KR101312164B1 - Bonding apparatus and bonding method - Google Patents

Abstract

This invention provides a joining apparatus and a joining method which can maintain a constant pressing force even if the position of a drive part changes with a simple structure. The bonding apparatus of this invention is the vacuum chamber 51 which seals the press head 52 which presses one work S2, the space which joins the workpieces S1, S2 by the press head 52, and the vacuum chamber ( The pressure reducing pump 55 which is connected to the 51, can suck the inside vacuum, the drive part 54 supported by the vacuum chamber 51, and apply | pressurizes the pressurizing head 52, and the pressurizing head 52 It has a sensor 56 which detects the position of and the control apparatus 6 which controls the pressing force by the drive part 54 based on the position of the pressurization head 52 detected by the sensor 56. As shown in FIG.

Description

Bonding device and joining method {BONDING APPARATUS AND BONDING METHOD}

TECHNICAL FIELD This invention relates to the joining apparatus and the joining method which improved on the technique which bonds a flat workpiece, such as a liquid crystal module and a cover panel, for example.

Generally, a liquid crystal panel is comprised by laminating | stacking a liquid crystal module, the protective sheet which protects the surface, the touchscreen for operation, etc. These liquid crystal modules, protective sheets, touch panels and the like (hereinafter referred to as "workpieces") are incorporated in the case of the liquid crystal module, and spaces are formed between each other to avoid contact with the liquid crystal glass due to deformation of the protective sheet or the touch panel. there was.

However, when a layer of air enters between a liquid crystal module, a protective sheet, a touch panel, etc. (henceforth a workpiece | work), visibility of a display surface will fall by external light reflection. In order to cope with this, bonding is performed so that the adhesive layer which fills in between workpieces is formed by adhesive materials, such as a double-sided tape and an adhesive agent.

For this reason, the manufacture of a liquid crystal panel requires the bonding apparatus which prepares this adhesive material with respect to at least one workpiece | work, and performs bonding. Moreover, in order to prevent a bubble etc. from mixing between the workpiece | work to join, it is preferable to perform bonding in vacuum. Therefore, the bonding apparatus should be equipped with a vacuum chamber etc.

As a technique for joining the workpieces in this manner, those disclosed in Patent Documents 1 to 4 are proposed, for example. These techniques join a pair of workpiece | work by a pressurization mechanism in a vacuum chamber. As this pressurization mechanism, the pressurizing plate which raises and lowers by drive parts, such as a motor and a cylinder, is used.

In addition, when a liquid resin or an adhesive sheet is used as an adhesive material, a vacuum bubble may generate | occur | produce and remain in the contact bonding layer after bonding, As a method of removing the vacuum bubble, pressurization in vacuum and atmospheric pressure after atmospheric release are used. (Standby) is valid. After atmospheric release, mechanical pressurization is also effective.

Japanese Patent Laid-Open Publication No. 06-97268 Japanese Patent Laid-Open No. 2002-329350 Japanese Patent Laid-Open No. 2003-307719 Japanese Patent Laid-Open No. 2006-184807

By the way, in the above prior art, the pressurization mechanism is directly supported by the vacuum chamber. Then, when vacuum suction is carried out in the vacuum chamber, the position of the pressurization mechanism is changed by the amount of the outer wall of the vacuum chamber being bent or the amount of crushing of the O-ring for sealing is changed by atmospheric pressure. For this reason, there exists a possibility that a void may generate | occur | produce in a contact bonding layer by the pressurization amount of a pressurizing plate becoming excessive and affecting a workpiece | work, or a pressurization amount falling after once pressurizing. In order to cope with this, a method of installing and driving the pressurization mechanism on a base separate from the vacuum chamber can be considered. However, when such a pressurizing mechanism is provided, the bonding apparatus becomes large and complicated.

The present invention has been proposed to solve the above problems of the prior art, and an object thereof is to provide a joining apparatus and a joining method capable of maintaining a constant pressing force even when the position of the driving unit is changed in a simple configuration. have.

