CN204101765U - The polarisation irradiation unit of polarization element unit and use polarization element unit - Google Patents
The polarisation irradiation unit of polarization element unit and use polarization element unit Download PDFInfo
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- CN204101765U CN204101765U CN201420447592.7U CN201420447592U CN204101765U CN 204101765 U CN204101765 U CN 204101765U CN 201420447592 U CN201420447592 U CN 201420447592U CN 204101765 U CN204101765 U CN 204101765U
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- polarization element
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- parallelogram
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Abstract
The utility model provides a kind of polarization element unit and uses the polarisation irradiation unit of polarization element unit, polarization element unit can prevent the leakages such as non-polarized light, and reduce non-polarizing light irradiation in optical alignment film resist, and the irradiation reducing exposure light is uneven, also provides a kind of polarisation irradiation unit using this unit.The polarisation irradiation unit (10) that the utility model provides irradiates polarized light to alignment films resist (W1), carry out light orientation, it is characterized in that, comprising: light source portion (11), it is for irradiating light to resist (W1); And polarization element unit (1), it is made up of the unit polarization element of parallelogram, for the polarized light making the light polarization from this light source become regulation.The light source (12) of light source portion (11) is for being parallel to the linear light source of the orientation configuration of the unit polarization element (2) of polarization element unit (1).
Description
Technical field
The utility model relates to a kind of polarization element unit and uses this polarization element unit liquid crystal to be represented to the alignment films such as the alignment films of element carry out polarisation irradiation unit and the light aligning device of light orientation.
In detail, relate to a kind of passing through combine multiple wiregrating polarization element and reduce the polarization element unit of the impact of the coupling part of each wiregrating polarization element, the polarisation irradiation unit using this polarization element unit and light aligning device.
Background technology
In the past, carry out in orientation process in the oriented layer etc. of the alignment films to liquid crystal panel, view angle compensation film, make friction mode mechanically, but, become problem by the dirt etc. of the substrate brought that rubs, therefore adopt the polarized light by irradiating certain wavelength to photosensitive optical alignment film etchant resist to carry out the light orientation technology of orientation.
Due to the maximization of liquid crystal panel, polarisation irradiation unit optical alignment film etchant resist being irradiated to polarized light is also maximized.
But due to polarization element, be subject to can the system limit of manufactured size, therefore, proposes for polarisation irradiation unit the combination (patent documentation 1) that bar-shaped lamp and multiple polarization element arrange the polarization element unit being row.
And, in this polarisation irradiation unit, owing to can spill the direct light from light source from the gap of the coupling part between polarization element, i.e. unpolarized light, extinction ratio is deteriorated, therefore the polarization element unit that throughput direction configuring multi-layer that a kind of edge is coated with the substrate of optical alignment film resist is formed the boundary portion shading of polarization element is further provided, in the boundary portion nonoverlapping mode mutual relative to the throughput direction of described substrate of the boundary portion between each layer polarization element and other layer of polarization element, the device configured along the direction staggered positions vertical with the throughput direction of described substrate.
But the method is owing to existing the region of the impact being subject to coupling part and light shielding part, and complete impregnable peripheral part, therefore, the formation generation deviation of optical alignment film.
And, propose a kind of the wiregrating polarization element, the polarization element unit that configures in the mode of multiple connecting portion overlap along the throughput direction of described substrate that combine the capable quadrilateral of wiregrating.
Prior art document
Patent documentation
Patent documentation 1: JP 2006-126464
Utility model content
But, in the polarization element unit that wiregrating polarization element at combined parallel quadrilateral, the throughput direction along described substrate configure in the mode of multiple connecting portion overlap, because multiple described connecting portion is overlapping along the direct of travel of described substrate, therefore, there is the problem that the illumination of exposure light is low.
The utility model completes in view of the foregoing, its object is to provide a kind of polarization element unit, it is in the polarization element unit formed side by side by wiregrating polarization element, can prevent the polarized light of non-polarized light or delustring ratio from revealing from the boundary member of polarization element, and the inequality exposing light and optical alignment film etchant resist is irradiated can be reduced; Also provide a kind of polarisation irradiation unit, it uses this polarization element unit, can carry out light orientation process to optical alignment film etchant resist.
