JP2019035930A - Polarized light irradiating device - Google Patents

Abstract

To provide a polarized light irradiating device with which it is possible to perform an exposure process on a large-sized workpiece in one step.SOLUTION: A first lamp 11 and a second lamp 12 whose longitudinal directions are approximately orthogonal to the conveyance direction of an object are arranged by being shifted in the conveyance direction and in approximately the orthogonal direction to the conveyance direction, a first end of the first lamp 11 overlapping the second lamp 12 and a second end of the second lamp 12 overlapping the first lamp 11 in the orthogonal direction. A first shading part is provided so as to overlap, in a plan view, a first region that is a portion of a long belt-like region in the orthogonal direction in which light from the first lamp 11 is shined, and a second shading part is provided so as to overlap a second region that is a portion of the long belt-like region in the orthogonal direction in which light from the second lamp is shined, the positions of the first and second regions in the orthogonal direction being approximately the same. The sum of the areas of the first and second shading parts is approximately the same as the areas of the first and second regions.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a polarized light irradiation apparatus.

  In Patent Document 1, linear lamps extending in a direction orthogonal to the transport direction of the photo-alignment film are arranged in multiple stages along the transport direction of the photo-alignment film, and a plurality of wire grids are formed along the direction in which the light source extends. A polarized light irradiation apparatus for photo-alignment in which polarizing elements are arranged is disclosed.

Japanese Patent No. 4815995

  In recent years, with an increase in the size of a display panel such as a liquid crystal display, there is a strong demand for performing exposure processing on a large workpiece having a width exceeding 3 m. However, it is difficult to manufacture a lamp having a length of about 3 m due to problems such as bending in manufacturing the lamp.

  In the invention described in Patent Document 1, since the width of the work (the length in the direction orthogonal to the conveyance direction) is narrower than the width of the lamp, it is possible to meet the demand for performing an exposure process on a large work. Can not.

  This invention is made | formed in view of such a situation, and it aims at providing the polarized light irradiation apparatus which can perform an exposure process with respect to a large sized workpiece | work at once.

  In order to solve the above-described problem, a polarized light irradiation apparatus according to the present invention includes, for example, a stage on which an object to be irradiated with polarized light is placed, and a longitudinal direction that is substantially orthogonal to the conveyance direction of the object. Polarized light emitted from the first lamp and the second lamp provided between the first lamp and the second lamp, and between the first lamp, the second lamp and the stage. A polarizing member that is provided between the first lamp and the stage, and is provided between the second lamp and the stage, a first light-shielding portion that shields light emitted from the first lamp, A second light-shielding portion that shields light emitted from the second lamp, and the first lamp and the second lamp are shifted in an orthogonal direction that is substantially perpendicular to the transport direction and the transport direction. Arranged in the orthogonal direction A first end of the first lamp overlaps with the second lamp, a second end of the second lamp overlaps with the first lamp, and the first light-shielding portion is separated from the first lamp in plan view. Is provided so as to overlap a first region that is a part of a band-like region that is long in the orthogonal direction, and the second light-shielding unit is irradiated with light from the second lamp in plan view. The first region and the second region have substantially the same position in the orthogonal direction, and are overlapped with a second region that is a part of a belt-like region that is long in the orthogonal direction. The sum of the area of the light shielding part and the area of the second light shielding part is substantially the same as the areas of the first region and the second region.

  According to the polarized light irradiation apparatus according to the present invention, the first lamp and the second lamp whose longitudinal direction is substantially orthogonal to the conveyance direction of the object are in the orthogonal direction that is the direction substantially orthogonal to the conveyance direction and the conveyance direction. In the orthogonal direction, the first end of the first lamp overlaps the second lamp, and the second end of the second lamp overlaps the first lamp. In plan view, the first light-shielding portion is provided so as to overlap with the first region that is a part of the belt-like region long in the orthogonal direction to which the light from the first lamp is irradiated, and the light from the second lamp is irradiated. A second light-shielding portion is provided so as to overlap with a second region that is a part of a belt-like region that is long in the orthogonal direction, and the first region and the second region have substantially the same position in the orthogonal direction. In this way, by arranging the first lamp and the second lamp along the conveyance direction and the orthogonal direction, and providing the first light shielding part and the second light shielding part in the first region and the second region (joint region), Two lamps can be inherited. The sum of the area of the first light shielding part and the area of the second light shielding part is substantially the same as the areas of the first region and the second region. As a result, the sum of the integrated light amount emitted from the first lamp in the joint region and the integrated light amount emitted from the second lamp is the light emitted from the first lamp in the region other than the joint region. The integrated light amount and the integrated light amount of the light emitted from the second lamp can be made substantially the same, and the exposure amount unevenness in the joint region can be eliminated. Therefore, it is possible to perform the exposure process once for a large workpiece having a width wider than the length of the first lamp and the second lamp.

  Here, in plan view, the first light-shielding portion has a first side that is oblique with respect to the transport direction, and the second light-shielding portion has a second side that is oblique with respect to the transport direction, The shape in which the first light-shielding portion and the second light-shielding portion are arranged so that the first side and the second side are substantially matched may be a substantially rectangular shape. Thereby, even when the positions of the first light-shielding part and the second light-shielding part are shifted in the rotation direction or in the parallel direction, the influence on the exposure amount and the optical characteristics can be reduced.

  Here, the illuminance distribution of the first lamp in plan view includes a third region that is substantially parallel along the longitudinal direction of the first lamp, and a fourth region that is not substantially parallel along the longitudinal direction of the first lamp. The second lamp has an illuminance distribution in plan view having a fifth region that is substantially parallel along the longitudinal direction of the second lamp and a sixth region that is not substantially parallel along the longitudinal direction of the first lamp. A region where light is irradiated with substantially the same illuminance as directly below the first lamp, and the end on the first end side of the first side is the third region and the fourth region In the region where light is irradiated with substantially the same illuminance as directly below the second lamp, the ends of the second side on the second end side are the fifth region and the sixth region. It may be on the boundary line. Thereby, the distribution of the exposure amount of the light irradiated to the object can be made substantially the same as the distribution of the exposure amount when the light is irradiated from one long lamp.

