JP2019008258A - Holding device, positioning device, and pasting device - Google Patents

Abstract

To provide a holding device, positioning device, and pasting device allowing the positioning of a workpiece when workpieces having curved surfaces are pasted on each other.SOLUTION: A holding device includes: a holding unit 20 for holding a workpiece W1 having a curved surface CS; a pressing unit 40 that has a pressing surface 41 for pressing a workpiece W2 so that it is along the curved surface of the workpiece W1, and in which a relative position of the plane direction crossing the pressing direction is immovable with respect to the holding unit 20 that makes the workpiece W1 face the pressing surface 41 for pressing; and a positioning unit 50 for positioning the workpiece W2 with respect to the workpiece W1 by changing the position of the plane direction of the workpiece W2 with respect to the workpiece W1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a holding device, a positioning device, and a bonding device.

  In general, a flat display device represented by a liquid crystal display or an organic EL display, that is, a so-called flat panel display includes a display panel and other work incorporated in a housing. Other works include a touch panel for operation, a cover panel for protecting the surface, a backlight, a light guide plate for the backlight, and the like.

  These workpieces are incorporated into the casing individually or in a state of being laminated in advance. For example, what was comprised as a composite panel which laminated | stacked the touch panel on the protective cover may be used.

  A display panel in which a touch panel function is incorporated may be used. As described above, there are various types of workpieces. Hereinafter, a plurality of workpieces constituting the display device are referred to as a display device member.

  The operation of laminating a general flat workpiece is performed by first attaching an adhesive to one surface of the workpiece and attaching another workpiece through the adhesive. When pasting another workpiece, it is necessary to position the other workpiece held by the other holding member with respect to the one workpiece held by the one holding member. For example, the position of the functional surface of the touch panel and the polarizing plate and the position of the display surface of the display panel must be matched within the print frame of the cover panel. In this case, the positional deviation of the workpieces held by both holding members is detected, and at least the position of the other holding member in the planar direction is adjusted so that the position of the other workpiece matches the one workpiece.

JP2012-190047A

  In an electronic apparatus using the display device member as described above, a physical button that is a mechanical switch for operating the apparatus is often provided on a side surface portion of the housing. However, in recent years, using a highly flexible display device member, the display area is extended not only on the surface of the housing but also on the side surface of the housing, and the operation by touching the touch panel also on the side surface There are products that enable this. In this case, a curved surface shape is formed from the surface to the side surface of the display device member.

  When pasting a workpiece having such a curved surface, one workpiece is held in a mold having a concave surface along the curved surface, and the other workpiece is held in a mold having a convex surface along the curved surface. It is conceivable to perform pressure bonding between a pair of workpieces. However, if the position and angle of the other mold in the planar direction are changed to match the position of the work held in the other mold with the work held in one mold, the unevenness of the mold will not match, and the Cannot be matched.

  The objective of this invention is providing the holding | maintenance apparatus, the positioning device, and the bonding apparatus which enable positioning of the workpiece | work when bonding the workpiece | work which has a curved surface.

  In order to achieve the above object, a holding device of the present invention includes a holding unit that holds a first workpiece having a curved surface, and a pressing surface that presses the second workpiece so as to follow the curved surface of the first workpiece. A pressing portion provided with a relative position in a plane direction that intersects the pressing direction immovable with respect to the holding portion having the first workpiece opposed to the pressing surface for pressing, and the second A positioning unit that positions the second workpiece with respect to the first workpiece by changing a position of the workpiece in the planar direction with respect to the first workpiece.

  The positioning unit is provided movably in the planar direction, and has a second holding unit that holds the second workpiece, and a drive unit that drives the second holding unit in the planar direction. May be.

  The second holding part may be provided in the pressing surface.

  The second holding part may be provided outside the pressing surface.

  The second holding part may have an attaching part to which the second work adheres.

  The adhering portion may include a vacuum chuck that adsorbs the second workpiece by decompression.

  The adhering portion may have an adhesive that adheres the second workpiece.

  The second holding unit may include a regulating unit that regulates the position of the second workpiece in the planar direction.

  The restricting portion may have a protruding tool that is inserted through a hole formed in the second workpiece.

  The restricting portion may include a holding portion that holds the second workpiece.

  Prior to pressing the second workpiece against the first workpiece by the pressing surface, a pressing portion for bringing the second workpiece into close contact with the pressing surface may be provided.

  In the positioning device of the present invention, in order to operate the holding device and the positioning portion, detection for detecting a positional deviation between the first workpiece and the second workpiece between the holding portion and the pressing portion. And a device.

  The detection device includes: an imaging unit that images a predetermined portion of the first workpiece and the second workpiece; and the first workpiece and the second workpiece based on an image captured by the imaging unit. And a detecting device for detecting the positional deviation of

  The bonding apparatus of the present invention includes the holding device and a pressing device that presses the second workpiece against the first workpiece by biasing one or both of the holding portion and the pressing portion in the pressing direction. Have.

  ADVANTAGE OF THE INVENTION According to this invention, the holding | maintenance apparatus, the positioning device, and the bonding apparatus which enable positioning of the workpiece | work when bonding the workpiece | work which has a curved surface can be provided.

It is the perspective view (A) and side view (B) which show the workpiece | work W1 used as the holding | maintenance object of embodiment. It is a top view which shows the workpiece | work W2 used as the holding object of embodiment. It is a schematic plan view which shows the bonding apparatus with which embodiment is applied. It is a side view which shows the bonding apparatus of FIG. It is a fragmentary sectional view which shows the pressing part and positioning mechanism of the holding | maintenance apparatus of embodiment. It is a perspective view which shows the holding | maintenance apparatus of embodiment. It is a top view which shows the pressing part and positioning mechanism of a holding | maintenance apparatus. It is a perspective view which shows mounting | wearing of the workpiece | work W1 to the pressing part 40. FIG. It is a block diagram which shows the control apparatus of the bonding apparatus. It is a side view which shows the time of the vacuum chamber standby of a press apparatus. It is a side view which shows the time of the vacuum chamber fall of a press apparatus. It is a side view which shows the time of the fall of the pressurization head of a press apparatus. It is a side view which shows the time of atmospheric release of a press apparatus. It is a side view which shows the time of the vacuum chamber raise of a press apparatus. It is sectional drawing which shows operation | movement of the crimping | compression-bonding part at the time of bonding. It is a top view which shows the positioning part of other embodiment.

