JP2018127943A - クライオポンプ - Google Patents

クライオポンプ Download PDF

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Publication number
JP2018127943A
JP2018127943A JP2017021002A JP2017021002A JP2018127943A JP 2018127943 A JP2018127943 A JP 2018127943A JP 2017021002 A JP2017021002 A JP 2017021002A JP 2017021002 A JP2017021002 A JP 2017021002A JP 2018127943 A JP2018127943 A JP 2018127943A
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
cooling stage
low
string
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017021002A
Other languages
English (en)
Japanese (ja)
Inventor
貴裕 谷津
Takahiro Yatsu
貴裕 谷津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2017021002A priority Critical patent/JP2018127943A/ja
Priority to TW107101951A priority patent/TWI688710B/zh
Priority to CN201880005243.0A priority patent/CN110234876A/zh
Priority to PCT/JP2018/003606 priority patent/WO2018147187A1/ja
Priority to KR1020197017505A priority patent/KR20190110087A/ko
Priority to KR1020217039684A priority patent/KR102436493B1/ko
Publication of JP2018127943A publication Critical patent/JP2018127943A/ja
Priority to JP2021191501A priority patent/JP7300494B2/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2017021002A 2017-02-08 2017-02-08 クライオポンプ Pending JP2018127943A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2017021002A JP2018127943A (ja) 2017-02-08 2017-02-08 クライオポンプ
TW107101951A TWI688710B (zh) 2017-02-08 2018-01-19 低溫泵
CN201880005243.0A CN110234876A (zh) 2017-02-08 2018-02-02 低温泵
PCT/JP2018/003606 WO2018147187A1 (ja) 2017-02-08 2018-02-02 クライオポンプ
KR1020197017505A KR20190110087A (ko) 2017-02-08 2018-02-02 크라이오펌프
KR1020217039684A KR102436493B1 (ko) 2017-02-08 2018-02-02 크라이오펌프
JP2021191501A JP7300494B2 (ja) 2017-02-08 2021-11-25 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017021002A JP2018127943A (ja) 2017-02-08 2017-02-08 クライオポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021191501A Division JP7300494B2 (ja) 2017-02-08 2021-11-25 クライオポンプ

Publications (1)

Publication Number Publication Date
JP2018127943A true JP2018127943A (ja) 2018-08-16

Family

ID=63107484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017021002A Pending JP2018127943A (ja) 2017-02-08 2017-02-08 クライオポンプ

Country Status (5)

Country Link
JP (1) JP2018127943A (ko)
KR (2) KR20190110087A (ko)
CN (1) CN110234876A (ko)
TW (1) TWI688710B (ko)
WO (1) WO2018147187A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020049916A1 (ja) * 2018-09-06 2020-03-12 住友重機械工業株式会社 クライオポンプおよびクライオパネル

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633874A (ja) * 1992-07-16 1994-02-08 Ulvac Kuraio Kk ターボ分子ポンプ付クライオポンプ装置
JPH0735041A (ja) * 1993-07-14 1995-02-03 Fujitsu Ltd クライオポンプ
JPH08219019A (ja) * 1995-02-14 1996-08-27 Ulvac Kuraio Kk クライオポンプ
JP2009062891A (ja) * 2007-09-06 2009-03-26 Sumitomo Heavy Ind Ltd クライオパネル
JP2009162074A (ja) * 2007-12-28 2009-07-23 Sumitomo Heavy Ind Ltd クライオポンプ及び真空排気方法
JP2012047120A (ja) * 2010-08-27 2012-03-08 Aisin Seiki Co Ltd クライオポンプ
JP2014227989A (ja) * 2013-05-27 2014-12-08 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
EP0384922B1 (de) * 1989-02-28 1993-07-14 Leybold Aktiengesellschaft Mit einem zweistufigen Refrigerator betriebene Kryopumpe
JP4980179B2 (ja) * 2007-09-06 2012-07-18 住友重機械工業株式会社 クライオパネル
JP5660979B2 (ja) * 2011-06-08 2015-01-28 住友重機械工業株式会社 クライオポンプ及び極低温冷凍機
JP6013886B2 (ja) * 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
CN106014916B (zh) * 2015-03-31 2018-07-03 住友重机械工业株式会社 低温泵

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633874A (ja) * 1992-07-16 1994-02-08 Ulvac Kuraio Kk ターボ分子ポンプ付クライオポンプ装置
JPH0735041A (ja) * 1993-07-14 1995-02-03 Fujitsu Ltd クライオポンプ
JPH08219019A (ja) * 1995-02-14 1996-08-27 Ulvac Kuraio Kk クライオポンプ
JP2009062891A (ja) * 2007-09-06 2009-03-26 Sumitomo Heavy Ind Ltd クライオパネル
JP2009162074A (ja) * 2007-12-28 2009-07-23 Sumitomo Heavy Ind Ltd クライオポンプ及び真空排気方法
JP2012047120A (ja) * 2010-08-27 2012-03-08 Aisin Seiki Co Ltd クライオポンプ
JP2014227989A (ja) * 2013-05-27 2014-12-08 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020049916A1 (ja) * 2018-09-06 2020-03-12 住友重機械工業株式会社 クライオポンプおよびクライオパネル
JPWO2020049916A1 (ja) * 2018-09-06 2021-08-12 住友重機械工業株式会社 クライオポンプおよびクライオパネル
JP7311522B2 (ja) 2018-09-06 2023-07-19 住友重機械工業株式会社 クライオポンプ

Also Published As

Publication number Publication date
KR20210149250A (ko) 2021-12-08
KR102436493B1 (ko) 2022-08-24
KR20190110087A (ko) 2019-09-27
WO2018147187A1 (ja) 2018-08-16
TW201829913A (zh) 2018-08-16
TWI688710B (zh) 2020-03-21
CN110234876A (zh) 2019-09-13

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