The feature of polarization element unit of the present utility model is, by multiple units polarization element of a diagonal line and base parallelogram shape at a right angle, arrange in the direction on the base being parallel to described parallelogram, and the connecting portion place of adjacent described unit polarization element is provided with light shielding part.
In preferred described parallelogram, the base of this parallelogram, hypotenuse and high ratio are 1:
5:2.
In preferred described parallelogram, the base of this parallelogram, hypotenuse and high ratio are 1:
2:1.
The feature of polarization element unit of the present utility model is, for by unit as claimed in claim 1 polarization element, the hypotenuse of two panels is abutted and multiple units polarization element of parallelogram shape of obtaining, the direction on base being parallel to described parallelogram arranges and forms polarization element row, this polarization element row are overlapping two-layer up and down, and make the unit polarization element of upside etc. divide the connecting portion of the unit polarization element crossing over downside.
Polarisation irradiation unit of the present utility model, it irradiates polarized light to alignment films, carries out the polarisation irradiation unit of light orientation, it is characterized in that, comprising: light source portion, irradiates light for the etchant resist used described alignment films; And polarisation portion, for the polarized light making the light polarization from described light source portion become regulation, described polarisation portion is the polarization element unit in Claims 1-4 described in any one, and described light source portion is the linear light source of the orientation configuration being parallel to unit polarization element in described polarization element unit.
The utility model can obtain following effect.
Due to the connecting portion shading to constituent parts polarization element, therefore, it is possible to prevent non-polarized light from revealing, the deterioration of extinction ratio can be prevented, and, as shown in Figure 4, light shielding part is not overlapping at the throughput direction of described substrate, therefore, the light loss being irradiated to optical alignment film etchant resist can be made minimum, and the light quantity generation deviation in optical alignment film etchant resist can be prevented.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the structure of polarization element unit for illustration of a kind of embodiment of the present utility model.
Fig. 2 is the schematic diagram of the unit polarization element of a kind of embodiment of the present utility model, and the unit polarization element that the unit polarization element that (a) is the 1st embodiment, (b) are the 2nd embodiments, (c) are the schematic diagram of the unit polarization element of the 3rd embodiment.
Fig. 3 is the explanation schematic diagram of the polarisation irradiation unit of a kind of embodiment of the present utility model.
Fig. 4 is the schematic diagram of the relation of each light shielding part of unit polarization element connecting portion for illustration of polarization element unit.
Fig. 5 is the schematic diagram of the unit polarization element in the 4th embodiment of the present utility model.
Fig. 6 is the explanation schematic diagram of the polarization element unit in the 4th embodiment of the present utility model.
Description of reference numerals
1 polarization element unit
2,20 unit polarization elements
3 light shielding parts
4a, 4b frame
10 polarisation irradiation units
11 light source portion
12 bar-shaped lamps
13 tubbiness collecting lens
B connecting portion
W workpiece
W1 optical alignment film resist
Embodiment
Referring to accompanying drawing, embodiment of the present utility model is described.
The feature of polarization element unit of the present utility model is, by multiple units polarization element of a diagonal line and base parallelogram shape at a right angle, arrange in the direction on the base being parallel to described parallelogram, and the connecting portion place of adjacent described unit polarization element is provided with light shielding part.
(a) of Fig. 1 is the figure of the unit polarization element 2a represented in the 1st embodiment of the present utility model, (b) of Fig. 1 is the figure of the unit polarization element 2b represented in the 2nd embodiment of the present utility model, and (c) of Fig. 1 is the figure of the unit polarization element 2c represented in the 3rd embodiment of the present utility model.Unit polarizer 2 (2a, 2b, 2c) shown in Fig. 1 is wiregrating polarization element, and unit polarizer 2a can be 1 for the base (top) shown in (a) of Fig. 1, hypotenuse and high ratio:
the parallelogram of 5:2, unit polarizer 2b can be 1 for the base (top) shown in (b) of Fig. 1, hypotenuse and high ratio:
the parallelogram of 5:1, unit polarizer 2c can for shown in (c) of Fig. 1, a diagonal line of parallelogram and base parallelogram at a right angle.Now, above-mentioned parallelogram more preferably the base of this parallelogram, hypotenuse and high ratio be 1:
the base of 5:2 or this parallelogram, hypotenuse and high ratio are 1:
2:1.