Embodiments of the present invention (hereinafter referred to as embodiments) will be specifically described with reference to the drawings.
[work]
The work W1 and the work W2 to be held in this embodiment will be described. The workpiece W1 is a member having a curved surface CS as shown in FIG. The curved surface CS constitutes a part of a pasting surface BS to which a work W1 described later is pasted via an adhesive AD. The curved surface CS is a surface on the opposite side to the surface that is extended by bending or bending a part of the workpiece W1.

  For example, the workpiece W1 has a rectangular plate shape, and the curved surface CS is formed by bending or bending a pair of opposing side portions SE of the workpiece W1. A region other than the curved surface CS of the pasting surface BS is a flat surface FS. For this reason, in the example of FIG. 1, the pasting surface BS is constituted by the curved surface CS and the flat surface FS.

  In the present embodiment, a cover panel of a display device is used as the work W1. The cover panel is a light-transmitting substrate that constitutes the exterior of the display device. The material of the cover panel is, for example, glass or acrylic. A printing frame B made of a light shielding material is formed on the sticking surface BS of the cover panel. The black area in FIG. 1A is the area of the printing frame B. As shown in FIG. 1B, printing is performed on the pasting surface BS side.

  The translucent area surrounded by the inner edge of the print frame B forms a display area D in which the display portion of the display device can be viewed from the outside. The display area D is, for example, a rectangle. However, the display area D is formed from the flat surface FS to the area extending from the curved surface CS.

  As shown in FIG. 1 (B), an adhesive AD is affixed to the affixing surface BS. The adhesive AD is attached by using an adhesive sheet in which the adhesive AD is attached to a release sheet. After sticking the adhesive AD to the work W1, the sticking surface BS of the work W1 can be made sticky by peeling the release sheet.

  For example, the adhesive AD uses OCA (Optical Clear Adhesive) attached to a release sheet. The adhesive AD is, for example, an acrylic, silicon, or urethane synthetic resin. The release sheet is a film in which the adhesive AD is made peelable using silicone or other resin. If the edge part of adhesive AD exists in the display area D, this edge part will inhibit visibility. For this reason, adhesive AD is affixed on the area | region which covers the display area D at least.

  As shown in FIG. 2, the workpiece W2 is a flat sheet-like member attached to the workpiece W1 as described above so as to follow the curved surface CS. In the present embodiment, the workpiece W2 is configured by bonding the functional member M and the release sheet P together with an adhesive. The functional member M is a member that bears a part of the function of the display device. The functional member M is, for example, a polarizing plate, a touch panel, or a display panel. The polarizing plate is a plate that transmits or shields light according to the incident direction. The touch panel is an input device that can be seen through the display screen of the display panel and inputs information by detecting contact with the display screen. The display panel is a panel having a display function such as a liquid crystal panel (LED) or an organic EL panel (OLED). The functional member M has a size that covers at least the display region D.

  The release sheet P and the pressure-sensitive adhesive are the same as the above-described release sheet and the pressure-sensitive adhesive AD. Such a workpiece W2 has flexibility to follow the curved surface CS. For this reason, in the region corresponding to the curved surface CS, the functional member M also bends following the curved surface CS. As shown in FIG. 2, the release sheet P has a pair of holes H used when the release sheet P is attached to the holding device. In the present embodiment, the functional member M and the release sheet P are square, and the holes H are formed in the vicinity of a pair of opposing sides of the release sheet P. For example, the hole H is formed in the center of the short side of the release sheet P. A straight line connecting the centers of the pair of holes H is parallel to a side to be bent or bent in accordance with the workpiece W1 of the workpiece W2, and passes through the center of the workpiece W2.

[Bonding device]
[overall structure]
The whole structure of the bonding apparatus which has a holding | maintenance apparatus of this embodiment is demonstrated. The bonding apparatus is an apparatus for bonding the workpiece W2 to the bonding surface BS including the curved surface CS of the workpiece W1 via the adhesive AD in a vacuum. As shown in FIGS. 3 and 4, the bonding device has four holding devices 2 mounted on the turntable 1. The bonding apparatus has an index mechanism 110. The index mechanism 110 is a mechanism that rotates the turntable 1 intermittently according to a plurality of positions. In the present embodiment, the index mechanism 110 rotates the turntable 1 with a driving source such as a motor, and moves the four holding devices 2 to the loading / unloading position 1A, the positioning position 1B, the plasma processing position 1C, and the bonding position 1D. Stop sequentially.

  As shown in FIGS. 3 and 4, the holding device 2 holds the workpiece W <b> 1 and the workpiece W <b> 2 facing each other. As shown in FIG. 5, the positioning position 1B is provided with a detection device 55 that detects the positions of the workpieces W1 and W2. Based on the positions of the workpieces W1 and W2 detected by the detection device 55, a moving amount for positioning the workpiece W2 with respect to the workpiece W1 is determined.

  For the detection of the positions of the workpiece W1 and the workpiece W2 by the detection device 55, alignment marks are used. Although not shown, the alignment mark is a mark provided on the workpiece W1 and the workpiece W2 corresponding to four vertices of a virtual rectangle or square. Note that the corners of the workpiece W1, the workpiece W2, the display area D, and the functional member M can also be used as alignment marks.

  As shown in FIG. 4, a pressing device 8 is provided at the bonding position 1D. The pressing device 8 can attach both of them by pressing the workpiece W1 and moving it to the workpiece W2 side in the reduced pressure space in the vacuum chamber 81. Details of the configuration of each unit will be described below.

[Holding device]
As illustrated in FIG. 6, the holding device 2 includes a stage 10, a holding unit 20, a support unit 30, a pressing unit 40, a positioning unit 50, and a crimping unit 60.

(stage)
The stage 10 is a table having a horizontal flat surface. The stage 10 is mounted at each position on the turntable 1. A pedestal 11 on which a pressing unit 40 and a positioning unit 50 are provided is fixed on the stage 10. The base 11 is a rectangular parallelepiped member, and the top surface is a flat surface.

(Holding part)
The holding unit 20 is a device that holds the workpiece W1. The holding unit 20 holds the workpiece W1 while maintaining the curved surface CS. The state where the curved surface is maintained means a state where the curved surface is not flat. In order to perform such holding, the holding unit 20 includes a mold 21 and a support plate 22.

  The mold 21 is a member having a concave contact surface 21a along a surface on the opposite side to the pasting surface BS of the workpiece W1. The mold 21 matches the surface of the contact surface 21a opposite to the pasting surface BS of the workpiece W1. An adhesive member (not shown) is affixed to the contact surface 21a to constitute an adhesive chuck.