In order to achieve the above object, the present invention provides a bonding apparatus for joining a pair of workpieces, the pressurizing head for pressing at least one of the workpieces and a space for joining the pair of workpieces by the pressing heads. A vacuum chamber, a decompression device connected to the vacuum chamber and capable of vacuum sucking the inside thereof, a drive unit supported by the vacuum chamber and applying a pressing force to the pressurizing head, and decompression before the decompression in the vacuum chamber. A judging section that directly or indirectly determines a change in the pressing force of the pressurizing head with respect to the other of the pair of works until the opening; and a pressing force by the driving section based on the judgment by the judging section. It characterized in that it comprises a control unit for controlling.

Another aspect is a joining method in which a pair of workpieces are joined by a pressurizing head that presses at least one of the workpieces in a vacuum chamber, wherein the pair of workpieces are operated from before depressurization in the vacuum chamber to decompression through the atmosphere. The control part determines the change of the pressing force of the said pressurizing head with respect to the other workpiece | work, based on the determination by the said determination part, The pressing force of the drive part which is supported by the vacuum chamber and drives a pressurizing head is controlled. It is characterized by controlling.

Another aspect includes a detection unit that detects the pressing force of the pressing head with respect to the other work of the pair of workpieces for determination by the determination unit.

Another aspect is characterized by including a detection unit for detecting the position of the pressing head relative to the other work of the pair of workpieces for determination by the determination unit.

In the above-described invention, even when the vacuum chamber or the like is displaced by atmospheric pressure when vacuum is sucked, the driving portion supported thereon is controlled to keep the pressing force of the pressurizing head constant, so that the fluctuation of the pressing force can be prevented.

Another aspect includes a support portion for supporting the other of the pair of workpieces, and the detection portion includes a sensor for detecting a distance between the support portion and the drive portion.

In the above aspect, the position of a pressurizing head can be determined from the space | interval of a support part and a drive part, and it can control by an appropriate pressing force.

Another aspect includes a support portion for supporting the other of the pair of workpieces, and the detection portion includes a sensor for detecting a distance between the support portion and the pressing head.

In the above aspect, the position of a pressurizing head can be determined from the space | interval of a support part and a pressurizing head, and it can control by appropriate pressing force.

As mentioned above, according to this invention, with the simple structure, the joining apparatus and the joining method which can maintain a constant pressing force even if the position of a drive part changes can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows schematically the whole structure of one Embodiment of this invention.
FIG. 2 is a perspective view illustrating the holding device in the embodiment of FIG. 1. FIG.
It is a longitudinal cross-sectional view which shows the vacuum chamber raising time of the pressing apparatus in embodiment of FIG.
FIG. 4 is a longitudinal cross-sectional view showing the vacuum chamber descending time of the pressing device of FIG. 3.
FIG. 5 is a longitudinal sectional view showing the vacuum chamber decompression time of the pressing device of FIG. 3. FIG.
FIG. 6 is a longitudinal cross-sectional view showing the lowering time of the pressing head of the pressing device of FIG. 3.
FIG. 7 is a longitudinal sectional view showing the vacuum chamber atmosphere opening of the pressing device of FIG. 3. FIG.
FIG. 8 is a functional block diagram illustrating the control device of the embodiment of FIG. 1.
It is a longitudinal cross-sectional view which shows the pressing device of another embodiment of this invention.
It is a longitudinal cross-sectional view which shows the pressing device of another embodiment of this invention.
It is a longitudinal cross-sectional view which shows the pressing device of another embodiment of this invention.

Next, embodiments of the present invention (hereinafter referred to as embodiments) will be specifically described with reference to the drawings.

[A. Configuration]

[One. Overall configuration]

First, the whole structure of the bonding apparatus (henceforth this apparatus) of this embodiment is demonstrated. As shown in Fig. 1, the present apparatus has four holding devices 2 mounted on a turntable 1. In Fig. The turntable 1 is configured to intermittently rotate by an index mechanism (not shown) in accordance with the input take-out position 1A, the adhesive preparation position 1B, the positioning position 1C, and the vacuum joining position 1D. have.

As shown in FIG. 2, the holding device 2 is a device for holding the work S1 disposed in the mounting unit 3 and the work S2 held by the holding unit 4 so as to face each other up and down. In this embodiment, rectangular substrates, such as a liquid crystal module and a cover panel, are used as the workpieces S1 and S2, for example. Moreover, the support part is comprised by the turntable 1 and the mounting part 3.

