JP2018087712A - Quality determination method of tubular member and quality determination system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a determination method of a tubular member capable of guaranteeing a quality by determining a clogging condition inside the tube of a tubular member.SOLUTION: A quality determination method of a tubular member includes the steps of: vacuuming a second case 31b by a pump 4; releasing an atmosphere fed to a first case 31a by an atmosphere supply valve 61a; and determining that there is no clogging in the tubular member, when a pressure in the second case 31b which is measured by a pressure measurement device after it is determined that the vacuuming of the second case 31b is completed, is equal to or more than a first threshold value.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a quality determination method for a tubular member and a quality determination system for determining quality based on the degree of blockage inside a pipe.

  Conventionally, a technique for determining the airtightness of a member using a helium leak detector is known. For example, Patent Document 1 discloses a technique for performing a hermetic test of a semiconductor pressure sensor using a helium leak detector.

JP-A-6-337232

With the conventional airtight test method as disclosed in Patent Document 1, it is possible to provide a member whose quality is guaranteed with respect to airtightness.
On the other hand, for example, when the member to be inspected is a tubular member, not only airtightness but also that the inside of the tube of the tubular member is not blocked is important for assuring the quality of the tubular member.
However, since the technology disclosed in Patent Document 1 does not have a function of testing the state of clogging inside the tube of the tubular member, the quality is not necessarily guaranteed when the test object is a tubular member. There was a problem that it could not be said.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a method for determining a tubular member that can guarantee the quality by determining the degree of blockage of the tubular member inside the tube. And

  The tubular member determination method according to the present invention is supplied to the first case and the second case, the tubular member which is housed in both ends, the pump connected to the second case, and the first case. A quality determination method for determining the quality of a tubular member by an air supply valve that controls the atmosphere, a pressure measurement device that measures the pressure in the second case, and a determination control device, wherein the pump includes a second The step of evacuating the case, the step of opening the atmosphere supplied to the first case by the atmosphere supply valve, and the determination control device determining that the evacuation of the second case has been completed. And a step of determining that the tubular member is not blocked if the pressure in the second case measured by the pressure measuring device is equal to or higher than the first threshold after the elapse of time.

  According to this invention, it is possible to provide a method for determining a tubular member that can guarantee the quality by determining the degree of blockage inside the tube of the tubular member.

It is a figure explaining an example of the structure of the quality determination system of the tubular member in Embodiment 1 of this invention. It is a figure which shows an example of the structure by which a pressure guiding tube is used in a differential pressure sensor system. FIG. 3A is a diagram illustrating an example of a configuration of the pressure guiding tube illustrated in FIG. 2, FIG. 3A is a diagram illustrating an entire configuration of the pressure guiding tube, and FIG. 3B is a cross-sectional view of a portion indicated by A in FIG. It is a flowchart explaining the operation | movement of the determination of the blockage condition of a pressure guiding tube among the determinations in the quality determination system of Embodiment 1. FIG. 6 is a flowchart for explaining an operation of a helium leak test in the determination in the quality determination system according to the first embodiment.

Embodiment 1 FIG.
FIG. 1 is a diagram for explaining an example of a configuration of a quality determination system for tubular members according to Embodiment 1 of the present invention.
In the tubular member quality judgment system as shown in FIG. 1, the tubular member inside the tube is blocked or airtightness is judged.
In the first embodiment, the tubular member is, for example, a pressure guiding tube 51 that is a thin tube for pressure transmission that is used to measure a differential pressure inside a pressure vessel (tank) in a differential pressure sensor system.

Here, FIG. 2 is a diagram illustrating an example of a configuration in which the pressure guiding tube 51 is used in the differential pressure sensor system.
As shown in FIG. 2, the pressure guiding pipe 51 is welded to the tanks 100 a and 100 b that hold a high-pressure fluid and connected to the pipe.
The pressure guiding pipe 51 performs pressure transmission for measuring the differential pressure with a predetermined sensor inside the tanks 100a and 100b. Note that the sensor for measuring the differential pressure is provided in one of the tanks 100a and 100b, for example.

3 is a diagram illustrating an example of the configuration of the pressure guiding tube 51 illustrated in FIG. 2, FIG. 3A is a diagram illustrating the entire configuration of the pressure guiding tube 51, and FIG. 3B is a cross-sectional view of a portion indicated by A in FIG. 3A. FIG.
As shown in FIGS. 3A and 3B, washers 200a and 200b are passed through the pressure guiding tube 51 at appropriate positions, and the washers 200a and 200b are joined to the pressure guiding tube 51 by laser welding or the like (for example, 3B). The washer 200a, 200b is welded around the entire circumference of the pressure guiding tube 51. The pressure guiding pipe 51 and washers 200a and 200b are metal members.

  In the tubular member quality determination system according to the first embodiment, the pressure guiding tube 51 as shown in FIGS. 2 and 3 is not blocked, or the airtightness between the pressure guiding tube 51 and the washers 200a and 200b, that is, the pressure guiding tube. It is determined that there is no leakage (leak) in the welded portion between 51 and washers 200a and 200b. If the pressure guiding tube 51 is blocked, the pressure in the pressure guiding tube 51 cannot be measured, and as a result, the differential pressure between the tanks 100a and 100b cannot be measured correctly. In addition, even when there is a leak in the welded portions of the washers 200a and 200b, the pressure cannot be measured correctly.

  As described above, in the first embodiment, the tubular member is the pressure guiding pipe 51 as shown in FIGS. 2 and 3, and the inside of the pressure guiding pipe 51 is closed, or the pressure guiding pipe 51 and the washers 200 a and 200 b However, this is only an example, and other members may be used as long as they are tubular members.

Returning to the description of FIG.
As shown in FIG. 1, the quality determination system according to the first embodiment includes a determination control device 1, a helium leak detector 2, a jig 3, a pump 4, an air supply valve 61a, a helium supply source 7, an MCF (Mass Flow Controller). ) 71, helium supply valves 62a and 62b, and the display device 8.
The determination control device 1 is connected to the helium leak detector 2, the air supply valve 61a, the pump 4, the helium supply source 7, the MCF 71, and the helium supply valves 62a and 62b via a network.

Further, the determination control device 1 is connected to the display device 8 via a network.
This is merely an example, and the determination control device 1 is directly connected to the helium leak detector 2, the air supply valve 61a, the pump 4, the helium supply source 7, the MCF 71, and the helium supply valves 62a and 62b. It may be. Further, the determination control device 1 may be directly connected to the display device 8, or the determination control device 1 may include the display device 8.

The jig 3 seals the first case 31a and the second case that house both ends of the pressure guiding pipe 51 in the room, and the portion of the pressure guiding pipe 51 that is not housed in the first case 31a and the second case. It consists of a third case 32.
The first case 31a, the second case 31b, and the third case 32 are independent. The first case 31a and the second case 31b may be the tanks 100a and 100b described in FIG.

In the pressure guiding tube 51, at least welded portions of the washers 200a and 200b are accommodated in the first case 31a and the second case 31b, and the first case 31a and the second case 31b and the washers 200a and 200b are sealed, respectively. The
Further, as described above, both ends of the pressure guiding pipe 51 are housed in the first case 31 a and the second case 31 b, and the atmosphere flowing through the pressure guiding pipe 51 is from the end of the pressure guiding pipe 51. The first case 31a and the second case 31b are opened.

The third case 32 seals a portion of the pressure guiding tube 51 that is not housed in the first case 31a and the second case 31b, and performs a helium leak test on a welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Sometimes, helium gas filled in the third case 32 is installed so as not to leak out of the case. Details of the helium leak test will be described later.
In FIG. 1, the third case 32 covers the first case 31a and the second case 31b, and the first case 31a, the second case 31b, and the third case 32 However, the present invention is not limited to this. For example, the third case 32 houses the pressure guiding tube 51 together with the first case 31a and the second case 31b. You may do it. The third case 32 seals the portion of the pressure guiding tube 51 that is not accommodated in the first case 31a and the second case 31b, and the helium gas filled in the third case 32 is the third case. What is necessary is just not to leak to the outside of 32.
In the first embodiment, the first case 31a and the second case 31b are also referred to as a vacuum chamber, and the third case 32 is also referred to as a helium filling chamber.

  The helium filling chamber is filled with helium gas during the helium leak test. The helium leak test will be described later.

The air supply valve 61a opens or closes the air discharged from an exhaust device (not shown) such as a muffler and supplied to the first case 31a based on control from the valve opening / closing control unit 11 of the determination control device 1. The exhaust device and the first case 31a are connected by, for example, piping, and the air supply valve 61a is installed in the piping.
The pump 4 evacuates the second case 31b based on the control from the circuit control unit 14 of the determination control device 1. The pump 4 and the second case 31b are connected by piping, for example. The pump 4 may be provided in the helium leak detector 2.

The helium leak detector 2 is a helium gas detector that leaks into the second case 31b of the gas filled in the helium filling chamber by an analysis tube (not shown) through the junction between the pressure guiding tube 51 and the washers 200a and 200b. Detect the amount of leakage. The helium leak detector 2 and the second case 31b are connected by, for example, piping.
The helium leak detector 2 notifies the leak determination control unit 13 of the determination control apparatus 1 of information on the detected amount of helium gas leak.
The helium leak detector 2 measures the pressure in the second case 31b. The helium leak detector 2 notifies the blockage determination control unit 12 of the determination control device 1 of the measured pressure information.

  The helium leak detector 2 may be a generally known helium leak detector. In the first embodiment, the helium leak test is performed by the internal vacuum spraying method using the helium leak detector 2.

The determination control apparatus 1 controls each part which comprises a quality determination system.
The determination control device 1 includes a valve opening / closing control unit 11, a blockage determination control unit 12, a leak determination control unit 13, a circuit control unit 14, and a display control unit 15. In addition, each part of the determination control apparatus 1 is controlled by the program process using CPU based on software.
The valve opening / closing control unit 11 performs valve opening / closing control. Specifically, for example, the valve opening / closing control unit 11 opens or closes the atmosphere supplied to the first case 31a with respect to the atmosphere supply valve 61a. Further, for example, the valve opening / closing control unit 11 opens or closes the helium gas from the helium supply source 7 to the helium supply valves 62a and 62b.

  The blocking determination control unit 12 determines whether or not the pressure guiding tube 51 is blocked depending on whether or not the pressure of the second case 31b measured by the helium leak detector 2 is equal to or higher than a preset threshold (first threshold). judge.

  The leak determination control unit 13 determines whether the helium gas leak amount in the second case 31b detected by the helium leak detector 2 is equal to or less than a predetermined threshold value (second threshold value). The leak of the welding part with 200a, 200b is detected.

  The circuit control unit 14 controls the operation of the pump 4. The circuit control unit 14 controls the operations of the helium supply source 7 and the MCF 71.

  The display control unit 15 causes the display device 8 to display the blockage determination result of the pressure guiding tube 51 by the blockage determination control unit 12 or the leak detection result by the leak determination control unit 13.

  The display device 8 is a display or the like, and displays a determination result of blockage determination of the pressure guiding tube 51 or a determination result of leak determination by a helium leak test.

The helium supply source 7 supplies helium gas blown into the helium filling chamber based on the control of the circuit control unit 14.
The MCF 71 controls the flow rate of helium gas supplied from the helium supply source 7 based on the control of the circuit control unit 14.

4 and 5 show the determination of the degree of blockage of the pressure guiding tube 51 or the leakage of the welded portion between the pressure guiding tube 51 and the washers 200a and 200b in the quality determination system of the first embodiment, that is, the helium leak test. It is a flowchart for demonstrating operation | movement of.
In the quality determination system, first, it is determined whether or not the pressure guiding tube 51 is blocked, and a helium leak test is performed on the pressure guiding tube 51 determined not to be blocked.
FIG. 4 is a flowchart for explaining the operation of determining the degree of blockage of the pressure guiding pipe 51 in the determination in the quality determination system of the first embodiment, and FIG. 5 is the determination in the quality determination system of the first embodiment. It is a flowchart explaining the operation | movement of a helium leak test.

First, the operation of determining the blocking state of the pressure guiding tube 51 will be described with reference to FIG.
The circuit control unit 14 operates the pump 4 to start evacuation of the second case 31b (step ST401).

The valve opening / closing control unit 11 causes the air supply valve 61a to release the air supplied to the first case 31a (step ST402).
In step ST401, the valve opening / closing control unit 11 may open the atmosphere supplied to the first case 31a with respect to the atmosphere supply valve 61a. In step ST401, the valve opening / closing control unit 11 may open the atmosphere supply valve 61a. On the other hand, the atmosphere supplied to the first case 31a may be closed, and may be opened in step ST402.

In steps ST401 and 402, when the exhaust amount of the pump 4 is large, the degree of vacuum of the second case 31b is lowered. The standard of the degree of vacuum at this time may be about 1000 Pa level, for example, based on roughing at the time of helium leak test of the helium leak detector 2. When the target vacuum level is reached, the process proceeds to step ST403. Specifically, for example, the blockage determination control unit 12 acquires information on the degree of vacuum from the helium leak detector 2 and determines whether or not the reference degree of vacuum has been reached. It is determined that the process has been completed, and the process of step ST403 is executed.
Since the washers 200a and 200b and the vacuum chamber are sealed, the atmosphere in the vacuum chamber does not communicate with the helium filling chamber.

  When the blockage determination control unit 12 determines that the second case 31b has reached the target degree of vacuum and the evacuation is completed, the blockage determination control unit 12 waits until a predetermined time elapses after the evacuation is completed ("NO" in step ST403). If). The fixed time is set in advance by the user, for example, 10 seconds.

If it is determined that a certain time has elapsed after completion of evacuation (in the case of “YES” in step ST403), the blockage determination control unit 12 acquires the pressure of the second case 31b from the helium leak detector 2, and the pressure It is determined whether or not is equal to or greater than a preset first threshold (step ST404). The first threshold value determined in step ST404 is appropriately set by the user in advance, for example, 200 Pa.
Since the helium leak detector 2 has a pressure measurement function, in the first embodiment, the pressure measurement function of the helium leak detector 2 is used to measure the pressure of the second case 31b. The pressure measurement method is not limited to this. For example, a pressure measurement device other than the helium leak detector 2 measures the pressure of the second case 31b, and the blockage determination control unit 12 acquires the pressure measured by the pressure measurement device, and is equal to or greater than a first threshold value. May be determined.

  In step ST404, when the pressure is not equal to or higher than a preset first threshold value (in the case of “NO” in step ST404), the blockage determination control unit 12 determines that the tube of the pressure guiding tube 51 is blocked, and The determination result is output to the display control unit 15 (step ST407).

When the pipe of the pressure guiding pipe 51 is clogged, the atmosphere supplied to the first case 31a by the atmosphere supply valve 61a opening the flow path of the atmosphere discharged from the exhaust device passes through the pipe of the pressure guiding pipe 51. The pressure in the second case 31b drops after a lapse of a certain time. The blockage determination control unit 12 determines a pressure drop in the second case 31b after a lapse of a certain time, and detects the blockage of the pressure guiding tube 51.
As described above, the blockage determination control unit 12 detects the blockage of the pressure guiding tube 51 depending on whether or not the pressure of the second case 31b is equal to or higher than a preset first threshold value. Rather than determining otherwise, the degree of blockage can be determined quantitatively.
The blockage determination control unit 12 outputs the determination result to the display control unit 15.

The display control unit 15 displays information indicating that the pressure guiding tube 51 is blocked on the display device 8 (step ST408), and the process ends.
The information that the display control unit 15 displays on the display device 8 that the pressure guiding tube 51 is blocked is, for example, a message such as “NG” or “blocked”. Note that this is merely an example, and it is only necessary that the user confirms the display device 8 to determine that the pressure guiding tube 51 is blocked.

  Since the pressure guiding tube 51 determined to be clogged in the tube is a rejected product, that is, the pressure guiding tube 51 whose quality is not guaranteed, it does not proceed to the subsequent helium leak test.

On the other hand, in step ST404, when the pressure is equal to or higher than a preset first threshold value (in the case of “YES” in step ST404), the blockage determination control unit 12 determines that there is no blockage in the pipe of the pressure guiding tube 51. The determination result is output to the display control unit 15 (step ST405). When the pipe of the pressure guiding pipe 51 is not blocked, the atmosphere supplied to the first case 31a passes through the pipe of the pressure guiding pipe 51 when the atmosphere supply valve 61a opens the flow path of the air discharged from the exhaust device. Therefore, the pressure in the second case 31b is kept at a constant level even after a lapse of a certain time.
The blockage determination control unit 12 outputs the determination result to the display control unit 15.

The display controller 15 causes the display device 8 to display information indicating that the pressure guiding tube 51 is not blocked (step ST406), and the process ends.
The information that the display control unit 15 displays on the display device 8 that the pressure guiding tube 51 is not blocked is, for example, a message such as “OK” or “no block”. Note that this is only an example, and it is only necessary that the user confirms the display device 8 and determines that the pressure guiding tube 51 is not blocked.

  Since the pressure guiding tube 51 determined not to be blocked in the tube is an acceptable product, that is, the pressure guiding tube 51 whose quality is guaranteed, the process proceeds to the subsequent helium leak test.

As a method for inspecting the blockage of the inside of a general tubular member, for example, there is GO-STOP confirmation using a gauge rod. In the GO-STOP confirmation, the blockage is inspected depending on whether or not the gauge rod passes through the pipe.
However, in the GO-STOP confirmation, it is difficult to make a gauge rod particularly for a narrow tube having an inner diameter of φ1.0 mm or less. Also, it is difficult to make a gauge bar when the pipe is bent. In addition, in the GO-STOP confirmation using the gauge rod, the blockage can be confirmed only by whether the gauge is OK or NG, that is, whether or not the gauge rod passes, and the blockage can be quantitatively determined. .
Further, as another method for inspecting the blockage of the inside of a general tubular member, for example, an appearance inspection can be cited. However, even in the appearance inspection, inspection with a thin tube or a bent tube is difficult. In addition, it is difficult to quantitatively determine the degree of blockage.
As a result, the work time is increased in order to guarantee the quality related to the blocking of the tubular member.

  On the other hand, according to the quality determination method of the blocking state of the pressure guiding tube 51 in the determination system of the first embodiment, as described above, the pressure drop after a certain time is quantitatively determined through the atmosphere of the pressure guiding tube 51. Then, since the degree of blockage of the pressure guiding tube 51 is determined, it is not necessary to create a tool for inspection such as a gauge rod. Moreover, even if the pipe is bent, it is possible to confirm the degree of blockage. In addition, the degree of blockage can be determined quantitatively.

Next, the operation of the leak test will be described with reference to FIG.
As a result of the determination of the degree of blockage described with reference to FIG. 4, when it is determined that there is no block in the pressure guiding tube 51, the valve opening / closing control unit 11 moves to the first case 31 a with respect to the air supply valve 61 a. The supplied atmosphere is closed (step ST501).
Specifically, the blockage determination control unit 12 outputs a determination result indicating that the blockage determination result has passed to the valve opening / closing control unit 11, and the valve opening / closing control unit 11 receives the determination result, Then, the air flow path that is discharged from the exhaust device and supplied to the first case 31a is closed with respect to the air supply valve 61a.

In step ST501, when the valve opening / closing control unit 11 closes the atmosphere supplied to the first case 31a with respect to the atmosphere supply valve 61a, the circuit control unit 14 operates the pump 4 and the second case 31b. Is evacuated (step ST502).
In step ST502, evacuation is further performed to the level of evacuation in the helium leak test of the helium leak detector 2.
Since it has been confirmed that the pressure guiding tube 51 is not blocked, the first case 31a is also evacuated by evacuating the second case 31b.

  When the second case 31b is in a vacuum state, the leak determination control unit 13 controls the helium supply valves 62b, 62c and the MCF 71 to blow helium gas from the helium supply source 7 into the helium filling chamber (step ST503). As described above, the first case 31a is also evacuated by evacuating the second case 31b. Therefore, when the second case 31b is in a vacuum state, the first case 31a is also evacuated. It becomes a state. The vacuum state here refers to a vacuum state sufficient to perform a leak test. The leak determination control unit 13 may determine whether or not the second case 31b is in a vacuum state by, for example, acquiring information on the degree of vacuum from the helium leak detector 2 and determining whether or not the target degree of vacuum has been reached. .

The helium leak detector 2 is a helium gas detector that leaks into the second case 31b of the gas filled in the helium filling chamber by an analysis tube (not shown) through the junction between the pressure guiding tube 51 and the washers 200a and 200b. The amount of leakage is detected (step ST504). Since the vacuum chamber and the washers 200a and 200b are sealed, helium gas leaking into the vacuum chamber is detected by the helium leak detector 2 via the pressure guiding tube 51 without flowing out into the helium filling chamber. That is, the helium gas leaked from the washer 200a to the first case 31a flows into the second case 31b via the pressure guiding tube 51 without flowing into the helium filling chamber and is detected by the helium leak detector 2. become.
The helium leak detector 2 notifies the leak determination control unit 13 of the detected leak amount of helium gas.

  Leak determination control unit 13 determines whether or not the amount of helium gas leakage is equal to or greater than a preset second threshold value (step ST505). The second threshold value determined in step ST505 is set as appropriate by the user in advance, for example.

In step ST505, when the leak amount of helium gas is equal to or larger than a preset second threshold value (in the case of “YES” in step ST505), the leak determination control unit 13 determines whether the pressure guiding tube 51 and the washers 200a and 200b are connected. It is determined that there is a leak in the welded portion (step ST508).
The leak determination control unit 13 outputs a determination result indicating that a leak has occurred to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that a leak has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b (step ST509), and the process ends.
The information that the display control unit 15 displays on the display device 8 that leakage has occurred is, for example, a message such as “NG” or “leak”. Note that this is only an example, and if the user checks the display device 8 and knows that it has been determined that a leak has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Good.

In step ST505, when the amount of helium gas leakage is not greater than or equal to the preset second threshold value (in the case of “NO” in step ST505), the leak determination control unit 13 determines whether the pressure guiding tube 51 and the washers 200a and 200b It is determined that there is no leakage in the welded portion (step ST506).
The leak determination control unit 13 outputs a determination result indicating that no leak has occurred to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that no leakage has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b (step ST507), and the process ends.
The information that the display control unit 15 displays on the display device 8 that there is no leakage is, for example, a message such as “OK” or “no leakage”. Note that this is only an example, and the user can confirm that the display device 8 is checked and it is determined that there is no leakage in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Good.

The operation of the helium leak test of FIG. 5 as described above is the same as the operation of a conventionally known helium leak test using a helium leak detector.
However, in the first embodiment, it is not necessary to open the analysis tube of the helium leak detector 2 to the atmosphere before entering the helium leak test. This is because the degree of blockage in the pressure guiding tube 51 is determined before the helium leak test, and evacuation is performed at this time (step ST401 in FIG. 4). As a result, the work time required for the helium leak test can be shortened.

  As described above, in the quality determination system according to the first embodiment, the determination of the blocking state of the pressure guiding tube 51 and the determination of the leakage of the welded portion between the pressure guiding tube 51 and the washers 200a and 200b can be performed together. it can. Since the above two inspections can be carried out, work efficiency is improved and equipment is simplified. In particular, by utilizing the pressure measurement function of the helium leak detector 2 and determining the blockage of the pressure guiding tube 51 based on the pressure measured by the helium leak detector 2, the work efficiency is improved and the equipment is simplified. Leads to.

  As described above, according to the first embodiment, the tubular member (pressure guiding tube 51) whose both ends are housed in the first case 31a and the second case 31b, and the pump connected to the second case, respectively. 4, the atmospheric supply valve 61 a that controls the atmosphere supplied to the first case 31 a, the pressure measuring device that measures the pressure in the second case 31 b, and the determination control device 1, the quality of the tubular member A method for determining quality, in which the pump 4 evacuates the second case 31b, the air supply valve 61a releases the air supplied to the first case 31a, and determination control. If the apparatus 1 determines that the evacuation of the second case 31b has been completed and the pressure in the second case 31b measured by the pressure measuring device is equal to or greater than the first threshold after the set time has elapsed, the tube A step of determining that the member is not clogged, so that a tool for inspection is not required, and even if the inside of the tubular member is thin or the tubular member is bent, the tube of the tubular member It is possible to provide a tubular member that can confirm the state of internal blockage and has a guaranteed quality. Further, it is possible to quantitatively determine the degree of blockage inside the tube of the tubular member.

According to the first embodiment, in the tubular member quality determination method, the pressure measuring device is the helium leak detector 2, and the portion of the tubular member that is not accommodated in the first case 31a and the second case 31b. A step of closing the atmosphere supplied to the first case 31a when the determination control device 1 determines that the tubular member is not blocked. The pump 4 performs the evacuation of the second case 31b, and the determination control device 1 performs the helium leak test of the helium gas filled in the third case 32 on the helium leak detector 2. And determining the leakage of the welded portion of the tubular member, and determining the degree of blockage of the tubular member, It can be carried out together with determination of the leakage contact portion. Since the two inspections can be carried out together, the work efficiency is improved and the equipment is simplified.
Further, since it is not necessary to open the analysis tube of the helium leak detector 2 to the atmosphere before entering the helium leak test after determining the blockage of the tubular member, the working time required for the helium leak test is shortened.

  In the present invention, any constituent element of the embodiment can be modified or any constituent element of the embodiment can be omitted within the scope of the invention.

DESCRIPTION OF SYMBOLS 1 Determination control apparatus 2 Helium leak detector 3 Jig 4 Pump 7 Helium supply source 8 Display apparatus 11 Valve opening / closing control part 12 Blocking determination control part 13 Leak determination control part 14 Circuit control part 15 Display control part 31a 1st case 31b 1st case 2 case 32 3rd case 51 Pressure guiding tube 61a Air supply valve 62a, 62b Helium supply valve 71 MCF
100a, 100b Tank 200 Washer

Claims (3)

A tubular member whose both ends are housed in the first case and the second case, a pump connected to the second case, an air supply valve for controlling the air supplied to the first case, A quality determination method for determining the quality of the tubular member by a pressure measurement device that measures the pressure in the second case and a determination control device,
The pump evacuating the second case;
The atmosphere supply valve releasing the atmosphere supplied to the first case;
If the pressure in the second case measured by the pressure measuring device is equal to or higher than the first threshold after a lapse of a set time after the determination control device determines that the evacuation of the second case has been completed. A method for determining the quality of a tubular member, comprising: determining that the tubular member is not blocked. The pressure measuring device is a helium leak detector,
A third case for sealing a portion of the tubular member that is not housed in the first case and the second case;
When the determination control device determines that the tubular member is not blocked,
The atmosphere supply valve closing the atmosphere supplied to the first case;
The pump evacuating the second case;
The determination control device further includes a step of causing the helium leak detector to perform a helium leak test of the helium gas filled in the third case, and determining leakage of a welded portion of the tubular member. The method for judging the quality of a tubular member according to claim 1. A tubular member whose both ends are housed in the first case and the second case, a pump connected to the second case, an air supply valve for controlling the air supplied to the first case, A tubular member quality judgment system comprising a pressure measurement device for measuring the pressure in the second case, and a judgment control device,
The pump evacuates the second case;
The air supply valve opens the air supplied to the first case;
The pressure in the second case measured by the pressure measuring device after the set time has elapsed after the determination control device determines that the evacuation of the second case has been completed. For example, it is determined that the tubular member is not blocked.

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