  The support plate 22 is a member that supports the mold 21. The support plate 22 is a rectangular parallelepiped member, and a surface opposite to the contact surface 21a of the mold 21 is fixed to one plane. The flat surface on which the mold 21 is fixed is directed downward when bonding. A bearing 22 a is provided on one side surface of the support plate 22. The bearing 22 a is a pair of protrusions having a shaft hole parallel to one side of the support plate 22.

(Support part)
The support unit 30 is a device that supports the holding unit 20 so as to be movable in a direction in which the workpiece W1 is in contact with and away from the workpiece W2. The support part 30 of this embodiment supports the holding | maintenance part 20 so that raising / lowering and rotation are possible. The support unit 30 includes a column 31, a regulation plate 32, and a shaft 33. The support column 31 is three rod-shaped members that are vertically raised on the stage 10.

  The restriction plate 32 is a plate that is attached to the upper end of the support 31 in the horizontal direction and restricts the rotation of the support plate 22. The shaft 33 is a horizontal cylindrical member, and is attached across the upper portions of the two columns 31. The shaft 33 is inserted into the shaft hole of the bearing 22a, so that the support plate 22 is supported so as to be rotatable about an axis parallel to one side thereof.

  The support plate 22 supported by the shaft 33 is opposed to the mounting position where the mold 21 rises in a substantially vertical direction for mounting the work W1 and the mold 21 in the substantially horizontal direction for attaching the work W1 to the work W2. Rotate between positions. The restriction plate 32 is provided with a stopper 32a that is a protruding piece that contacts the edge of the support plate 22 so that the support plate 22 rotates from the mounting position and stops at the opposite position.

  Further, the support portion 30 is provided on the stage 10 together with the support plate 22 so as to be lifted and lowered. That is, the support plate 22 is located above the stage 10 at the initial position where the bonding is not performed. Then, the support plate 22 rotated and brought into the horizontal state is pressed downward by the pressing device 8, so that the support plate 22 is lowered together with the support column 30, and the workpiece W <b> 1 and the workpiece W <b> 2 are bonded.

  In addition, the support part 30 will raise to an initial position, when released from the press by the press apparatus 8. FIG. For this reason, although not shown, a biasing member that biases the column 31 upward is connected to the column 31. For example, when the support 31 is always urged upward by the urging member and is pressed by the pressing device 8, the support 31 is lowered against the urging force of the urging member and released. The urging member is configured to rise by the urging force of the urging member. For example, a compression spring or a cylinder can be used as the urging member.

(Pressing part)
The pressing part 40 is a member having a pressing surface 41. The pressing surface 41 is a surface that presses the workpiece W2 so as to follow the curved surface CS of the workpiece W1. To follow the curved surface CS means that the shape matches the curved surface CS. The pressing portion 40 has a substantially rectangular parallelepiped shape, and a pressing surface 41 is formed on the top surface thereof. The pressing surface 41 has a shape along the pasting surface BS. The shape along the pasting surface BS refers to a shape that follows the pasting surface BS by being pressed against the pasting surface BS. For this reason, the pressing surface 41 has a curved surface along the curved surface CS and a flat surface along the flat surface FS. Thereby, the external appearance of the pressing part 40 is substantially bowl-shaped. That is, the pressing portion 40 forms a convex mold that faces the concave mold 21.

  In the present embodiment, the adhesive AD is interposed between the workpiece W1 and the workpiece W2, and the workpiece W2 pressed by the pressing surface 41 follows the flat surface FS as well as the curved surface CS of the workpiece W1. Close contact with. The pressing portion 40 is provided with a linear groove 42 that is parallel to the side where the curved surface of the pressing surface 41 is formed and passes through the center. As shown in FIG. 5, the groove 42 has a concave cross section.

  In addition, in order to press, the work W1 and the work W2 should just move relatively. That is, both or one of the work W1 and the work W2 may be moved. In the present embodiment, the workpiece W1 is moved by the movement of the die 21 together with the holding portion 20, and the workpiece W2 is pressed against the workpiece W1 by the pressing portion 40 provided on the stage 10 side. The surface opposite to the pressing surface 41 is a flat surface fixed to the pedestal 11.

  In addition, the pressing unit 40 is provided with a fixed position in the plane direction that intersects the pressing direction with respect to the holding unit 20 in which the workpiece W1 is opposed to the pressing surface 41 for pressing. The pressing direction is a direction in which the holding unit 20 and the pressing unit 40 approach and separate from each other. In the present embodiment, the pressing direction is a vertical direction orthogonal to the horizontally opposed workpieces W1 and W2. Hereinafter, this direction is referred to as a Z direction.

  The plane direction intersecting with the pressing direction is a linear direction and a rotation (θ) direction on the plane intersecting with the pressing direction. Hereinafter, the plane direction is simply referred to as a plane direction. In the present embodiment, the plane direction is a linear direction and a rotation direction on a horizontal plane orthogonal to the pressing direction. Centering on the axis in the Z direction, the radial direction and the θ direction perpendicular to the axis are included in the plane direction. Of the plane directions of the present embodiment, the direction parallel to the side on which the curved surface of the pressing portion 40 is formed is defined as the X direction, and the direction perpendicular thereto is defined as the Y direction.

  The phrase “the relative position in the planar direction of the pressing portion 40 does not move” means that the relative position in the planar direction with the holding portion 20 that has come to the opposite position for pressing is constant. In the present embodiment, the pressing unit 40 is fixed at a position facing the mold 21 of the holding unit 20. That is, it is fixed to the top surface of the pedestal 11 provided on the stage 10. The pressing unit 40 is installed in a direction in which the pressing surface 41 of the pressing unit 40 matches the pasting surface BS of the workpiece W1 held by the holding unit 20. Matching means that the workpiece W2 fits into the workpiece W1 without colliding between the edge of the workpiece W1 and the edge of the workpiece W2 held so as to follow the pressing surface 41 of the pressing portion 40.

  In addition, when the holding part 20 and the pressing part 40 face each other for pressing, the relative position in the plane direction of both may be fixed, and the holding part 20 and the pressing part may be pressed before the work W1 and the work W2 face each other. The relative position of the portion 40 in the planar direction may change. For example, when the holding unit 20 is rotated from the mounting position to the facing position, and when the holding unit 20 is rotated from the facing position to the mounting position, the position in the planar direction with respect to the pressing unit 40 is changed. In addition, when both or one of the holding unit 20 and the pressing unit 40 moves in the plane direction and comes to the opposite position, the relative position in the plane direction may change during the movement.