Although not shown in the adhesive material preparation position 1B, a peeling apparatus or an application apparatus is provided so that attachment or detachment is possible. A peeling apparatus is a peeling apparatus which peels the release paper of the double-sided tape previously stuck to the workpiece | work S1. The application device is an application device for applying an adhesive to the work S1.

Although not shown in the positioning position 1C, a positioning device for determining the position of the work S1 relative to the work S2 is arranged based on a value detected by the detection device that detects the positions of the work S1, S2. It is.

In the vacuum bonding position 1D, as shown to FIGS. 3-7, the pressing apparatus 5 is provided. The pressing device 5 can bond the two by pressing the work S2 to the work S1 side in the decompression space in the vacuum chamber 51.

[2. Compression device]

Next, the detail of the press apparatus 5 is demonstrated. As shown in FIGS. 3 to 7, the pressing device 5 includes a vacuum chamber 51, a pressurizing head 52, a lifting mechanism 53, a driving unit 54, an auxiliary member 56A, and an auxiliary member ( 56B), the sensor 57, and the like. The vacuum chamber 51 is a chamber for covering and sealing the holding device 2 on the turntable 1. [ The vacuum chamber 51 is connected with a pressure reduction pump 55 (FIG. 8) which is a vacuum source (decompression device) via a pipe.

The pressurizing head 52 is provided in the vacuum chamber 51 and is a means which pressurizes the workpiece | work S2 downward. An elastic protective sheet or the like may be attached to the pressing head 52 and the placing portion 3. The drive part 54 is a motor which raises and lowers the drive rod 54a connected to the pressurizing head 52 by rotating the ball screw which is not shown in figure.

The lifting mechanism 53 is a mechanism for raising and lowering the vacuum chamber 51 together with the pressure head 52. This lifting mechanism 53 has a drive source 53a, a ball screw 53b, a slider 53c, a guide 53d, and the like. The drive source 53a is a member such as a motor for rotating the ball screw 53b. The ball screw 53b is a member for elevating the slider 53c by rotation. The slider 53c is a member which is fixed to the vacuum chamber 51 and raises and lowers the vacuum chamber 51. The guide 53d is a member that guides the movement of the slider 53c.

The auxiliary member 56A is a member in the horizontal direction fixed to the drive rod 54a. The auxiliary member 56B is a member in the vertical direction fixed to the turntable 1. The sensor 57 is a sensor which is fixed to the upper end of the auxiliary member 56B, and detects the space | interval with the auxiliary member 56A which comes to the upper part. This indirectly detects the position of the pressurizing head 52. In addition, the auxiliary members 56A and 56B and the sensor 57 constitute a detection unit.

As for the components, such as the turntable 1, the holding | maintenance apparatus 2, and the pressing apparatus 5, each drive source, a switch, a power supply, etc. are controlled by the control apparatus 6 shown in FIG. This control apparatus 6 can be comprised by implementing each function as follows, for example with a dedicated electronic circuit or the computer which runs with a predetermined program.

Hereinafter, this control apparatus 6 is demonstrated with reference to FIG. 8 which is a virtual functional block diagram. In addition, a description will be given of an input device such as a switch, a touch panel, a keyboard and a mouse for operating the control device 6, and an output device such as a display, a lamp, a meter for checking the state of the control device 6, and the like. Omit.

That is, the control apparatus 6 is the chamber control part 61, the pressure reduction control part 62, the pressure control part 63, the space | interval determination part 64, the memory | storage part 65, the variation determination part 66, and the drive amount determination part. (67) and the input / output interface 68 and the like. The chamber control part 61 is a means for controlling the lifting mechanism 53 which raises and lowers the vacuum chamber 51.

The pressure reduction control unit 62 is a means for controlling the pressure reduction pump 55 for depressurizing the inside of the vacuum chamber 51. The press control part 63 is a means for controlling the drive part 54 which raises and lowers the press head 52.

The gap determination unit 64 is a means for determining the gap between the auxiliary member 56A and the auxiliary member 56B based on the detection value from the sensor 57. The storage unit 65 is a means for storing the interval determined by the interval determination unit 64.

The variation determination unit 66 is a means for comparing the interval determined by the interval determination unit 64 with the interval stored in the storage unit 65 to determine the variation amount of the interval. The driving amount determination unit 67 is a means for determining the driving amount of the driving unit 54 based on the interval determined by the interval determination unit 64 or the variation amount determined by the variation determination unit 66. The input / output interface 68 is a means for controlling conversion of signals and input / output between the units to be controlled.

[B. Action]

The operation of the present embodiment having the above configuration will be described with reference to FIGS. 2 to 8. Moreover, the computer program which operates the method and control apparatus which control a bonding apparatus by the procedure demonstrated below is also one aspect of this invention.

First, as shown in FIG. 2, the work S1 is arrange | positioned at the mounting part 3, The work S2 is hold | maintained by the holding | maintenance part 4, and the work S1 and the work S2 are mutually arrange | positioned. The adhesive material T is prepared in the workpiece | work S1. That is, one adhesive side of the double-sided tape is adhere | attached or an adhesive agent is apply | coated.

The holding apparatus 2 which hold | maintained the workpiece | work S1 and S2 comes to the vacuum joining position 1D by rotation of the turntable 1, as shown in FIG. Then, as will be described later, the vacuum bonding is performed by the pressing device 5.

That is, as shown in FIG. 4, the chamber control unit 61 lowers the vacuum chamber 51 by operating the lifting mechanism 53 to seal the circumference of the holding device 2. As shown in FIG. 5, the depressurization control unit 62 operates the depressurization pump 55 to vacuum the inside of the vacuum chamber 51. At this time, the vacuum chamber 51 is bent at atmospheric pressure, but an interval is detected by the sensor 57 and stored in the storage unit 65.

The detected interval is proportional to the distance between the position of the pressurizing head 52 (in the initial state, at a constant position with respect to the vacuum chamber 51) and the work S1, and based on this interval, the drive amount determination portion Reference numeral 67 determines the driving amount of the driving unit 54. As shown in FIG. 6, the pressing control unit 63 operates the driving unit 54 to lower the pressing head 52 based on the determined driving amount, and presses the work S2 onto the work S1.

Subsequently, as shown in FIG. 7, the depressurization control unit 62 stops the depressurization pump 55 and opens the vacuum chamber 51 to the atmosphere. Then, since the inside of the vacuum chamber 51 becomes atmospheric pressure, the curvature of an outer wall returns.

At this time, the variation determination unit 66 compares the interval detected by the sensor 57 with the interval during decompression to determine the variation amount, and the driving amount determination unit 67 determines the variation amount based on this variation amount. The driving amount is determined so that the equal pressing force is maintained, and the pressure control unit 63 operates the driving unit 54 based on this.

Thus, by performing real-time control by a feedback, the workpiece | work S2 is always pressurized with a constant pressure with respect to the workpiece | work S1. Then, after a predetermined time elapses when the adhesive material is stabilized, the pressing control section 63 operates the driving section 54 to raise the pressure head 52.

[C. effect]

According to the present embodiment as described above, the following effects can be obtained. That is, even in a simple configuration in which the drive unit 54 is disposed on the vacuum chamber 51, since the pair of workpieces S1 and S2 can be crimped at a constant pressure after the atmospheric opening from the vacuum suction time, the workpiece It can also prevent that a void arises in an adhesive layer by the fall of a pressurized amount, without adversely affecting.

[D. Other Embodiments]

The present invention is not limited to the above embodiment. For example, the drive unit may be any means as long as it can raise and lower the pressure head. For example, a cylinder for advancing and retracting the driving rod may be used. The lifting mechanism may be any means as long as it can lift and lower the vacuum chamber. For example, a cylinder may be used. A plurality of lifting mechanisms may be provided around the vacuum chamber to realize stable lifting.

The shape of the vacuum chamber is also not limited to a specific one. For example, as shown in FIG. 9, by forming the hollow part 51a which communicates with the outside inside, the curvature amount of the vacuum chamber 51 at the time of vacuum suction can be suppressed, and the influence on the drive part 54 can be reduced. Can be.

The configuration of the detector is also free. What is necessary is just a structure which can determine the change of the pressing force by a pressurizing head directly or indirectly with respect to the workpiece | work opposite to the workpiece | work pressed by a pressurizing head. For this reason, a distance between any one of the workpiece, the support portion (e.g., the arrangement portion) and the turntable that supports the workpiece, and the one of the pressing head and the member (e.g., the driving rod) that moves together with the pressing head is provided to the sensor. You may detect by. In that case, whether or not the auxiliary member is interposed on one or both sides of the gap is freely detected. Also as a sensor to be used, it is not limited to said thing. For example, a laser displacement meter or the like may be used.

Moreover, you may make it the structure which can detect the change of a pressing force directly by providing the sensor which detects the pressing force itself of a pressurizing head in a detection part. For example, as shown in FIG. 10, the sensor 58 which detects a pressure between the auxiliary member 56A and the auxiliary member 56B is provided, or as shown in FIG. 11, the sensor is provided in the drive rod 54a. Insertion of 58 may be considered. In this case, the pressure determination unit is set instead of the interval determination unit 64 in the control device 6 described above.

At the time of depressurization of the vacuum chamber 51, the pressure (the pressure changed from the initial state before decompression) determined by the pressure determining unit is stored in the storage unit 65 by the detection value of the sensor 58. Based on this pressure, the drive amount determination unit 67 determines the drive amount of the drive unit 54. The pressing control unit 63 operates the driving unit 54 to lower the pressing head 52 based on the determined driving amount, and presses the work S2 onto the work S1.

Thereafter, the depressurization control unit 62 stops the depressurization pump 55, and the fluctuation determination unit 66 compares the pressure detected by the sensor 58 with the pressure at the depressurization time, and the amount of change (change in pressure). Is determined. The driving amount determining unit 67 determines the driving amount so that the pressing force equivalent to that at the time of decompression is maintained in accordance with this variation amount, and the pressing control unit 63 operates the driving unit 54 based on this. As the sensor for detecting the pressure, for example, stress sensors such as metal resistors, semiconductors, piezoelectrics, magnetic distortions, ion conductors, and the like can be considered, but are not limited thereto.

In addition, although the cover panel and a liquid crystal module (display panel and backlight laminated | stacked) are typical examples, the workpiece | work which becomes a bonding object can be applied to any workpiece | work as long as it can become a pair of adhesion object. For example, it can be applied to semiconductor wafers, optical disks and the like. The type of adhesive or double sided tape is also free.

1: turntable 2: holding device
3: placement unit 4: holding unit
5 pressure device 6 control device
51 vacuum chamber 51a hollow part
52 pressurizing head 53 lifting mechanism
53a: drive source 53b: ball screw
53c: Slider 53d: Guide
54 drive unit 54a drive rod
55: pressure reducing pumps 56A, 56B: auxiliary members
57, 58: sensor 61: chamber control unit
62: decompression control unit 63: pressure control unit
64: interval determination unit 65: storage unit
66: variation determination unit 67: drive amount determination unit
68: I / O interface

Claims (6)

In the bonding apparatus which joins a pair of workpiece | work,
A press head for pressing at least one work piece,
A vacuum chamber for sealing a space for joining a pair of workpieces by the pressure head;
A decompression device connected to the vacuum chamber and capable of vacuum sucking the inside thereof;
A driving unit supported by the vacuum chamber and applying a pressing force to the pressing head;
A determination unit that directly or indirectly determines a change in the pressing force of the pressurizing head with respect to the other work of the pair of work between before decompression in the vacuum chamber and decompression through the atmosphere;
A control unit that controls the pressing force by the drive unit based on the determination by the determination unit.
Bonding device comprising a. The bonding apparatus according to claim 1, further comprising a detection unit for detecting the pressing force of the pressing head against the other work of the pair of workpieces for determination by the determination unit. The bonding apparatus according to claim 1, further comprising a detection unit for detecting a position of the pressing head relative to the other work of the pair of works for determination by the determination unit. According to claim 3, comprising a support for supporting the other of the pair of work,
The detection unit includes a sensor for detecting a distance between the support and the drive unit. According to claim 3, comprising a support for supporting the other of the pair of work,
And the detector includes a sensor for detecting a gap between the support and the pressure head. In the joining method of joining a pair of workpiece | work by the pressurizing head which presses at least one workpiece | work in a vacuum chamber,
The determination unit determines, directly or indirectly, the change in the pressing force of the pressurizing head with respect to the other of the pair of workpieces from before the depressurization in the vacuum chamber through the decompression to the atmospheric opening.
And the control unit controls the pressing force of the drive unit supported by the vacuum chamber to drive the pressure head based on the determination by the determination unit.

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