  Here, when viewed from the transport direction, the illuminance distributions of the first lamp and the second lamp are each substantially trapezoidal, with the central portion being high and decreasing toward the end. When the height of the bottom portion is 100, the line that is substantially parallel to the bottom of the substantially trapezoidal shape and exists at a height of about 90 to about 99 intersects the line indicating the illuminance distribution. The position in the orthogonal direction may substantially coincide with the end on the first end side of the first side and the end on the second end side of the second side. Thereby, the distribution of the exposure amount of the light irradiated to the object can be made substantially the same as the distribution of the exposure amount when the light is irradiated from one long lamp.

  Here, between the first lamp and the stage, a first aperture provided so as to cover a region irradiated with light from the first lamp, and between the second lamp and the stage. A second aperture provided so as to cover a region irradiated with light from the second lamp, wherein the first light-shielding portion and the second light-shielding portion are dot patterns including a plurality of dots. The first aperture includes a substantially plate-shaped first light-transmitting member and the first light-shielding portion formed on the first light-transmitting member, and the second aperture includes a substantially plate-shaped second light-transmitting member. A light-transmitting member and the second light-shielding portion formed on the second light-transmitting member. In the first region, the number of dots per unit area increases as the distance from the first end increases. The number of dots per unit area increases as the distance from the first end increases. The number of dots per unit area gradually changes so as to disappear, and in the second region, the number of dots per unit area increases as the distance from the second end increases, and the distance from the second end increases. The number of dots per unit area may gradually change so that the number of dots per unit area decreases. Thereby, the exposure amount unevenness in the joint area can be eliminated.

  Here, when the distance between the first lamp and the object is about 150 mm to about 160 mm, the length of the first region is about 8% to about 15% of the length in the longitudinal direction of the first lamp. When the distance between the second lamp and the object is approximately 150 mm to approximately 160 mm, the length of the second region is approximately 8% to approximately 15% of the length in the longitudinal direction of the second lamp. It may be. As described above, when the first lamp or the second lamp deteriorates, the first light shielding part or the second light shielding part covers a region that becomes black and the exposure amount decreases, thereby causing the deterioration of the first lamp or the second lamp. Since the reduction of the exposure amount does not affect the exposure, the uneven exposure amount can be eliminated.

  Here, in a plan view, the shape of the first light-shielding part is approximately 180 degrees with respect to the second light-shielding part about a second point where the second side and the central axis of the second lamp intersect. The shape of the second light-shielding part is approximately 180 degrees around the first point, which is the point where the first side and the central axis of the first lamp intersect. It may be a rotated shape. Thereby, the dispersion | variation in the polarization axis of the polarized light irradiated to a target object, ie, an optical characteristic nonuniformity, can be eliminated.

  Here, you may have a moving part which moves the said 1st lamp | ramp or the said 2nd lamp | ramp in the direction substantially orthogonal to the said conveyance direction. This eliminates the need to use a region that becomes black and the exposure amount decreases when the first lamp or the second lamp deteriorates. Therefore, exposure amount unevenness can be eliminated by preventing the exposure amount from being lowered by the deterioration of the first lamp or the second lamp.

  According to the present invention, an exposure process can be performed on a large workpiece at a time.

It is a front view which shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. It is a top view which shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. It is a principal part perspective view which shows the outline when the polarized light irradiation part 10 and the workpiece | work W are seen from the side. It is a figure which shows arrangement | positioning of the apertures 17 and 18 in planar view of the polarized light irradiation apparatus 1. FIG. It is a figure which shows the relationship between the apertures 17 and 18 and the integrated light quantity of the light irradiated to the workpiece | work W, (A) shows arrangement | positioning of the apertures 17 and 18 in planar view, (B) is every lamp | ramp 11 and 12 (C) indicates the total of the integrated light amounts of the lamps 11 and 12. It is a figure which shows the relationship between the polarization axis of light, and the position of the apertures 17 and 18. FIG. It is an example of the illumination intensity distribution of the lamps 11 and 12 in planar view. It is a figure which shows typically the relationship between the apertures 17A and 18A in planar view of the polarized light irradiation apparatus 2, and illuminance distribution. It is a figure which shows typically the relationship between the apertures 17B and 18B in planar view of the polarized light irradiation apparatus 2A concerning a modification, and illumination intensity distribution. (A) shows the relationship between the longitudinal position of the lamps 11 and 12 and the illuminance distribution, (B) shows the relationship between the illuminance distribution and the aperture 17C, and (C) shows the relationship between the illuminance distribution and the aperture 18C. Indicates. It is a figure which shows arrangement | positioning of the apertures 17C and 18C in planar view of the polarized light irradiation apparatus 3. FIG. It is a figure which shows arrangement | positioning of 10 A of polarized light irradiation parts in planar view of the polarized light irradiation apparatus. It is a top view which shows the outline of the apertures 17E and 18E. It is a figure which shows the relationship between the apertures 17E and 18E and the integrated light quantity of the light irradiated to the workpiece | work W, (A) shows arrangement | positioning of the apertures 17E and 18E in planar view, (B) is lamp | ramp 11 and 12 every (C) indicates the total of the integrated light amounts of the lamps 11 and 12.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The polarized light irradiation apparatus of the present invention, for example, obtains polarized light by passing light from a light source through a polarizing film, and irradiates the exposed surface of a glass substrate or the like (hereinafter referred to as a work W) with a liquid crystal panel. An alignment film for use is generated.