(Positioning part)
The positioning unit 50 is a device that positions the workpiece W2 with respect to the workpiece W1 by changing the position of the workpiece W2 in the plane direction with respect to the workpiece W1. To change the position in the plane direction means to move the workpiece W2 along the plane, and includes a linear direction orthogonal to the Z direction, a curved direction such as meandering or arc shape, and a movement in the rotation direction. “Positioning” means that there is no deviation in the plane direction of the workpiece W2 with respect to the workpiece W1.

  As shown in FIGS. 5 and 7, the positioning unit 50 includes a second holding unit 51 and a driving unit 52. The second holding unit 51 is a member that is movably provided in the plane direction and holds the workpiece W2. In the present embodiment, the second holding unit 51 is provided so as to be movable in the X direction, the Y direction, and the θ direction on the horizontal plane independently of the pressing unit 40 and the stage 10. The second holding unit 51 includes an adhesion part 511 and a regulation part 512. The adhesion part 511 is a member to which the workpiece W2 adheres. The adhering portion 511 is provided in the pressing surface 41. That is, the adhering portion 511 is a rectangular parallelepiped rod-like member, and is inserted into the groove 42 formed in the pressing surface 41.

  As shown in FIG. 5, since a gap is provided between the outer side surface of the adhering part 511 and the inner side surface of the groove 42, the adhering part 511 is allowed to move in the plane direction and the moving range thereof is shown. Is regulated by the inner surface of the groove 42. The top surface of the adhesion portion 511 has a height equal to that of the pressing surface 41. As shown in FIG. 7, suction holes 511 a are formed on the top surface of the adhering portion 511. The suction hole 511a is connected to the decompression device 53 (see FIG. 9), and constitutes a vacuum chuck that sucks and holds the workpiece W2.

  The restricting portion 512 is a member that restricts the position of the workpiece W2 in the planar direction. As shown in FIG. 7, the restricting portion 512 is a rectangular flat plate provided at both ends of the attaching portion 511. The top surface of the restricting portion 512 is horizontal and is set at a position lower than the pressing surface 41. As shown in FIGS. 5 and 7, the restricting portion 512 includes a pair of projecting tools 512 a. The protruding tool 512a is an upright cylindrical pin.

  The distance between the pair of projecting tools 512a and the respective diameters are set so as to be inserted into the pair of holes H of the workpiece W2 to regulate the position of the workpiece W2. For example, the distance between the axes of the pair of protrusions 512a is provided so as to be approximately the same as the distance between the centers of the pair of holes H, and the diameter of the pair of protrusions 512a and the diameter of the pair of holes H are approximately the same. Provide to do. In addition, the diameter which substantially corresponds includes the case where the diameter of the hole H is formed slightly large so that insertion may be smooth. Further, as shown by a one-dot chain line in FIG. 7, a center line that is a straight line penetrating the center of the pressing surface 41 in the longitudinal direction coincides with a straight line that connects the centers of the pair of protruding tools 512a.

  As shown in FIG. 5, the drive unit 52 is a device that drives the second holding unit 51. As the driving unit 52, an XYθ table can be used. For example, a mechanism in which a linear slider that moves along a horizontal linear guide is driven by a ball screw that is rotated by a motor is overlapped in an orthogonal direction to move the second holding unit 51 in the XY direction. . Further, the second holding unit 51 is rotated in the θ direction by a drive shaft that is rotated by a direct drive of a motor or a belt drive.

  The drive unit 52 is disposed below the stage 10, and the shaft 521 constituting the drive shaft passes through the through holes 41 a formed in the bottom surface of the groove 42, the through holes 10 a and 11 a formed in the stage 10 and the base 11. Then, it is connected to the bottom surface of the adhering portion 511. The through holes 41 a, 10 a, 11 a are formed with play allowing the movement in the horizontal direction between the shafts 521. Thereby, the adhesion part 511 moves in the X direction and the Y direction along with the shaft 521 in the groove 42. Further, as the shaft 521 rotates, the adhering portion 511 moves in the θ direction in the groove 42 as described above. The driving unit 52 may be any mechanism as long as it moves the second holding unit 51 in the plane direction.

(Crimping part)
The crimping portion 60 is a component that brings the workpiece W2 into close contact with the pressing surface 41 before pressing the workpiece W2 against the workpiece W1 by the pressing surface 41. The close contact with the pressing surface 41 means that the surface of the workpiece W2 opposite to the surface attached to the workpiece W1 follows the pressing surface 41. The pressure-bonding portion 60 of the present embodiment presses both opposing edge portions of the work W2, thereby applying tension to the work W2 and bringing it into close contact with the pressing surface 41.

  As shown in FIG. 6, the crimping part 60 includes rollers 61 and 62, bearing parts 63 and 64, a guide part 65, a pushing part 66, a first biasing part 67, and a second biasing part 68. The rollers 61 and 62 are thin cylindrical members, and are respectively provided along the opposing long side surfaces of the mold 21. The bearing parts 63 and 64 are members that rotatably support both ends of the rollers 61 and 62. The guide part 65 is a member that supports the bearing part 63 so as to be slidable. Thus, the rollers 61 and 62 are provided so as to be movable in a direction perpendicular to the axis thereof.

  The pushing portion 66 is a plate that is provided on the surface of the support plate 22 opposite to the rollers 61 and 62 and is pressed by the ceiling of the vacuum chamber 81 of the pressing device 8. The extruding part 66 has a rod 66 a that penetrates the support plate 22 and is connected to the guide part 65. The rod 66 a is a cylindrical member, and when the pushing portion 66 is pressed, the rollers 61 and 62 move in a direction away from the support plate 22.

  The first urging unit 67 is a member that urges the rollers 61 and 62 in a direction to approach and close each other. As the first urging portion 67, for example, a tension spring suspended between the bearing portions 63 and 64 is used. The second urging portion 68 is a member that urges the rollers 61 and 62 toward the support plate 22. As the second urging portion 68, for example, a compression spring inserted between the pushing portion 66 and the support plate 22 is used.

