CN109387897B - Wire grid assembly, polarized illumination device and optical alignment equipment - Google Patents
Wire grid assembly, polarized illumination device and optical alignment equipment Download PDFInfo
- Publication number
- CN109387897B CN109387897B CN201710681538.7A CN201710681538A CN109387897B CN 109387897 B CN109387897 B CN 109387897B CN 201710681538 A CN201710681538 A CN 201710681538A CN 109387897 B CN109387897 B CN 109387897B
- Authority
- CN
- China
- Prior art keywords
- wire grid
- splicing
- polarizing element
- assembly
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
Abstract
The invention provides a wire grid assembly, a polarized illumination device and an optical alignment device, wherein each first wire grid polarization element and each second wire grid polarization element comprise a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarization element and the second wire grid polarization element have the same grid pitch; the first wire grid polarization elements are spliced side by side, and a splicing gap is formed between every two first wire grid polarization elements; the second wire grid polarizing elements are covered above or below all the splicing gaps, so that light beams incident to the splicing gaps are polarized by the second wire grid polarizing elements, two wire grid polarizing elements are adopted for lapping, all light rays emitted by the linear light source are polarized, unpolarized light irradiating the arrangement direction of the wire grid polarizing elements can be effectively prevented from leaking from the splicing gaps, and better extinction ratio and illumination uniformity are obtained.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a wire grid assembly, a polarizing illumination device and optical alignment equipment.
Background
The photo-alignment technique is a technique in which a polarizing illumination device irradiates a polarized light having a specific wavelength to an alignment film to perform alignment, that is, the alignment film is irradiated with the polarized light having a predetermined wavelength so that the alignment film aligned with or perpendicular to the polarization axis direction of the polarized light undergoes a photoreaction.
The polarizing illuminator generally comprises an illuminator and a wire grid assembly, wherein the alignment film requires ultraviolet rays with a wavelength of 250nm to 320nm, the wire grid pitch of the wire grid assembly is preferably 100nm, and the diameter of a substrate which can be processed by the current semiconductor processing device is 300 mm. The wire grid of the wire grid assembly for a polarized illumination apparatus can only be arranged with a plurality of wire grid light source length alignments.
Since the wire grid module is cut from the glass substrate, there are minute notches or irregularities at the edges, and there are gaps only when these polarizing elements are arranged in a mutually abutting manner, and direct light (unpolarized light) from the illumination module leaks out of the gaps, resulting in deterioration of the extinction ratio; further, the damage of the edge at the time of cutting causes the loss of the grid, and the extinction ratio is also deteriorated in the peripheral portion of the polarizing element.
Disclosure of Invention
The invention aims to provide a wire grid assembly, a polarized illumination device and an optical alignment device, which aim to solve the problems of poor extinction ratio, uneven illumination and the like after light emitted by a linear light source passes through the wire grid assembly in the prior art.
In order to achieve the above object, the present invention provides a wire grid assembly that changes a light beam incident to the wire grid assembly into polarized light, the wire grid assembly including a first wire grid polarizing element and a second wire grid polarizing element;
the first wire grid polarizing element and the second wire grid polarizing element both comprise a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarizing element and the second wire grid polarizing element have equal grid distances;
the first wire grid polarizing elements are arranged in a plurality and are spliced side by side, and splicing gaps are formed between every two adjacent first wire grid polarizing elements;
the second linear grating polarizing elements are covered above or below all the splicing gaps, so that the light beams incident to the splicing gaps are polarized by the second linear grating polarizing elements;
optionally, a gap is formed between each second linear grating polarizing element and each splicing gap in the vertical direction;
optionally, the vertical height of the gap is preferably 1mm to 2 mm;
optionally, a splicing surface of each first wire grid polarizing element spliced with another adjacent first wire grid polarizing element is in a step shape, and the second wire grid polarizing element is embedded between the splicing surfaces of two adjacent first wire grid polarizing elements;
optionally, the splicing surfaces include two steps, the splicing gaps and a convex space located below the splicing gaps are formed by combining the splicing surfaces of two adjacent first linear grating polarization elements, the second linear grating polarization element is of a convex structure, and the convex structure is embedded in the convex space;
optionally, a transparent support part is arranged below the splicing gap;
optionally, the gap width of the splicing gap is preferably 2mm to 5 mm;
optionally, the width of the grid surface of the second linear grid polarizing element is greater than 3 times the gap width of the splicing gap;
optionally, the width of the grid surface of the second wire grid polarizing element is further greater than: the gap width of the splicing gap +2 × (the height difference between the wire grid surfaces of the second wire grid polarizing element and the first wire grid polarizing element + the processing error and defect influence width of the second wire grid polarizing element);
optionally, cooling protective gas is introduced into the splicing gap;
the invention also provides a polarized illumination device, which comprises an illumination component and the wire grid component;
the lighting assembly comprises a linear light source;
the linear light source emits light through the wire grid assembly to form polarized light.