<First Embodiment>
FIG. 1 is a front view showing an outline of a polarized light irradiation apparatus 1 according to the first embodiment. FIG. 2 is a plan view showing an outline of the polarized light irradiation apparatus 1 according to the first embodiment. Here, the conveyance direction of the workpiece W is the y direction, the direction orthogonal to the conveyance direction is the x direction, and the vertical direction is the z direction.

  The polarized light irradiation apparatus 1 mainly includes a polarized light irradiation unit 10, a stage 20, and a stage driving unit 30.

  The polarized light irradiation unit 10 irradiates the work W with polarized light. The polarized light irradiation unit 10 includes two lamps 11 and 12. The lamps 11 and 12 are rod-shaped lamps having a long emission length of about 1500 mm to 2000 mm, and irradiate light that is not polarized (for example, ultraviolet light). For the lamps 11 and 12, a long arc lamp that efficiently emits short-wavelength ultraviolet light (for example, light having a wavelength of 254 nm) necessary for the photo-alignment treatment can be used. Electrodes 11a, 11b, 12a and 12b are provided at both ends of the lamps 11 and 12, respectively.

  The lamps 11 and 12 are provided so that the longitudinal direction is substantially orthogonal to the conveyance direction (y direction) of the workpiece W (substantially along the x direction). The lamps 11 and 12 are arranged so as to be shifted in the x direction and the y direction.

  FIG. 3 is a perspective view of a main part showing an outline when the polarized light irradiation unit 10 and the workpiece W are viewed from the side. The polarized light irradiation unit 10 mainly includes lamps 11 and 12, a reflector 13, a specific wavelength transmission filter 14, a polarizing member 15, a cover glass 16, and apertures 17 and 18.

  A specific wavelength transmission filter 14, a polarizing member 15, and a cover glass 16 are provided on the lower side (−z side) of the lamps 11 and 12, that is, between the lamps 11 and 12 and the stage 20, respectively. Light emitted from the lamps 11 and 12 is reflected by the reflector 13, passes through the specific wavelength transmission filter 14, the polarizing member 15, and the like, and is applied to the workpiece W.

  The reflector 13 has a substantially bowl shape in a side view and a substantially rectangular shape in a plan view. The reflector 13 reflects the light from the lamps 11 and 12 so that the light from the lamps 11 and 12 is concentrated on the irradiation region.

  The specific wavelength transmission filter 14 is a filter that transmits only light in a specific wavelength range and absorbs light of other wavelengths. In the specific wavelength transmission filter 14, a filter layer of a band pass filter that transmits only light in a specific wavelength range is formed on a transparent substrate made of plate-like glass (quartz glass or the like). However, the filter formed on the transparent substrate is not limited to the band pass filter, and may be a low cut filter or a reflection filter, for example.

  The polarizing member 15 is formed by arranging a plurality of wire grid polarizers with little incident angle dependency along the x direction. A wire grid polarizer has a metal wire formed on the surface of a transparent substrate. By making the pitch of the metal wire equal to or less than the wavelength of incident light, a polarization component substantially parallel to the longitudinal direction of the metal wire is obtained. Reflects and passes a polarization component substantially orthogonal to the longitudinal direction of the metal wire. The polarizing member 15 is not limited to a wire grid polarizer.

  A cover glass 16 is provided below the polarizing member 15. However, the cover glass 16 is not essential.

  Apertures 17 and 18 are provided below the cover glass 16, that is, between the cover glass 16 and the stage 20. The aperture 17 is provided below the lamp 11, and the aperture 18 is provided below the lamp 12. The apertures 17 and 18 will be described in detail later. In addition, the apertures 17 and 18 may be provided not between the cover glass 16 and the stage 20 but between the specific wavelength transmission filter 14 and the polarizing member 15, for example.

  Returning to the description of FIGS. The stage 20 is provided to be movable in the y direction. On the upper surface of the stage 20, a work W to be irradiated with polarized light is placed.

  The stage drive unit 30 includes a stage guide rail 31 extending in the y direction, a stage scan shaft 32, and a drive unit 33 having an actuator and the like.

  The stage 20 is provided so as to be movable along the stage guide rail 31 by driving means (not shown) (see thick arrows in FIGS. 1 and 2). The drive part 33 moves the stage 20 along the stage guide rail 31 (namely, conveyance direction) (refer the thick arrow of FIG. 1).

  When the stage 20 moves in the y direction along the stage guide rail 31, the position of the stage 20 on the stage scan shaft 32 is detected by a position detector (not shown). Thereby, the position of the stage 20 in the y direction can be adjusted. In addition, since the movement and positioning of the stage 20 are already well-known techniques, description is abbreviate | omitted.

  The robot 40 is a moving unit that moves the workpiece W to the stage 20 and moves the workpiece W from the stage 20. Since the robot 40 is already known, a description thereof will be omitted. The position of the robot 40 is not limited to the position shown in FIGS. Further, the moving means for moving the workpiece W to the stage 20 and moving the workpiece W from the stage 20 is not limited to the robot 40.

  The polarized light irradiation unit 10, the stage 20, and the stage driving unit 30 are provided inside the apparatus frame 50. The apparatus frame 50 is provided with an opening (not shown) through which an operator enters and exits and the robot 40 moves the workpiece W relative to the stage 20.

  Next, the apertures 17 and 18 will be described in detail. FIG. 4 is a diagram showing the arrangement of the apertures 17 and 18 in a plan view (when viewed from the + z direction). In FIG. 4, the lamps 11 and 12 are indicated by two-dot chain lines. In FIG. 4, the light shielding portions 17a and 18a are shaded for explanation.

  The apertures 17 and 18 have light shielding portions 17a and 18a and openings 17b and 18b, respectively. The apertures 17 and 18 are provided so as to cover regions irradiated with light from the lamps 11 and 12 in plan view.