[Detection device]
As shown in FIG. 5, the detection device 55 is a device that detects the displacement of the workpiece W <b> 1 and the workpiece W <b> 2 between the holding unit 20 and the pressing unit 40 in order to operate the positioning unit 50. An imaging unit 56, an arm 57, and a moving mechanism 58 (see FIG. 9) are included. The imaging unit 56 is an apparatus that images a predetermined portion of the workpiece W1 and the workpiece W2. The predetermined location is the alignment mark as described above. The imaging unit 56 includes a camera 561 and a lens barrel 562. The camera 561 is a device that converts an optical signal into an electric signal by an image sensor using a light receiving element as an imaging device. The lens barrel 562 is a device that receives light from two upper and lower directions and emits the light to the camera 561. As a result, the camera 561 can capture images in two upper and lower visual fields, as indicated by arrows.

  The arm 57 is a long member that supports the imaging unit 56. The moving mechanism 58 includes a drive source and the like, and guides the imaging unit 56 to the imaging position by moving the arm 57. For example, the moving mechanism 58 is provided so that the imaging unit 56 can be inserted and removed between the workpiece W1 and the workpiece W2 that are held apart by the holding device 2 by moving the imaging unit 56 in the XYθ direction. The alignment mark is positioned at a position where it can be imaged.

[Plasma processing equipment]
Although not shown, the plasma processing apparatus is an apparatus disposed at the plasma processing position 1C, and at least one of the surfaces of the workpiece W1 and the workpiece W2 to be bonded to each other is subjected to plasma processing to improve the surface. The plasma processing apparatus introduces a processing gas such as nitrogen, oxygen, or argon between electrodes to which a high voltage is applied, and sprays a gas activated by discharge on the surface to be processed. The surfaces of the workpieces W1 and W2 to which the activated gas is sprayed are modified, and, for example, adhesion with an adhesive is improved. In this embodiment, it is assumed that the workpiece W2 is subjected to plasma processing.

[Pressing device]
As shown in FIG. 4, the pressing device 8 is a device that presses the work W <b> 2 against the work W <b> 1 by urging the holding unit 20 in the pressing direction. The pressing device 8 includes a vacuum chamber 81, a pressure head 82, an elevating mechanism 83, and a pressing mechanism 84. The vacuum chamber 81 is a container that forms a vacuum chamber inside by covering the flat surface of the stage 10. The vacuum chamber 81 forms a vacuum chamber by covering the periphery of the workpiece W1 and the workpiece W2 to be bonded and sealing the space between the stage 10 and the workpiece. That is, this embodiment has a vacuum chamber for attaching the workpiece W2 to the workpiece W1 via the adhesive AD in a vacuum.

  When the ceiling of the vacuum chamber 81 is lowered, the rollers 61 and 62 are lowered by urging the pushing portion 66 of the crimping portion 60. A decompression device 81a (see FIG. 9) is connected to the vacuum chamber 81. The decompression device 81a is a device that creates a vacuum by decompressing the vacuum chamber. Although not illustrated, the decompression device 81a includes a pipe, a vacuum pump, and a valve. One end of the pipe communicates with the vacuum chamber, and the other end is connected to the vacuum pump. The vacuum pump is an exhaust device that exhausts air from the vacuum chamber.

  The pressure head 82 is a device that is provided in the vacuum chamber 81 and presses the support portion 30 of the holding device 2 downward. The pressurizing head 82 has a flat plate shape, and lowers the supporting plate 22 together with the supporting portion 30 by urging the supporting plate 22 in the facing position downward.

  The lifting mechanism 83 is a mechanism that lifts and lowers the vacuum chamber 81 together with the pressure head 82. The elevating mechanism 83 has, for example, a block that moves in the vertical direction by a vertical guide rail and a ball screw that is rotated by a driving source, and a vacuum chamber 81 is connected to the block. When the vacuum chamber 81 is lowered to a position where it is in contact with the stage 10 and sealed, the inner ceiling touches the pushing portion 66 and presses the pushing portion 66 of the crimping portion 60, thereby lowering the rollers 61 and 62. (See FIG. 11).

  The pressing mechanism 84 is a mechanism that raises and lowers the pressure head 82 independently of the vacuum chamber 81. The pressing mechanism 84 has, for example, a drive rod that moves forward and backward in the vertical direction by a cylinder, and a pressure head 82 is connected to the drive rod. When the pressure head 82 is lowered, the support plate 22 of the holding device 2 is pressed and lowered (see FIG. 12). In other words, the pressure head 82 enters between the pair of extruding portions 66 that are arranged apart from each other, and presses against the support plate 22.

[Control device]
Control device 9 is a device which controls operation of each part of the above-mentioned pasting device. The control device 9 can be configured by, for example, a dedicated electronic circuit or a computer that operates with a predetermined program. The control device 9 is programmed with the control content of each unit, and is executed by a processing device such as a PLC or a CPU.

  The configuration of the control device 9 will be described with reference to FIG. 9 which is a virtual functional block diagram. That is, the control device 9 includes a mechanism control unit 91, a detection unit 92, a storage unit 93, and an input / output control unit 94.

  The mechanism control part 91 is a process part which controls the mechanism of each part of the bonding apparatus. For example, the mechanism control unit 91 performs intermittent rotation operation of the index mechanism 110, operation of the drive unit 52 of the positioning unit 50, operation of the decompression device 53, imaging of the imaging unit 56, operation of the moving mechanism 58, operation of the decompression device 81a, The operation of the lifting mechanism 83 and the operation of the pressing mechanism 84 are controlled.

  The detection unit 92 detects a correction amount for correcting a shift between the workpiece W1 and the workpiece W2 based on the image captured by the imaging unit 56. The detection unit 92 includes an extraction unit 921 and a calculation unit 922. The extraction unit 921 extracts the coordinates of one point that specifies the positions of the alignment marks of the workpiece W1 and the workpiece W2 from the image captured by the imaging unit 56. Extraction of the alignment mark can be realized by general image processing.

  The calculating unit 922 calculates a correction amount for the positional deviation between the workpiece W1 and the workpiece W2 based on the coordinates of the extracted alignment mark. For example, among the four alignment marks of the workpiece W1 and the workpiece W2, the midpoint of two diagonal points is calculated as the barycentric coordinates of the workpiece W1 and the workpiece W2. In addition, the inclination of a straight line connecting two points of the long side or the short side among the four alignment marks of the work W1 and the work W2 is calculated as the inclination of the work W1 and the work W2.

