト、ナノ多孔性担体、およびそれらの組合せも挙げられる。一実装形態において、さらなる吸着剤には、強酸などの酸が含浸される。好適な酸としては、例えば、リン酸およびクエン酸が挙げられる。これらの酸が含浸された吸着剤は、アンモニアなどの塩基性汚染物質の除去に特に好適である。
ここで、図面を参照すると、図1は、本発明の一実装形態にしたがって作製される、ガス流から汚染物質を除去するためのろ材の簡略化された図を示す。エレメント10は、底部12および上部14を含む。ガスは、(全体的なガス流れ方向を示す大きい矢印によって示されるように)底部12から媒体パック16の1つ以上の層を通り、次いで、エレメント10の上部14を出るように流れる。
Claims (50)
- ガス中のシロキサンレベルを減少させる方法であって、
酸で洗浄された第1の吸着剤材料を提供する工程と、
前記ガス中のシロキサンレベルを減少させるように、ガスを前記吸着剤材料に通す工程と
を含む方法。 - 前記第1の吸着剤材料が活性炭を含む、請求項1および3〜23のいずれか一項に記載の方法。
- 前記第1の吸着剤材料が、シリカゲル、活性アルミナ、ゼオライト、ナノ多孔性担体、およびそれらの組合せの群から選択される、請求項1〜2および4〜23のいずれか一項に記載の方法。
- 前記酸が強酸を含む、請求項1〜3および5〜23のいずれか一項に記載の方法。
- 前記酸が硝酸を含む、請求項1〜4および6〜23のいずれか一項に記載の方法。
- 前記吸着剤が、少なくとも5パーセントの硝酸の水溶液で洗浄される、請求項1〜5および7〜23のいずれか一項に記載の方法。
- 前記吸着剤が、少なくとも10パーセントの硝酸の水溶液で洗浄される、請求項1〜6および8〜23のいずれか一項に記載の方法。
- 前記吸着剤材料に通された前記ガスが、周囲空気を含む、請求項1〜7および9〜23のいずれか一項に記載の方法。
- 前記吸着剤材料に通された前記ガスが、その後、半導体製造に使用される、請求項1〜8および10〜23のいずれか一項に記載の方法。
- 第2の吸着剤材料を提供する工程と、
前記ガスを前記第2の吸着剤材料に通す工程と
をさらに含む、請求項1〜9および11〜23のいずれか一項に記載の方法。 - 前記第2の吸着剤材料が活性炭を含む、請求項1〜10および12〜23のいずれか一項に記載の方法。
- 前記第2の吸着剤材料吸着剤材料が、シリカゲル、活性アルミナ、ゼオライト、ナノ多孔性担体、およびそれらの組合せの群から選択される、請求項1〜11および13〜23のいずれか一項に記載の方法。
- 前記第2の吸着剤材料が、酸が含浸された吸着剤を含む、請求項1〜12および14〜23のいずれか一項に記載の方法。
- 前記酸が強酸を含む、請求項1〜13および15〜23のいずれか一項に記載の方法。
- 前記酸がリン酸を含む、請求項1〜14および16〜23のいずれか一項に記載の方法。
- 前記酸がクエン酸を含む、請求項1〜15および17〜23のいずれか一項に記載の方法。
- 前記ガスが、前記第1の吸着剤材料に通され、続いて、前記第2の吸着剤材料に通される、請求項1〜16および18〜23のいずれか一項に記載の方法。
- 前記ガスが、前記第2の吸着剤材料に通され、続いて、前記第1の吸着剤材料に通される、請求項1〜17および19〜23のいずれか一項に記載の方法。
- 酸性ガス除去剤をさらに含む、請求項1〜18および20〜23のいずれか一項に記載の方法。
- 前記酸性ガス除去剤が、ヨウ化カリウム、炭酸カリウムまたは水酸化ナトリウム、およびそれらの組合せの群から選択される含浸剤が含浸された吸着剤を含む、請求項1〜19および21〜23のいずれか一項に記載の方法。
- 前記酸性ガス除去剤が、ヨウ化カリウム、炭酸カリウム、または水酸化ナトリウムおよびそれらの組合せが含浸された吸着剤を含む、請求項1〜20および22〜23のいずれか一項に記載の方法。
- 第1の吸着剤対酸性ガス除去剤の比率が、2:1〜1:2である、請求項1〜21および23のいずれか一項に記載の方法。
- 第1の吸着剤対酸性ガス除去剤の比率が、10:1〜1:10である、請求項1〜22のいずれか一項に記載の方法。
- ガス中のシロキサンレベルを減少させるためのろ材であって、
酸で洗浄された吸着剤を含む第1の吸着剤材料と、
酸が含浸された吸着剤を含む第2の吸着剤材料と
を含むろ材。 - 前記第1の吸着剤材料が活性炭を含む、請求項24および26〜42のいずれか一項に記載のろ材。
- 前記第1の吸着剤材料がシリカゲルを含む、請求項24〜25および27〜42のいずれか一項に記載のろ材。
- 前記酸が強酸を含む、請求項24〜26および28〜42のいずれか一項に記載のろ材。
- 前記酸が硝酸を含む、請求項24〜27および29〜42のいずれか一項に記載のろ材。
- 前記吸着剤が、少なくとも5パーセントの硝酸の水溶液で洗浄される、請求項24〜28および30〜42のいずれか一項に記載のろ材。
- 前記吸着剤が、少なくとも10パーセントの硝酸の水溶液で洗浄される、請求項24〜29および31〜42のいずれか一項に記載のろ材。
- 前記第2の吸着剤材料が活性炭を含む、請求項24〜30および32〜42のいずれか一項に記載のろ材。
- 前記第2の吸着剤材料がシリカゲルを含む、請求項24〜31および33〜42のいずれか一項に記載のろ材。
- 前記第2の吸着剤材料を含浸する前記酸が強酸を含む、請求項24〜32および34〜42のいずれか一項に記載のろ材。
- 前記第2の吸着剤材料を含浸する前記酸がリン酸を含む、請求項24〜33および35〜42のいずれか一項に記載の方法。
- ガスがまず前記第1の吸着剤材料を通過し、続いて、前記第2の吸着剤材料を通過するように構成される、請求項24〜34および36〜42のいずれか一項に記載のろ材。
- ガスがまず前記第2の吸着剤材料を通過し、続いて、前記第1の吸着剤材料を通過するように構成される、請求項24〜35および37〜42のいずれか一項に記載のろ材。
- 酸性ガス除去剤をさらに含む、請求項24〜36および38〜42のいずれか一項に記載のろ材。
- 前記酸性ガス除去剤が、ヨウ化カリウム、炭酸カリウム、およびそれらの組合せが含浸された吸着剤を含む、請求項24〜37および39〜42のいずれか一項に記載のろ材。
- 第1の吸着剤対酸性ガス除去剤の比率が、2:1〜1:2である、請求項24〜38および40〜42のいずれか一項に記載のろ材。