  The light shielding part 17a is provided on the lamp 12 side (+ x side) of the opening part 17b, and the light shielding part 18a is provided on the lamp 11 side (−x side) of the opening part 18b.

  Here, the regions irradiated with the light from the lamps 11 and 12 are strip-like regions that are long in the x direction in plan view. The region irradiated with light from the lamp 11 substantially coincides with the region where the light shielding portion 17a and the opening portion 17b are arranged in FIG. Further, the region irradiated with the light from the lamp 12 substantially coincides with the region where the light shielding portion 18a and the opening 18b are arranged in FIG.

  In the x direction, the end 11c (the end on the + x side) of the lamp 11 is at a position overlapping the lamp 12, and this position is set to x = X1. Further, in the x direction, the end 12c (end on the −x side) of the lamp 12 is at a position overlapping the lamp 11, and this position is set to x = X2.

  In plan view, the light-shielding portion 17a is provided so as to overlap with the region A1 on the + x side in the belt-like region long in the x direction irradiated with light from the lamp 11. Further, in plan view, the light shielding portion 18a is provided so as to overlap the −x side region A2 in the belt-like region long in the x direction irradiated with the light from the lamp 12. Regions A1 and A2 are part of a strip-like region that is long in the x direction and irradiated with light from the lamps 11 and 12, respectively. Although the areas A1 and A2 cannot be visually recognized, the ends of the areas A1 and A2 are indicated by dotted lines in FIG. The region A1 and the region A2 have substantially the same position in the x direction, and the regions A1 and A2 are defined as joint regions.

  The light shielding portions 17a and 18a have sides 17m and 18m that are oblique to the x direction and the y direction. The sides 17m and 18m are inclined by approximately 45 degrees with respect to the x direction and the y direction, respectively. However, the inclination of the sides 17m and 18m is not limited to approximately 45 degrees.

  Each of the light shielding portions 17a and 18a has a shape obtained by cutting a substantially rectangular plate-shaped member obliquely with respect to the y direction. In other words, the shape in which the light shielding part 17a and the light shielding part 18a are arranged with the side 17m and the side 18m substantially aligned with each other is a substantially rectangular shape. The sum of the area of the light shielding part 17a and the area of the light shielding part 18a is substantially the same as the area of the regions A1 and A2.

  The position of the end on the + x side of the side 17m is x = X4, and the position of the end on the −x side of the side 18m is x = X3. When the distance H (see FIG. 3) between the lamps 11 and 12 and the workpiece W is approximately 150 mm to approximately 160 mm, the distance d between the position X2 and the position X3 and the distance d between the position X1 and the position X4 are as follows. It is about 8% to about 15% of the length of 12 longitudinal directions (here, the x direction). For example, when the length of the lamps 11 and 12 is about 2500 mm, the distance d is about 200 mm, which is about 8% of the length of the lamps 11 and 12. For example, when the length of the lamps 11 and 12 is approximately 2250 mm, the distance d is approximately 225 mm, which is approximately 10% of the length of the lamps 11 and 12. For example, when the length of the lamps 11 and 12 is about 1500 mm, the distance d is about 200 mm, which is about 13.3% of the length of the lamps 11 and 12.

  The region of about 8% to about 15% of the length in the longitudinal direction of the lamps 11 and 12 from the ends of the lamps 11 and 12 means that when the lamps 11 and 12 deteriorate, the lamps become black and the exposure amount decreases. It is an area. By covering this area with the light shielding portions 17a and 18a, the exposure amount decrease due to the deterioration of the lamps 11 and 12 does not affect the exposure of the workpiece W, so that the exposure amount unevenness can be eliminated.

  The operation of the polarized light irradiation device 1 will be described. While irradiating light from the polarized light irradiation unit 10, the light irradiated from the polarized light irradiation unit 10 while moving (one reciprocation) the stage 20 (that is, the workpiece W) through the driving unit 33 in the y direction that is the transport direction. An exposure process for generating an alignment film or the like is performed by irradiating the exposed surface of the workpiece W.

  5A and 5B are diagrams showing the relationship between the apertures 17 and 18 and the integrated light quantity of light irradiated to the workpiece W. FIG. 5A shows the arrangement of the apertures 17 and 18 in a plan view, and FIG. 11 and 12 show the integrated light amount, and (C) shows the total integrated light amount of the lamps 11 and 12. The light irradiated from the lamp 11 passes through the opening 17b of the aperture 17 and is irradiated to the workpiece W. However, since the light is blocked by the light blocking portion 17a, the integrated light amount gradually decreases toward the + x side in the area A1. The light irradiated from the lamp 12 passes through the opening 18b of the aperture 18 and is irradiated to the workpiece W. However, since the light is blocked by the light blocking portion 18a, the integrated light amount gradually increases toward the −x side in the region A2. Get smaller.

  Since the sum of the area of the light shielding part 17a and the area of the light shielding part 18a is substantially the same as the area of the areas A1 and A2, the integrated light amount emitted from the lamp 11 and the lamp 12 irradiated in the joint area. The sum with the integrated light quantity of light is substantially the same as the integrated light quantity of light emitted from the lamp 11 and the integrated light quantity of light emitted from the lamp 12 in the region other than the joint region. Thereby, the exposure amount unevenness in the joint area can be eliminated.

