JP7344647B2 - tape pasting device - Google Patents

Description

The present invention relates to a tape application device.

A tape adhering device (see, for example, Patent Document 1) is used, for example, to adhere a dicing tape to the back surface of a semiconductor wafer and an annular frame to form a frame unit, which is a semiconductor wafer held by the annular frame. Dicing tape is formed by laminating an adhesive layer on one side of a base material layer, and is supplied as a tape roll wound around a cylindrical core material of a predetermined length. It is set on the roll support roller.

The dicing tape set in the tape sticking device is pulled out through a plurality of rollers, stuck to an adherend such as a wafer, cut, and consumed. The amount of dicing tape used is controlled by the number of dicing tapes attached, and when the amount of tape wrapped around the core material attached to a certain number of wafers becomes small, the device notifies you and the operator replaces the tape roll.

Japanese Patent Application Publication No. 2016-008104

In the tape sticking device shown in Patent Document 1, etc., when replacing the tape roll, it is very time-consuming to repeatedly pass the dicing tape through multiple rollers, so the dicing tape before replacement is pasted on the tape roller. The dicing tape is cut at the position immediately after being pulled out, and the replaced dicing tape is pasted to the cut dicing tape before replacement, and the dicing tape is restarted to be pulled out. Then, the replaced dicing tape passes through the rollers in a predetermined path using the dicing tape before replacement, and the replacement is easily completed.

The tape applicator shown in patent documents requires manual work by an operator to cut the dicing tape before replacing it, but the tape roll is usually set near the center of the device. , access is poor and difficult, and requires a lot of man-hours.

The present invention has been made in view of such problems, and an object thereof is to provide a tape sticking device that can suppress difficulties when replacing tape rolls.

In order to solve the above-mentioned problems and achieve the objects, the tape applying device of the present invention pulls out a tape provided with an adhesive layer on one side of a base layer from a tape roll wound into a roll, and applies the adhesive layer to the adhesive layer on one side of the base material layer. A tape pasting device for pasting onto a workpiece, comprising: a support roller through which the tape roll is removably inserted; a passing roller through which the tape pulled out from the tape roll supported by the support roller passes; and the tape. A plate-shaped tape cutting table used to cut the tape wrapped around the passing roller when the roll is removed from the supporting roller, and a device that accommodates the supporting roller, the passing roller, and the tape cutting table. a main body, the support roller and the passing roller are disposed parallel to a first side wall of the tape applicator that is detachable from the device main body, and the support roller and the tape cutting table are The tape cutting table is arranged near a corner of the apparatus main body where a first side wall and a second side wall perpendicular to the first side wall are connected, and the tape cutting table is arranged so that the tape is pasted more than the tape passing through the passing roller. The tape applicator is arranged so as to be able to move forward and backward into a retracted position where it is retracted to the back of the tape applicator and a cutting position where the tape is pushed out to the vicinity of the first side wall of the tape applicator and the tape is traced on the surface of the tape cutting table. , the tape is closer to the first side wall at the cut position than at the retracted position, and the tape is brought closer to the first side wall at the cut position than at the retracted position.
In the tape pasting device, the tape cutting table is arranged such that, at the cutting position, the passing roller closest to the first side wall among the plurality of passing rollers for the tape is positioned downstream in the tape passing direction. You can also push it out.

INDUSTRIAL APPLICATION This invention has the effect of being able to suppress the difficulty at the time of replacing|exchanging a tape roll.

FIG. 1 is a side sectional view schematically showing a schematic configuration of a tape sticking device according to a first embodiment. FIG. 2 is a perspective view of a tape roll of tape applied to a workpiece by the tape application apparatus shown in FIG. FIG. 3 is a sectional view taken along line III-III in FIG. 2. FIG. 4 is a plan view schematically showing main parts of the tape sticking device shown in FIG. 1. FIG. 5 schematically shows a state in which the tape applying device shown in FIG. 1 has stopped the pasting operation, the first side wall and the second side wall have been removed, and the tape cutting table has been positioned at the cutting position. FIG. FIG. 6 is a plan view schematically showing main parts of the tape sticking device shown in FIG. 5. FIG. FIG. 7 is a plan view schematically showing a state in which the tape roll is removed from the support roller of the tape applicator shown in FIG. 6. FIG. 8 is a plan view schematically showing a state in which the support roller of the tape sticking device shown in FIG. 7 supports a new tape roll. FIG. 9 schematically shows a state in which the tape applicator according to the modification of Embodiment 1 stops the adhesion operation, the first side wall and the second side wall are removed, and the tape cutting table is positioned at the cutting position. FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
DESCRIPTION OF THE PREFERRED EMBODIMENTS A tape sticking device according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a side sectional view schematically showing a schematic configuration of a tape sticking device according to a first embodiment. FIG. 2 is a perspective view of a tape roll of tape applied to a workpiece by the tape application apparatus shown in FIG. FIG. 3 is a sectional view taken along line III-III in FIG. 2. FIG. 4 is a plan view schematically showing main parts of the tape sticking device shown in FIG. 1.

A tape applying apparatus 1 shown in FIG. 1 according to the first embodiment is an apparatus that applies a tape 200 to a back surface 101 of a workpiece 100. In the first embodiment, the workpiece 100 to which the tape 200 is attached by the tape attaching device 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate of silicon, sapphire, gallium arsenide, or the like. be. In the workpiece 100, devices are formed in regions defined by a plurality of dividing lines on the surface 102 of the substrate. The device is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device), or a CMOS (Complementary Metal Oxide Semiconductor). In Embodiment 1, the tape sticking device 1 sticks the tape 200 to the back surface 101 of the workpiece 100, but in the present invention, even if the tape 200 is stuck to the front surface 102 of the workpiece 100. good.

As shown in FIG. 3, the tape 200 applied to the back surface 101 of the workpiece 100 by the tape application apparatus 1 according to the first embodiment includes a base material layer 201 made of synthetic resin and a base material layer 201. The adhesive layer 202 is laminated on one side 204 of the workpiece 100 and is attached to the workpiece 100. In Embodiment 1, as shown in FIGS. 2 and 3, the tape 200 is formed as a long sheet-like member, and is wound into a roll with a release sheet 203 attached to an adhesive layer 202. Thus, a tape roll 210 shown in FIG. 2 is constructed. In the first embodiment, the tape roll 210 has the tape 200 wound in a roll shape such that the release sheet 203 is located on the inner circumferential side.

Note that the release sheet 203 protects the adhesive layer 202 of the tape 200. In the first embodiment, the tape 200 is attached to the back surface 101 of the workpiece 100 and the annular frame 103 having a larger inner diameter than the workpiece 100 by peeling off the release sheet 203 sequentially from the end by the tape application device 1. At the same time, it is cut between the inner edge and the outer edge of the annular frame 103 and attached to the workpiece 100 and the annular frame 103.

The tape application device 1 pulls out the tape 200 from the tape roll 210, applies it to the back surface 101 of the workpiece 100 and the annular frame 103, and cuts the tape 200 between the inner edge and the outer edge of the annular frame 103. It is a device. As shown in FIG. 1, the tape applicator 1 includes an apparatus main body 2, a chuck table 10, a support roller 20, a plurality of passing rollers 30, an applicator unit 40, a release sheet winding unit 50, It includes a tape cutting table 60, a cutting unit (not shown), and a tape winding unit 90.

The apparatus main body 2 constitutes the outer shell of the tape application apparatus 1, and includes a chuck table 10, a support roller 20, a plurality of passing rollers 30, an application unit 40, a release sheet winding unit 50, a tape cutting table 60, and a cutting unit. and a tape winding unit 90. In the first embodiment, as shown in FIG. 4, the device main body 2 includes a first side wall 3 (corresponding to a side surface) that extends in the vertical direction, and a first side wall 3 that extends in the vertical direction and is connected to the first side wall 3. A second side wall 4 (shown in FIG. 2) is detachable.

The chuck table 10 has a holding surface 11 on which a workpiece 100 and an annular frame 103 are placed, and holds the workpiece 100 and annular frame 103 on the holding surface 11. Further, the chuck table 10 is moved along the holding surface 11 in a direction toward the first side wall 3 and a direction away from the first side wall 3 by a moving mechanism (not shown).

The support roller 20 is formed in a cylindrical shape, through which the tape roll 210 is removably inserted, and is rotatably provided around its axis. The support roller 20 is passed along the axis into the central hole of the tape roll 210, and the tape roll 210 is mounted thereon. In the first embodiment, the axis of the support roller 20 is arranged parallel to the first side wall 3 and perpendicular to the second side wall 4.

The tape 200 pulled out from the tape roll 210 supported by the support roller 20 passes through the plurality of passing rollers 30 and guides the tape 200 from the support roller 20 onto the holding surface 11 of the chuck table 10. . In Embodiment 1, a pair of passing rollers 30 (hereinafter referred to as 31) among the plurality of passing rollers 30 sandwich the tape 200 between them, and at least one of them is rotated about the axis by a motor, and the tape 200 is rotated around the axis by a motor. 200 is sent out from the support roller 20 toward the chuck table 10. The axes of the plurality of passing rollers 30 are arranged parallel to the first side wall 3. Further, the plurality of passing rollers 30 and 31 guide the tape 200 pulled out from the tape roll 210 between the tape cutting table 60 and the first side wall 3. In the first embodiment, the axes of the passing rollers 30 and 31 are arranged parallel to the first side wall 3 and perpendicular to the second side wall 4.

The sticking unit 40 sticks the tape 200 supplied on the holding surface 11 of the chuck table 10 to the workpiece 100 held on the holding surface 11 of the chuck table 10 and the annular frame 103. The sticking unit 40 is arranged above the holding surface 11 of the chuck table 10. The sticking unit 40 includes a peel plate 41 arranged above the chuck table 10 and a pressure roller 43 arranged next to the tip 42 of the peel plate 41. The peel plate 41 has a wedge-shaped tip 42, and is arranged so as to gradually approach the holding surface 11 of the chuck table 10 as it goes toward the tip 42.

The peel plate 41 folds back the tape 200 on the tip 42 and peels the release sheet 203 from the tape 200. The pressing roller 43 is rotatably provided around its axis and is disposed close to the tip 42 of the peel plate 41. The axis of the pressing roller 43 is parallel to the first side wall 3. The pressing roller 43 presses the tape 200 from which the release sheet 203 has been peeled off by the peel plate 41 against the annular frame 103 and the workpiece 100 , and presses the tape 200 against the annular frame 103 and the workpiece 100 held on the chuck table 10 . Paste it on.

The release sheet winding unit 50 winds up the release sheet 203 peeled from the tape 200 by the peel plate 41 of the adhesion unit 40. The release sheet winding unit 50 is formed into a cylindrical shape whose axis is parallel to the first side wall 3, and is rotated around the axis by a drive device such as a motor (not shown), so that the release sheet winding unit 50 rolls the tape 200 onto the outer peripheral surface. The peeled release sheet 203 is rolled up.

The cutting unit attaches the tape 200 to the workpiece 100 and the annular frame 103 and then cuts the tape 200 attached to the annular frame 103 between the inner edge and the outer edge of the annular frame 103 to cut the workpiece 100. And unnecessary portions are removed from the tape 200 attached to the annular frame 103. The tape winding unit 90 winds up the unnecessary portion of the tape 200 cut by the cutting unit. The tape winding unit 90 is formed into a cylindrical shape whose axis is parallel to the first side wall 3, and is rotated around the axis by a drive device such as a motor (not shown), thereby eliminating the need for the tape 200 on the outer peripheral surface. Roll up the part.

The tape cutting stand 60 is a plate-shaped member used to cut the tape 200 stretched over the passing roller 30 when removing the tape roll 210 with little remaining tape 200 from the support roller 20. In the first embodiment, the tape cutting table 60 is disposed between the support roller 20 and the pair of passing rollers 31, and is used to cut the tape 200 between the supporting roller 20 and the pair of passing rollers 31. In the first embodiment, as shown in FIG. 4, the support roller 20 and the tape cutting stand 60 are located near the corner 5 of the apparatus main body 2 that is continuous with the first side wall 3 and the second side wall 4, that is, the first It is arranged near both the side wall 3 and the second side wall 4. In the present invention, being disposed near both the first side wall 3 and the second side wall 4 means that when the first side wall 3 and the second side wall 4 are removed, the operator can move the support roller 20 And the tape cutting table 60 is arranged in a position where it can be seen visually and the support roller 20 and the tape cutting table 60 can be operated.

The tape cutting table 60 is placed on a support member 61 at a retracted position shown in FIG. It is arranged so as to be able to move back and forth to a cutting position where the tape 200 is pushed out to the vicinity of the side wall 3 of the tape cutting table 60 and the tape 200 is made to follow the surface 62 of the tape cutting table 60. The tape cutting table 60 cuts the support member 61 in a direction intersecting the moving direction of the tape 200 passing through the passing roller 30 (in the first embodiment, a direction perpendicular to the planar view) between the retracted position and the cut position. Advance and retreat. The tape cutting table 60 is closer to the first side wall 3 at the cutting position than at the retracted position. Further, in the first embodiment, the tape cutting table 60 is capable of moving back and forth between a retracted position and a cutting position in a direction perpendicular to the axes of the support roller 20 and passing rollers 30 and 31.

The tape cutting table 60 is formed into a flat plate shape, and is inclined gradually downward as it approaches the first side wall 3. The tape cutting table 60 has a tip end close to the first side wall 3 having an arcuate cross section, and pushes out the tape 200 near the first side wall 3 at the tip end at the cutting position. Further, the tape cutting table 60 has a groove 63 formed on the surface 62. The groove 63 is formed in a concave shape from the surface 62 of the tape cutting table 60, and extends linearly in a direction inclined with respect to the first side wall 3, as shown in FIG. 4 in plan view.

Further, the tape applicator 1 includes a control unit 70 that controls each of the above-described components constituting the tape applicator 1, and a notification unit 80 that notifies the operator by at least one of sound and light. The control unit 70 causes the tape applicator 1 to perform an operation of attaching the tape 200 to the workpiece 100. The control unit 70 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output interface device. It is a computer that has the following functions and is capable of executing computer programs.

The arithmetic processing device of the control unit 70 executes a computer program stored in the ROM on the RAM to generate control signals for controlling the tape application device 1 . The arithmetic processing device of the control unit 70 outputs the generated control signal to each component of the tape application device 1 via the input/output interface device. In addition, the control unit 70 is connected to a display means (not shown) such as a liquid crystal display device that displays the status of the pasting operation, images, etc., and an input means used by the operator to register processing content information. There is. The input means includes at least one of a touch panel provided on the display means, a keyboard, and the like.

In addition, the control unit 70 counts the number of workpieces 100 to which the tape 200 is attached after the tape roll 210 of the support roller 20 is replaced, and the number of workpieces 100 to which the tape 200 is attached is set in advance. When the predetermined number is reached, the pasting operation is stopped and the notification unit 80 is activated to notify the operator. Note that the predetermined number is such that the number of tapes 200 on the tape roll 210 is small.

The tape applicator 1 having the above-described configuration positions the tape cutting table 60 at the retracted position shown in FIG. The tape 200 pulled out from the supported tape roll 210 is guided onto the holding surface 11 of the chuck table 10 by the passing roller 30. The tape application device 1 uses the application unit 40 to apply the tape 200 to the end of the annular frame 103 on the side away from the first side wall 3, and then moves the chuck table 10 along the holding surface 11 using the moving mechanism. The tape 200 is attached to the workpiece 100 and the annular frame 103 by moving it in a direction away from the first side wall 3 .

The tape applicator 1 cuts unnecessary parts of the tape 200 using a cutting unit, winds up the release sheet 203 peeled off from the tape 200 in a release sheet winding unit 50, and winds the tape 200 with the unnecessary parts cut off. It is wound up on the take-up unit 90. In the sticking unit 40, when the number of workpieces 100 to which the tape 200 is stuck after the tape roll 210 of the support roller 20 is replaced reaches a predetermined number, the control unit 70 stops the sticking operation. The notification unit 80 is operated to notify the operator.

Then, the operator replaces the tape roll 210 supported by the support roller 20 with a new one. Next, in this specification, the replacement work of the tape roll 210 will be explained based on the drawings. FIG. 5 schematically shows a state in which the tape applying device shown in FIG. 1 has stopped the pasting operation, the first side wall and the second side wall have been removed, and the tape cutting table has been positioned at the cutting position. FIG. FIG. 6 is a plan view schematically showing main parts of the tape sticking device shown in FIG. 5. FIG. FIG. 7 is a plan view schematically showing a state in which the tape roll is removed from the support roller of the tape applicator shown in FIG. 6. FIG. 8 is a plan view schematically showing a state in which the support roller of the tape sticking device shown in FIG. 7 supports a new tape roll. In the following explanation, when distinguishing between the tape 200 and the tape roll 210 before and after replacement, the tape 200 before replacement is indicated by reference numeral 200-1, the tape 200 after replacement is indicated by reference numeral 200-2, and the tape 200 before and after replacement is indicated by reference numeral 200-2. The previous tape roll 210 is designated by 210-1, and the replaced tape roll 210 is designated by 210-2. Further, in FIG. 5, the tape winding unit 90 is omitted.

First, the operator removes the first side wall 3 and the second side wall 4 from the apparatus main body 2, positions the tape cutting table 60 at the cutting position as shown in FIGS. The tape 200-1 is pushed out at the tip end to the vicinity of the position where the first side wall 3 was attached, and the tape 200-1 is made to follow the surface 62 of the tape cutting table 60. Thereafter, the operator cuts the tape 200-1 by moving the blade of the cutter 300, which is a tool for cutting the tape 200-1, along the groove 63 and cutting into the tape 200-1. As shown in FIG. 7, the operator temporarily fixes the upper part of the cut tape 200-1 on the inclined surface of the tape cutting table 60 with an adhesive tape or the like, and then removes the tape. The tape 200-1 supported on the lower side of the inclined surface of the cutting table 60 is removed from the tape cutting table 60. Then, the tape roll 210-1 is removed from the support roller 20. Note that when removing the tape roll 210-1 from the support roller 20, the tape roll 210-1 is moved along the axis of the support roller 20 in the direction of the arrow in FIG. 6, approaching the second side wall 4.

The operator attaches a new tape roll 210-2 to the support roller 20, as shown in FIG. When attaching the tape roll 210-2 to the support roller 20, the tape roll 210-2 is approached to the support roller 20 along the axis of the support roller 20 from the side where the second side wall 4 was attached, as shown in FIG. Move it in the direction of the arrow. The operator pulls out the end of the tape 200-2 from the tape roll 210-2, passes it through the passing roller 30, and then pastes the ends of the tapes 200-1 and 200-2 together on the tape cutting table 60. do. The operator positions the tape cutting table 60 at the retracted position, attaches the first side wall 3 and the second side wall 4 to the apparatus main body 2, and completes the replacement work of the tape rolls 210-1 and 210-2.

The tape applicator 1 according to the first embodiment described above connects the support roller 20 and the tape cutting table 60 to the corner 5 of the apparatus main body 2 where the removable first side wall 3 and the second side wall 4 are connected. Since the axis of the support roller 20 is arranged in parallel with the first side wall 3, the tape rolls 210-1 and 210 can be removed by removing the first side wall 3 and the second side wall 4. -2 can be easily replaced. In addition, the tape applying device 1 is provided with a tape cutting table 60 that can move forward and backward in a direction intersecting the moving direction of the tape 200 in a plan view, and the first side wall 3 is attached at the cutting position rather than at the retracted position. Since the tape cutting table 60 moves closer to the operator's position, the tape cutting table 60 can accurately cut the tape 200-1, and since the tape cutting table 60 advances to a position closer to the operator than the retracted position, the tape 200-1 can be easily cut. In addition to this, there is also an effect that the ends of the tapes 200-1 and 200-2 can be easily attached to each other. As a result, the tape adhering device 1 has the effect of suppressing the difficulty in replacing the tape rolls 210-1 and 210-2.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention. For example, as shown in FIG. 9, the tape applicator 1 of the present invention positions the tip of the tape cutting table 60 at the cutting position on the outside of the apparatus main body than the position where the first side wall 3 was attached. Also good. In short, in the present invention, the cutting position may be such that the tip of the tape cutting table 60 closer to the first side wall 3 than the retracted position is located outside the main body of the apparatus. Note that FIG. 9 shows a state in which the tape applying device according to the modification of the first embodiment has stopped the pasting operation, the first side wall and the second side wall have been removed, and the tape cutting table has been positioned at the cutting position. It is a side sectional view shown typically. Further, in FIG. 9, the same parts as in the first embodiment are given the same reference numerals.

1 Tape pasting device 3 First side wall (side surface)
20 Support roller 30, 31 Passing roller 60 Tape cutting stand 62 Surface 100 Workpiece 200, 200-1, 200-2 Tape 201 Base layer 202 Adhesive layer 204 Single side 210, 210-1, 210-2 Tape roll

Claims (2)

A tape sticking device that pulls out a tape provided with an adhesive layer on one side of a base layer from a tape roll wound into a roll and sticks the tape to a workpiece,
a support roller through which the tape roll is removably inserted;
a passing roller through which the tape pulled out from the tape roll supported by the support roller passes;
a plate-shaped tape cutting table used to cut the tape wrapped around the passing roller when removing the tape roll from the support roller;
comprising the support roller, the passing roller, and a device main body that accommodates the tape cutting table,
The support roller and the passing roller are arranged parallel to a first side wall that is detachable from the main body of the tape applicator, and
The support roller and the tape cutting table are arranged near a corner of the apparatus main body where the first side wall and a second side wall perpendicular to the first side wall are connected,
The tape cutting table is
A retracted position where the tape is retracted to the back side of the tape applicator than the tape passing through the passing roller, and the tape is pushed out to the vicinity of the first side wall of the tape applicator and the tape is copied onto the surface of the tape cutting table. a tape that is arranged so as to be movable back and forth in a cutting position, and is closer to the first side wall at the cutting position than at the retracted position, and causes the tape to be closer to the first side wall at the cutting position than at the retracted position; Pasting device. 2. The tape cutting table, at the cutting position, pushes out a position on the downstream side in the tape passing direction of the passing roller closest to the first side wall among the plurality of passing rollers for the tape. Tape pasting device.

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