The invention also provides optical alignment equipment, and polarized light for optical alignment is provided by adopting the polarized illumination device.
In the wire grid assembly, the polarized illumination device and the optical alignment device provided by the invention, each of the first wire grid polarization element and the second wire grid polarization element comprises a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarization element and the second wire grid polarization element have equal grid distances; the first wire grid polarization elements are spliced side by side, and a splicing gap is formed between every two first wire grid polarization elements; the second wire grid polarizing elements are covered above or below all the splicing gaps, so that light beams incident to the splicing gaps are polarized by the second wire grid polarizing elements, two wire grid polarizing elements are adopted for lapping, all light rays emitted by the linear light source are polarized, unpolarized light irradiating the arrangement direction of the wire grid polarizing elements can be effectively prevented from leaking from the splicing gaps, and better extinction ratio and illumination uniformity are obtained.
Drawings
Fig. 1-2 are schematic diagrams of a wire grid assembly provided in accordance with a first embodiment;
FIG. 3 is a schematic view of a wire grid assembly according to a second embodiment;
FIG. 4 is a schematic view of a wire grid assembly according to a third embodiment;
fig. 5 is a schematic view of a first wire grid polarizing element of the wire grid assembly provided in accordance with a third embodiment;
fig. 6 is a schematic view of a second wire grid polarizing element of the wire grid assembly provided in accordance with the third embodiment;
the optical fiber grating structure comprises 1-a first grating polarizing element, 11-a first grating, 12-a first substrate, 13-a splicing surface of the first grating polarizing element, 2-a second grating polarizing element, 21-a second grating, 22-a second substrate, 23-a splicing surface of the second grating polarizing element, 3-a frame, 4-supporting bars, 5-splicing gaps and 6-vertical gaps.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. Advantages and features of the present invention will become apparent from the following description and claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
Referring to fig. 1-2, which are schematic views of a wire grid assembly provided in this embodiment, a light beam incident on the wire grid assembly is changed into polarized light, and the wire grid assembly includes a first wire grid polarization element 1 and a second wire grid polarization element 2; the first wire grid polarizing element 1 and the second wire grid polarizing element 2 both comprise a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarizing element 1 and the second wire grid polarizing element 2 have the same grid pitch; the first wire grid polarizing elements 1 are arranged in a plurality, the first wire grid polarizing elements 1 are spliced side by side, and a splicing gap 5 is formed between every two adjacent first wire grid polarizing elements 1; the second linear grating polarization element 2 is covered above or below all the splicing gaps 5, so that the light beams incident to the splicing gaps 5 are polarized by the second linear grating polarization element 2. The wire grid assembly provided by the invention adopts two wire grid polarizing elements for lapping, polarizes all light rays emitted by the wire grid light source, can effectively prevent unpolarized light irradiated in the arrangement direction of the wire grid polarizing elements from leaking from the splicing gap, and obtains better extinction ratio and illumination uniformity. Of course, the pitch of the wire grids of the first wire grid polarization element 1 and the second wire grid polarization element 2 is equal to or less than the wavelength of the incident light, preferably equal to or less than 1/3 wavelength of the incident light.
For better description, the dimension of the first wire-grid polarizing element 1 and the second wire-grid polarizing element 2 along the splicing direction is defined as a length, the dimension perpendicular to the splicing direction and on the same horizontal plane with the splicing direction is defined as a width, and the dimension perpendicular to both the length and the width is defined as a height.
In this embodiment, both the first wire grid polarizer 1 and the second wire grid polarizer 2 are single-sided wire grid elements, specifically, the first wire grid polarizer 1 includes a first substrate 12 and a first wire grid 11, the second wire grid polarizer 2 includes a second substrate 22 and a second wire grid 21, the first wire grid 11 is located on an upper surface of the first substrate 12, and the second wire grid 21 is located on an upper surface of the second substrate 22. The first linear grating polarization element 1 and the second linear grating polarization element 2 are fixed in the frame 3, and the first substrate 12 and the second substrate 22 are both transparent quartz glass substrates, so that light can penetrate through the substrates conveniently.
