JP6767961B2 - X線測定のための円錐コリメータ - Google Patents
X線測定のための円錐コリメータ Download PDFInfo
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- 238000005259 measurement Methods 0.000 title claims description 16
- 238000000034 method Methods 0.000 claims description 17
- 238000004876 x-ray fluorescence Methods 0.000 claims description 16
- 239000003870 refractory metal Substances 0.000 claims description 12
- 239000006185 dispersion Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 8
- 238000000149 argon plasma sintering Methods 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000009681 x-ray fluorescence measurement Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 238000013459 approach Methods 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000011960 computer-aided design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- G—PHYSICS
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- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
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- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
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- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/60—Treatment of workpieces or articles after build-up
- B22F10/62—Treatment of workpieces or articles after build-up by chemical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
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- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
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- G01N2223/076—X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
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- G01N2223/50—Detectors
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Description
サンプルを支持するサンプルステージと、
X線源と、
エネルギ分散X線検出器と
サンプルとX線源との間に又はサンプルとエネルギ分散X線検出器との間に設けられる円錐X線コリメータとを含み、円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、切頭円錐は、サンプル上に中心測定スポットを定める共通の頂点を有する、X線蛍光装置が提供される。
X線源からサンプルの上にX線を方向付けるステップと、
エネルギ分散X線検出器を用いて、サンプルからのX線を検出するステップとを含み、
円錐X線コリメータが、サンプルとX線源との間に又はサンプルとエネルギ分散X線検出器との間に設けられ、円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、切頭円錐は、サンプル上に中心測定スポットを定める共通の頂点を有する、X線蛍光測定を行う方法が提供される。
更なるエッチングプロセスを実行して、耐火金属をエッチングし且つ、耐火金属の小さな粒子をエッチングして除去する、ステップとを含む。
4 サンプルステージ(sample stage)
6 サンプル(sample)
8 エネルギ分散X線検出器(energy dispersive X-ray detector)
10 円錐コリメータ(conical collimator)
12 中央端(central end)
14 外側端(outer end)
16 ベーン(vanes)
18 切頭円錐(truncated cones)
20 焦点(focal spot)
22 フランジ(flange)
Claims (13)
- サンプルを支持するサンプルステージと、
X線源と、
エネルギ分散X線検出器とを含み、
前記サンプルと前記X線源との間に又は前記サンプルと前記エネルギ分散X線検出器との間に設けられる円錐コリメータによって特徴付けられ、該円錐コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、該切頭円錐は、前記X線源から中心測定スポット上にX線をコリメートするために、前記サンプル上に前記中心測定スポットを定める共通の頂点を有し、前記円錐コリメータは、0.1mSr〜10mSrの立体角を限定する、
X線蛍光装置。 - 前記円錐コリメータは、耐火金属で作られる、請求項1に記載のX線蛍光装置。
- 前記円錐コリメータは、単一ユニットとして一体的に形成される、請求項1又は2に記載のX線蛍光装置。
- 前記円錐コリメータは、1mm以下の横方向寸法のサンプルステージにあるスポットを定める、請求項1乃至3のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、前記サンプルステージと前記エネルギ分散X線検出器との間に配置される、請求項1乃至4のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、前記サンプルステージと前記X線源との間に配置される、請求項1乃至5のうちの何れか1項に記載のX線蛍光装置。
- 前記円錐コリメータは、複数の径方向支持体によって支持される少なくとも4つの切頭円錐を含む、請求項1乃至6のうちの何れか1項に記載のX線蛍光装置。
- 各切頭円錐は、40μm〜200μmの厚さを有するシートで形成される、請求項7に記載のX線蛍光装置。
- 最も近接する地点での隣接する切頭円錐の間の間隔は、50μm〜250μmの範囲内にある、請求項7又は8に記載のX線蛍光装置。
- X線蛍光測定を行う方法であって、
X線源からサンプルの上にX線を方向付けるステップと、
エネルギ分散X線検出器を用いて、前記サンプルからのX線を検出するステップとを含み、
円錐X線コリメータが、前記サンプルと前記X線源との間に又は前記サンプルと前記エネルギ分散X線検出器との間に設けられ、前記円錐X線コリメータは、中心軸の周りに同心状に配置される複数の切頭円錐を含み、該切頭円錐は、前記サンプル上に中心測定スポットを定める共通の頂点を有し、前記円錐X線コリメータは、0.1mSr〜10mSrの立体角を限定する、
方法。 - 前記円錐X線コリメータは、耐火金属から作られる、請求項10に記載の方法。
- 前記円錐X線コリメータは、単一ユニットとして一体的に形成される、請求項10又は11に記載の方法。
- X線蛍光装置のための円錐コリメータの製造方法であって、
直接金属レーザ焼結プロセスを用いて耐火金属の円錐コリメータを形成するステップであって、該円錐コリメータは、中心軸の周りに同心状に配置された複数の切頭円錐を含み、該切頭円錐は、X線をコリメートするために、サンプル上に中心測定スポットを定める共通の頂点を有する、ステップと、
更なるエッチングプロセスを実行して、前記耐火金属をエッチングし且つ、前記耐火金属の小さな粒子をエッチングして除去する、ステップとを含む、
製造方法。
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Application Number | Priority Date | Filing Date | Title |
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US15/366,632 | 2016-12-01 | ||
US15/366,632 US10281414B2 (en) | 2016-12-01 | 2016-12-01 | Conical collimator for X-ray measurements |
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JP2018091850A JP2018091850A (ja) | 2018-06-14 |
JP6767961B2 true JP6767961B2 (ja) | 2020-10-14 |
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US (2) | US10281414B2 (ja) |
EP (2) | EP3480587B1 (ja) |
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CN (1) | CN108132267B (ja) |
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US10393683B2 (en) | 2019-08-27 |
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EP3330701A2 (en) | 2018-06-06 |
US20180156745A1 (en) | 2018-06-07 |
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US20190204246A1 (en) | 2019-07-04 |
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