  FIG. 6 is a diagram showing the relationship between the polarization axis of the light irradiated from the lamps 11 and 12 and polarized by the polarizing member 15 and the positions of the apertures 17 and 18. The shape of the light-shielding portion 17a in plan view is a shape obtained by rotating the light-shielding portion 18a approximately 180 degrees around the point 18s where the central axis ax2 of the lamp 12 and the side 18m intersect, and the shape of the light-shielding portion 18a in plan view. Is a shape obtained by rotating the light-shielding portion 17a about 180 degrees around a point 17s where the central axis ax1 of the lamp 11 and the side 17m intersect, so that the light-shielding portions 17a and 18a are displayed in a downward-sloping manner in FIG. The polarized light having the polarization axis is mainly shielded, and the work W is mainly irradiated with the polarized light having the polarization axis displayed ascending in FIG. Therefore, it is possible to eliminate variations in the polarization axis of the polarized light applied to the workpiece W, that is, uneven optical characteristics.

  According to the present embodiment, a plurality (two in this case) of lamps 11 and 12 are arranged along the x direction and the y direction, and the light shielding portions 17a and 18a are provided in the joint region. Two lamps can be connected with no characteristic unevenness. Therefore, an exposure process can be performed on a large workpiece at once (one reciprocation).

  Further, according to the present embodiment, when the lamps 11 and 12 are deteriorated, the lamps become black and the exposure amount decreases (in the present embodiment, from the ends of the lamps 11 and 12, the lamps 11 and 12 Since a region of about 8% to about 15% of the length in the longitudinal direction) is covered with the light shielding portions 17a and 18a, the exposure process can be performed without being affected even if the exposure amount is reduced due to the deterioration of the lamps 11 and 12.

  Further, according to the present embodiment, the light-shielding portions 17a and 18a have sides 17m and 18m that are oblique with respect to the x and y directions, so that the positions of the apertures 17 and 18 are shifted in the rotational direction or in the y direction. Even when they are shifted, the influence on the exposure amount and the optical characteristics can be reduced.

  In the present embodiment, the light from the lamps 11 and 12 is partially covered by providing the apertures 17 and 18 having the light shielding parts 17a and 18a and the openings 17b and 18b. Only the light shielding portions 17a and 18a (the openings 17b and 18b may be omitted) may be provided in a portion where it is desired to block the light.

<Second Embodiment>
In the first embodiment of the present invention, the regions of about 8% to about 15% of the lengths of the lamps 11 and 12 from the ends of the lamps 11 and 12 are covered with the light shielding portions 17a and 18a. The arrangement of the light shielding portions 17a and 18a is not limited to this.

  In the second embodiment, a region covered by the light shielding portions 17a and 18a is determined based on the illuminance distribution of the lamps 11 and 12. Hereinafter, the polarized light irradiation apparatus 2 of 2nd Embodiment is demonstrated. Since the difference between the polarized light irradiation apparatus 1 of the first embodiment and the polarized light irradiation apparatus 2 of the second embodiment is only the aperture, the polarized light irradiation apparatus of the second embodiment will be described below. The apertures 17A and 18A in FIG. Further, the same parts as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  First, the illuminance distribution of light emitted from the lamps 11 and 12 will be described. FIG. 7 is an example of the illuminance distribution of the lamps 11 and 12 in plan view. The illuminance distribution of the lamps 11 and 12 has a region I that is substantially parallel along the longitudinal direction of the lamps 11 and 12 and a region II that is not substantially parallel along the longitudinal direction of the lamps 11 and 12. Note that the upper and lower ends of the illuminance distribution in FIG. 6 are shielded by both end faces of the reflector 13 (not shown in FIG. 6).

  FIG. 8 is a diagram schematically showing the relationship between the apertures 17A and 18A and the illuminance distribution in plan view. In FIG. 8, the illuminance distribution is illustrated by a two-dot chain line for explanation. As with the apertures 17 and 18, the apertures 17A and 18A are provided below the lamps 11 and 12, respectively, and are provided so as to cover regions irradiated with light from the lamps 11 and 12. Apertures 17A and 18A have light shielding portions 17c and 18c and openings 17d and 18d, respectively.

  The light shielding part 17c is provided on the + x side of the opening part 17d, and the light shielding part 18c is provided on the −x side of the opening part 18d. The light shielding parts 17c and 18c have sides 17n and 18n that are oblique to the x direction and the y direction. The shape in which the side 17n and the side 18n are substantially matched and the light shielding part 17c and the light shielding part 18c are arranged is a substantially rectangular shape. The sum of the area of the light shielding portion 17c and the area of the light shielding portion 18c is substantially the same as the area of the joint region A3.

  The shape of the light-shielding portion 17c in plan view is a shape obtained by rotating the light-shielding portion 18c about 180 degrees around a point 18t where the central axis ax2 of the lamp 12 and the side 18n intersect, and the shape of the light-shielding portion 18c in plan view. Is a shape obtained by rotating the light shielding portion 17c by approximately 180 degrees around a point 17t where the central axis ax1 of the lamp 11 and the side 17n intersect.

  The + x side end of the side 17n is on the boundary line between the region I and the region II, and the −x side end of the side 18m is on the boundary line between the region I and the region II. Therefore, the sum of the integrated light amount emitted from the lamp 11 in the joint region A3 and the integrated light amount emitted from the lamp 12 is the sum of the light emitted from the lamp 11 in the region other than the joint region A3. The amount of light and the integrated amount of light emitted from the lamp 12 are substantially the same.

  According to the present embodiment, the distribution of the exposure amount of light irradiated onto the workpiece W is substantially the same as the distribution of the exposure amount when light is irradiated from one long lamp. On the other hand, an appropriate exposure process can be performed.

  In the present embodiment, the end on the + x side of the side 17n is on the boundary line between the region I and the region II, and the end on the −x side of the side 18n is on the boundary line between the region I and the region II. However, for example, as shown in FIG. 9, an aperture 17B having a light shielding portion 17e in which a point 17u where the central axis ax1 of the lamp 11 intersects the side 17o is on the boundary line between the region I and the region II, An aperture 18B having a light shielding portion 18e in which a point 18u where the central axis ax2 and the side 18o intersect is on the boundary line between the region I and the region II may be used.

