JP2018127323A - Adhesive tape joint method, adhesive tape joint device and adhesive tape conveyance method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesive tape joint method, an adhesive tape joint device and an adhesive tape conveyance method capable of implementing jointing of the terminals of adhesive tapes certainly even when the adhesive tape has strong adhesive and various handling.SOLUTION: An extrusion member 33 projects a part of adhesion tape Tp of long adhesive tape T to a direction R approximately perpendicular to a delivery direction L. By a crimp roller 35 crimping the projecting adhesive tape Tp, a part of the adhesive tape T is formed as an exposed core. Since the exposed core projects a prescribed length to the direction R at a prescribed position Tf, the adhesive tape T can be manipulated by holding the exposed core easily and certainly. Further, since a length of the exposed core at a delivery direction L is very short, location accuracy of an area where handling is done to the long adhesive tape can be improved and large strength can be applied to a limited area of the adhesive tape T by doing handling holding the exposed core.SELECTED DRAWING: Figure 14

Description

  The present invention is an example of an operation of joining the tip of another adhesive tape to the rear end of the preceding adhesive tape in the process of supplying the adhesive tape to be attached to various substrates such as a semiconductor wafer, LED (Light Emitting Diode), and electronic circuit. The present invention relates to an adhesive tape joining method, an adhesive tape joining apparatus, and an adhesive tape transport method.

  A semiconductor wafer (hereinafter referred to as “wafer” as appropriate) has circuit patterns of a large number of elements formed on the surface thereof. For example, bumps and fine circuits are formed on the wafer surface. Therefore, a protective adhesive tape is affixed to prevent contamination and damage of the circuit surface during back grinding and conveyance.

  Here, a conventional configuration of a tape applicator used for adhering an adhesive tape to the surface of a wafer will be described. As shown in FIG. 33, the conventional tape pasting apparatus 101 includes a tape supply unit 103, a separator peeling unit 105, a holding table 107, a tape pasting unit 109, a tape cutting mechanism 111, a tape collecting unit 113, a separator collecting unit 115, and the like. I have.

  The tape supply unit 103 feeds and guides the adhesive tape TS from a supply bobbin loaded with an original fabric roll around which the adhesive tape TS with a separator for circuit protection is wound. The separator peeling unit 105 peels the separator S from the fed adhesive tape TS. The holding table 107 sucks and holds the wafer W whose circuit forming surface is facing upward. The tape affixing unit 109 is an affixing roller as an example, and moves horizontally in the left direction in FIG. By the horizontal movement, the tape attaching unit 109 attaches the adhesive tape T from which the separator S has been peeled off to the wafer W on the holding table 107.

  The tape cutting mechanism 111 includes a cutter 111a, and the adhesive tape T is cut out along the outer shape of the wafer W when the tape cutting mechanism 111 rotates around the vertical axis indicated by the symbol P. Unnecessary unnecessary tape Tn after being cut out is wound and collected in a roll shape on a winding shaft constituting the tape collecting unit 113. Further, the separator S peeled off from the adhesive tape T is wound up and collected in a roll shape on a winding shaft constituting the separator collecting unit 115.

  In such a tape applicator, when the amount of adhesive tape T loaded in the tape supply unit 103 falls below a certain amount, or the amount of unnecessary tape Tn collected by the tape collecting unit 113 exceeds a certain amount, etc. The roll needs to be changed. In the conventional tape applicator 101, when a roll is exchanged, an operator needs to manually perform a complicated operation.

  That is, the tape supply unit 103 requires a series of operations such as cutting of the adhesive tape T fed out from the original fabric roll, replacement of the original fabric roll, joining of the cut adhesive tape T, and resumption of feeding of the adhesive tape T. In the tape collection unit 113 and the like, a series of operations such as cutting of the unnecessary tape Tn, removal of the unnecessary tape Tn collected in a roll shape, joining of the unnecessary tape Tn to the take-up shaft, and resumption of winding of the unnecessary tape Tn. Cost. In the conventional apparatus, it is necessary to interrupt the operation of the tape applicator during the series of operations.

  In recent years, attempts have been made to automatically perform roll replacement work, in particular, work for joining the ends of the cut adhesive tape T together, in order to avoid a reduction in sticking efficiency due to interruption of operation of the tape sticking device. As an example, the following tape joining method has been proposed (see, for example, Patent Document 1). That is, the adhesive tape T and the separator S are peeled over a predetermined length at the end of the preceding tape by adsorbing one end surface of the preceding pressure-sensitive adhesive tape T with a separator with an adsorbing member and moving the adsorbing member away from each other. Let And the terminal of the adhesive tape T with a separator can be automatically joined by sticking the said terminal of the adhesive tape T from which the separator peeled to the front-end | tip part of the subsequent adhesive tape T with a separator.

JP 2014-133616 A

  However, the conventional apparatus has the following problems.

  In recent years, an adhesive having a stronger adhesive force tends to be used for an adhesive tape for wafer protection or the like. Therefore, in the conventional tape joining method according to Patent Document 1, even if the adhesive member is moved away, the adhesive tape T and the separator S cannot be reliably peeled off, and there is a concern that a joining error occurs. .

  The present invention has been made in view of such circumstances, and an adhesive tape joining method and an adhesive tape capable of reliably joining the ends of the adhesive tape and various kinds of handling even if the adhesive tape has a strong adhesive force. It is a main object to provide a bonding apparatus and an adhesive tape transport method.

In order to achieve such an object, the present invention has the following configuration.
That is, it is an adhesive tape joining method for joining the ends of a long adhesive tape to which a separator is attached, and is fed from a first original fabric roll among a plurality of original fabric rolls provided in the tape supply unit. A gripping margin forming process for forming at least one of the first adhesive tape and the first separator forming a gripping margin protruding in a direction substantially perpendicular to the feeding direction; and an adhesive tape holding member for holding the first adhesive tape And the separator holding member for holding the first separator, the first adhesive tape and the first separator are held at the rear end side from the gripping margin in a state where the first adhesive tape and the first separator are sandwiched between the first adhesive tape and the first separator. The cutting process of cutting, and the adhesive tape holding member and the separator holding member relatively move apart in a state where the grip allowance is held. A separation process for separating the first separator from the first adhesive tape by a predetermined length from the rear end, and a switching process for switching the preceding first original roll to a different second original roll, It is characterized by comprising a joining process for joining the leading end of the second adhesive tape in the subsequent line fed from the second original fabric roll and the trailing end of the first adhesive tape. Is.

  (Function / Effect) According to this method, in the gripping margin forming process, the gripping margin is formed on at least one of the first adhesive tape and the first separator fed from the first raw fabric roll, and after the gripping margin. The first adhesive tape and the first separator are cut at the end side. Then, the first separator is peeled from the rear end by a predetermined length from the first pressure-sensitive adhesive tape by relatively moving the pressure-sensitive adhesive tape holding member and the separator holding member with the gripping margin held therebetween.

  Since the grip margin has a shape protruding in a direction substantially perpendicular to the feeding direction, the first adhesive tape and the first separator can be easily separated by gripping the grip margin and moving it away. Therefore, even if the adhesive material with strong adhesive force is used for the adhesive tape, the first separator can be reliably peeled from the rear end portion of the preceding first adhesive tape. Therefore, it is possible to reliably avoid the occurrence of a joining error between the subsequent second adhesive tape and the preceding first adhesive tape due to the peeling error of the first separator.

  Then, the rear end of the first adhesive tape that has been fed out from the first original fabric roll is joined to the front end of the second adhesive tape that has been fed out from the second original fabric roll. That is, the adhesive tapes fed out from different original fabric rolls can be handled as a single adhesive tape continuous by the joining.

  In the above-described invention, after the gripping margin forming process, the first adhesive tape and the first separator are moved in a direction opposite to the feeding direction to bring the gripping margin closer to the first raw roll. It is preferable to provide a process.

  (Function / Effect) According to this configuration, after the gripping margin forming process, the first adhesive tape and the first separator are moved in the direction opposite to the feeding direction in the reverse flow process to bring the gripping margin closer to the first raw roll. . In this case, since the position which cut | disconnects a 1st adhesive tape and a 1st separator in a cutting process becomes closer to a 1st original fabric roll, the waste of the 1st adhesive tape by a cutting process can be reduced. Moreover, since the joining position of the 1st adhesive tape and the 2nd adhesive tape becomes close to the original fabric roll, the time required to pay out the second adhesive tape in the joining process can be reduced.

  Further, in the above-described invention, a separator peeling process for peeling the first separator from the first pressure-sensitive adhesive tape is provided, and the gripping margin forming process is configured to move the first pressure-sensitive adhesive tape from which the first separator is peeled in the feeding direction. The gripping margin is formed by projecting in a substantially vertical direction, and after the gripping margin forming process, the first separator is again applied to a portion of the first adhesive tape where the gripping margin is formed. It is preferable to provide a reattachment process for attaching.

  (Operation / Effect) According to this configuration, since the gripping margin forming process is performed after the separator peeling process, it becomes easy to form the gripping margin by individually protruding the first adhesive tape in a substantially vertical direction. Thereafter, since the first separator is reattached to the first adhesive tape at the portion where the gripping margin is formed, any position on the rear end side from the gripping margin is cut in the cutting process, and the preceding first adhesive It can be the rear end of the tape and the first separator.

  Further, in the above-described invention, the joining process includes the first pressure-sensitive adhesive tape that holds the tip of the second pressure-sensitive adhesive tape that is fed out from the second raw fabric roll, and the first pressure-sensitive adhesive tape that is held by the pressure-sensitive adhesive tape holding member. The first pressure-sensitive adhesive tape and the second pressure-sensitive adhesive are moved between the first separator held by the separator holding member, and the tip of the second pressure-sensitive adhesive tape is sandwiched between the first pressure-sensitive adhesive tape and the first separator. It is preferable to join the tape.

  (Operation / Effect) According to this configuration, the leading end of the second adhesive tape in the subsequent direction is sandwiched and joined by the respective rear ends of the preceding first adhesive tape and the first separator that are separated from each other. Adhesive tapes and separators are joined. In this case, it can join more reliably by pinching | interposing the adhesive tapes drawn | fed out from the respectively different fabric rolls. Further, the separator and the first separator attached to the second adhesive tape by the bonding are handled as a single separator, and the continuous separator is continuously peeled from the bonded adhesive tape. be able to.

In order to achieve such an object, the present invention may take the following configurations.
That is, an adhesive tape joining apparatus for joining the ends of a long adhesive tape to which a separator is attached, comprising a plurality of adhesive tape original rolls, and the first of the plurality of original rolls A tape supply section for feeding the adhesive tape from the original fabric roll, a trailing tape holding member for clamping the tip of the adhesive tape of each original fabric roll, and a first adhesive tape being fed from the first original roll By holding the adhesive tape holding member to be held and the first separator attached to the first adhesive tape, the first adhesive tape and the first separator are clamped in cooperation with the adhesive tape holding member. And at least one of the first pressure-sensitive adhesive tape and the first separator fed from the first original fabric roll in a direction substantially perpendicular to the feeding direction. A grip allowance forming portion that is formed to form a grip allowance, and each of the first adhesive tape and the first separator sandwiched between the adhesive tape holding member and the separator holding member are cut on the rear side from the grip allowance. A cutting mechanism, and the adhesive tape holding member and the separator holding member are moved relatively apart from each other in a state where the gripping allowance is held, whereby the first separator is separated from the rear part by a predetermined length. A peeling mechanism for separating the tape, a tape switching mechanism for moving the tape supply unit and switching the original roll for feeding the adhesive tape from the first original roll to the second original roll, and the second A joining mechanism that joins the front end of the second adhesive tape that is fed out from the raw roll and the rear end of the first adhesive tape; It is characterized in.

  (Operation / Effect) According to this configuration, the rear end of the first adhesive tape fed out from the first original fabric roll and the second original roll fed out from the second original fabric roll switched by the switching mechanism. Join the tip of the adhesive tape. That is, the adhesive tapes fed out from different original fabric rolls can be handled as a single adhesive tape continuous by the joining. Since the switching by the switching mechanism and the joining by the joining mechanism can be automated, the operator can change the original fabric roll for feeding the adhesive tape from the tape supply unit from the first original fabric roll to the new second original fabric roll. The burden received can be reduced.

  In the grip allowance forming portion, a grip allowance is formed on at least one of the first adhesive tape and the first separator that is fed from the first original fabric roll, and the first adhesive tape and the first end on the rear end side from the grip allowance. Cut the separator. Then, the first separator is peeled from the rear end by a predetermined length from the first pressure-sensitive adhesive tape by relatively moving the pressure-sensitive adhesive tape holding member and the separator holding member with the gripping margin held therebetween.

  Since the grip margin has a shape protruding in a direction substantially perpendicular to the feeding direction, the first adhesive tape and the first separator can be easily separated by gripping the grip margin and moving it away. Therefore, even if the adhesive material with strong adhesive force is used for the adhesive tape, the first separator can be reliably peeled from the rear end portion of the preceding first adhesive tape. Therefore, it is possible to reliably avoid the occurrence of a joining error between the subsequent second adhesive tape and the preceding first adhesive tape due to the peeling error of the first separator.

  In the above-described invention, it is preferable that a reverse flow mechanism is provided that moves the first adhesive tape and the first separator in a direction opposite to the feeding direction to bring the grip margin closer to the first original roll.

  (Operation / Effect) According to this configuration, since the backflow mechanism brings the grip margin closer to the first original fabric roll, the position at which the cutting mechanism cuts the first adhesive tape and the first separator is more the first original fabric roll. Close to. Therefore, waste of the first adhesive tape due to the cutting mechanism can be reduced. Moreover, since the joining position of the 1st adhesive tape and the 2nd adhesive tape becomes close to an original fabric roll, the time required to pay out the 2nd adhesive tape at the time of joining can be reduced.

  Further, in the above-described invention, a separator peeling mechanism that peels the first separator from the first adhesive tape is provided, and the grip allowance forming portion removes the first adhesive tape from which the first separator is peeled in the feeding direction. In this case, the gripping margin is formed by projecting in a substantially vertical direction, and the first separator is reattached to the portion of the first adhesive tape where the gripping margin is formed. It is preferable to provide an installation mechanism.

  (Function / Effect) According to this configuration, since the grip margin is formed on the first adhesive tape after the first separator is peeled off, the first adhesive tape is individually protruded in a substantially vertical direction and gripped. It becomes easy to form a bill. Thereafter, the first separator is reattached to the first adhesive tape at the portion where the grip margin is formed. Therefore, the cutting mechanism can cut an arbitrary position on the rear end side from the gripping allowance and set the position as the rear end of the preceding first adhesive tape and first separator.

  In the above-described invention, the joining mechanism includes the first separator and the adhesive tape in which the separator holding member holds the leading end of a second adhesive tape that is fed from the second raw fabric roll. The first separator held by the holding member is moved between the peeled first adhesive tape and the tip of the second adhesive tape is sandwiched between the first adhesive tape and the first separator. It is preferable to join the first adhesive tape and the second adhesive tape.

  (Operation / Effect) According to this configuration, the leading end of the second adhesive tape in the subsequent direction is sandwiched and joined by the respective rear ends of the preceding first adhesive tape and the first separator that are separated from each other. Adhesive tapes and separators are joined. In this case, it can join more reliably by pinching | interposing the adhesive tapes drawn | fed out from the respectively different fabric rolls. Further, the separator and the first separator attached to the second adhesive tape by the bonding are handled as a single separator, and the continuous separator is continuously peeled from the bonded adhesive tape. be able to.

  In the above-described invention, the adhesive tape of each raw fabric roll has a separator peeled at a predetermined length at the tip portion, and each of the separator of the predetermined length and the tip portion of the pressure-sensitive adhesive tape is the trailing tape holding member. It is preferable to be wound around.

  (Operation / Effect) According to this configuration, each of the separator and the tip portion of the adhesive tape is wound around the trailing tape holding member, so that the trailing separator wound around the trailing tape holding member When the leading edge and the leading edge of the subsequent adhesive tape are sandwiched between the trailing edge of the preceding adhesive tape and the trailing edge of the preceding separator peeled from the preceding adhesive tape, respectively, the leading adhesive tape and the succeeding adhesive tape are in contact with each other. It is possible to increase the area and the area where the preceding separator and the subsequent separator are in contact with each other. Therefore, the joining by the joining mechanism can be made stronger.

In order to achieve such an object, the present invention may take the following configurations.
That is, an adhesive tape transport method for transporting a long adhesive tape that has been fed in a predetermined feeding direction, wherein a protruding step of projecting a part of the adhesive tape in a direction substantially perpendicular to the feeding direction And gripping the pressure-sensitive adhesive tape protruding in the substantially vertical direction by sandwiching the pressure-sensitive adhesive tape from the feeding direction and the direction opposite to the feeding direction, and a part of the pressure-sensitive adhesive tape protruding in the substantially vertical direction. A crimping process for forming a margin, and a transporting process for gripping the grip margin and transporting the adhesive tape to a predetermined position.

  (Operation / Effect) According to this configuration, the gripping margin is formed on the adhesive tape, and the gripping margin is gripped and conveyed. A part of the adhesive tape is protruded in a direction substantially perpendicular to the feeding direction, and the adhesive tape protruding in the substantially vertical direction is crimped to form a grip allowance. In this case, the grip margin has a shape protruding in a direction substantially perpendicular to the feeding direction. Therefore, since the grip allowance can be gripped more easily and firmly, the occurrence of a transport error due to the failure to hold the adhesive tape can be reliably avoided. Further, since the protruding length can be arbitrarily set, the grip allowance protruding with a sufficient length can be gripped by using a configuration such as a manipulator. As a result, the adhesive tape can be transported with a complicated and highly accurate operation.

  According to the adhesive tape joining method and the adhesive tape joining apparatus of the present invention, a grip margin protruding in a direction substantially perpendicular to the feeding direction is formed, and the grip margin is gripped from the rear end of the preceding adhesive tape. Remove the separator. In this case, since a strong force can be applied in the substantially vertical direction, the separator can be reliably peeled off at the rear end of the adhesive tape even if the adhesive tape has a strong adhesive force. Therefore, it is possible to reliably avoid the occurrence of a joining error due to a peeling error.

  Moreover, according to the adhesive tape transport method of the present invention, the grip margin protruding in a direction substantially perpendicular to the feeding direction is gripped and the adhesive tape is transported, so that the grip margin can be gripped more firmly. Moreover, conveyance of an adhesive tape can be performed by complicated and highly accurate operation | movement using structures, such as a manipulator.

It is a front view which shows the basic composition of the adhesive tape sticking apparatus which concerns on an Example. It is a figure which shows the structure of the tape supply part which concerns on an Example. (A) is a perspective view of a tape supply part, (b) is a front view of a tape supply part. It is a figure which shows the structure of the grip allowance formation unit which concerns on an Example. It is a figure which shows the structure of the tape joining unit which concerns on an Example. It is a figure which shows the structure of the tape collection | recovery part which concerns on an Example. It is a figure which shows the structure of the separator collection | recovery part which concerns on an Example. It is a flowchart which shows operation | movement of the adhesive tape sticking apparatus which concerns on an Example. (A) is a flowchart showing an outline of an operation for attaching an adhesive tape to a wafer, (b) is a flowchart for explaining the details of the operation in step S7, and (c) shows details of an operation for collecting unnecessary tape. It is a flowchart to explain. It is a figure which shows operation | movement of step S2 which concerns on an Example. (A) is a figure which shows the state which has a sticking roller in an initial position, (b) is a figure which shows the state which the sticking roller moved to the terminal position. It is a figure which shows operation | movement of step S3 which concerns on an Example. It is a figure which shows operation | movement of step S4 which concerns on an Example. It is a figure which shows operation | movement of step S7-1 based on an Example. It is a figure which shows operation | movement of step S7-1 based on an Example. It is a figure which shows operation | movement of step S7-1 based on an Example. It is a figure which shows operation | movement of step S7-1 based on an Example. It is a figure which shows operation | movement of step S7-1 based on an Example. It is a figure which shows operation | movement of step S7-2 which concerns on an Example. It is a figure which shows operation | movement of step S7-3 which concerns on an Example. It is a figure which shows operation | movement of step S7-4 which concerns on an Example. (A) is a figure which shows the state before clamping a preceding tape, (b) is a figure which shows the state after clamping a preceding tape, (c) is a figure which shows the state which hold | gripped the grip allowance. is there. It is a figure which shows operation | movement of step S7-5 which concerns on an Example. It is a figure which shows operation | movement of step S7-6 which concerns on an Example. It is a figure which shows operation | movement of step S7-7 which concerns on an Example. (A) is a figure which shows the state before switching an original fabric roll, (b) is a figure which shows the state after switching an original fabric roll. It is a figure which shows operation | movement of step S7-8 which concerns on an Example. (A) is a figure which shows the state before unwinding a succeeding tape, (b) is a figure which shows the state after unwinding a succeeding tape. It is a figure which shows operation | movement of step S7-9 based on an Example. (A) is a figure which shows the state which pinches | interposes and joins the front-end | tip of a trailing tape with the rear end of a preceding tape, (b) is a figure which shows the state which draw | feeds out the tape after joining. It is a figure which shows operation | movement of step S5-1 based on an Example. (A) is a figure which shows the state which a tape holding member moves to an end position, (b) is a figure which shows the state in which a tape holding member hold | maintains an unnecessary tape, (c) is a figure which does not require a tape holding member It is a figure which shows the state which pulls out. It is a figure which shows operation | movement of step S5-2 based on an Example. It is a figure which shows operation | movement of step S5-3 based on an Example. (A) is a figure which shows operation | movement of the cutter blade which concerns on an Example, (b) is a figure which shows an example of a modification about operation | movement of a cutter blade. It is a figure which shows operation | movement of step S5-4 which concerns on an Example. It is a figure which shows operation | movement of step S5-5 which concerns on an Example. It is a figure which shows the operation | movement which replaces | exchanges the collection box which concerns on an Example. It is a figure compared with the conventional example about the adhesive tape joining method which concerns on an Example. (A) is a figure which shows the state which adsorb | sucks an adsorbing member to a tape in a prior art example, (b) is a figure which shows the state which adsorbs an adsorbing member in a prior art example, (c) uses a tape with high adhesive force. It is a figure which shows the problem of the prior art example in a case, (d) is a figure which shows the structure of an Example. It is a figure compared with the prior art example about the adhesive tape collection | recovery method which concerns on an Example. (A) is a figure which shows the trouble of a prior art example, (b) is a figure which shows the structure of an Example. It is a figure which shows the structure of the adhesive tape joining apparatus which concerns on a modification. (A) is a figure which shows the structure of the tape holding member in the front-end | tip part of an adhesive tape, (b) is a figure which shows the structure of step S7-9 in a modification. It is a figure which shows the structure of the adhesive tape joining apparatus which concerns on a prior art example.

  Embodiments of the present invention will be described below with reference to the drawings. Drawing 1 is a front view showing the basic composition of adhesive tape pasting device 1 provided with the tape joining device concerning an example. In addition, in the figure which shows the adhesive tape sticking apparatus 1, illustration is abbreviate | omitted about the support means which supports various structures, the drive means which drives various structures.

  In this embodiment, an adhesive tape T for surface protection to be affixed to various substrates such as a semiconductor wafer (hereinafter simply referred to as “wafer”) is supplied in a long length with a separator S attached thereto, and predetermined on the downstream side. A case of cutting into a system will be described as an example. That is, in this embodiment, long adhesive tapes are joined together.

  In this embodiment, “upstream” and “downstream” are defined as being along the feeding direction of the adhesive tape. That is, “upstream” means a side close to a tape supply unit described later in the feeding direction of the adhesive tape. The adhesive tape T with the separator S attached thereto is referred to as a tape TS.

<Description of overall configuration>
As shown in FIG. 1, the adhesive tape pasting apparatus 1 according to the embodiment includes a tape joining device 3, a holding table 5, a tape pasting unit 7, a tape cutting unit 9, a tape separating unit 11, a tape collecting unit 13, and a separator collecting unit. 15 is provided. The tape joining apparatus 3 joins the leading end of another tape TS to the trailing end of the preceding tape TS. A specific configuration of the tape bonding apparatus 3 will be described later.

  The holding table 5 places and holds the wafer W with the circuit forming surface facing upward. In the embodiment, a chuck table that sucks and holds the wafer W is used as the holding table 5, but the configuration of the holding table 5 is not limited to this. Further, a cutter running groove 5a is formed on the upper surface of the holding table 5 in order to cut the adhesive tape T by turning a cutter blade 9c provided in a tape cutting unit 11 (to be described later) along the outer shape of the wafer W. Has been.

  The tape attaching unit 7 attaches the adhesive tape T to the circuit surface of the wafer W placed on the holding table 5 and held by suction. As shown in FIG. 1, the tape adhering unit 7 includes a movable base 7a that reciprocates horizontally along a rail (not shown) and an adhering roller 7b that is pivotally supported by a bracket connected to the movable base 7a. .

  The tape cutting unit 9 is equipped with a support arm 9b at the lower part of a movable base 9a that can be driven up and down so as to be capable of driving and turning around a vertical axis P located on the center of the holding table 5. Further, a cutter 9c with a blade edge facing downward is mounted on the free end side of the support arm 9b. That is, the support arm 9b is rotated about the vertical axis P, so that the cutter 9c moves along the outer periphery of the wafer W to cut out the adhesive tape T.

  The tape separation unit 11 separates the adhesive tape Tw cut out by the cutter 9c and attached to the surface of the wafer W from the unnecessary unnecessary tape Tn after being cut out. The tape separation unit 11 includes a guide roller 11a that maintains the tension of unnecessary unnecessary tape Tn, and a nip roller 12. The nip roller 12 includes a pinch roller 12a that can move up and down and a feed roller 12b that is driven by a motor. The tape separation unit 11 is configured to be able to reciprocate horizontally in the horizontal direction along a rail (not shown).

<Configuration of tape joining device>
Here, the configuration of the tape bonding apparatus 3 will be described. As shown in FIG. 1, the tape bonding apparatus 3 includes a tape supply unit 17, a grip allowance forming unit 19, and a tape bonding unit 21. The configuration of the tape supply unit 17 will be described with reference to FIGS. FIG. 2A is a perspective view of the tape supply unit 17, and FIG. 2B is a front view of the tape supply unit 17.

  As shown in FIG. 2A, the tape supply unit 17 is configured such that a plurality of bobbins 25 are erected on the rotating plate 23 and the original roll 28 of the tape TS is loaded into each bobbin 25. . In the embodiment, it is assumed that two bobbins 25 </ b> A and 25 </ b> B are erected on the rotating plate 23. The original fabric roll loaded on the bobbin 25A is denoted by reference numeral 28A, and the original fabric roll loaded on the bobbin 25B is denoted by reference numeral 28B.

  The rotating plate 23 is configured to rotate around a central axis 26 by a drive mechanism 24. With the rotation of the rotating plate 23, each bobbin 25 can move between the supply position and the standby position. 2 shows a state where the bobbin 25A is disposed at the supply position and the bobbin 25B is disposed at the standby position.

  In addition, the original fabric roll 28 arrange | positioned in a stand-by position is comprised so that it can take out to the exterior of the adhesive tape sticking apparatus 1 through the opening-and-closing door which is not shown in figure. The operator can take out the original fabric roll 28 and set a new original fabric roll 28 at the standby position. Moreover, in the tape supply part 17, a standby position is comprised so that it may become a position away from the center part of the adhesive tape sticking apparatus 1 compared with a supply position. In general, many components, cutters, movable parts, and the like that are at a high temperature are provided at the center of the adhesive tape applicator 1. Therefore, when exchanging the original fabric roll 28 switched to the standby position, the operator can avoid approaching the high temperature part or the movable part.

  Each bobbin 25 is provided with a tape holding member 27 and a guide roller 29. The leading end of the tape TS pulled out from the original roll 28 loaded in the bobbin 25 is guided to the tape holding member 27 while the tension is maintained by the guide roller 29. The tape holding member 27 is configured by two plate-like members as an example, and the tape TS is sandwiched between the plate-like members.

  As shown in FIG. 3, the grip allowance forming unit 19 includes a peeling unit 31, an extrusion member 33, and a pressure roller 35. The peeling unit 31 peels the tape TS onto the adhesive tape T and the separator S. The peeling unit 31 includes a guide roller 37 and a feed roller 39.

  The guide roller 37 maintains the tension of the tape TS and the peeled adhesive tape T. The feed roller 39 is configured to reciprocate horizontally from side to side. The separated separator S is wound around the feed roller 39 and guided to the separator collection unit 15.

  The pushing member 33 is configured to be driven in a direction R (y direction in FIG. 3) substantially perpendicular to the feeding direction L of the adhesive tape T, and includes an exterior portion 33a and a protrusion portion 33b. Yes. The protruding portion 33b is disposed on the upper surface of the inner plate 33c, and the inner plate 33c is connected to the bottom surface of the exterior portion 33a via an elastic member 33d. The exterior portion 33a and the inner plate 33c are configured to be pushed up in the direction R independently of each other. When the inner plate 33c is pushed up, the projecting portion 33b is configured to protrude to the outside of the exterior portion 33a.

  When the pushing member 33 is driven in the direction R, a part of the adhesive tape T is projected in the direction R by the contact of the protruding portion 33b. The pressure-bonding roller 35 presses the pressure-sensitive adhesive tapes T protruding by pressing the pressure-sensitive adhesive tape T protruded in the direction R, and forms a grip allowance H. Specific operations of the extruding member 33 and the pressure roller 35 and the process of forming the gripping margin H will be described later.

  As shown in FIG. 4, the tape joining unit 21 includes a cutter unit 41, a holding unit 43, and a gripping unit 45. The cutter unit 41 includes a movable table 41a and a cutter blade 41b.

  The movable table 41a can be driven in the direction R by a driving mechanism (not shown). The movable base 41a is configured to be driven in the width direction of the tape TS (z direction in FIG. 4). A cutter blade 41b is provided at the tip of the movable base 41a. The cutter blade 41b cuts the tape TS in the width direction at a predetermined position indicated by reference symbol C. When the cutter blade 41c cuts the preceding tape TS, an end portion for joining the succeeding tape TS is formed on the preceding tape TS.

  The holding unit 43 can be driven in the direction R as an example, and is configured to come into contact with the tape TS from the separator S side by the driving. The holding unit 43 has a gap 44, and the cutter unit 41 is configured to approach the tape TS via the gap 44 and to cut the tape TS at a predetermined position C.

  The gripping unit 45 can be driven in the direction R. The gripping unit 45 is configured to contact the tape TS from the adhesive tape T side by being driven in the direction R. That is, the holding unit 43 and the gripping unit 45 each hold the tape TS stably by being driven so as to sandwich the tape TS. Further, each of the holding unit 43 and the gripping unit 45 is preferably configured to be capable of being vacuum-sucked. In this case, the tape TS can be held more stably by performing vacuum suction after contacting the tape TS.

  The gripping unit 45 is constituted by a plurality of members arranged in parallel in the feeding direction L, and has at least one gap portion 46 between the plurality of members. In the embodiment, it is assumed that the gripping unit 45 has two members 45a and 45b, and a gap 46 is formed between the members 45a and 45b.

  The member 45a and the member 45b can be driven in the same direction in the direction R, and are driven in opposite directions in the feeding direction L. When the member is driven in the reverse direction, the gripping unit 45 stably grips the gripping margin H formed by the gripping margin forming unit 19. Even when the adhesive tape T has a strong adhesive force, the adhesive tape T and the adhesive tape T are formed at the rear end portion of the tape TS. The separator S can be reliably peeled off.

<Configuration of tape recovery unit>
Next, the structure of the tape collection | recovery part 13 is demonstrated. As shown in FIG. 5, the tape collection unit 13 includes a tape holding member 51, a tape pressing member 53, a cutter unit 55, and a tape collection unit 57.

  The tape holding member 51 includes a movable base 51a and a holding member 51b. The movable base 51a is configured to be capable of reciprocating in the horizontal direction. The holding member 51b is connected to the movable base 51a. The holding member 51b moves in the thickness direction of the unnecessary unnecessary tape Tn to hold the unnecessary tape Tn from both sides of the front and back surfaces. The holding member 51b is not limited to the configuration for holding the unnecessary tape Tn, and a configuration for holding the unnecessary tape Tn by suction may be used. With the holding member 51b holding the unnecessary tape Tn, the movable base 51a moves to the right as shown in FIG. 5, whereby the unnecessary tape Tn guided to the tape collecting unit 13 by the guide roller 50 is pulled out in the horizontal direction. It is held stably in the state.

  The tape pressing member 53 includes a movable base 53a and a pressing plate 53b. The movable base 53a is configured to be capable of reciprocating in the vertical direction between a standby position shown in FIG. 5 and a recovery position of a recovery box F described later. The pressing plate 53b is connected to the movable base 53a, and the back surface (the lower side in the figure) is flat. Of the flat back surface, at least a tape suction portion is provided with suction holes. In other words, the unnecessary tape Tn drawn out by the tape holding member 51 is stably adsorbed and held in a flat state spread in the horizontal direction by the flat surface of the pressing plate 53b.

  Then, after the unnecessary tape Tn is cut by a cutter unit 55, which will be described later, the movable base 53a moves to the collection box F arranged at the collection position, so that the unnecessary tape Tn cut into single sheets spreads horizontally. It is stored in the collection box in a flat state.

  The cutter unit 55 includes a movable base 55a and a cutter blade 55b. The movable table 55a is configured to be driven in each of the width direction and the thickness direction of the unnecessary tape Tn. The cutter blade 55b is connected to the tip of the movable base 55a, and is configured such that the blade tip faces the unnecessary tape Tn. That is, the cutter blade 55b cuts the unnecessary tape Tn in the width direction according to the driving of the movable base 55a. That is, the unnecessary tape Tn is stably held in a state of spreading in the horizontal direction by the holding member 51b and the pressing plate 53b, and is cut into single sheets by the cutter blade 55b while maintaining the state.

  The tape collection unit 57 includes a rotary table 58 and a plurality of collection boxes F. In the embodiment, it is assumed that two recovery boxes F1 and F2 are provided. The rotary table 58 is configured to rotate about the central axis V. With the rotation of the turntable 58, each of the collection boxes F moves between the collection position and the standby position. FIG. 5 shows a state in which the collection box F1 is arranged at the collection position and the collection box F2 is arranged at the standby position.

  The collection position is located directly below the tape pressing member 53, and the unnecessary tape Tn cut into sheets is stored in a collection box F arranged at the collection position. The standby position is configured to be farther from the center of the tape applicator 1 than the recovery position, and the recovery box F disposed at the standby position passes through the open / close door 59 shown in FIG. 1 can be taken out to the outside.

<Configuration of separator recovery unit>
The configuration of the separator recovery unit 15 is the same as that of the tape recovery unit 13. That is, as shown in FIG. 6, the separator collection unit 15 includes a separator holding member 61, a separator pressing member 63, a cutter unit 65, and a separator collection unit 67.

  The separator holding member 61 includes a movable base 61a and a holding member 61b. With the holding member 61b holding the separator S, the movable base 61a moves leftward as shown in FIG. 6, so that the separator S guided to the separator collecting unit 15 by the guide roller 60 is pulled out in the horizontal direction. Stable in state.

  The separator pressing member 63 includes a movable base 63a and a pressing plate 63b. The movable table 63a is configured to be capable of reciprocating in the vertical direction. The pressing plate 63b is provided with suction holes at least in the separator suction portion of the flat back surface, and the separator S pulled out by the separator holding member 61 is flattened horizontally by the pressing plate 63b. Adsorbed and held in a stable state.

  The cutter unit 65 includes a movable table 65a and a cutter blade 65b. The movable table 65a is configured to be driven in each of the width direction and the thickness direction of the separator S. The cutter blade 55b is connected to the tip of the movable base 55a, and cuts the separator S into sheets in the width direction.

  The separator collection unit 67 includes a rotary table 68 and a plurality of collection boxes G. In the embodiment, it is assumed that two recovery boxes G1 and G2 are provided. The rotary table 68 is configured to rotate around the central axis W. Due to the rotation of the rotary table 68, each of the collection boxes G moves between the collection position Gc and the standby position Gs.

  FIG. 6 shows a state where the collection box G1 is arranged at the collection position Gc and the collection box G2 is arranged at the standby position Gs. The separator S cut into pieces is stored in a collection box G arranged at a collection position. The collection box G arranged at the standby position Gs can be taken out of the adhesive tape pasting apparatus 1 through the opening / closing door 69 shown in FIG.

<Overview of pasting operation>
Here, a series of basic operations for attaching the adhesive tape T for circuit surface protection to the wafer W using the adhesive tape attaching device 1 will be described. FIG. 7A is a flowchart illustrating a process of attaching the protective adhesive tape T to the wafer W.

  When a sticking command is issued, the wafer W stored in a predetermined storage unit is aligned on the alignment stage and then placed on the holding table 5 by a wafer transfer mechanism (not shown). The wafer W placed on the holding table 5 is turned and sucked and held in an aligned state so that the center of the wafer W is on the center of the holding table 5. (Step S1).

  At this time, each of the tape pasting unit 7, the tape cutting unit 9, and the tape peeling unit 11 has moved to the initial position shown in FIG. That is, the tape applying unit 9 has moved to the right side of the holding table 5, and the tape peeling unit 11 has moved to the left side of the holding table 5. Further, the tape cutting unit 9 stands by above the holding table 5.

  The separator-attached adhesive tape TS is fed out and supplied downstream from the original roll 28A loaded at the supply position of the tape supply unit 17, and the tape TS is peeled off to the adhesive tape T and the separator S by the peeling unit 31. The adhesive tape T is guided to the tape attaching unit 7 and the tape peeling unit 11.

  Next, as shown in FIG. 8B, the sticking roller 7b of the tape sticking unit 7 rolls forward on the wafer W while pressing the adhesive tape T downward (leftward in FIG. 8). It moves from the initial position shown to the end position shown by the solid line. Thereby, the adhesive tape T is affixed on the whole surface of the wafer W (step S2).

  After the adhesive tape T is attached to the wafer W, as shown in FIG. 9, the tape cutting unit 9 that has been waiting upward is lowered and moved from the initial position indicated by the dotted line to the cutting position indicated by the solid line. Then, when the tape cutting unit 9 is lowered to the cutting position, the cutter 9 c is pierced into the adhesive tape T in the cutter running groove 5 a of the holding table 5.

  When the cutter 9c is stabbed into the adhesive tape T, the support arm 9b rotates about the vertical axis P as the center of rotation. Along with this, the cutter 9c rotates while sliding on the outer periphery of the wafer, and the adhesive tape T is cut along the outer shape of the wafer (step S3).

  When the cutting of the adhesive tape T along the outer shape of the wafer is completed, the tape cutting unit 9 is raised to the original standby position. Then, the tape applying unit 7 returns from the terminal position to the initial position. As the affixing unit 17 returns to the initial position, the tape peeling unit 11 moves forward (rightward in FIG. 10) as shown in FIG. That is, the tape peeling unit 11 moves rightward from the initial position indicated by the dotted line in FIG. 10 to the end position indicated by the solid line.

  While the tape peeling unit 11 moves to the end position, the unnecessary tape Tn cut and cut on the wafer W from the adhesive tape T is wound up and peeled off (step S4). Of the adhesive tape T, the portion attached to the surface of the wafer W is marked with the symbol Tw to be distinguished from the unnecessary tape Tn.

  When the peeling unit 21 reaches the end position of the peeling operation, the tape peeling unit 11 returns from the end position to the initial position. At this time, the unnecessary tape Tn is wound up, guided to the tape collecting unit 13 and collected, and a certain amount of tape TS is fed out from the tape supply unit 17 (step S5).

  When each process up to step S5 is completed, the suction on the holding table 5 is released. After the suction release, the wafer W to which the adhesive tape Tw is attached is transferred by the wafer transfer mechanism and is collected by a wafer collection unit (not shown) (step S6). This completes one adhesive tape application process.

  In addition, after completion of the adhesive tape pasting process, the following steps are branched according to the loading amount of the original roll 28 (supply tape) of the tape TS arranged at the supply position of the tape supply unit 13. When the loading amount of the supply tape becomes equal to or less than a predetermined amount, automatic replacement of the tape TS is performed (step S7). By confirming that the supply amount of the supply tape is equal to or greater than the specified amount using various sensors, the above operations are sequentially repeated thereafter.

<Description of tape replacement process>
Here, the process of automatically replacing the tape TS according to step S7 will be described. When the loading amount of the supply tape becomes equal to or less than the specified amount, the tape replacement process according to step S7 is performed according to the processes from step S7-1 to step 7-8 shown in the flowchart of FIG. 7B. . After the raw roll 28 arranged at the supply position of the tape supply unit 17 is replaced with a new raw roll 28 and fed out from the new raw roll 28 by the process shown in FIG. The leading end of the tape TS in the row (upstream) and the trailing end of the preceding (downstream) tape TS are automatically joined.

  In the embodiment of the tape supply unit 17, the bobbin 25A and the original fabric roll 28A are initially arranged at the supply position. The case of exchange will be described as an example.

Step S7-1 (formation of gripping allowance)
When exchanging the tape, a process of forming a grip margin on the adhesive tape T by the grip margin forming unit 19 is executed. The initial position of each configuration of the grip allowance forming unit 19 is as shown in FIG. That is, the separator S is peeled off from the tape TS by the peeling unit 31, and the adhesive surface of the adhesive tape T is exposed. The extruding member 33 is disposed on the adhesive surface side of the adhesive tape T, and the pressure roller 35 is disposed on the non-adhesive surface side of the adhesive tape T.

  In step S7-1, first, as shown in FIG. 11, the inner plate 33c moves in the direction R independently of the exterior portion 33a, and pushes up the protruding portion 33b. When the inner plate 33c pushes up the protruding portion 33b, the tip end portion of the protruding portion 33b is pushed out from the exterior portion 33a.

  Next, the pushing member 33 moves in the direction R in a state where the tip end portion of the protruding portion 33b is pushed out of the exterior portion 33a. As a result, as shown in FIG. 12, a part of the adhesive tape T (adhesive tape Tp) is pushed out in the direction R, which is a direction substantially perpendicular to the feeding direction L, by the protrusion 33b.

  In a state where the protruding portion 33b has pushed the adhesive tape Tp in the direction R, the exterior portion 33a is in contact with the adhesive tape T extending in the direction L. Therefore, it can avoid that the position where the projection part 33b is pushed up shifts in the direction R. Further, in a state where the protruding portion 33b is pushed out of the adhesive tape Tp in the direction R, the adhesive tape T fed in the direction L is preferably held so as to be sandwiched between the exterior portion 33a and the pressure roller 35. .

  In this case, it is possible to avoid the direction in which the adhesive tape T excluding the adhesive tape Tp extends from the direction L when the protrusion 33b pushes the adhesive tape Tp in the direction R. Therefore, it is possible to avoid the occurrence of an error in forming the gripping portion H, which will be described later, and the occurrence of a situation where the shape and size of the gripping portion H are different from the initially assumed shape.

  After the pressure-sensitive adhesive tape Tp is pushed out in the direction R by the extruding member 33, the pushed-out pressure-sensitive adhesive tape Tp is pressure-bonded by the pressure-bonding roller 35 to form a grip allowance H. Specifically, first, as shown in FIG. 13, each of the pressure rollers 35 moves in the opposite direction in the feeding direction L so as to approach each other. As a result, the non-adhesive surface of the adhesive tape Tp pushed in the direction R is sandwiched from both sides by the pressure roller 35.

  When the adhesive tape Tp is sandwiched between the pressure-bonding rollers 35, as shown in FIG. 14, the pushing-up of the protruding portion 33b by the inner plate 33c is released, and the protruding elastic member 33d returns to its original state, whereby the protruding portion 33b It is housed inside 33a.

  Since the protrusion 33b is separated from the adhesive tape T by storing the protrusion 33b, the adhesive tape Tp can be crimped. That is, as shown in FIG. 15, the pressure roller 35 is further pressed from both sides of the adhesive tape Tp. Further, the pressure-sensitive adhesive tape Tp is pressed and the pushing member 33 is separated from the pressure-sensitive adhesive tape T. As a result, the adhesive surfaces of the adhesive tape Tp are pressure-bonded to form a grip allowance H.

  In this manner, the adhesive allowance is formed by causing the adhesive tape Tp to protrude in the direction R at the predetermined grip allowance forming position Tf, and further sandwiching and pressing the adhesive tape Tp from opposite directions in the feeding direction L. As a result, the shape of the gripping margin H is a shape that protrudes in the direction R by the length Pb in the region of the length Pa in the adhesive tape T that is fed in the direction L. The length Pa in the feeding direction L is as short as the thickness of the adhesive tape T, while the length Pb in the direction R substantially perpendicular to the direction L is an arbitrary length depending on the shape of the protrusion 33b. It can be.

Step S7-2 (Separator reattachment)
After the gripping margin is formed, the separator is reattached. That is, as shown in FIG. 16, the feed roller 39 around which the separator S is wound is rolled forward (leftward in FIG. 16) in the feeding direction L of the adhesive tape T. At this time, the feed roller 39 is configured to roll over a predetermined position Tf where the gripping margin H is formed on the adhesive tape T.

  As the feed roller 39 rolls from the initial position indicated by the dotted line to the terminal position indicated by the solid line, the separator S is reattached over a predetermined length of the adhesive tape T including the proximal end portion of the gripping allowance H. By attaching the separator S to the proximal end portion of the gripping margin H, it is possible to prevent the adhesive surfaces of the adhesive tape T forming the gripping margin H from being separated from each other. As a result, it is possible to prevent the gripping margin H from collapsing due to the peeling between the adhesive surfaces of the adhesive tape T, so that the gripping margin H can be maintained more stably.

Step S7-3 (sending the gripping allowance)
After the reattachment of the separator is completed, the gripping margin is sent out. That is, the gripping allowance H is sent out to the tape joining unit 21 by feeding out the tape TS. In the embodiment, since the tape TS is cut and joined at a position closer to the original fabric roll 28, the position of the tape joining unit 21 is configured to be upstream from the grip allowance forming position Tf (FIG. 1). Therefore, as shown in FIG. 17, the feeding direction of the tape TS is made to flow backward from the direction L to the direction Lr, whereby the gripping margin H is sent upstream from the formation position Tf and moved to the tape joining unit 21.

Step S7-4 (holding the gripping allowance)
The gripping margin H sent from the gripping margin forming unit 19 to the tape joining unit 21 moves to the position of the gap portion 46 formed in the gripping unit 45 as shown in FIG. After the gripping margin H is sent to the tape joining unit 21, the gripping margin is held. That is, as shown in FIG. 18B, the tape TS is held between the holding unit 43 and the gripping unit 45 by moving the holding unit 43 and the gripping unit 45 in the direction R. By sandwiching by each unit, the deviation of the tape TS in the feeding direction L is prevented. At this time, the holding unit 43 holds the separator S by suction.

  The gripping unit 45 holds the adhesive tape T by suction. By this suction and holding, the tape TS is held more stably. And the holding | maintenance allowance H by the holding | grip unit 45 is performed with clamping of tape TS. That is, as shown in FIG. 18C, the member 45a and the member 45b are moved in opposite directions in the feeding direction L, and are gripped so as to sandwich the grip allowance H in the gap portion 46. Since the gripping margin H protrudes in a direction substantially perpendicular to the feeding direction L, the gripping unit 45 can hold the adhesive tape T more stably by gripping the gripping margin.

Step S7-5 (cutting the preceding tape)
After holding the grip allowance, the preceding tape is cut. The preceding tape means the tape TS fed out from the original fabric roll 28 (original fabric roll 28A in the embodiment) arranged at the supply position. That is, as shown in FIG. 19, the movable base 41a of the cutter unit 41 is driven in the direction R, and the cutter blade 41b is pierced into the tape TS.

  Then, by driving the movable table 41a in the width direction of the tape TS, the cutter blade 41b cuts the preceding tape TS in the width direction at a predetermined position indicated by reference numeral C. When the preceding tape is cut by the cutter blade 41b, the preceding tape TS is separated from the original roll 28A. And the terminal part for joining with the tape drawn | fed out from the new original fabric roll 28 is formed in the rear end of preceding tape TS.

Step S7-6 (peeling of the rear end of the preceding tape)
After cutting the leading tape, the trailing end of the leading tape is peeled off. That is, as shown in FIG. 20, the holding unit 43 that holds the separator S by suction and the holding unit 45 that holds the adhesive tape T by suction and holds the grip allowance H are reversed in the direction R, respectively. Separate. The adhesive tape T and the separator S are peeled off at the rear end Ba of the preceding tape TS by separating both units while maintaining the holding state.

  Unlike the conventional configuration in which one surface of the tape TS is adsorbed and peeled off, in the embodiment, a gripping margin H protruding in a direction substantially perpendicular to the surface of the tape TS is formed, and the gripping unit 45 serves as the gripping margin. It is the structure to hold. Compared to a configuration in which one surface is sucked and held, the configuration in which the gripping allowance H protruding in a substantially vertical direction is held and held can hold the tape TS more stably. Therefore, in the structure of an Example, even if it is a case where the adhesive force between the adhesive tape T and the separator S is strong, the adhesive tape T and the separator S can be reliably peeled in the rear end of a preceding tape.

Step S7-7 (switching of the raw roll)
After the trailing edge of the preceding tape is peeled off, the original roll is switched. That is, as shown in FIGS. 21A and 21B, the rotating plate 23 of the tape supply unit 17 is appropriately rotated to switch the original fabric roll 28 disposed at the supply position. Due to the rotation of the rotating plate 23, the original roll 28 disposed at the supply position is changed from the original roll 28A in which the loading amount is decreased (FIG. 21A) to the original roll 28B having a sufficiently large loading amount. (FIG. 21B).

  In FIG. 21 and subsequent figures, the tape holding member 27 disposed on the bobbin 25A is denoted by reference numeral 27A, and the tape retaining member 27 disposed on the bobbin 25B is denoted by reference numeral 27B to distinguish them. 22 and FIG. 23, the tape TS, the adhesive tape T, and the separator S relating to the preceding tape are each given a reference symbol “a”, and the tape TS, the adhesive tape T, and the separator S relating to the subsequent tape are indicated by a reference symbol “b”. To distinguish between the two.

Step S7-8 (feeding out following tape)
After the original roll has been switched, the subsequent tape is fed out. At the time when the original fabric roll at the supply position is switched to the original fabric roll 28B, the leading end of the succeeding tape TSb is held between the tape holding members 27B (FIG. 22A). Therefore, in order to join the preceding tape TSa and the succeeding tape TSb, the succeeding tape TSb is fed out from the raw fabric roll 28B via the tape holding member 27B (FIG. 22B). As a result, the leading end Fw of the succeeding tape TSb is fed out to a position where it can be joined to the trailing end Ba of the preceding tape TSa.

Step S7-9 (tape joining)
After the succeeding tape is fully paid out, the tape is joined. That is, as shown in FIG. 23A, the holding unit 43 that holds the separator Sa by suction and the grip unit 45 that holds the adhesive tape Ta by suction are moved in the direction R, and the leading end of the succeeding tape TSb. Fw is sandwiched between the preceding adhesive tape Ta and separator Sa. After the sandwiching, the leading tape TSa and the trailing tape TSb are joined by causing bonding between the rear end of the adhesive tape Ta and the front end of the adhesive tape Tb and between the rear end of the separator Sa and the front end of the separator Sb. The joining with is completed.

  In the embodiment, as shown in each drawing of FIG. 22, an adhesive material g taking a double-sided tape as an example is attached in advance at the tip of the tape TS. Therefore, the rear end of the adhesive tape Ta and the front end of the adhesive tape Tb, and the rear end of the separator Sa and the front end of the separator Sb are pressed by the holding unit 43 and the gripping unit 45, thereby being joined via the adhesive material g. The

  After the joining of the preceding tape TSa and the succeeding tape TSb is completed, as shown in FIG. 23B, the holding unit 43 and the gripping unit 45 are returned to the initial positions indicated by the solid lines. Then, both the joined tapes are fed out in the direction L. Thus, a series of operations according to step S7 is completed. That is, the exchange of the original fabric roll 28B from the original fabric roll 28A and the joining of the ends of the tape TSa fed from the original fabric roll 28A and the tape TSb fed from the original fabric roll 28B are automatically performed.

  In addition, the original fabric roll 28A switched from the supply position to the standby position in step S7-7 can be removed to the outside of the adhesive tape attaching apparatus 1 through an opening / closing door (not shown). Then, the operator removes the original roll 28A and sets a new original roll 28C at the standby position. When the loading amount of the original fabric roll 28B decreases, the process of step S7 is performed again, whereby the tape TS of the original fabric roll 28B can be automatically switched to the tape TS of the original fabric roll 28C. As a result, the work by the operator can be greatly reduced.

<Description of tape recovery process>
Next, a specific operation in which the tape collecting unit 13 collects the unnecessary tape Tn in step S5 and the like will be described. FIG. 7C is a flowchart for explaining each operation of the tape collecting step in which the tape collecting unit 13 collects the unnecessary tape Tn. In addition, the initial position of each structure with which the tape collection | recovery part 13 is provided shall be as showing in FIG. In the tape recovery unit 57, it is assumed that the recovery box F1 is disposed at the recovery position Fc and the recovery box F2 is disposed at the standby position Fs.

Step S5-1 (tape withdrawal)
In the tape collecting step according to the embodiment, the tape is first pulled out. That is, the unnecessary tape Tn guided to the tape collecting unit 13 by the guide roller 50 is pulled out by a predetermined length. Specifically, as shown in FIG. 24A, the tape holding member 51 moves from an initial position indicated by a dotted line to an end position indicated by a solid line. The end position may be set as appropriate as long as the unnecessary tape Tn is fed out.

  The tape holding member 51 moved to the end position holds the unnecessary tape Tn guided to the tape collecting unit 13. In the embodiment, as shown in FIG. 24B, the holding member 51b is moved in the thickness direction of the unnecessary tape Tn to hold the unnecessary tape Tn from both sides of the front and back surfaces. As long as the tape holding member 51 is configured to stably hold the unnecessary tape Tn, the configuration is not limited to the configuration of holding the unnecessary tape Tn, and the tape holding member 51 may be configured to hold the unnecessary tape Tn by suction. .

  Then, as shown in FIG. 24C, the tape holding member 51 returns from the terminal position to the initial position while holding the unnecessary tape Tn. When the tape holding member 51 returns to the initial position, the unnecessary tape Tn is pulled out in the direction indicated by the symbol M by a predetermined length K from the end position to the initial position. In the embodiment, the direction M is configured to be a horizontal direction, but the direction M may be changed as appropriate.

Step S5-2 (holding the tape flat)
After the unnecessary tape Tn is pulled out by a predetermined length, the pulled out unnecessary tape Tn is held in a flat state. That is, as shown in FIG. 25, the tape pressing member 53 moves from the initial position indicated by the dotted line to the suction position indicated by the solid line.

  The tape pressing member 53 sucks and holds the drawn unnecessary tape Tn through the entire flat back surface of the pressing plate 53b. At this time, the unnecessary tape Tn is held so as to be flat in the feeding direction and the width direction. The configuration for holding the unnecessary tape Tn flat may be changed as appropriate, and as an example, a configuration for holding the unnecessary tape Tn by suction may be applied to the outer peripheral portion of the flat back surface of the pressing plate 53b.

Step S5-3 (cut the tape into sheets)
After holding the unnecessary tape Tn in a flat state, the tape is cut into sheets. That is, as shown in FIG. 26A, the cutter unit 55 moves from the initial position indicated by the dotted line to the cutting position indicated by the solid line in the thickness direction of the unnecessary tape Tn. At the cutting position, the cutter blade 55b is pierced by the unnecessary tape Tn. Thereafter, the movable base 55a moves in the width direction (z direction in the drawing) of the unnecessary tape Tn, so that the cutter blade 55b cuts the unnecessary tape Tn into sheets. Note that the cutter blade 55b is not limited to a configuration in which the cutter blade 55b is moved in the R direction and pierced with the unnecessary tape Tn and then moved in the width direction. As an example, as shown in FIG. 26B, by moving the cutter blade 55b waiting on the side surface of the unnecessary tape Tn in the width direction of the unnecessary tape Tn, the cutting edge of the cutter blade 55b causes the unnecessary tape Tn to be separated. The structure which cut | disconnects to may be sufficient. In this case, the movable base 55a can be omitted from the configuration of moving in the direction R.

Step S5-4 (Storing the sheet tape)
Unnecessary tape Tn is pulled out, and the pulled-out portion is cut into sheets, and then the sheet tape is stored. First, the cutter unit 55 is returned to the initial position, and the holding of the unnecessary tape Tn by the tape holding member 51 is released. Then, as shown in FIG. 27, the tape pressing member 53 is further lowered in a state where the unnecessary tape Tn cut into pieces is sucked and held.

  The lowered tape pressing member 53 moves from the suction position indicated by the dotted line to the vicinity of the bottom surface of the collection box F1 indicated by the solid line. Then, the unnecessary holding of the unnecessary tape Tn is released in the vicinity of the bottom surface of the collection box F1. The unnecessary tape Tn whose suction holding has been released is stored in a flat state on the bottom surface of the recovery box F1 or on the unnecessary tape Tna already stored in the recovery box F1.

  Since the suction holding of the flat unnecessary tape Tn is released in the vicinity of the bottom surface of the collection box F1 or in the vicinity of the upper surface of the unnecessary tape Tna that has already been stored, each of the unnecessary tapes Tn cut into sheets is kept in a flat state. Can be stacked and stored. That is, it is possible to avoid deformation of the sheet-like unnecessary tape Tn from the suction holding release to the stacked storage.

  In addition, if each unnecessary tape Tn can be laminated | stacked in a flat state, it will not be restricted to the structure which cancel | releases adsorption | suction holding | maintenance in the bottom face vicinity etc. of the collection box F1. That is, it is more preferable that the lowered tape pressing member 53 releases the suction holding in a state where the unnecessary tape Tn held by suction is pressed against the bottom surface of the collection box F1 or the surface of the stored unnecessary tape Tna. After the unnecessary tape Tn cut into pieces is stacked and stored in the collection box, the tape pressing member 53 is raised and returned to the initial position.

  Thereafter, the process branches depending on whether or not the amount of unnecessary tape Tn stored in the recovery box F1 disposed at the recovery position Fc is equal to or larger than a predetermined amount. If it falls below the specified amount, the process returns to step S5-1 to repeat the series of operations from step S5-1 to step S5-4 to continue collecting the unnecessary tape Tn. If it is equal to or greater than the specified amount, the process proceeds to step S5-5, and the collection box F is switched.

Step S5-5 (switching of collection box)
When switching the collection box F, the rotary table 58 on which each of the collection boxes F is placed is rotated around the central axis V as shown in FIG. By the rotation of the turntable 58, the collection box F1 storing unnecessary tapes Tn exceeding a specified amount moves from the collection position Fc to the standby position Fs. Meanwhile, the empty collection box F2 moves from the standby position Fs to the collection position Fc.

  By switching the collection box F arranged at the collection position Fc from the collection box F1 to the collection box F2, the single-sheet unnecessary tape Tn can be stored in the collection box F2. That is, when the collection box F arranged at the collection position Fc is switched to the empty collection box F2, the process of collecting the unnecessary tape Tn can be resumed by returning to step S5-1.

  In the embodiment, the recovery box F exceeding the allowable amount can be replaced while restarting the recovery process of the unnecessary tape Tn. That is, as shown in FIG. 29, the operator opens the opening / closing door 59 to take out the collection box F <b> 1 moved to the standby position to the outside of the adhesive tape attaching device 1. The operator places an empty new collection box F3 at the standby position Fs on the turntable 58 instead of the collection box F1.

  The standby position Fs is configured to be farther from the center of the tape applicator 1 than the collection position Fc. Therefore, when taking out and exchanging the collection box F moved to the standby position Fs, it is possible to avoid the operator from approaching the high temperature part or the movable part.

  Further, the recovery box F2 can be replaced with the recovery box F3 while the recovery box F2 is moved to the recovery position Fc and recovery of the unnecessary tape Tn is resumed. That is, since it is not necessary to stop the operation of the tape collection unit 13 except for the step of rotating the turntable 58, the operation efficiency of the tape collection unit 13 can be improved.

<Description of operation of separator recovery unit>
Here, the operation of the separator collection unit 15 will be described. The configuration of the separator collection unit 15 shown in FIG. 6 is common to the tape collection unit 13 shown in FIG. 5, and the operation of the separator collection unit 15 is also common to the operation of the tape collection unit 13.

  That is, the separator S peeled from the adhesive tape T by the peeling unit 31 is guided to the separator collecting unit 15 by the guide roller 60. The separator holding member 61 holds the end of the guided separator S and pulls out the end of the separator S in a predetermined direction (left direction in FIG. 6 in the embodiment) by a predetermined length.

  After pulling out the separator S, the separator pressing member 63 descends. Then, the drawn separator S is sucked and held in a flat state through the entire flat surface of the pressing plate 63b. The cutter blade 65b of the cutter unit 65 cuts the separator S held in a flat state into sheets.

  The separator pressing member 63 further descends while adsorbing the separator S cut into sheets, and moves to the vicinity of the bottom surface of the collection box G1 disposed at the collection position Gc. Then, the separator pressing member 63 releases the suction holding of the separator S in the vicinity of the bottom surface of the collection box F1. The separator S from which the suction holding has been released is stored in the collection box G1 in a state where a large number of flat separators S are stacked.

  After the separator S is stored in the recovery box G1 in a flat state, the cutter unit 65 and the separator pressing member 63 are returned to the initial positions, and thereafter, the separator S is cut into sheets and stacked and stored in a flat state. repeat. When the separator storage amount of the collection box G arranged at the collection position Gc exceeds a specified value, the rotation table 68 is rotated around the central axis W and the collection box G2 is moved to the collection position Gc. The recovery process of the separator S is restarted.

  The operator opens the opening / closing door 69 and takes out the collection box G1 moved from the collection position Gc to the standby position Gs, and places a new collection box G at the standby position Gs. In the recovery process according to such an embodiment, it is not necessary to stop the operation of the separator recovery unit 15 except for the process of rotating the turntable 68. That is, since the operation of the separator recovery unit 15 can be continued even when the recovery box whose storage amount exceeds the specified value is replaced, the operation efficiency of the separator recovery unit 15 can be improved.

<Effects of Configuration of Example>
In the embodiment, a part of the preceding adhesive tape is protruded in a direction substantially perpendicular to the feeding direction of the adhesive tape to form a grip margin, and a portion on the rear end side from the grip margin is cut. Then, with the holding margin held, the adhesive tape and the separator are moved away from each other at the rear portion of the preceding tape to separate them. Finally, the front part of the succeeding tape is moved between the peeled preceding adhesive tape and the separator, and the front part of the succeeding tape is sandwiched and joined by the preceding adhesive tape and separator.

  Examples of conventional methods for automatically joining different tapes include the following. That is, as shown in FIG. 30A, the preceding adhesive tape Ta is first adsorbed by the adsorbing member J. Then, as shown in FIG. 30B, the separator Sa and the adhesive tape Ta are separated by moving the preceding separator Sa and the adsorbing member J apart. Finally, the front part of the succeeding tape TSb is sandwiched and joined between the rear part of the peeled adhesive tape Ta and the rear part of the separator Sa.

  However, in such a conventional automatic joining method, the adhesive force of the adhesive tape Ta is strong, and the adhesive force between the adhesive tape Ta and the separator Sa may exceed the adsorption force of the adsorption member J. In this case, as shown in FIG. 30C, since the rear part of the adhesive tape Ta and the rear part of the separator Sa cannot be separated even if the adsorption member J is moved away, the joining of the preceding tape TSa and the succeeding tape TSb is performed. It becomes difficult.

  In contrast to such a conventional method, in the embodiment, as shown in FIG. 30 (d), the holding member N moves away while holding the grip allowance H. Since the gripping margin H is a part of the adhesive tape Ta, the gripping margin H can be prevented from being torn from the adhesive tape Ta even if the holding member N is moved away.

  In addition, the shape of the grip allowance H is a shape protruding in the direction R by the length Pb in the region of the length Pa in the adhesive tape T fed in the direction L. The length Pa is as short as the thickness of the adhesive tape T. Therefore, the holding member N holds the grip allowance H and moves away in the direction R, whereby a strong traction force can be applied to a relatively narrow range Pa in the feeding direction L. As a result, it is possible to dramatically increase the magnitude of the force acting per unit area at the boundary surface between the adhesive tape Ta and the separator Sa. Therefore, the adhesive tape Ta and the separator Sa can be reliably peeled off at the rear end Ba of the preceding tape TSa.

  On the other hand, the length Pb in the direction R can be set to an arbitrary length according to the shape of the protrusion 33b that pushes out the adhesive tape T. That is, since the length Pb can be set sufficiently long, the holding member N can securely and firmly hold the gripping margin H. As a result, it is possible to more reliably avoid the occurrence of a peeling error at the rear end Ba of the preceding tape as shown in FIG.

  Furthermore, since the gripping allowance H has a shape protruding in the direction R with a sufficient length, various configurations can be applied as the holding member N. As an example, a configuration such as a manipulator can be applied. Therefore, the holding member N can hold the gripping margin H more stably, and can perform a complicated and precise operation on the adhesive tape T while holding the gripping margin H.

  In addition, a part of the adhesive tape T is pushed out in the direction R at a predetermined position Tf, and the part of the extruded adhesive tape T is gripped at the predetermined position by a simple operation of pressing in a feeding direction L from opposite directions. A cost H can be formed. Accordingly, it is possible to improve the position accuracy of the gripping margin forming position Tf.

  In the embodiment, when an unnecessary adhesive tape or separator is collected, a long adhesive tape or the like is cut into sheets at a predetermined length. Then, the cut sheet adhesive tape and the like are stacked and stored in a spread flat state.

  In the conventional collecting method as shown in FIG. 33, the tape collecting unit winds and collects a long unnecessary tape or the like around a shaft. In such a conventional configuration, when the amount of unnecessary tape to be wound and collected exceeds a certain amount, the operation of the device is first stopped and then the unnecessary tape is cut and wound and collected in a roll shape. Take out the shaft and replace it with a new one. After the unnecessary unnecessary tape is wound around the new shaft and connected, the operation is resumed.

  In the conventional configuration, these series of complicated operations need to be performed manually, which increases the burden on the operator. In addition, since it is necessary to stop the operation of the apparatus for a long time, it is difficult to improve work efficiency. Moreover, since it is necessary to install a large winding axis | shaft in the structure which winds and collects, the problem that an adhesive tape sticking apparatus enlarges also is anxious.

  As a configuration for collecting a long unnecessary tape or the like without using a winding shaft, a method of cutting the long tape into sheets and dropping the sheet into a collection box for storage is conceivable. However, in such a configuration of the comparative example, since the collection frequency increases, there is a concern that the work efficiency is lowered.

  As a result of repeated studies on such problems, it has been found that the cause is the deformation of the tape cut into single sheets. That is, since a long tape is wound and guided by a large number of guide rollers or the like, when the long tape is cut into sheets, the sheet-like tape piece is easily deformed into a curved shape. Therefore, as shown in FIG. 31 (a), when the sheet-like unnecessary tape Tn is dropped and recovered in the recovery box F, the unnecessary tape Tn is deformed into various shapes such as a curl shape inside the recovery box F. A plurality of unnecessary tapes Tn are stored in a messy state.

  In this case, the height Hn at which the unnecessary tapes Tn stored in the collection box F are stacked rises relatively quickly. That is, since the volume occupied by the unnecessary tape Tn is larger than the amount of unnecessary tape Tn stored, the replacement frequency of the collection box F increases, and as a result, the operating efficiency of the apparatus decreases. Further, since the shape of each unnecessary tape Tn is not constant, the speed at which the stacked height Hn increases is indefinite. For this reason, it is difficult to predict the timing of taking out and replacing the collection box F, so that it is very difficult to perform planned work.

  On the other hand, in the present invention, as shown in FIG. 31 (b), after the long unnecessary tape Tn is cut into a single sheet in a state where the long unnecessary tape Tn is flattened, the sheet-like unnecessary tape Tn is maintained while maintaining the flat state. Laminate and store in collection box. In such a configuration according to the present invention, the unnecessary tapes Tn are neatly stacked without waste, so that the volume occupied by the unnecessary tapes Tn with respect to the amount of storage of the unnecessary tapes Tn is minimized. Since the replacement frequency of the collection box F can be reduced, the operating efficiency of the apparatus can be greatly improved. Further, since the rising speed of the height Hn at which the unnecessary tapes Tn are stacked is constant, it becomes easy to perform planned work.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the embodiment, a description will be given by taking as an example a process in which the adhesive tape T formed with a grip allowance is gripped, the adhesive tape T and the separator S are suitably separated at the rear end, and the ends of the tape TS are joined together. did. However, the method of using the adhesive tape T in which the grip allowance is formed is not limited to the adhesive tape joining method. That is, the process of forming the grip allowance H on the adhesive tape T can be applied to various adhesive tape handling methods, such as a method of transporting a long adhesive tape being fed to a predetermined position. Here, “transport” is not limited to the operation of transporting the entire adhesive tape, but also includes the operation of moving a part of the adhesive tape including the gripping margin to a predetermined position.

  The process of transporting the adhesive tape to a predetermined position via the gripping margin is as follows. First, a part Tp of the adhesive tape that is fed in the feeding direction L is projected in a direction R that is substantially perpendicular to the direction L (see FIG. 12). Next, a part Tp of the adhesive tape protruding in the direction R is pressed by the pressing roller 53 from the direction L and the direction opposite to the direction L (see FIGS. 13 and 14). As a result of the crimping, a grip margin H having a shape in which a part of the adhesive tape T protrudes in the direction R is formed (see FIG. 15). Then, by holding the grip allowance H (see FIG. 18C), the adhesive tape T is conveyed to a predetermined position (see FIG. 20).

  As shown in FIGS. 15 and 30C, the gripping margin H has a shape that protrudes in a direction R substantially perpendicular to the feeding direction of the adhesive tape T at a predetermined gripping margin forming position Tf. Since the protrusion length Pb in the direction R can be set in advance to an arbitrary and sufficient length, the grip margin H can be easily and firmly held. Further, in the long adhesive tape T extending in the direction L, the gripping margin H protruding in the direction R can be easily and reliably confirmed as a target of the handling target area. Therefore, it is possible to reliably avoid the actual handling position of the long adhesive tape T from deviating from the planned position.

  On the other hand, the length Pa of the gripping margin H in the feeding direction L is as short as the thickness of the adhesive tape T. Moreover, the position accuracy of the grip allowance forming position Tf can be further improved by appropriately setting the position of the pushing member 33. Therefore, by holding the grip allowance H and carrying out various handlings on the adhesive tape T, a structure in which a wide member is brought into contact with the adhesive tape T and the long adhesive tape T extending in the direction L is picked directly. Compared to the configuration and the like, it is possible to precisely set a region that exerts a handling operation on the long adhesive tape T.

  In particular, the structure for forming the grip allowance according to the present embodiment has a particularly advantageous effect when various types of handling are performed on a single-sided tape having an adhesive layer on one side. That is, as shown in FIG. 12, the non-adhesive surface side (the upper side in FIG. 12) of the long adhesive tape T fed in the feeding direction L is projected in the direction R by using the pressing member 33 or the like. Then, a part of the protruding adhesive tape Tp is sandwiched from the non-adhesive surface side by the press roller 53 to be pressed to form a grip allowance H.

  At this time, since the pressure roller 53 is in pressure contact with the non-adhesive surface of the adhesive tape T, it is possible to avoid the pressure roller 53 from adhering to the adhesive tape T without performing a non-adhesive process on the pressure roller 53. Further, since the pressure roller 53 is pressure-bonded from the feeding direction L and the direction opposite to the direction L, the gripping margin H preferably has a shape protruding in a direction R substantially perpendicular to the direction L.

  Then, after forming the gripping margin H, the gripping margin H is gripped by using the gripping unit 45 and the like, whereby various handlings such as conveyance, cutting, and peeling are performed on the adhesive tape T (FIG. 19 and FIG. 19). 20). Since the grip allowance H protrudes in the direction R so that the non-adhesive surface of the adhesive tape T faces outside, the gripping unit 45 grips the non-adhesive surface of the adhesive tape. Therefore, it is possible to avoid the gripping unit 45 from sticking to the adhesive tape T without performing non-adhesion processing.

  Furthermore, the grip unit 45 can be provided only on one surface of the adhesive tape T by forming the grip margin H and gripping the grip margin H. In general, when the adhesive tape is gripped for conveyance or the like, it is necessary to provide a gripping mechanism on both the front surface side and the back surface side of the adhesive tape so as to sandwich the adhesive tape from the front surface and the back surface. As a result, the configuration and purpose of the gripping mechanism are limited from the viewpoint of the area occupied.

  On the other hand, in the present invention, since the gripping unit can be provided only on the surface where the gripping margin protrudes, the portion occupied by the gripping unit 45 can be made smaller and the configuration of the gripping unit 45 can be simplified. Further, the adhesive tape can be firmly held from one surface of the adhesive tape T, and a strong force can be applied to the adhesive tape T in a predetermined direction.

  Therefore, the configuration of the present application can be suitably applied to a process of peeling an adhesive tape attached to a wafer, a process of changing the shape of a line in which a long tape is fed out, or the like. In this case, the gripping unit is brought close to the tape on which the gripping allowance is formed from one side of the tape to grip the gripping allowance, and at least a portion including the gripping allowance of the tape is moved to an arbitrary position. Each process can be suitably performed.

  (2) In the examples and the modified examples, the tape joining device and the tape recovery device according to the present invention have been described using the adhesive tape pasting device, but the tape joining device and the tape recovery device according to the present invention are the tape pasting device. Besides, it can be applied to various tape processing apparatuses. Examples of the tape processing apparatus include a tape peeling apparatus for peeling various tapes attached to a wafer, or a mounting apparatus (mounter) used for mounting the wafer on a ring frame.

  (3) In the example and each modification, in the step of forming the gripping margin H, a part of the adhesive tape T is protruded in the direction R by pushing the adhesive tape T by the protrusion 33b. The configuration to be formed is not limited to this. That is, a part of the adhesive tape T may be protruded in the direction R by drawing a part of the adhesive tape T to the outside. Examples of the pull-out configuration include a configuration in which a part of the adhesive tape T is gripped and pulled out by a magic hand-shaped part, and a configuration in which a part of the adhesive tape T is sucked and pulled out using a vacuum device or the like.

  (4) In the embodiment and each modification, the number of the raw fabric rolls 28 disposed in the tape supply unit 17 is not limited to two, and may be three or more. Further, three or more recovery boxes F of the tape recovery unit 13 and recovery boxes G of the separator supply unit 15 may be provided.

  (5) In the examples and modifications, the gripping margin H protrudes the peeled adhesive tape T, but the place where the gripping margin H is formed is not limited to the adhesive tape T side of the tape TS. That is, the separator S after peeling may be protruded, and the grip allowance H may be formed on the separator S side.

  As a configuration for forming the grip allowance H on the side of the separator S, there is a method in which the separator S protruding in the direction R is pressed from the opposite direction, and the protruding separators S are joined by applying heat or ultrasonic waves ( (Refer FIG.12 (b)). As another method, there is a method in which the separators S projected in the direction R are joined together by driving a joining material such as a staple needle in a staple manner. Further, in the tape TS, the grip allowance H may be formed on both the adhesive tape T side and the separator S side.

  (6) In the example and each modification, the unnecessary tape Tn is adsorbed on the entire flat surface of the pressing plate 53b in each of the steps S5-2 to S5-4 related to the tape collecting step. However, the configuration is not limited to this as long as the unnecessary tape Tn can be held in a flat spread state. As another example, there may be mentioned a configuration in which suction holes are provided at the four corners of the flat surface of the pressing plate 53b and the unnecessary tape Tn is sucked and held at the four corners. Further, the configuration is not limited to suction holding, and a configuration in which the unnecessary tape Tn is held in a flat state by clamping the unnecessary tape Tn using a mechanical configuration may be applied.

  (7) In the example and each modification, the step of joining the preceding tape TSa and the succeeding tape TSb according to step S7-9 fixed the position of the tape holding member 27 as shown in FIG. The configuration is not limited to the configuration in which the leading end Fw of the succeeding tape TSb is fed out in a state. That is, the trailing tape TSb may be fed out while maintaining the state in which the tape holding member 27 holds the front end Fw of the trailing tape TSb.

  (8) In the example and each modified example, the tip of the tape TS in the new original fabric roll 28 was configured to be sandwiched between two tape holding members 27 as shown in FIG. Not limited to. That is, as shown in FIG. 32A, a part of the tip of the tape TS is peeled off in advance to the separator S and the adhesive tape T, and the peeled adhesive tape T is wound around one tape holding member 27 and peeled off. More preferably, the separator S is wound around the other tape holding member 27.

  In such a modification, when joining the rear part of the preceding tape TSa and the front part of the succeeding tape TSb, as shown in FIG. 32 (b), the tape holding member that holds the front end Fw of the succeeding tape TSb. 27 moves in the feeding direction together with the tip Fw. The rear part of the preceding adhesive tape Ta and the front part of the succeeding adhesive tape Tb are joined, and the rear part of the preceding separator Sa and the front part of the succeeding separator Sb are joined.

  In the joining step according to such a modification, the area where the preceding tape TSa and the succeeding tape TSb are in contact with each other can be increased, so that both tapes can be joined firmly. Further, since the adhesive surface of the succeeding tape TSb is exposed to the outside, the exposed adhesive surface of the succeeding tape TSb is preferably in contact with the adhesive surface of the preceding tape TSa by sandwiching the leading end of the succeeding tape TSb with the preceding tape TSa. To do. As a result, the force at which both tapes are joined can be further increased.

  (9) In the example and each modification, the process of joining the preceding tape TSa and the succeeding tape TSb according to step S7-9 is performed from both sides using an adhesive material g as shown in FIG. The method is not limited to the press bonding. Examples of other methods include a configuration in which a heater is disposed in the holding unit 43 or other configuration so that both are heated and bonded, or a configuration in which both are ultrasonically bonded using an ultrasonic generator. Can be mentioned.

DESCRIPTION OF SYMBOLS 1 ... Adhesive tape sticking apparatus 3 ... Tape joining apparatus 5 ... Holding table 7 ... Tape sticking unit 9 ... Tape cutting unit 11 ... Tape separation unit 13 ... Tape collection | recovery part 15 ... Separator collection part 17 ... Tape supply part 19 ... Grip allowance formation Unit 21 ... Tape joining unit 31 ... Peeling unit 33 ... Extrusion member 35 ... Pressure roller 41 ... Cutter unit 43 ... Holding unit 45 ... Holding unit 51 ... Tape holding member 53 ... Tape pressing member 55 ... Cutter unit 57 ... Tape recovery unit T ... Adhesive tape TSa ... Leading tape TSb ... Subsequent tape S ... Separator F ... Collection box G ... Collection box H ... Grip allowance

Claims (10)

An adhesive tape joining method for joining the ends of a long adhesive tape with a separator attached thereto,
A grip that projects at least one of the first adhesive tape and the first separator fed from the first roll among the plurality of rolls provided in the tape supply unit in a direction substantially perpendicular to the feed direction. The process of forming the grip allowance,
In a state where the first adhesive tape and the first separator are sandwiched by an adhesive tape holding member that holds the first adhesive tape and a separator holding member that holds the first separator, the first adhesive tape and the first A cutting process of cutting each of the separators on the rear end side from the gripping margin;
Peeling for separating the first separator from the first adhesive tape by a predetermined length from the first adhesive tape by moving the adhesive tape holding member and the separator holding member relatively apart in a state where the gripping allowance is held. Process,
A switching process of switching the preceding first web roll to a different second web roll;
A joining process of joining the leading end of the second adhesive tape in the subsequent line fed from the second original fabric roll and the trailing end of the first adhesive tape;
A pressure-sensitive adhesive tape joining method comprising: The pressure-sensitive adhesive tape joining method according to claim 1,
After the grip allowance forming process, the adhesive tape joining method includes a reverse flow process in which the first adhesive tape and the first separator are moved in a direction opposite to the feeding direction to bring the grip allowance closer to the first raw roll. . The pressure-sensitive adhesive tape joining method according to claim 1 or 2,
A separator peeling process for peeling the first separator from the first adhesive tape;
In the gripping margin forming process, the gripping margin is formed by projecting the first adhesive tape from which the first separator has been peeled in a direction substantially perpendicular to the feeding direction,
A pressure-sensitive adhesive tape joining method comprising a reattachment step of reattaching the first separator to a portion of the first pressure-sensitive adhesive tape where the gripping allowance is formed after the gripping margin forming step. It is the adhesive tape joining method in any one of Claims 1 thru | or 3, Comprising:
In the joining process, the leading end of the second adhesive tape that is fed out from the second raw fabric roll is held by the first adhesive tape and the separator holding member that are held by the adhesive tape holding member. An adhesive tape that is moved between the first separators and that joins the first adhesive tape and the second adhesive tape by sandwiching a tip of the second adhesive tape between the first adhesive tape and the first separator. Joining method. An adhesive tape joining apparatus for joining the ends of a long adhesive tape with a separator attached thereto,
A plurality of adhesive tape rolls, a tape supply unit for feeding the adhesive tape out of the first roll of the plurality of rolls;
A trailing tape holding member for sandwiching the tip of the adhesive tape of each of the fabric rolls;
An adhesive tape holding member for holding the first adhesive tape being fed from the first original fabric roll;
A separator holding member for holding the first adhesive tape and the first separator in cooperation with the adhesive tape holding member by holding the first separator attached to the first adhesive tape;
A grip allowance forming portion for forming a grip allowance by projecting at least one of the first adhesive tape and the first separator fed from the first original fabric roll in a direction substantially perpendicular to the feed direction;
A cutting mechanism for cutting each of the first adhesive tape and the first separator sandwiched between the adhesive tape holding member and the separator holding member on the rear side from the gripping margin;
A peeling mechanism for peeling the first separator from the first adhesive tape from the rear by a predetermined length by relatively separating the adhesive tape holding member and the separator holding member while holding the gripping allowance. When,
A tape switching mechanism that moves the tape supply unit and switches the original roll from which the adhesive tape is fed out from the first original roll to the second original roll;
A joining mechanism for joining the front end of the second adhesive tape in the subsequent line fed from the second raw fabric roll and the rear end of the first adhesive tape;
An adhesive tape joining device comprising: The pressure-sensitive adhesive tape joining device according to claim 5,
A pressure-sensitive adhesive tape joining method comprising: a reverse flow mechanism that moves the first pressure-sensitive adhesive tape and the first separator in a direction opposite to the feeding direction to bring the gripping margin closer to the first raw fabric roll. The pressure-sensitive adhesive tape joining apparatus according to claim 5 or 6,
A separator peeling mechanism for peeling the first separator from the first adhesive tape;
The grip allowance forming portion forms the grip allowance by projecting the first adhesive tape from which the first separator has been peeled off in a direction substantially perpendicular to the feeding direction,
An adhesive tape joining apparatus comprising a reattachment mechanism for attaching the first separator again to a portion of the first adhesive tape where the grip margin is formed. The pressure-sensitive adhesive tape joining device according to any one of claims 5 to 7,
In the joining mechanism, the first separator and the adhesive tape holding member holding the separator holding member hold the leading end of the second adhesive tape that is fed out from the second raw roll. The first pressure-sensitive adhesive tape and the first pressure-sensitive adhesive tape are moved between the first pressure-sensitive adhesive tape and the first pressure-sensitive adhesive tape, and the first pressure-sensitive adhesive tape and the first separator sandwich the tip of the second pressure-sensitive adhesive tape. Adhesive tape joining device that joins two adhesive tapes. The pressure-sensitive adhesive tape joining device according to any one of claims 5 to 8,
The adhesive tape of each original fabric roll has a separator peeled off at a leading end by a predetermined length, and each of the predetermined length separator and the leading end of the adhesive tape is wound around the trailing tape holding member. Tape joining device. An adhesive tape transport method for transporting a long adhesive tape being fed in a predetermined feeding direction,
A projecting process for projecting a part of the adhesive tape in a direction substantially perpendicular to the feeding direction;
The pressure-sensitive adhesive tape protruding in the substantially vertical direction is clamped between the feeding direction and the direction opposite to the feeding direction, and a grip margin having a shape in which a part of the pressure-sensitive adhesive tape protrudes in the substantially vertical direction is provided. Crimping process to be formed;
A transporting process of gripping the grip allowance and transporting the adhesive tape to a predetermined position;
A pressure-sensitive adhesive tape transport method comprising:

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