JP2019008318A5

JP2019008318A5 -

Info

Publication number: JP2019008318A5
Application number: JP2018175261A
Authority: JP
Filing date: 2018-09-19
Publication date: 2019-04-18
Anticipated expiration: 2035-01-14

Claims

It is a polarizer in which a plurality of thin wires are arranged in parallel on a transparent substrate transparent to ultraviolet light,
A light shielding film for shielding the ultraviolet light is formed outside the polarization region in which the thin lines are arranged ,
The light shielding film is formed along one side that constitutes the outer edge of the polarization area,
The one side is a side parallel to the thin line,
A polarizer , wherein a distance between the thin line and an edge on an inner edge side of the light shielding film is equal to a distance between the thin lines .

The said light shielding film is formed in the outer periphery of the said polarization | polarized-light area | region, The polarizer of Claim 1 characterized by the above-mentioned.

The polarizer according to claim 1 or 2, wherein a character, a symbol, or an alignment mark is formed on the light shielding film.

The polarizer according to claim 3, wherein the character, the symbol, or the alignment mark has a configuration in which a plurality of thin lines are arranged in parallel.

The value of the S-wave transmittance for the ultraviolet light in the character, the symbol, or the alignment mark is the same as the S-wave transmittance for the ultraviolet light in the polarized region, or for the ultraviolet light in the polarized region The polarizer according to claim 4, which has a smaller value than the S-wave transmittance.

The polarizer according to any one of claims 1 to 5, wherein the thin line is connected to the light shielding film.

The polarizer according to any one of claims 1 to 6, wherein a material forming the light shielding film contains a material forming the thin wire.

  A method for producing a polarizer according to any one of claims 1 to 7, which produces the polarizer,
  Preparing a laminate in which the first material layer is formed on the transparent substrate;
  Forming a resist layer on the first material layer;
  Processing the resist layer to form a resist pattern having a fine line pattern and a light shielding film pattern;
  Etching the first material layer using the resist pattern as an etching mask;
  A method of manufacturing a polarizer, comprising:

The resist layer is composed of a positive type electron beam resist,
The step of forming a resist pattern having the thin line pattern and the light shielding film pattern includes the step of irradiating the resist layer at a position to be a space pattern portion of the line and space pattern constituting the thin line pattern. A method of manufacturing a polarizer according to claim 8.

A photo-alignment device that polarizes ultraviolet light and irradiates the photo-alignment film, comprising the polarizer according to any one of claims 1 to 7.
A light alignment device, comprising: irradiating the light alignment film with light transmitted through the polarization area of the polarizer.

  A mechanism for moving the photo alignment film is provided;
  A plurality of the polarizers are provided in both the moving direction of the light alignment film and the direction orthogonal to the moving direction of the light alignment film,
  The plurality of polarizers are disposed such that boundaries between the plurality of adjacent polarizers in the direction orthogonal to the moving direction of the optical alignment film are not continuously connected to the moving direction of the optical alignment film. The light aligning device according to claim 10, characterized in that:

  A polarizer that shields light in a polarization direction parallel to a thin line of ultraviolet light that has entered, and transmits light in a polarization direction perpendicular to the thin line,
  A plurality of the thin wires are arranged in parallel on a substrate having transparency to the ultraviolet light,
  A light shielding film for shielding the ultraviolet light is provided outside the thin wire region which is a region where the thin wire is disposed,
  The formation direction of the inner edge side of the light shielding film is parallel or perpendicular to the longitudinal direction of the thin line,
  The light shielding film is formed along one side constituting an outer edge of the thin line region,
  The one side is a side parallel to the longitudinal direction of the thin line,
  A polarizer, wherein a distance between the thin line and an edge on an inner edge side of the light shielding film is equal to a distance between the thin lines.

The polarizer according to claim 12, wherein a second fine wire region, which is a region in which the thin wire is arranged, is formed outside the light shielding film.