  Then, the calculation unit 922 obtains the movement amount of the workpiece W2 whose inclination coincides with the barycentric coordinates of the workpiece W1 and the workpiece W2. That is, the movement amount in the X direction and the Y direction of the drive unit 52 for making the barycentric coordinate of the work W2 coincide with the barycentric coordinate of the work W1 is calculated. Further, the operation amount in the θ direction of the drive unit 52 for making the inclinations of the workpiece W1 and the workpiece W2 coincide is calculated. Based on this operation amount, the mechanism control unit 91 operates the drive unit 52.

  The storage unit 93 stores information necessary for the processing of this embodiment. Such information includes the image captured by the imaging unit 56, the coordinates of the alignment mark, the barycentric coordinates, the inclination, and the operation amount of the driving unit 52.

  The input / output control unit 94 is an interface for controlling signal conversion and input / output with each unit to be controlled.

  Further, the control device 9 has an input device 95 and an output device 96. The input device 95 is a device such as a switch, a touch panel, a keyboard, and a mouse for an operator to input information necessary for processing of the present embodiment and information stored in the storage unit 93. The output device 96 is a device such as a display, a lamp, and a meter for the operator to check the state of the present embodiment. For example, the image captured by the imaging unit 56, the alignment mark coordinates, the barycentric coordinates, the tilt, and the operation amount of the driving unit 52 may be displayed on the display screen.

[Operation]
The bonding operation | movement by this embodiment as mentioned above is demonstrated below. In addition, the method of controlling the bonding apparatus in the procedure demonstrated below and the computer program which operates a control apparatus are also one aspect | mode of this invention.

(Installation of work W1)
The operator attaches the workpiece W1 to the mold 21 at the loading / unloading position 1A shown in FIG. In other words, the work W1 is held on the mold 21 by the adhesive chuck by pressing the surface on the extended side of the work W1 (the surface opposite to the surface including the curved surface CS) according to the position of the mold 21 (FIG. 6). In addition, it can position using a jig | tool at the time of mounting | wearing of the workpiece | work W1. For example, since the position of the workpiece W1 in the short side direction (Z direction in the state of FIG. 6) is positioned by the curved surface CS as the workpiece W1 is pressed, the long side direction of the workpiece W1 (X direction in the state of FIG. 6) A jig may be used for positioning. When adhesive AD is affixed with the peeling sheet on the sticking surface BS of the workpiece | work W1, a peeling sheet is peeled.

(Installation of work W2)
In addition, the worker attaches the workpiece W2 to the pressing unit 40 as shown in FIG. As shown in FIG. 8, this mounting is performed by inserting a protruding tool 512 a provided in the restricting portion 512 of the positioning portion 50 into the hole H with the functional member M of the workpiece W <b> 2 facing upward. Thereby, the workpiece W2 is positioned with respect to the adhesion portion 511, and the first-stage positioning is performed with respect to the pressing portion 40.

(Rotation of support plate)
The operator rotates the holding portion 20 until the stopper 32 a comes into contact with the edge portion of the support plate 22, and sets the facing position. Thereby, as shown in FIG. 5, the mold | type 21 and the workpiece | work W1 with which this was mounted | worn oppose the workpiece | work W2 in a horizontal state. As shown in FIG. 7, the workpiece W2 is mounted on the restricting portion 512, whereby the basic positioning with respect to the workpiece W1 is performed and the positional deviation with respect to the workpiece W1 is prevented.

(Workpiece positioning)
The holding device 2 holding the workpiece W1 and the workpiece W2 as described above comes to the positioning position 1B by the rotation of the turntable 1. Then, since the suction hole 511a on the top surface of the adhering portion 511 becomes negative pressure and the vacuum chuck functions by the decompression device 53, the work W2 is sucked and held.

  Then, as shown in FIG. 5, by moving the arm 57 by the moving mechanism 58 (see FIG. 9), the imaging unit 56 can be inserted between the workpieces W1 and W2 facing each other, and the alignment mark can be imaged. Stop in order. At each stop, the imaging unit 56 images the alignment marks of the workpiece W1 and the workpiece W2. The captured image is input to the control device 9.

  The extraction unit 921 of the detection unit 92 extracts the coordinates of the alignment mark from the captured image. The calculation unit 922 calculates a correction amount of the position of the workpiece W2 with respect to the workpiece W1 from the coordinates of the extracted alignment mark.

  The mechanism control unit 91 instructs the drive unit 52 to perform an operation based on the calculated correction amount. Accordingly, as shown in FIG. 7, the driving unit 52 operates with the movement amount in the X direction and the Y direction and the rotation amount in the θ direction according to the correction amount. For this reason, the position of the workpiece W2 attracted to the adhering portion 511 is changed so that the displacement with respect to the workpiece W1 is corrected. Thereby, the workpiece W2 is positioned with respect to the workpiece W1.

(Plasma treatment)
The holding device 2 in which the workpieces W1 and W2 are positioned as described above comes to the plasma processing position 1C by the rotation of the turntable 1. A plasma processing apparatus (not shown) enters between the workpieces W1 and W2 facing each other, and plasma-treats the upper surface of the workpiece W2, more specifically, the upper surface of the functional member M.

(Lamination)
Next, the holding device 2 holding the workpiece W1 and the workpiece W2 comes to the bonding position 1D by the rotation of the turntable 1. Thereby, as shown in FIG. 10, the holding device 2 comes below the vacuum chamber 81 where the pressing device 8 is raised.

  As shown in FIG. 11, the lifting mechanism 83 of the pressing device 8 lowers the vacuum chamber 81 to a position where it is in contact with the stage 10 and sealed. Then, since the ceiling of the vacuum chamber 81 presses the pushing portion 66 of the pressure-bonding portion 60, the rollers 61 and 62 that are in contact with the side surface of the mold 21 are moved to the second urging portion as shown in FIG. It descends against the urging force of 68.

  As a result, as shown in FIG. 15B, the rollers 61 and 62 are detached downward from the side surface of the mold 21 while rotating. Furthermore, the rollers 61 and 62 move to the side surface of the pressing unit 40 while pressing the workpiece W2 on the pressing surface 41 of the pressing unit 40. Since the rollers 61 and 62 are urged in directions approaching each other by the urging force of the first urging portion 67, the rollers 61 and 62 move downward while applying pressure so as to sandwich both side surfaces of the pressing portion 40. Thereby, tension is applied so as to pull both ends of the work W2, and the work W2 comes into close contact with the pressing surface 41. If the rollers 61 and 62 are too close, for example, if the rollers 61 and 62 are closed until they come into contact with each other, the rollers cannot be lowered so as to sandwich the pressing portion 40 only by pressing down. For this reason, the rollers 61 and 62 are urged in the approaching direction by the first urging portion 67, but are stopped at intervals that are a predetermined amount narrower than the width of the pressing portion 40 by a stopper (not shown). It is supposed to be. “Narrow by a predetermined amount” means that the rollers 61 and 62 are in positions facing the curved surface corresponding to the curved surface CS in the pressing portion 40, respectively.