  The apertures 17B and 18B have light shielding portions 17e and 18e and openings 17f and 18f. The light shielding portions 17e and 18e have a substantially triangular shape in plan view. The shape of the light-shielding part 17e in plan view is a shape obtained by rotating the light-shielding part 18e about 180 degrees around the point 18u, and the shape of the light-shielding part 18e in plan view is about 180 around the point 17u. It is a shape rotated by a degree. In this case, although the exposure amount of the light irradiated to the workpiece W in the joint area is slightly reduced, the distribution of the exposure amount of the light irradiated to the workpiece W is a case where the light is irradiated from one long lamp. The lamps 11 and 12 can be used in a wider range with the exposure amount distribution being substantially the same.

<Third Embodiment>
In the second embodiment of the present invention, the shape of the apertures 17A and 18A is determined based on the illuminance distribution of the lamps 11 and 12 in plan view, but the shape of the aperture is not limited to this.

  In the third embodiment, the shape of the aperture is determined based on the illuminance distribution of the lamps 11 and 12 when viewed substantially along the transport direction. Hereinafter, the polarized light irradiation device 3 of the third embodiment will be described. Since the difference between the polarized light irradiation apparatus 1 of the first embodiment and the polarized light irradiation apparatus 3 of the third embodiment is only the aperture, the polarized light irradiation apparatus of the third embodiment will be described below. The apertures 17C and 18C in FIG. Further, the same parts as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  10A shows the relationship between the longitudinal position of the lamps 11 and 12 and the illuminance distribution, FIG. 10B shows the relationship between the illuminance distribution and the aperture 17C, and FIG. 10C shows the illuminance distribution. And the aperture 18C. FIG. 10 illustrates a case where the radiation angle from a certain point of the lamps 11 and 12 is 30 degrees.

  A two-dot chain line in FIG. 10A shows a state of light emitted from the ends of the light emitting regions of the lamps 11 and 12. The area outside the two-dot chain line in FIG. 10A is only light emitted from the inside, and there is no light emitted from the outside. Therefore, when viewed from the y direction, the illuminance distribution of the lamps 11 and 12 has a substantially trapezoidal shape in which the central portion is high and decreases toward the end. Note that the left and right ends of the illuminance distribution in FIG. 10A are shielded by both end faces of the reflector 13 (not shown in FIG. 10).

  Apertures 17C and 18C have light shielding portions 17g and 18g and openings 17h and 18h, respectively. The light shielding part 17g is provided on the + x side of the opening 17h, and the light shielding part 18g is provided on the −x side of the opening 18h. The light shielding portions 17g and 18g have sides 17p and 18p that are oblique to the x direction and the y direction. The shape in which the side 17p and the side 18p are substantially matched and the light shielding part 17g and the light shielding part 18g are arranged is a substantially rectangular shape.

  The line l1 is a line substantially parallel to the bottom of the substantially trapezoidal shape, and the height of approximately 90 to approximately 99 when the height of the upper base portion of the substantially trapezoidal shape indicating the illuminance distribution of the lamps 11 and 12 is 100. Exists. The positions in the x direction of the points P1 and P2 where the line l1 and the line indicating the illuminance distribution intersect substantially coincide with the + x side end of the side 17p and the −x side end of the side 18p.

  FIG. 11 is a diagram showing the arrangement of the apertures 17C and 18C in plan view. The light shielding part 17g is provided so as to overlap with the area A4, and the light shielding part 18g is provided so as to overlap with the area A5. The region A4 and the region A5 have substantially the same position in the x direction, and the regions A4 and A5 are defined as joint regions. The sum of the area of the light shielding part 17g and the area of the light shielding part 18g is substantially the same as the areas of the regions A4 and A5.

  The shape of the light-shielding part 17g in plan view is a shape obtained by rotating the light-shielding part 18g approximately 180 degrees around the point 18v where the central axis ax2 of the lamp 12 and the side 18p intersect, and the shape of the light-shielding part 18g in plan view. Is a shape obtained by rotating the light shielding portion 17g by approximately 180 degrees around a point 17v where the central axis ax1 of the lamp 11 and the side 17p intersect.

  According to the present embodiment, since an area having an illuminance of approximately 90 to approximately 99 when the illuminance at the center of the lamps 11 and 12 is 100 is used, the light irradiated from the two lamps 11 and 12 is used. The distribution of exposure amount can be made substantially the same as the distribution of exposure amount when light is irradiated from one long lamp. Therefore, an appropriate exposure process can be performed on a large workpiece.

<Fourth embodiment>
In the first embodiment of the present invention, the regions where the exposure amount decreases when the lamps 11 and 12 deteriorate are not covered by the light shielding portions 17a and 18a, but the lamps 11 and 12 deteriorate. The form of not using the region where the exposure amount sometimes decreases is not limited to this.

  In the fourth embodiment, the lamps 11 and 12 are moved so that the deteriorated portion is not used. Hereinafter, the polarized light irradiation apparatus 4 of 4th Embodiment is demonstrated.

  Since the difference between the polarized light irradiation device 1 of the first embodiment and the polarized light irradiation device 4 of the fourth embodiment is only the configuration of the polarized light irradiation unit, hereinafter, the fourth embodiment will be described. Only the polarized light irradiation unit 10A in the polarized light irradiation device 4 will be described, and the illustration and description of the others will be omitted. Further, the same parts as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 12 is a diagram illustrating the arrangement of the polarized light irradiation unit 10A in plan view. The polarized light irradiation unit 10A mainly includes lamps 11 and 12, a reflector 13 (not shown), a specific wavelength transmission filter 14 (not shown), a polarizing member 15 (not shown), and a cover glass 16 (not shown). , Apertures 17D and 18D, and a lamp moving unit (not shown).