Fig. 2 is the figure of the structure representing polarization element unit 1.This polarizer unit 1 comprises frame 4a, 4b that the unit polarizer 2 of the multiple parallelogram along the arrangement of 1X direction of principal axis, the light shielding part 3 blocking the connecting portion of constituent parts polarizer 2 and level hold fixing above-mentioned unit polarizer.
Namely, (a) of Fig. 2 is the figure of polarization element unit 1 viewed from the direction of illumination of irradiation light, the side cross-section of polarization element unit 1, as shown in (b) of Fig. 2, the configuration side by side of constituent parts polarizer 2 level contiguity, in order to not make the unpolarized exposure light of the connecting portion B from constituent parts polarizer 2 reveal, light shielding part 3 is utilized to cover the connecting portion of constituent parts polarizer 2.
Frame 4 comprises upper ledge 4a and lower frame 4b, and between this frame 4a, 4b, unit polarizer 2 is configured by multiple horizontal alignment, and is fixed by holding.
Further, light shielding part 3 is installed in upper ledge 4a in the mode of the connecting portion B covering constituent parts polarizer 2.
Although the part illumination arranging light shielding part 3 is low, non-polarized light is not revealed from the gap of the unit polarization element 2 of horizontal close contact configuration arranged side by side, and extinction ratio can not be made to reduce.In addition, light shielding part 3 is the length of the hypotenuse along unit polarizer, when unit polarization element 2 is a diagonal line of the parallelogram shown in (c) of such as Fig. 1 and base parallelogram at a right angle, as shown in Figure 4, the long L of projection of Y direction does not have the part of repeating part or curtailment each other, therefore, Illumination Distribution is uneven in the X-axis direction in the exposure light of optical alignment film etchant resist can not to make irradiation.
In addition, due to without the need to as mode in the past, diffused light source is used, the deterioration of Illumination Distribution is revised by the distance pulling open this light source and polarization element unit, the distance of light source and polarization element unit therefore, it is possible to further, effectively can utilize the light from light source.Correspondingly, can also the output power of light source be suppressed very low.
In addition, owing to not existing as prior art because light shielding part causes the generation deviation of Illumination Distribution, therefore, without the need to arranging multiple polarization element unit along the throughput direction of alignment films.
Below to using the polarisation irradiation unit of polarizer unit 1 of the present utility model to be described.Fig. 3 is the schematic diagram of the polarisation irradiation unit 10 of a kind of embodiment of the present utility model.
Polarisation irradiation unit 10 has, light source portion 11, the polarization element unit 1 configured in the below of light source portion 11 and the supply unit (not shown) along Y-axis prescribed direction (direction of arrow B) continus convergence glass substrate (hereinafter referred to as " workpiece ") W, this workpiece W is configured in the below of polarization element unit 1, the applied resist W1 having optical alignment film as exposure object.
And, under the state that light source portion 11 and polarization element unit 1 maintain predetermined distance, be integrated not shown support unit supports in the top of the supply unit of described workpiece W, workpiece W is when the below of polarisation irradiation unit 10 is transferred, penetrate the resist W1 in workpiece W by the illumination from lamp 12 after polarization element unit 1 polarization of the present utility model, and carry out light orientation process.
The light that light source portion 11 has the wire el lamp 12 that the length direction (X-direction) along polarization element unit 1 configures and the top being arranged at lamp 12 (inserting the reverse direction of lamp 12 and glass substrate W), radiate for the upper side made to lamp 12 is to the catoptron 13 of the tubbiness of glass substrate lateral reflection.
Lamp 12 is high-pressure mercury-vapor lamp or metal halide lamp etc., also can for the linear light source configured side by side by LED or LD many linearities.Now, the direction of LED or LD arrangement is equivalent to the length direction of lamp 12.