- 第1の吸着剤対酸性ガス除去剤の比率が、3:1〜1:3である、請求項24〜39および41〜42のいずれか一項に記載のろ材。
- 少なくとも前記第1の吸着剤材料が、充填床に提供される、請求項24〜40および42のいずれか一項に記載のろ材。
- 少なくとも前記第1の吸着剤材料が、ウェブ形態で提供される、請求項24〜41のいずれか一項に記載のろ材。
- ガス中のシロキサンレベルを減少させる方法であって、
吸着剤材料を硝酸で洗浄する工程と、
前記吸着剤材料に、硝酸以外の強酸を含浸させる工程と、
ガス中のシロキサンレベルを減少させるように、ガスを前記吸着剤材料に通す工程と
を含む方法。 - ガス中のシロキサンレベルを減少させるためのろ過システムであって、
吸着剤材料を含む第1のろ材であって、前記第1の吸着剤材料が、酸で洗浄された吸着剤を含む第1のろ材と、
吸着剤材料を含む第2のろ材であって、前記第2の吸着剤材料が、酸が含浸された吸着剤を含む第2のろ材と
を含み、
前記ガスの大部分が前記第1のろ材および前記第2のろ材を通過するように連続して構成されるろ過システム。 - ガス中のシロキサンレベルを減少させるためのろ過システムであって、
吸着剤材料を含む第1のろ材であって、前記第1の吸着剤材料が、酸が含浸された吸着剤を含む第1のろ材と、
吸着剤材料を含む第2のろ材であって、前記第2の吸着剤材料が、酸で洗浄された吸着剤を含む第2のろ材と
を含み、
前記ガスの大部分が前記第1のろ材および前記第2のろ材を通過するように連続して構成されるろ過システム。 - ガス中のシロキサンレベルを減少させる方法であって、
酸で洗浄された吸着剤材料を提供する工程と、
前記ガス中のシロキサンレベルを減少させるように、ガスを前記吸着剤材料に通す工程と
を含む方法。 - ガス中のシロキサンレベルを減少させる方法であって、
第1の酸で洗浄され、続いて、第2の酸が含浸された吸着剤材料を提供する工程と、
前記ガス中のシロキサンレベルを減少させるように、ガスを前記吸着剤材料に通す工程と
を含む方法。 - 前記第1の酸および第2の酸が異なる酸である、請求項47および49〜50のいずれか一項に記載の方法。
- 前記第1の酸が硝酸を含む、請求項47〜48および50のいずれか一項に記載の方法。
- 前記第2の酸が、硝酸以外の酸を含む、請求項47〜49のいずれか一項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261643732P | 2012-05-07 | 2012-05-07 | |
US61/643,732 | 2012-05-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015511467A Division JP2015518422A (ja) | 2012-05-07 | 2013-03-15 | シロキサン汚染物質の除去のための材料、方法、およびデバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019058909A true JP2019058909A (ja) | 2019-04-18 |
JP6725627B2 JP6725627B2 (ja) | 2020-07-22 |
Family
ID=48048235
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015511467A Pending JP2015518422A (ja) | 2012-05-07 | 2013-03-15 | シロキサン汚染物質の除去のための材料、方法、およびデバイス |
JP2018225318A Active JP6725627B2 (ja) | 2012-05-07 | 2018-11-30 | シロキサン汚染物質の除去のための材料、方法、およびデバイス |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015511467A Pending JP2015518422A (ja) | 2012-05-07 | 2013-03-15 | シロキサン汚染物質の除去のための材料、方法、およびデバイス |
Country Status (8)
Country | Link |
---|---|
US (5) | US9789435B2 (ja) |
EP (2) | EP3995203A1 (ja) |
JP (2) | JP2015518422A (ja) |
KR (7) | KR102066307B1 (ja) |
CN (2) | CN104334249A (ja) |
ES (1) | ES2910994T3 (ja) |
PL (1) | PL2846895T3 (ja) |
WO (1) | WO2013169392A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
PL2846895T3 (pl) | 2012-05-07 | 2022-04-19 | Donaldson Company, Inc. | Materiały, sposoby i urządzenia do usuwania zanieczyszczeń siloksanami |
US9480944B2 (en) * | 2013-06-18 | 2016-11-01 | Guild Associates Inc. | Process for removal of siloxanes and related compounds from gas streams |
JP6500353B2 (ja) * | 2014-06-10 | 2019-04-17 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
JP6500352B2 (ja) * | 2014-06-10 | 2019-04-17 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
WO2015190459A1 (ja) * | 2014-06-10 | 2015-12-17 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