  The decompression device 81a is evacuated by decompressing the vacuum chamber. As shown in FIG. 12, the pressing mechanism 84 presses the support plate 22 of the holding unit 20 by lowering the pressure head 82. Then, as shown in FIG. 15 (C), the mold 21 moves down together with the support plate 22 and follows the pressing surface 41 of the pressing portion 40, so that it adheres so as to follow the bonding surface BS including the curved surface CS of the workpiece W1. The workpiece W2 is pasted through the agent AD.

  After bonding, the vacuuming is released by using a valve or the like (not shown) and the atmosphere is released, and the elevating mechanism 83 raises the vacuum chamber 81 as shown in FIG. At this time, the pressing mechanism 84 maintains the pressure applied by the pressure head 82. Then, the pressing of the crimping part 60 to the pushing part 66 is released, so that the rollers 61 and 62 are raised by the urging force of the second urging part 68. As shown in FIG. 15D, the rollers 61 and 62 move from the side surface of the pressing unit 40 to the side surface of the mold 21 to release the pressure bonding to the workpiece W2.

  As shown in FIG. 14, the pressing mechanism 84 lifts the pressure head 82 to release the pressing of the holding unit 20 against the support plate 22. And the support plate 22 raises by the support | pillar 31 of the support part 30 raising. Then, as shown in FIG. 15 (E), the workpiece W1 and the workpiece W2 bonded thereto are raised together with the mold 21. Thereafter, the elevating mechanism 83 is driven again to raise the vacuum chamber 81 to the initial position.

(Workpiece removal)
As described above, when the holding device 2 holding the bonded workpiece W1 and workpiece W2 comes to the loading / unloading position 1A by the rotation of the turntable 1, the operator removes the workpieces W1 and W2 from the mold 21.

[Function and effect]
(1) The holding unit 20 that holds the workpiece W1 having the curved surface CS, and the pressing surface 41 that presses the workpiece W2 so as to follow the curved surface of the workpiece W1, and the workpiece W1 is opposed to the pressing surface 41 for pressing. By changing the position of the workpiece W2 in the plane direction with respect to the workpiece W1 by changing the pressing portion 40 in which the relative position in the plane direction intersecting the pressing direction is immovable with respect to the holding portion 20, the workpiece W1 is changed to the workpiece W1. And a positioning portion 50 for positioning W2.

  For this reason, since it is possible to move and position only the workpiece W2 in the plane direction without moving the pressing portion 40 in the plane direction with respect to the workpiece W1, the pressing portion 40 against the workpiece W1 having the curved surface CS. As a result, the projections and depressions are not displaced.

(2) The positioning unit 50 is provided movably in the planar direction, and includes a second holding unit that holds the workpiece W2, and a drive unit that drives the second holding unit in the planar direction.

  For this reason, when the 2nd holding | maintenance part 51 holding the workpiece | work W2 moves to a plane direction independently of the pressing part 40, the workpiece | work W2 can be positioned with respect to the workpiece | work W1.

(3) The 2nd holding | maintenance part 51 has the adhesion part 511 to which the workpiece | work W2 adheres. For this reason, the workpiece W2 can be positioned with respect to the workpiece W1 by moving the second holding unit 51 in a state where the workpiece W2 is adhered to the adhesion portion 511.

(4) The adhering portion 511 has a vacuum chuck (adsorption hole 511a) that adsorbs the workpiece W2 by decompression. For this reason, the workpiece W2 can be strongly held by the second holding portion 51 by the vacuum chuck, and deviation from the second holding portion 51 can be prevented.

(5) The second holding part 51 is provided in the pressing surface 41. For this reason, the workpiece | work W2 can be hold | maintained at the pressing surface 41, and it can prevent that the shift | offset | difference which the workpiece | work W2 from the pressing surface 41 does not intend arises.

(6) The 2nd holding | maintenance part 51 has the control part 512 which controls the position of the plane direction of the workpiece | work W2. For this reason, before the positioning of the workpiece | work W2 with respect to the workpiece | work W1, the 1st step positioning of the workpiece | work W2 with respect to the pressing part 40 can be performed by the control part 512. FIG. Further, the displacement of the workpiece W2 mounted on the pressing unit 40 in the planar direction is prevented.

(7) The regulation part 512 has the protrusion tool 512a inserted in the hole H formed in the workpiece | work W2. For this reason, the operator can easily position the workpiece W2 on the pressing portion 40 by inserting the protruding tool 512a into the hole H of the workpiece W2, and can prevent the occurrence of deviation with respect to the pressing portion 40 thereafter. .

(8) Before pressing the workpiece W2 against the workpiece W1 by the pressing surface 41, the pressing portion 41 has a pressure-bonding portion 60 that brings the workpiece W2 into close contact with the pressing surface 41. For this reason, since the workpiece W2 before being pressed against the workpiece W1 is in close contact with the pressing surface 41, the workpiece W2 is made to follow the pasting surface BS of the workpiece W1 without any gaps or twists. Can do.

(9) In addition to having the holding device 2, in order to operate the positioning unit 50, the holding device 2 has a detection device 55 that detects a positional deviation of the workpiece W <b> 1 and the workpiece W <b> 2 between the holding unit 20 and the pressing unit 40. For this reason, based on the position shift of the workpiece | work W1 and the workpiece | work W2 detected by the detection apparatus 55, the positioning part 50 can be operated and the workpiece | work W2 can be positioned with respect to the workpiece | work W1.

(10) The detection device 55 captures a predetermined amount of the workpiece W1 and the workpiece W2, and a correction amount for correcting the shift between the workpiece W1 and the workpiece W2 based on the image captured by the imaging unit 56. And a detecting unit 92 for detecting. For this reason, the workpiece | work W1 and the workpiece | work W2 can be positioned correctly by operating the positioning part 50 based on the correction amount.

(11) The holding device 2 and the pressing device 8 that presses the workpiece W2 against the workpiece W1 by urging the holding portion 20 in the pressing direction. For this reason, both can be pasted together by pressing device 8 after positioning work W2 to work W1.