Due to the existence of machining errors, a certain adjusting space needs to be reserved between two adjacent first wire grid polarizing elements 1, preferably, the gap width of a splicing gap between two adjacent first wire grid polarizing elements 1 is preset to be greater than or equal to 2mm, and the preferred value is 2mm-5 mm; the length of the second wire-grid polarizing element 2 is at least 3 times the gap width of the splicing gap 5. In order to prevent unpolarized light from entering the splicing gap 5 even at an incident angle of 0-45 °, the length of the second wire grid polarizing element 2 is further greater than: (gap width +2 of splicing slit 5 (height difference between the grid surfaces of second grid 21 and first grid 11 + processing error and defect-affected width of second grid polarization element 2 itself)).
The second linear grating polarization element 2 covers the splicing gap 5, a vertical gap 6 is formed between the second linear grating polarization element and the first linear grating polarization element 1, the height of the vertical gap 6 is preferably 1mm-2mm, and cooling protective gas is introduced into the vertical gap 6. The first wire grid 11 and the second wire grid 21 have the same grid pitch, the first wire grid 11 and the second wire grid 21 are made of metal or metal oxide, and when the first wire grid 11 and the second wire grid 21 are made of metal, the cooling protective gas is inert gas, preferably nitrogen. In order to keep the tightness of the cooling protective gas flow field, a transparent quartz supporting strip 4 is adopted to support under the splicing gap 5, the width of the transparent quartz supporting strip 4 can be smaller than or equal to that of the second linear grating polarizing element 2, and the transparent quartz supporting strip 4 ensures the tightness of the flow field and does not influence the passing of light.
Example two
As shown in fig. 3, unlike the first embodiment, in the present embodiment, the second wire-grid polarizer 2 is disposed below the splicing gap 5, specifically, below the transparent quartz supporting strip 4, and the vertical gap 6 is left between the second wire-grid polarizer and the transparent quartz supporting strip 4, the height of the vertical gap 6 is preferably 1mm-2mm, and a cooling protection gas is introduced into the vertical gap 6. The gap width of the splicing gap between two adjacent first wire grid polarizing elements 1 is preferably 2mm-5 mm; the length of the second linear grating polarization element 2 is at least 3 times of the gap width of the splicing gap 5, and meanwhile, the condition that unpolarized light entering the splicing gap 5 does not leak under the condition that the incident angle of the light is 0-45 degrees is met, specifically, the length of the second linear grating polarization element 2 is also larger than: (gap width +2 of splicing slit 5 (height difference between the grid surfaces of second grid 21 and first grid 11 + processing error and defect-affected width of second grid polarization element 2 itself)).
EXAMPLE III
Referring to fig. 4, different from the second embodiment, in the second embodiment, a splicing surface 13 where each first wire grid polarizer 1 is spliced with another adjacent first wire grid polarizer 1 is in a step shape, and the shape of each second wire grid polarizer 2 matches with the step shape and is embedded between the splicing surfaces 13 of two adjacent first wire grid polarizers 1. As shown in fig. 5, each first wire grid polarizing element 1 is processed with 2-level steps on the splicing surface 13, as shown in fig. 6, the second wire grid polarizing element 2 also has two splicing surfaces 23 matching with the splicing surfaces of two adjacent first wire grid polarizing elements 1, the splicing surface 23 of the second wire grid polarizing element 2 is processed into the shape of a 1-level step, the splicing surface 23 of the second wire grid polarizing element 2 is overlapped with the first wire grid polarizing element 1 on the splicing surface 13, specifically, the splicing surfaces of two adjacent first wire grid polarizing elements 1 are combined to form a convex space, the second wire grid polarizing element 2 is a convex structure, the convex structure is embedded in the convex space, the second wire grid polarizing element 2 is arranged below the splicing gap 5, the vertical gap 6 is left between the second wire grid polarizing element 2 and the splicing gap 5, and at this time, the step of the second wire grid polarizing element 2 is in contact with the second-level step surface of the first wire grid polarizing element 1 And the vertical gap 6 is reserved between the wire grid surface of the second wire grid polarizing element 2 and the first-stage step surface of the first wire grid polarizing element 1, so that the cooling protective gas introduced into the splicing gap 5 can enter between the first wire grid polarizing element 1 and the second wire grid polarizing element 2, and the sealing property of a flow field can be kept. The contact length of the step of the second wire grid polarizing element 2 and the second-stage step surface of the first wire grid polarizing element 1 is greater than 3mm, and the preferred value is 4-5 mm.