  Apertures 17D and 18D have light shielding portions 17i and 18i and openings 17j and 18j, respectively. The light shielding part 17i is provided on the + x side of the opening part 17j, and the light shielding part 18i is provided on the −x side of the opening part 18j. The light shielding portions 17i and 18i have a substantially triangular shape in plan view, and the shape in which the light shielding portions 17i and 18i are arranged with the oblique sides substantially coincided with the x direction and the y direction of the light shielding portions 17i and 18i is as follows. It is a substantially rectangular shape.

  The lamp moving unit moves the lamps 11 and 12 in the x direction. Since a known technique can be used for the lamp moving unit, description thereof is omitted.

  The lamps 11 and 12 are initially located at positions overlapping with the apertures 17D and 18D (indicated by dotted lines in FIG. 12). When the lamps 11 and 12 deteriorate and the ends of the lamps 11 and 12 become black, the lamp moving unit moves the lamp 11 in the + x direction and moves the lamp 12 in the −x direction (indicated by a solid line in FIG. 12). . At this time, the lamps 11 and 12 are arranged so that the light shielding portions 17i and 18i cover the black portions of the lamps 11 and 12, respectively.

  According to the present embodiment, the lamps 11 and 12 are deteriorated in order not to use the region where the exposure amount decreases when the lamps 11 and 12 deteriorate, by moving the lamps 11 and 12 in the x direction. The decrease in the exposure amount due to the above does not affect the exposure of the workpiece W, and the uneven exposure amount can be eliminated.

<Fifth embodiment>
In the first embodiment of the present invention, the apertures 17 and 18 have substantially plate-shaped light shielding portions 17a and 18a having sides 17m and 18m oblique to the x and y directions, respectively. Is not limited to this.

  In the fifth embodiment, a substantially plate-shaped light shielding portion is not used. Hereinafter, the polarized light irradiation apparatus 5 of 5th Embodiment is demonstrated. Since the difference between the polarized light irradiation apparatus 1 of the first embodiment and the polarized light irradiation apparatus 5 of the fifth embodiment is only the aperture, hereinafter, the polarized light irradiation apparatus of the fifth embodiment. The apertures 17E and 18E in FIG. Further, the same parts as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 13 is a plan view schematically showing the apertures 17E and 18E. The aperture 17E is provided below the lamp 11 so as to cover a region irradiated with light from the lamp 11 in plan view. The aperture 18E is provided below the lamp 12 so as to cover a region irradiated with light from the lamp 12 in plan view.

  Apertures 17E and 18E have light shielding portions 17k and 18k, and substantially plate-like light transmitting members 17l and 18l, respectively. The light shielding part 17k is provided so as to overlap with the area A1, and the light shielding part 18k is provided so as to overlap with the area A2.

  The light shielding portions 17k and 18k are dot patterns including a plurality of dots. The light shielding part 17k is formed on the light transmitting member 17l, and the light shielding part 18k is formed on the light transmitting member 18l.

  In the area A1, the number of dots per unit area gradually increases so that the number of dots per unit area increases as it approaches the end 11c, and the number of dots per unit area decreases as the distance from the end 11c increases. To do. Thereby, in the area A1, the dot pattern at the position adjacent to the end 11c is the darkest, and the dot pattern gradually becomes thinner as the distance from the end 11c increases.

  In the area A2, the number of dots per unit area gradually increases so that the number of dots per unit area increases as the distance from the edge 12c increases, and the number of dots per unit area decreases as the distance from the edge 12c increases. To change. In FIG. 13, the number of dots in the region F1 near the end 12c is larger than the number of dots in the region F2 far from the end 12c. Thereby, in the area A2, the dot pattern at the position adjacent to the end 12c is the darkest, and the dot pattern gradually becomes thinner as the distance from the end 12c increases.

  In FIG. 13, for the sake of illustration, the dot pattern density changes stepwise, but in reality the dot pattern density changes continuously. Although it is possible to change the density of the dot pattern step by step, it is desirable to change the density of the dot pattern continuously in order to eliminate unevenness in the light shielding amount.

  14A and 14B are diagrams showing the relationship between the apertures 17E and 18E and the integrated light quantity of light applied to the workpiece W. FIG. 14A shows the arrangement of the apertures 17E and 18E in a plan view, and FIG. 11 and 12 show the integrated light amount, and (C) shows the total integrated light amount of the lamps 11 and 12. Since the light emitted from the lamp 11 is blocked by the light blocking portion 17k, the integrated light amount gradually decreases toward the + x side in the area A1. Further, since the light emitted from the lamp 12 is blocked by the light blocking portion 18k, the integrated light amount gradually decreases toward the −x side in the region A2.

  Since the sum of the area of the light shielding part 17k and the area of the light shielding part 18k is substantially the same as the area of the areas A1 and A2, the integrated light amount emitted from the lamp 11 and the lamp 12 irradiated in the joint area. The sum with the integrated light quantity of light is substantially the same as the integrated light quantity of light emitted from the lamp 11 and the integrated light quantity of light emitted from the lamp 12 in the region other than the joint region. Thereby, the exposure amount unevenness in the joint area can be eliminated.

  According to the present embodiment, two lamps can be connected in a state where there is no exposure amount unevenness or optical characteristic unevenness. Therefore, the exposure process can be performed once for a large workpiece.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and includes design changes and the like within a scope not departing from the gist of the present invention. In addition, it is possible to employ a configuration in which the configurations described as the embodiments and modifications described above are appropriately combined. For example, the configuration of the fourth embodiment can be appropriately combined with the configuration of the first embodiment.

  Further, in the present invention, “substantially” is a concept including not only a case where they are exactly the same but also errors and deformations that do not lose the identity. For example, “substantially parallel” is not limited to being strictly parallel. Further, for example, when simply expressing as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc. but also cases of substantially parallel, substantially orthogonal, etc. are included.

1, 2, 2A, 3, 4: Polarized light irradiation device 10, 10A: Polarized light irradiation units 11, 12: Lamps 11a, 11b, 12a, 12b: Electrodes 11c, 12c: End 13: Reflector 14: Specific wavelength transmission filter 15 : Polarizing member 16: Cover glass 17, 17A, 17B, 17C, 17D: Apertures 17a, 17c, 17e, 17g, 17i: Light shielding portions 17b, 17d, 17f, 17h, 17j: Openings 17m, 17n, 17o, 17p, : Sides 18, 18A, 18B, 18C, 18D: Apertures 18a, 18c, 18e, 18g, 18i: Light shielding portions 18b, 18d, 18f, 18h, 18j: Openings 18m, 18n, 18o, 18p: Side 20: Stage 30 : Stage drive unit 31: Stage guide rail 32: Stage scan shaft 33: Drive unit 40: Robot 50: Device frame

Claims (8)

A stage on which an object to be irradiated with polarized light is placed;
A first lamp and a second lamp provided such that a longitudinal direction thereof is substantially orthogonal to a conveyance direction of the object;
A polarizing member that is provided between the first lamp and the second lamp and the stage and polarizes light emitted from the first lamp and the second lamp;
A first light-shielding portion that is provided between the first lamp and the stage and blocks light emitted from the first lamp;
A second light-shielding portion that is provided between the second lamp and the stage and blocks light emitted from the second lamp;
With
The first lamp and the second lamp are arranged to be shifted in an orthogonal direction which is a direction substantially orthogonal to the transport direction and the transport direction,
In the orthogonal direction, a first end of the first lamp overlaps the second lamp, a second end of the second lamp overlaps the first lamp,
In a plan view, the first light-shielding portion is provided so as to overlap a first region that is a part of a strip-shaped region that is long in the orthogonal direction to which light from the first lamp is irradiated,
In a plan view, the second light-shielding portion is provided so as to overlap a second region that is a part of a strip-shaped region that is long in the orthogonal direction to which the light from the second lamp is irradiated,
The first region and the second region have substantially the same position in the orthogonal direction,
The sum of the area of the first light-shielding part and the area of the second light-shielding part is substantially the same as the areas of the first region and the second region. In plan view, the first light-shielding part has a first side oblique to the transport direction, and the second light-shielding part has a second side oblique to the transport direction,
2. The polarized light irradiation according to claim 1, wherein a shape in which the first light-shielding portion and the second light-shielding portion are arranged so that the first side and the second side substantially coincide with each other is a substantially rectangular shape. apparatus. The illuminance distribution of the first lamp in plan view has a third region that is substantially parallel along the longitudinal direction of the first lamp and a fourth region that is not substantially parallel along the longitudinal direction of the first lamp. And
The illuminance distribution of the second lamp in plan view has a fifth region that is substantially parallel along the longitudinal direction of the second lamp and a sixth region that is not substantially parallel along the longitudinal direction of the first lamp. And
In a region where light is irradiated with substantially the same illuminance as directly below the first lamp, an end on the first end side of the first side is on a boundary line between the third region and the fourth region,
In a region where light is irradiated with substantially the same illuminance as directly below the second lamp, an end of the second side on the second end side is on a boundary line between the fifth region and the sixth region. The polarized light irradiation apparatus according to claim 2. When viewed from the transport direction, the illuminance distribution of the first lamp and the second lamp has a substantially trapezoidal shape that has a high central portion and decreases toward the end,
A line that is substantially parallel to the bottom of the substantially trapezoidal shape and has a height of about 90 to about 99 when the height of the upper base portion of the substantially trapezoidal shape is 100, and a line that indicates the illuminance distribution The position in the orthogonal direction of the point where the crossing points substantially coincides with the end on the first end side of the first side and the end on the second end side of the second side. The polarized light irradiation apparatus according to 1. A first aperture provided between the first lamp and the stage so as to cover a region irradiated with light from the first lamp;
A second aperture provided between the second lamp and the stage so as to cover a region irradiated with light from the second lamp;
With
The first light shielding portion and the second light shielding portion are dot patterns including a plurality of dots,
The first aperture includes a substantially plate-shaped first light-transmitting member and the first light-shielding portion formed on the first light-transmitting member.
The second aperture includes a substantially plate-shaped second light transmissive member, and the second light shielding portion formed on the second light transmissive member,
In the first region, the closer to the first end, the larger the number of dots per unit area, and the further away from the first end, the smaller the number of dots per unit area. The number of dots of the
In the second region, the closer to the second end, the larger the number of dots per unit area, and the farther away from the second end, the smaller the number of dots per unit area. The polarized light irradiation apparatus according to claim 1, wherein the number of the dots of the light beam gradually changes. When the distance between the first lamp and the object is approximately 150 mm to approximately 160 mm, the length of the first region is approximately 8% to approximately 15% of the length in the longitudinal direction of the first lamp.
When the distance between the second lamp and the object is about 150 mm to about 160 mm, the length of the second region is about 8% to about 15% of the length in the longitudinal direction of the second lamp. The polarized light irradiation apparatus according to claim 1, 2, or 5. In a plan view, the shape of the first light-shielding portion is obtained by rotating the second light-shielding portion approximately 180 degrees around the second point where the second side and the central axis of the second lamp intersect. The shape of the second light-shielding portion is obtained by rotating the first light-shielding portion approximately 180 degrees around the first point where the first side intersects the central axis of the first lamp. The polarized light irradiation device according to claim 2, wherein the polarized light irradiation device has a shape. The polarized light irradiation apparatus according to claim 1, further comprising: a moving unit that moves the first lamp or the second lamp in a direction substantially orthogonal to the transport direction.

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