[Other Embodiments]
The present invention is not limited to the embodiment as described above.
(1) The adhering portion 511 may be provided outside the pressing surface 41. For example, as illustrated in FIG. 16, a vacuum chuck may be configured by forming suction holes 511 a in the flat plate of the restricting portion 512. Thereby, the continuity of the surface of the pressing surface 41 is maintained. Even if the workpiece W2 is a member that easily causes uneven pressing when there is a gap such as a groove on the pressing surface 41, uneven pressing on the bonding surface can be made difficult to occur. Moreover, while providing the adhesion part 511 outside the pressing surface 41, you may provide the adhesion part 511 in the pressing surface 41 further like said embodiment. In this case, it is preferable that the upper surface of the restricting portion 512 has the same height as the flat surface of the pressing surface 41.

(2) The regulation part 512 may have a clamping part that clamps the workpiece W2. For example, instead of the projecting tool 512a or together with the projecting tool 512a, a holding part that holds the edge of the work W2 may be provided to prevent the position of the work W2 from being displaced with respect to the pressing surface 41.

(3) The adhesion part 511 may have the adhesive which adheres the workpiece | work W2. In other words, instead of the vacuum chuck, the workpiece W2 can be held by providing an adhesive on the top surface of the adhesion portion 511 as described above. Alternatively, the adhesive portion 511 may be formed by providing an adhesive on the flat plate of the restricting portion 512. Thus, when using an adhesive, a mechanism becomes simpler than a vacuum chuck.

(4) In order to bond the workpieces W1 and W2, the holding unit 20 and the pressing unit 40 may move relatively, and one or both may be urged in the pressing direction. The vertical relationship between the holding unit 20 and the pressing unit 40 may be reversed.

(5) An elastic body such as rubber or sponge may be attached to the surface of the pressing surface 41 of the pressing portion 40 and the surface of the contact surface 21a of the mold 21. For example, when laminating and laminating a plurality of workpieces, the height that changes each time the number of layers is increased can be absorbed by the elastic body, which has the effect of preventing uneven pressing.

(6) Before the rollers 61 and 62 descend at the bonding position 1D, the work W2 may be sucked and held by the pressing surface 41. As a result, the workpiece W2 is more closely attached to the pressing surface 41.

(7) In the above aspect, the adhesive AD is attached to the workpiece W1, but the adhesive AD may be attached to the workpiece W2. For example, when the adhesive AD is attached to the work W1, the adhesive AD (double-sided tape) is attached instead of the functional member M of the work W2, and is attached to the work W1.

(8) The curved surfaces of the workpiece W1 and the workpiece W2 are not limited to curved surfaces having no corners, and may be curved surfaces having corners.

  As mentioned above, although embodiment of this invention and the modification of each part were demonstrated, this embodiment and the modification of each part are shown as an example, and are not intending limiting the range of invention. These novel embodiments described above can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention and included in the invention described in the claims.

W1 Work W2 Work AD Adhesive B Printing frame BS Attached surface CS Curved surface D Display area FS Flat surface P Release sheet SE Side edge H Hole 10 Stage 10a Through hole 11 Base 11a Through hole 20 Holding part 21 Mold 21a Contact surface 22 Support Plate 22a Bearing 30 Support portion 31 Support column 32 Restriction plate 33 Shaft 40 Pressing portion 41 Pressing surface 41a Through hole 42 Groove 50 Positioning portion 51 Second holding portion 511 Adhering portion 511a Adsorption hole 512 Restricting portion 512a Protruding tool 52 Driving portion 521 Shaft 55 Detection device 56 Imaging unit 561 Camera 562 Lens barrel 57 Arm 58 Moving mechanism 60 Crimping part 61, 62 Roller 63, 64 Bearing part 65 Guide part 66 Pushing part 67 First urging part 68 Second urging part 8 Pressing Device 81 Vacuum chamber 81a Pressure reducing device 82 Pressure head 83 Elevating mechanism 84 Pressing mechanism 9 Control device 1 mechanism control unit 92 detecting unit 921 extracting unit 922 calculating unit 93 storage unit 94 input-output control unit 95 input unit 96 an output device

Claims (14)

A holding unit for holding a first workpiece having a curved surface;
A pressing surface that presses the second workpiece so as to follow the curved surface of the first workpiece, and the first workpiece is opposed to the pressing surface for pressing in the pressing direction. A pressing portion in which the relative position in the intersecting plane direction is immovably provided;
A positioning unit that positions the second workpiece with respect to the first workpiece by changing a position of the second workpiece in the planar direction with respect to the first workpiece;
A holding device comprising: The positioning part is
A second holding portion that is movably provided in the planar direction and holds the second workpiece;
A drive unit that drives the second holding unit in the planar direction;
The holding device according to claim 1, further comprising:   The holding device according to claim 2, wherein the second holding portion includes an attaching portion to which the second work is attached.   The holding apparatus according to claim 3, wherein the adhesion portion includes a vacuum chuck that adsorbs the second workpiece by decompression.   The holding device according to claim 3, wherein the attaching portion includes an adhesive that attaches the second workpiece.   The holding device according to claim 3, wherein the adhesion portion is provided in the pressing surface.   The holding device according to claim 3, wherein the adhesion portion is provided outside the pressing surface.   The holding device according to any one of claims 2 to 7, wherein the second holding unit includes a regulating unit that regulates a position of the second workpiece in the planar direction.   The holding device according to claim 8, wherein the restricting portion includes a protrusion that is inserted into a hole formed in the second workpiece.   The holding device according to claim 8, wherein the restricting portion includes a holding portion that holds the second workpiece.   11. The pressure-bonding portion according to claim 1, further comprising: a pressure-bonding portion that causes the second work to be in close contact with the pressing surface before the second work is pressed against the first work by the pressing surface. The holding device as described. A holding device according to any one of claims 1 to 11,
In order to operate the positioning unit, a detection device that detects a displacement of the first workpiece and the second workpiece between the holding unit and the pressing unit;
A positioning apparatus comprising: The detection device includes:
An imaging unit for imaging a predetermined portion of the first workpiece and the second workpiece;
A detection unit that detects a correction amount for correcting a shift between the first workpiece and the second workpiece based on an image captured by the imaging unit;
The positioning apparatus according to claim 12, further comprising: A holding device according to any one of claims 1 to 11,
A pressing device that presses the second workpiece against the first workpiece by biasing one or both of the holding portion and the pressing portion in the pressing direction;
It has a bonding apparatus characterized by having.

Images