EP3034476A1 (de) * | 2014-12-16 | 2016-06-22 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur herstellung von synthetischem quarzglas unter verwendung einer reinigungsvorrichtung |
US9605626B2 (en) | 2015-03-06 | 2017-03-28 | Deere & Company | Siloxane filtration system and method |
JP2016221467A (ja) * | 2015-06-01 | 2016-12-28 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
JP6645110B2 (ja) * | 2015-10-09 | 2020-02-12 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
JP6682819B2 (ja) * | 2015-11-18 | 2020-04-15 | 東洋紡株式会社 | シロキサン除去ろ材 |
US9803598B2 (en) | 2015-12-21 | 2017-10-31 | Caterpillar Inc. | Air intake system for engine |
US20180073474A1 (en) * | 2016-09-14 | 2018-03-15 | Caterpillar Inc. | Air intake system for engine |
EP3525916A1 (en) * | 2016-10-17 | 2019-08-21 | Haldor Topsøe A/S | A process for the removal of siloxanes from landfill gases |
US10391469B2 (en) * | 2016-11-08 | 2019-08-27 | Hamilton Sundstrand Corporation | Sorbent systems and methods |
CN109438499A (zh) * | 2018-12-27 | 2019-03-08 | 湖北新蓝天新材料股份有限公司 | 一种三甲基硅醇的制备方法 |
US11977007B2 (en) * | 2019-05-17 | 2024-05-07 | Figaro Engineering Inc. | Gas detection device and gas detection method |
US11578413B2 (en) | 2020-01-13 | 2023-02-14 | Hamilton Sundstrand Corporation | Sabatier reactor apparatus |
WO2024048577A1 (ja) * | 2022-09-01 | 2024-03-07 | 日本碍子株式会社 | 酸性ガス吸着装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11290636A (ja) * | 1998-04-15 | 1999-10-26 | Shimizu Corp | 空気清浄装置 |
JP2000157826A (ja) * | 1998-11-26 | 2000-06-13 | Nec Corp | ケミカルフィルタ及びその交換判定法、並びに気体浄化装置 |
JP2001310109A (ja) * | 2000-02-21 | 2001-11-06 | Nichias Corp | ケミカルフィルタ |
JP2005506898A (ja) * | 2001-06-08 | 2005-03-10 | ドナルドソン カンパニー,インコーポレイティド | 吸着エレメントと吸着方法 |
WO2008024329A1 (en) * | 2006-08-22 | 2008-02-28 | Donaldson Company, Inc. | Biogas purification with siloxane removal |
US20110052462A1 (en) * | 2008-01-17 | 2011-03-03 | Carrier Corporation | Filters for removal of volatile siloxanes and lifetime extension of photocatalytic devices |
JP2011212531A (ja) * | 2010-03-31 | 2011-10-27 | Kuraray Chemical Co Ltd | アルキルシラノール除去材及びそれを製造する方法 |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2015593A (en) * | 1932-02-24 | 1935-09-24 | Aluminum Co Of America | Manufacture of adsorbents |
NL6503023A (ja) * | 1964-03-23 | 1965-09-24 | ||
US4014817A (en) * | 1975-04-03 | 1977-03-29 | Calgon Corporation | Manufacture of activated carbon from sized coal |
US4083801A (en) * | 1976-12-20 | 1978-04-11 | Aluminum Company Of America | High purity activated carbon produced by calcining acid leached coal containing residual leaching solution |
US5626820A (en) * | 1988-12-12 | 1997-05-06 | Kinkead; Devon A. | Clean room air filtering |
JPH04312785A (ja) | 1991-04-10 | 1992-11-04 | Ngk Spark Plug Co Ltd | セラミックスヒータ及びその製造方法 |
JPH06135708A (ja) * | 1992-10-28 | 1994-05-17 | Hitachi Plant Eng & Constr Co Ltd | 空気浄化剤の製造方法 |
US5607647A (en) * | 1993-12-02 | 1997-03-04 | Extraction Systems, Inc. | Air filtering within clean environments |
US5985790A (en) | 1994-12-07 | 1999-11-16 | Project Earth Industries, Inc. | Method of making acid contacted enhanced aluminum oxide adsorbent particle |
US6620385B2 (en) * | 1996-08-20 | 2003-09-16 | Ebara Corporation | Method and apparatus for purifying a gas containing contaminants |
US5900532A (en) | 1997-02-20 | 1999-05-04 | Nippon Sanso Corporation | Method of removing siloxanes from silicon compound gases and apparatus therefor |
KR100216985B1 (ko) * | 1997-03-17 | 1999-09-01 | 김성년 | 황화수소 흡착제거용 ki 첨착활성탄의 제조방법 |
TW422724B (en) * | 1997-07-03 | 2001-02-21 | Takasago Thermal Engineering | An air filter, the manufacturing method, and a high efficiency air cleaning apparatus |
JP3977514B2 (ja) * | 1998-05-26 | 2007-09-19 | 高砂熱学工業株式会社 | 空気浄化フィルタ及びその製造方法及び高度清浄装置 |
JP4542248B2 (ja) | 2000-08-09 | 2010-09-08 | 新コスモス電機株式会社 | シリコーンガス吸着剤及びガスフィルタ及びガスセンサ |
CN101549233A (zh) * | 2000-10-17 | 2009-10-07 | 霍尼韦尔国际公司 | 化学反应过滤的装置和方法 |
US20050092176A1 (en) | 2001-06-08 | 2005-05-05 | Lefei Ding | Adsorptive filter element and methods |
JP4568481B2 (ja) | 2003-04-15 | 2010-10-27 | エスポ化学株式会社 | 汚染気体の洗浄システム及びこの洗浄システムを用いた汚染気体の洗浄方法 |
US6913654B2 (en) | 2003-06-02 | 2005-07-05 | Mykrolis Corporation | Method for the removal of airborne molecular contaminants using water gas mixtures |
US7393381B2 (en) | 2003-06-19 | 2008-07-01 | Applied Filter Technology, Inc. | Removing siloxanes from a gas stream using a mineral based adsorption media |
US7132011B2 (en) | 2003-09-02 | 2006-11-07 | Entegris, Inc. | Reactive gas filter |
MXPA06013601A (es) * | 2004-05-26 | 2007-03-15 | 3M Innovative Properties Co | Filtro polimerico poroso para gas y metodos de fabricacion del mismo. |
US20060042209A1 (en) * | 2004-08-27 | 2006-03-02 | Dallas Andrew J | Alkaline impregnated filter element, and methods |
WO2006125096A2 (en) * | 2005-05-16 | 2006-11-23 | Saes Getters S.P.A. | Gas purification with carbon based materials |
US20070068386A1 (en) | 2005-09-23 | 2007-03-29 | Mitariten Michael J | Landfill gas upgrading process |
CN101443279A (zh) * | 2006-04-20 | 2009-05-27 | 水安全公司 | 用于流体净化的组合物和方法 |
JP4956089B2 (ja) * | 2006-08-18 | 2012-06-20 | 吸着技術工業株式会社 | 吸着剤を利用したバイオ発酵ガスからのメタンの回収、精製方法 |
JP5080042B2 (ja) * | 2006-08-31 | 2012-11-21 | 大阪ガスケミカル株式会社 | シロキサンガス除去用吸着剤及びシロキサンガス除去用フィルタ |
EP2300400A4 (en) * | 2008-06-05 | 2012-03-21 | Huntsman Petrochemical Llc | PROCESS FOR PREPARING AND CLEANING PROPYLENE GLYCOL |
CN101502738B (zh) * | 2009-02-06 | 2011-05-11 | 南京大学 | 低浓度硅氧烷气体的净化方法及装置 |
JP2010259983A (ja) * | 2009-04-30 | 2010-11-18 | Canon Inc | 気体浄化装置 |
