JP2018091850A - X線測定のための円錐コリメータ - Google Patents
X線測定のための円錐コリメータ Download PDFInfo
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Abstract
【解決手段】X線装置は、サンプル(6)を支持するサンプルステージ(4)と、X線源(2)と、エネルギ分散X線検出器(8)とを含む。円錐X線コリメータ(10)が、サンプルとX線源との間に又はサンプルとエネルギ分散X線検出器との間に設けられ、円錐X線コリメータは、中心軸の周りに同心状に配置された複数の切頭円錐を含み、切頭円錐は、サンプル上に中心測定スポットを定める共通の頂点を有する。
【選択図】図1
Description
サンプルを支持するサンプルステージと、
X線源と、
エネルギ分散X線検出器と
サンプルとX線源との間に又はサンプルとエネルギ分散X線検出器との間に設けられる円錐X線コリメータとを含み、円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、切頭円錐は、サンプル上に中心測定スポットを定める共通の頂点を有する、X線蛍光装置が提供される。
X線源からサンプルの上にX線を方向付けるステップと、
エネルギ分散X線検出器を用いて、サンプルからのX線を検出するステップとを含み、
円錐X線コリメータが、サンプルとX線源との間に又はサンプルとエネルギ分散X線検出器との間に設けられ、円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、切頭円錐は、サンプル上に中心測定スポットを定める共通の頂点を有する、X線蛍光測定を行う方法が提供される。
更なるエッチングプロセスを実行して、屈折性金属をエッチングし且つ、屈折性金属の小さな粒子をエッチングして除去する、ステップとを含む。
4 サンプルステージ(sample stage)
6 サンプル(sample)
8 エネルギ分散X線検出器(energy dispersive X-ray detector)
10 円錐コリメータ(conical collimator)
12 中央端(central end)
14 外側端(outer end)
16 ベーン(vanes)
18 切頭円錐(truncated cones)
20 焦点(focal spot)
22 フランジ(flange)
Claims (14)
- サンプルを支持するサンプルステージと、
X線源と、
エネルギ分散X線検出器とを含み、
前記サンプルと前記X線源との間に又は前記サンプルと前記エネルギ分散X線検出器との間に設けられる円錐コリメータによって特徴付けられ、該円錐コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、該切頭円錐は、前記X線源から中心測定スポット上にX線をコリメートするために、前記サンプル上に前記中心測定スポットを定める共通の頂点を有する、
X線蛍光装置。 - 前記円錐コリメータは、屈折性金属で作られる、請求項1に記載のX線蛍光装置。
- 前記円錐コリメータは、単一ユニットとして一体的に形成される、請求項1又は2に記載のX線蛍光装置。
- 前記円錐コリメータは、1mm以下の横方向寸法のサンプルステージにあるスポットを定める、請求項1乃至3のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、0.1mSr〜10mSrの立体角を限定する、請求項1乃至4のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、前記サンプルステージと前記エネルギ分散X線検出器との間に配置される、請求項1乃至5のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、前記サンプルステージと前記X線源との間に配置される、請求項1乃至6のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、複数の径方向支持体によって支持される少なくとも4つの切頭円錐を含む、請求項1乃至7のうちの何れか1項に記載のX線蛍光装置。
- 各切頭円錐は、40μm〜200μmの厚さを有するシートで形成される、請求項8に記載のX線蛍光装置。
- 最も近接する地点での隣接する切頭円錐の間の間隔は、50μm〜250μmの範囲内にある、請求項8又は9に記載のX線蛍光装置。
- X線蛍光測定を行う方法であって、
X線源からサンプルの上にX線を方向付けるステップと、
エネルギ分散X線検出器を用いて、前記サンプルからのX線を検出するステップとを含み、
円錐X線コリメータが、前記サンプルと前記X線源との間に又は前記サンプルと前記エネルギ分散X線検出器との間に設けられ、前記円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、該切頭円錐は、前記サンプル上に中心測定スポットを定める共通の頂点を有する、
方法。 - 前記円錐X線コリメータは、屈折性金属から作られる、請求項11に記載の方法。
- 前記円錐X線コリメータは、単一ユニットとして一体的に形成される、請求項11又は12に記載の方法。
- X線蛍光装置のための円錐コリメータの製造方法であって、
直接金属レーザ焼結プロセスを用いて屈折性金属の円錐コリメータを形成するステップであって、該円錐コリメータは、中心軸の周りに同心状に配置された複数の切頭円錐を含み、該切頭円錐は、X線をコリメートするために、前記サンプル上に中心測定スポットを定める共通の頂点を有する、ステップと、
更なるエッチングプロセスを実行して、前記屈折性金属をエッチングし且つ、前記屈折性金属の小さな粒子をエッチングして除去する、ステップとを含む、
製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US15/366,632 | 2016-12-01 | ||
US15/366,632 US10281414B2 (en) | 2016-12-01 | 2016-12-01 | Conical collimator for X-ray measurements |
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JP2018091850A true JP2018091850A (ja) | 2018-06-14 |
JP6767961B2 JP6767961B2 (ja) | 2020-10-14 |
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EP (2) | EP3330701B1 (ja) |
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CN (1) | CN108132267B (ja) |
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FR3043247B1 (fr) * | 2015-10-30 | 2020-06-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Collimateur pour la spectrometrie de diffraction x, dispositif associe et son utilisation |
US10281414B2 (en) * | 2016-12-01 | 2019-05-07 | Malvern Panalytical B.V. | Conical collimator for X-ray measurements |
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EP3330701B1 (en) | 2019-09-04 |
US10281414B2 (en) | 2019-05-07 |
EP3330701A3 (en) | 2018-08-22 |
US20190204246A1 (en) | 2019-07-04 |
CN108132267B (zh) | 2023-01-13 |
US20180156745A1 (en) | 2018-06-07 |
JP6767961B2 (ja) | 2020-10-14 |
EP3480587A1 (en) | 2019-05-08 |
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