The length of the second wire grid polarizing element 2 is required to be more than 3 times of the gap width of the splicing gap 5; to ensure that no light is leaked even at an incident angle of 45 °, the length of the second wire grid polarizer 2 is greater than: (gap width +2 of splicing slit 5 (height difference between the grid surfaces of second grid 21 and first grid 11 + processing error and defect-affected width of second grid polarization element 2 itself)). The thickness of the first substrate 12 is greater than 6mm, and the thickness of the first substrate 12 is preferably 6mm to 8mm in consideration of the supportability of the substrate and the size of the occupied space.
The invention also provides a polarized illumination device, which comprises an illumination component and the wire grid component; the lighting assembly comprises a linear light source; the linear light source emits light through the wire grid assembly to form polarized light.
The lighting assembly comprises a straight groove type or trough type reflecting cover and a lamp tube, wherein the lamp tube is a linear light source, and light emitted by the lamp tube forms light rays with specific angles after being reflected by the reflecting cover. When light passes through the wire grid assembly, a polarized light component parallel to the length direction of the wire grid assembly is mostly reflected, and polarized light perpendicular to the length direction of the wire grid assembly is transmitted to form a set of polarized light.
The invention also provides a photo-alignment device, and polarized light for photo-alignment is provided by utilizing the polarized illumination device.
In summary, the wire grid assembly, the polarized illumination apparatus and the optical alignment apparatus provided by the embodiments of the invention have the following advantages: each of the first wire grid polarizing element and the second wire grid polarizing element comprises a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarizing element and the second wire grid polarizing element have equal grid pitches; the first wire grid polarizing elements are spliced side by side, and a splicing gap is formed between every two adjacent first wire grid polarizing elements; the second wire grid polarizing elements are covered above or below all the splicing gaps, so that light beams incident to the splicing gaps are polarized by the second wire grid polarizing elements, two wire grid polarizing elements are adopted for lapping, all light rays emitted by the linear light source are polarized, unpolarized light irradiating the arrangement direction of the wire grid polarizing elements can be effectively prevented from leaking from the splicing gaps, and better extinction ratio and illumination uniformity are obtained.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A wire grid assembly that converts a beam of light incident on the wire grid assembly into polarized light, the wire grid assembly comprising a first wire grid polarizing element and a second wire grid polarizing element;
the first wire grid polarizing element and the second wire grid polarizing element both comprise a substrate and a wire grid formed on the surface of the substrate, and the wire grids of the first wire grid polarizing element and the second wire grid polarizing element have equal grid distances;
the first wire grid polarizing elements are arranged in a plurality and are spliced side by side, splicing gaps are formed between every two adjacent first wire grid polarizing elements, and the gap width of each splicing gap is 2-5 mm;
the second linear grating polarizing elements are covered above or below all the splicing gaps, so that the light beams incident to the splicing gaps are polarized by the second linear grating polarizing elements;
the splicing surface of each first wire grid polarizing element spliced with another adjacent first wire grid polarizing element is in a step shape, and the second wire grid polarizing element is embedded between the splicing surfaces of two adjacent first wire grid polarizing elements;
in the splicing direction, the length of the first wire grid polarizing element is greater than that of the second wire grid polarizing element.
2. A wire grid assembly as set forth in claim 1, wherein each of said second wire grid polarizing elements is vertically spaced from each of said stitching slits.
3. A wire grid assembly as set forth in claim 2, wherein the vertical height of the voids is preferably in the range of 1mm to 2 mm.
4. A wire grid assembly as set forth in claim 1, wherein the splicing surfaces comprise two steps, the splicing surfaces of two adjacent first wire grid polarization elements combine to form the splicing seam and a "convex" shaped space below the splicing seam, and the second wire grid polarization element has a convex structure embedded in the "convex" shaped space.
5. A wire grid assembly as set forth in claim 2, wherein a transparent support is disposed below the splice seam.
6. A wire grid assembly as set forth in claim 1, wherein the second wire grid polarizing element has a grid face width greater than 3 times the gap width of the splice gap.
7. A wire grid assembly as set forth in claim 6, wherein the second wire grid polarizing element further comprises a grid face width greater than: gap width of splicing gap +2 (height difference of wire grid surface of the second wire grid polarization element and the first wire grid polarization element + processing error and defect influence width of the second wire grid polarization element).