KR101644656B1 (ko) * | 2009-11-02 | 2016-08-10 | 삼성전자주식회사 | 선형 블록 부호를 사용하는 통신 시스템에서 패리티 검사 행렬을 생성하는 방법과 이를 이용한 채널 부호화/복호화 장치 및 방법 |
WO2011091090A2 (en) * | 2010-01-19 | 2011-07-28 | Zeropoint Clean Tech, Inc. | A process to sequester carbon, mercury, and other chemicals |
TWI538726B (zh) * | 2010-02-15 | 2016-06-21 | Nitta Corp | Chemical filters using acidic additives, and air purification methods |
PL2846895T3 (pl) | 2012-05-07 | 2022-04-19 | Donaldson Company, Inc. | Materiały, sposoby i urządzenia do usuwania zanieczyszczeń siloksanami |
-
2013
- 2013-03-15 PL PL13714434T patent/PL2846895T3/pl unknown
- 2013-03-15 KR KR1020147034307A patent/KR102066307B1/ko active IP Right Grant
- 2013-03-15 KR KR1020217018662A patent/KR102360223B1/ko active IP Right Grant
- 2013-03-15 EP EP21209475.9A patent/EP3995203A1/en active Pending
- 2013-03-15 KR KR1020227003767A patent/KR102503713B1/ko active IP Right Grant
- 2013-03-15 CN CN201380029993.9A patent/CN104334249A/zh active Pending
- 2013-03-15 KR KR1020207000468A patent/KR102163355B1/ko active IP Right Grant
- 2013-03-15 ES ES13714434T patent/ES2910994T3/es active Active
- 2013-03-15 WO PCT/US2013/032463 patent/WO2013169392A1/en active Application Filing
- 2013-03-15 JP JP2015511467A patent/JP2015518422A/ja active Pending
- 2013-03-15 US US14/399,480 patent/US9789435B2/en active Active
- 2013-03-15 KR KR1020237006126A patent/KR102664287B1/ko active IP Right Grant
- 2013-03-15 CN CN201811444539.0A patent/CN109395531A/zh active Pending
- 2013-03-15 EP EP13714434.1A patent/EP2846895B1/en active Active
- 2013-03-15 KR KR1020247014807A patent/KR20240068772A/ko active Search and Examination
- 2013-03-15 KR KR1020207028176A patent/KR102268189B1/ko active IP Right Grant
-
2017
- 2017-10-04 US US15/724,498 patent/US10130905B2/en active Active
-
2018
- 2018-11-02 US US16/179,145 patent/US10688433B2/en active Active
- 2018-11-30 JP JP2018225318A patent/JP6725627B2/ja active Active
-
2020
- 2020-05-30 US US16/888,688 patent/US11648501B2/en active Active
-
2023
- 2023-04-21 US US18/137,739 patent/US20230264135A1/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11290636A (ja) * | 1998-04-15 | 1999-10-26 | Shimizu Corp | 空気清浄装置 |
JP2000157826A (ja) * | 1998-11-26 | 2000-06-13 | Nec Corp | ケミカルフィルタ及びその交換判定法、並びに気体浄化装置 |
JP2001310109A (ja) * | 2000-02-21 | 2001-11-06 | Nichias Corp | ケミカルフィルタ |
JP2005506898A (ja) * | 2001-06-08 | 2005-03-10 | ドナルドソン カンパニー,インコーポレイティド | 吸着エレメントと吸着方法 |
WO2008024329A1 (en) * | 2006-08-22 | 2008-02-28 | Donaldson Company, Inc. | Biogas purification with siloxane removal |
US20110052462A1 (en) * | 2008-01-17 | 2011-03-03 | Carrier Corporation | Filters for removal of volatile siloxanes and lifetime extension of photocatalytic devices |