In addition, suitably selecting from the wavelength of the light of lamp 12 radiation according to the material of optical alignment film resist W1, such as, is the light etc. of wavelength 260nm or 365nm of light.
Exposure light from light source portion 11 irradiates to polarization element unit 1, and polarization is the polarized light of regulation, and the resist W1 to workpiece W irradiates.
Namely, described resist to workpiece W irradiates polarized light, this polarized light in polarization element unit 1, along and the light (P polarized light) that vibrate of the rectangular direction of orientation of the line of wiregrating inclined element transmitance, with along be parallel to line orientation direction and the ratio (being called " extinction ratio ") of the transmitance of light (S polarized light) that vibrates is more than setting (being such as more than 20:1).
Below, as the 4th embodiment of the present utility model, replacing the unit polarizer 2 of polarizer unit 1, can also be 1 by the parallelogram shown in Fig. 5, i.e. base, hypotenuse and high ratio:
the unit polarization element 20 of 5:1, along the contact of hypotenuse direction horizontal close, multiple arrangement and form polarization element group, and as shown in Figure 6, by overlapping up and down for this polarization element of two panels group, and makes the unit polarization element of upside etc. point cross over the unit polarization element of downside.Or, can also for multiple units polarization element of a diagonal line and base parallelogram shape at a right angle, its hypotenuse of 2 is abutted and is formed in the polarization element row being parallel to and the direction on parallelogram base arranges, this polarization element row are overlapping two-layer up and down, and make the unit polarization element of upside etc. divide the unit polarization element crossing over downside.
Now, polarization is there is in the unpolarized light revealed from the connecting portion of the constituent parts polarization element of upside polarization element group by downside polarization element group, the connecting portion of the constituent parts polarization element of downside polarization element group is incided by the polarized light after the polarization element group polarization of upside, therefore, the resist W1 of unpolarized smooth direct irradiation workpiece W is not had.Therefore, without the need to arranging the light shielding part 3 of the connecting portion B covering constituent parts polarization element 20.
Claims (5)
1. a polarization element unit, is characterized in that,
By multiple units polarization element of a diagonal line and base parallelogram shape at a right angle, be parallel to the direction arrangement on base of described parallelogram, and the connecting portion place of adjacent described unit polarization element is being provided with light shielding part.
2. polarization element unit according to claim 1, is characterized in that,
In described parallelogram, the base of this parallelogram, hypotenuse and high ratio are 1:
5:2.
3. polarization element unit according to claim 1, is characterized in that,
In described parallelogram, the base of this parallelogram, hypotenuse and high ratio are 1:
2:1.
4. a polarization element unit, is characterized in that,
For by unit as claimed in claim 1 polarization element, the hypotenuse of two panels is abutted and multiple units polarization element of parallelogram shape of obtaining, the direction on base being parallel to described parallelogram arranges and forms polarization element row, this polarization element row are overlapping two-layer up and down, and make the unit polarization element of upside etc. divide the connecting portion of the unit polarization element crossing over downside.
5. a polarisation irradiation unit, it irradiates polarized light to alignment films, carries out the polarisation irradiation unit of light orientation, it is characterized in that, comprising:
Light source portion, irradiates light for the etchant resist used described alignment films; And
Polarisation portion, for the polarized light making the light polarization from described light source portion become regulation,
Described polarisation portion is the polarization element unit in Claims 1-4 described in any one,
Described light source portion is the linear light source of the orientation configuration being parallel to unit polarization element in described polarization element unit.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013166247 | 2013-08-09 | ||
| JP2013-166247 | 2013-08-09 | ||
| JP2014151387A JP2015057639A (en) | 2013-08-09 | 2014-07-25 | Polarizing element unit and polarized light irradiation device using polarizing element unit |
| JP2014-151387 | 2014-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204101765U true CN204101765U (en) | 2015-01-14 |
Family
ID=52270182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420447592.7U Expired - Fee Related CN204101765U (en) | 2013-08-09 | 2014-08-08 | The polarisation irradiation unit of polarization element unit and use polarization element unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204101765U (en) |
-
2014
- 2014-08-08 CN CN201420447592.7U patent/CN204101765U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150114 Termination date: 20200808 |