8. A wire grid assembly as set forth in claim 1, wherein said splice slits are vented with a cooling shielding gas.
9. A polarized illumination apparatus, characterized in that it comprises an illumination assembly and a wire grid assembly according to any of claims 1-8;
the lighting assembly comprises a linear light source;
the linear light source emits light through the wire grid assembly to form polarized light.
10. A photoalignment device, characterized in that polarized light for photoalignment is provided using a polarizing illumination device as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710681538.7A CN109387897B (en) | 2017-08-10 | 2017-08-10 | Wire grid assembly, polarized illumination device and optical alignment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710681538.7A CN109387897B (en) | 2017-08-10 | 2017-08-10 | Wire grid assembly, polarized illumination device and optical alignment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109387897A CN109387897A (en) | 2019-02-26 |
| CN109387897B true CN109387897B (en) | 2021-04-23 |
Family
ID=65414992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710681538.7A Active CN109387897B (en) | 2017-08-10 | 2017-08-10 | Wire grid assembly, polarized illumination device and optical alignment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109387897B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115167025B (en) * | 2022-07-15 | 2023-08-22 | 苏州华星光电技术有限公司 | Preparation method of display device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769982A (en) * | 2004-10-28 | 2006-05-10 | 优志旺电机株式会社 | Polarization element unit and polarization light emitting apparatus |
| CN101048681A (en) * | 2004-11-11 | 2007-10-03 | 日东电工株式会社 | Combination optical film, laminated combination optical film, and image display |
| CN101432124B (en) * | 2006-05-09 | 2012-06-13 | 日东电工株式会社 | Method for manufacturing combination-type optical film, apparatus for the method, combination-type optical film, and image display device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4707697B2 (en) * | 2006-10-31 | 2011-06-22 | 日東電工株式会社 | Method for manufacturing combined optical film, apparatus therefor, combined optical film, image display device, method for manufacturing liquid crystal panel, and method for manufacturing laminated optical film |
-
2017
- 2017-08-10 CN CN201710681538.7A patent/CN109387897B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769982A (en) * | 2004-10-28 | 2006-05-10 | 优志旺电机株式会社 | Polarization element unit and polarization light emitting apparatus |
| CN101048681A (en) * | 2004-11-11 | 2007-10-03 | 日东电工株式会社 | Combination optical film, laminated combination optical film, and image display |
| CN101432124B (en) * | 2006-05-09 | 2012-06-13 | 日东电工株式会社 | Method for manufacturing combination-type optical film, apparatus for the method, combination-type optical film, and image display device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109387897A (en) | 2019-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7463418B2 (en) | Polarization element unit and polarization light emitting apparatus | |
| TWI431344B (en) | Polarized light irradiation device | |
| KR101462273B1 (en) | Light illuminating apparatus for photo-alignment | |
| KR101829778B1 (en) | Exposure device and manufacturing method of liquid crystal display | |
| KR101792302B1 (en) | Orientation treatment method and orientation treatment device | |
| KR20070020090A (en) | Polarized uv exposure system | |
| KR100510888B1 (en) | Irradiating device for alignment film of liquid crystal display device_ | |
| JP5077465B2 (en) | Polarized light irradiation device for photo-alignment | |
| CN109387897B (en) | Wire grid assembly, polarized illumination device and optical alignment equipment | |
| US20130083307A1 (en) | Photo-Alingment Apparatus, and Method for Fabricating Liquid Crystal Display | |
| KR20120036741A (en) | Light irradiation apparatus | |
| TWI521258B (en) | Light alignment illumination device | |
| TW201915451A (en) | Cutting multilayer materials apparatus and method thereof | |
| JP5693541B2 (en) | Light irradiation device | |
| JP2013228533A (en) | Polarizer unit | |
| JP2015106015A (en) | Polarized light irradiation device, polarized light irradiation method and polarized light irradiation program | |
| KR20160067168A (en) | Laser scanning system for laser release | |
| CN116520612A (en) | Optical module and optical film processing apparatus | |
| KR20170015799A (en) | Photo Alignment Apparatus And Photo Alignment Method Using The Same | |
| CN109387898A (en) | Wiregrating component is polarized lighting device and light orientation equipment | |
| WO2019031453A1 (en) | Photo-aligning exposure device | |
| JP2015057639A (en) | Polarizing element unit and polarized light irradiation device using polarizing element unit | |
| KR101659698B1 (en) | Method and apparatus for manufacturing liquid crystal display device | |
| JP6534567B2 (en) | Light irradiation device | |
| CN204101765U (en) | The polarisation irradiation unit of polarization element unit and use polarization element unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |