JP2018523313A - 異なる寸法の開口を有するボンドパッド - Google Patents
異なる寸法の開口を有するボンドパッド Download PDFInfo
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- JP2018523313A JP2018523313A JP2018506259A JP2018506259A JP2018523313A JP 2018523313 A JP2018523313 A JP 2018523313A JP 2018506259 A JP2018506259 A JP 2018506259A JP 2018506259 A JP2018506259 A JP 2018506259A JP 2018523313 A JP2018523313 A JP 2018523313A
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- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000002591 computed tomography Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
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- 229910000679 solder Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2224/812—Applying energy for connecting
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- Engineering & Computer Science (AREA)
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Abstract
Description
10 撮像システム
11 放射源
12 放射線
13 対象物
14 制御モジュール
15 伝達要素
20 撮像システム
21 モジュール
27 ストリング
28a プロセッサ基板
28b プロセッサ基板
30 ブラケット
32 センサダイ
33 センサ基板
33a 下部セグメント
37 受動電子部品
38 キャリア
39 プロセッサダイ
100 集積回路
101 ボンドパッド
102 開口
103 ダイパッシベーション層
104 ダイ材料
105 バンプ
300 ダイ
301 ボンドパッド
302 開口
303 勾配
400 ダイ
401 ボンドパッド
410 ゾーン
411 開口
420 ゾーン
421 開口
430 ゾーン
431 開口
441 開口
450 第1のゾーン
460 第2のゾーン
470 水平中心線
471 垂直中心線
472 距離
473 距離
500 開口
501 ポリイミド層
502 無機パッシベーション層
503 上部開口寸法
504 下部開口寸法
505 バンプ
506 シリコン層
507 ボンドパッド表面
Claims (28)
- 複数のボンドパッドと、
複数の前記ボンドパッドを露出させる複数の異なる寸法の開口を有するダイパッシベーション層と、を備える、集積回路ダイ。 - 前記複数の異なる寸法の開口が2つ以上の開口グループを含み、各グループが他のグループに比べて異なる平均開口寸法を有する、請求項1に記載の集積回路ダイ。
- 前記グループのうちの2つの平均最大横方向寸法間の寸法差が約2μmよりも大きい、請求項2に記載の集積回路ダイ。
- 前記開口グループが、前記ダイの第1の半分を備える第1のゾーンおよび前記ダイの第2の半分を備える第2のゾーンを含む前記ダイの2つのゾーンに対応し、前記第1のゾーンおよび前記第2のゾーンが異なる平均開口寸法を有する、請求項2に記載の集積回路ダイ。
- 前記第1のゾーンの前記開口が第1の平均開口寸法を有し、前記第2のゾーンの前記開口が第2の平均開口寸法を有し、前記第1の平均開口寸法が前記第2の平均開口寸法よりも小さく、前記第1のゾーンが前記第2のゾーンと比較してより多数の露出されたボンドパッドを有する、請求項4に記載の集積回路ダイ。
- 前記ダイが、第1の側面、前記第1の側面に対向する第2の側面、第3の側面、および前記第3の側面に対向する第4の側面を有し、前記第1のゾーンが前記第3の側面を含み、前記第2のゾーンが前記第4の側面を含み、前記第3の側面が前記第4の側面と比較してより多数の露出されたボンドパッドを有する、請求項5に記載の集積回路ダイ。
- 前記複数の異なる寸法の開口の寸法が、前記複数のボンドパッドの非対称な分布に起因する前記ダイ上の応力を少なくとも部分的に相殺する様式で異なる、請求項1に記載の集積回路ダイ。
- 第1の側面、前記第1の側面に対向する第2の側面、第3の側面、前記第3の側面に対向する第4の側面を有し、
前記複数の開口が、前記第1の側面および前記第2の側面に沿って異なる寸法の開口を備え、前記第3の側面に沿って複数の開口を備え、前記第4の側面に沿って開口を備えていない、請求項1に記載の集積回路ダイ。 - 前記第1の側面および前記第2の側面の前記開口が、少なくとも3つの異なる寸法を備え、前記3つの異なる寸法の前記開口が、前記第3の側面に隣接して位置決めされた最小寸法を有し、前記3つの異なる寸法の前記開口が、前記第4の側面に隣接して位置決めされた最大寸法を有する、請求項8に記載の集積回路ダイ。
- 前記第3の側面に沿った前記複数の開口が、前記ダイ上のボンドパッドを露出させる前記最小開口を備える、請求項8に記載の集積回路ダイ。
- 前記開口が、正方形の開口を備える、請求項1に記載の集積回路ダイ。
- 半導体ダイと、
前記ダイに電気的に接続されたパッケージング基板と、を備え、
前記ダイが、複数の異なる寸法の開口を有するダイパッシベーション層を含む、パッケージチップ。 - 前記半導体ダイが、複数の非対称に分布したボンドパッドをさらに備え、前記複数の異なる寸法の開口が対応する複数の前記ボンドパッドを露出させる、請求項12に記載のパッケージチップ。
- 前記パッケージング基板が熱圧着ボンディングにより前記ダイに電気的に接続され、前記複数の異なる寸法の開口が、前記熱圧着ボンディングからの前記ダイ内の応力勾配を、均一な寸法を有する開口に比べて低減するように構成される、請求項12に記載のパッケージチップ。
- 前記複数の異なる寸法の開口が2つ以上の開口グループを備え、各グループが異なる平均開口寸法を有する、請求項12に記載のパッケージチップ。
- 前記開口グループが、前記ダイの第1の半分を備える第1のゾーンおよび前記ダイの第2の半分を備える第2のゾーンを含む前記ダイの2つのゾーンに対応し、前記第1のゾーンが前記第2のゾーンと比較して異なる平均開口寸法を有する、請求項15に記載のパッケージチップ。
- 前記第1のゾーンおよび前記第2のゾーンの各々が複数の開口タイプを備え、1つの前記ゾーン内の各開口タイプが異なる平均開口寸法を有する、請求項16に記載のパッケージチップ。
- 前記第1のゾーンの第1の平均開口寸法が前記第2のゾーンの第2の平均開口寸法よりも小さく、前記第1のゾーンが前記第2のゾーンと比較してより多数の露出されたボンドパッドを有する、請求項16に記載のパッケージチップ。
- 集積回路ダイをパッケージングする方法であって、
複数のボンドパッドを有するダイを準備することと、
前記ダイ上にパッシベーション層を形成することと、
前記パッシベーション層に異なる寸法の複数の開口を形成して、対応する複数の前記ボンドパッドを露出させることと、を含む、方法。 - 前記パッシベーション層がポリイミドを含む、請求項19に記載の方法。
- 前記パッシベーション層が無機誘電体層をさらに備える、請求項19に記載の方法。
- 前記ボンドパッドが前記ダイにわたって非対称に分布している、請求項19に記載の方法。
- 前記複数の異なる寸法の開口が複数の開口グループを備え、各グループが異なる平均開口寸法を有する、請求項19に記載の方法。
- 第1のグループが第1の平均開口寸法を有し、かつボンドパッドの第1の面密度を有するゾーンに位置決めされ、第2のグループが第2の平均開口寸法を有し、かつボンドパッドの第2の面密度を有するゾーンに位置決めされるように、前記複数の異なる寸法の開口を位置決めすることをさらに含み、前記第1の平均開口寸法が前記第2の平均開口寸法より小さく、ボンドパッドの前記第1の面密度がボンドパッドの前記第2の面密度よりも大きい、請求項23に記載の方法。
- 前記ダイをパッケージング基板にフリップチップ取り付けすることをさらに含む、請求項19に記載の方法。
- 前記複数の異なる寸法の開口の寸法を、前記複数のボンドパッドの非対称な分布に起因する前記ダイ上の応力を少なくとも部分的に相殺する様式で変えることをさらに含む、請求項19に記載の方法。
- 前記ダイをパッケージング基板に熱圧縮ボンディングすることをさらに含む、請求項19に記載の方法。
- 均一な開口寸法に比べて前記ダイの応力勾配を低減させるように前記複数の異なる寸法の開口を位置決めすることをさらに含む、請求項19に記載の方法。
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