JP2011212531A (ja) * | 2010-03-31 | 2011-10-27 | Kuraray Chemical Co Ltd | アルキルシラノール除去材及びそれを製造する方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20200006178A (ko) | 2020-01-17 |
KR102664287B1 (ko) | 2024-05-10 |
KR102163355B1 (ko) | 2020-10-08 |
US10688433B2 (en) | 2020-06-23 |
US20180028960A1 (en) | 2018-02-01 |
PL2846895T3 (pl) | 2022-04-19 |
KR20240068772A (ko) | 2024-05-17 |
US11648501B2 (en) | 2023-05-16 |
US20230264135A1 (en) | 2023-08-24 |
EP3995203A1 (en) | 2022-05-11 |
US20200324243A1 (en) | 2020-10-15 |
KR102503713B1 (ko) | 2023-02-27 |
JP2015518422A (ja) | 2015-07-02 |
US9789435B2 (en) | 2017-10-17 |
KR102360223B1 (ko) | 2022-02-09 |
EP2846895B1 (en) | 2021-12-15 |
KR20230033020A (ko) | 2023-03-07 |
KR102066307B1 (ko) | 2020-02-11 |
EP2846895A1 (en) | 2015-03-18 |
CN104334249A (zh) | 2015-02-04 |
KR20150008167A (ko) | 2015-01-21 |
CN109395531A (zh) | 2019-03-01 |
US20150118137A1 (en) | 2015-04-30 |
WO2013169392A1 (en) | 2013-11-14 |
US20190070552A1 (en) | 2019-03-07 |
KR20200117054A (ko) | 2020-10-13 |
KR20220025097A (ko) | 2022-03-03 |
ES2910994T3 (es) | 2022-05-17 |
JP6725627B2 (ja) | 2020-07-22 |
US10130905B2 (en) | 2018-11-20 |
KR20210076211A (ko) | 2021-06-23 |
KR102268189B1 (ko) | 2021-06-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6725627B2 (ja) | シロキサン汚染物質の除去のための材料、方法、およびデバイス | |
Shah et al. | Hydrogen sulfide capture: from absorption in polar liquids to oxide, zeolite, and metal–organic framework adsorbents and membranes | |
Quang et al. | Thermally stable amine-grafted adsorbent prepared by impregnating 3-aminopropyltriethoxysilane on mesoporous silica for CO2 capture | |
JP6749919B2 (ja) | 窒素酸化物を除去するための炭素吸着剤とその作成方法 | |
Hwang et al. | Removal of dimethylsulfide by adsorption on ion-exchanged zeolites | |
KR100463048B1 (ko) | 케미컬 필터 미디엄, 케미컬 필터 및 이의 제조 방법 | |
Santos et al. | Contamination of zeolites used in oxygen production by PSA: effects of water and carbon dioxide | |
Cho et al. | Adsorptive removal of ultra-low concentration H2S and THT in CH4 with and without CO2 on zeolite 5A and 13X pellets | |
TW201100325A (en) | Methods of purifying COS | |
JP4726360B2 (ja) | 吸着材 | |
TW201318695A (zh) | 二氧化氮吸附劑、二氧化氮吸附裝置及二氧化氮之去除方法 | |
JP2011166085A (ja) | 金属触媒担持ケミカルフィルタ | |
JP5817780B2 (ja) | 気体脱湿装置 | |
JP2012130861A (ja) | 生命維持ガス浄化装置 | |
JP4778695B2 (ja) | 脱臭吸着剤 | |
JP2006061885A (ja) | 脱臭吸着剤 | |
JP2017070930A (ja) | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181219 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181219 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20191009 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191015 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200529 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200625 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6725627 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |