201237385 六、發明說明： 【發明所屬之技術領域】 本發明係關於壓差計測方法及裝置，尤其關於基於主容 器與工作容器之内部之壓力差（壓差）而判斷工作容器内之 • 洩漏之壓差計測方法及裝置。 - 【先前技術】 作為檢查自配管或容器等之洩漏之方法，向來是將容器 等之檢查對象之内部加壓或減壓，以單壓式感測器測定檢 Ο 查對象之内部壓力之變化，基於測定結果而判斷浪漏。 然而，如在對容器等剛經過铸造或熔接等熱處理後之狀 態下，在測疋中谷器荨本身有溫度變化、或在檢查中環境 溫度有所變化等情況下，檢查對象内部之氣體溫度亦有所 變化之情形時’容器等之内部壓力會受到溫度變化之影響 而易於變動，故難以進行精確的洩漏判斷。專利文獻i中 提出一種可進行精確的洩漏檢查之方法及裝置，其係對容 器等之檢查對象測定大氣壓狀態下之内部壓力之變化，計 〇 异出/jm·度變化之影響，而自加壓或減壓時之内部壓力之變 化排除所計算出之溫度變化之影響。 - 另一方面’如專利文獻2或3所示，在作為基準之容器 - (以下稱作「主容器」）及成為檢查對象之配管或容器（以下 稱作「工作容器」）之間’配置歷差感測器，基於兩者之 Μ差之變化而判斷工作容器之茂漏。 相較於單壓式感測器’由於是採用加壓主容器與工作容 器雙方並計測該等之壓差之方式，故可將計測範圍縮小， 160768.doc 201237385 與此同時精度亦變高。因此，利用壓差感測器之洩漏檢查 方法及裝置受到间度期待。又，專利文獻2或3中，為排除 溫度變化之影響，提出測定大氣壓狀態之壓差變化而除去 測试加壓狀態下之溫度變化之影響。 近年來，業界追求朗檢查作t效率之提高或檢查精度之提 高。然而’例如在對成為㈣檢查對象之卫作容器進行禱造 或炫接等減理後隨即進行&漏檢查之情料，為實施精度 佳之沒漏檢查，必須將^容器在室溫下放置至少數小時， 此點成為料多工作容器進行有效率㈣漏檢查之障礙。 又，專利文獻2或3之、力漏檢查方法中，因將大㈣狀態 下所敎之溫度變化假定為進行測試加以狀態下之溫度 變化，完全未考慮氣體狀態差異或時間上的偏差之影響， 故難以實現正確的洩漏檢查。 [專利文獻丨]日本專利第3483253號公報 [專利文獻2]曰本專利第341 1374號公報 [專利文獻3]日本專利第3133275號公報 【發明内容】 [發明所欲解決之問題] 計測方法及裝置，其 之作業效率、及提供 本發明所欲解決之課題係提供壓差 可解決如上述之問題、提高茂漏檢查 提高鴻漏檢查精度。 [解決問題之技術手段] 两解決上述課題 仪術万案 法，其包含：溫度補償值檢測] 明係一種壓差計測方 其係對主容器與工作 I60768.doc 201237385 容器之各者’以大氣壓密封氣體，而測定該主容器與該工 作谷器之間所產生之壓差值之變化並求得溫度補償值；及 壓差變化測定步驟，其對該主容器與該工作容器賦予大氣 壓以外之測試壓力，而測定該主容器與該工作容器之間所 產生之壓差值之變化；且’以該溫度補償值修正該壓差變 化測定步驟所測定之壓差值之變化，並基於其結果判斷該 工作容器之）¾漏；其特徵在於：包含測定時序設定機構， 其測定僅與該工作容器之内部壓力相關之壓力變化，而決 ◎ 定該溫度補償值之壓差值之測定時序；且針對該主容器及 該工作容器之間之壓差，基於該溫度補償值檢測步驟中所 測定之大氣壓之壓差值，及該壓差變化測定步驟中所測定 之測試壓力之壓差值，求得氣體之密度變化，並藉由該密 度變化修正該溫度補償值或在該壓差變化測定步驟所測定 之壓差值之任一方。 技術方案2之發明係如技術方案i之壓差計測方法，其特 Q 徵在於該溫度補償值檢測步驟係於該壓差變化測定步驟之 前後進行，並基於經檢測之前後溫度補償值，修正該壓差 變化測定步驟所測定之壓差值之變化。 技術方案3之發明係如技術方案丨或2之壓差計測方法， 其特徵在於即使在該工作容器之容積相異之情形下該主 容器亦可使用容積共通之容器。 技術方案4之發明係一種壓差計測裝置，其包含·主容 器，工作容器；壓差感測器，其測定該主容器與該工作容 器之間之壓差；大氣壓調整機構，其以大氣壓之氣體密封 160768.doc 201237385 該主容器與該工作容器；測試壓力賦予機構，其對該主容 器與該工作容器賦予大氣壓以外之測試壓力；及控制機 構，其使該大氣壓調整機構動作，並基於該氣壓感測器之 測定值而求得溫度補償值，且使該測試壓力賦予機構動 作，並以該溫度補償值修正該壓差感測器之測定值，基於 其結果而判斷該工作容器之洩漏；其特徵在於：包含工作 容器内壓力測定機構，其測定該工作容器之内部壓力；且 該控制機構設定為，基於該工作容器内壓力測定機構之測 定值，決定測定該溫度補償值時之該壓差感測器之測定時 序，且基於自該工作容器内壓力測定機構檢測之由該大氣 壓調整機構之動作所得之大氣壓之氣壓值，及由該測試壓 力賦予機構之動作所得之測試壓力之差壓值，求得氣體之 密度變化，並藉由該密度變化修正該溫度補償值或使該測 試壓力賦予機構動作並測定之壓差值之任一方。 技術方案5之發明係如技術方案4之壓差計測裝置，其特 徵為包含主容器内壓力測定機構，其測定該主容器之内部 壓力；且該控制機構設定為，求得上述氣體之密度變化 時，取代該工作容器内壓力測定機構所測定之壓力值而 使用由該主容器内壓力測定機構測定之上述大氣壓之壓差 值及上述測試壓力之壓差值。 技術方案6之發明係如技術方案4或5之壓差計測裝置， 其特微在於，以使藉由該測試壓力賦予機構對該主容器及 該工作容器賦予測試壓力之各配管路徑成為具有等價之有 效剖面積之限流孔之方式，設定配管經路上之開口剖面積 160768.doc 201237385 或長度。 [發明之效果] 根據技術方案1之發明，因包含測定時序設定機構，其 測定僅與工作容器之内部壓力相關之壓力變化，而決定該 溫度補償值之壓差值之測定時序，故即使在工作容器器受 到與主容器相異之溫度影響之情況下，藉由儘量減少與主 容器之溫度差’可將檢查之測定時序最佳化，而可提高洩 漏檢查之作業效率。例如，在工作容器内之溫度變化穩定 ° 為下降狀態之情況下，因可隨時進行洩漏檢查，故不必等 待數小時直到工作容器之溫度完全穩定、且壓差亦成為一 定變化之後才進行檢查。 又，針對主容器或工作容器之任一方之内部壓力，由於 是基於溫度補償值檢測步驟中所測定之大氣壓之壓差值、 及壓差變化測定步驟中所測定之測試壓力之壓差值，求得 氣體之密度變化，並藉由該密度變化修正溫度補償值或壓 〇 差變化測定步驟所測定之壓差值之任一方，故可修正大氣 壓狀態與測試壓力狀態之間之氣體密度變化，進行更高精 度之洩漏檢查。 根據技術方案2之發明，溫度補償值檢測步驟係於壓差 變化測定步驟之前後進行，且基於經檢測之前後溫度補償 值，修正該壓差變化測定步驟所測定之壓差值之變化，故 即使因溫度補償值檢測步驟與壓差變化測定步驟之間之時 間偏差使得溫度變化狀態產生變化之情形時，由於是對壓 差變化測定步驟之前後之溫度變化進行觀察，故可實施更 160768.doc 201237385 '度之/皿度補償。且’即使溫度在短時間内產生變化之 隋形時’亦可實施洩漏檢查，而亦可提高檢查之作業效 率。 根據技術方案3之發明’即使在工作容器之容積相異之 情形下’主容器亦使用容積共通之容器，故不必根據每種 工作容器之種類而更換主容器’可抑制作業效率之降低。 且’亦無必要準備多個主容器’可抑制檢查成本之增加。 根據技術方案4之發明’由於包含測定工作容器之内部 麗力之m内壓力敎機構，且控制機構基於該工作 容器内壓力敎機構之敎值，衫敎溫度補償值時之 該壓差感測器之測定時序，故與上述技術方案(之發明同 樣地可將檢查之測定時序最佳化，而可提高沒漏檢查之作 業效率。 且，由於設定為基於自工作容器内壓力測定機構檢測 之、由大氣壓調整機構之動作所得之大氣壓之壓差值，及 由測試壓力賦予機構之動作所得之測試壓力之差壓值，求 得氣體之密度變化，並藉由該密度變化修正溫度補償值或 使測試壓力賦予機構動作並測定之壓差之任一方，故可與 上述技術方案1之發明同樣地修正大氣壓狀態與測試壓力 狀態之間之氣體密度變化，進行更高精度之洩漏檢查。 根據技術方案5之發明，由包含測定主容器之内部壓力 之主容器内壓力測定機構，且控制機構設定為，在求得氣 體之密度變化時，取代工作容器内壓力測定機構所測定之 壓力值，而使用由該主容器内壓力測定機構測定之上述大 160768.doc 201237385 氣壓之壓差值及上述測試壓力之壓差值，故主容器可較工 作容器更為正確地敎内部之壓力值，因而可更為正確地 計算出氣體之密度變化。 根據技術方案6之發明，由於以使藉由測試壓力賦予機 構對主容器及工作容器賦予壓力之各配管路徑成為具有等 價之有效剖面積之限流孔之方式，設定配管路徑上之開口 剖面積或長度，故可以適當之流量實施對主容器或工作容 器之氣體之填充或排放，可縮短填充或排放之所需時間， 而可提高洩漏檢查之作業效率。 【實施方式】 以下’對本發明之壓差計測方法之裝置進行詳細說明。 圖1係顯示使用於本發明之壓差計測方法之裝置一例。 壓差計測裝置包含主容器（基準容器）；工作容器；及感測 器，其測定該主容器與該工作容器之間之壓差。作為以大 氣廢，氣體密封該主容器與該工作容器之大氣壓調整機 Q 構，設有主容器側閥門（MV)與工作容器側閥門（WV)、及 減塵關門。進@具備測試壓力賦予機構，其對該主容器 與該工作容器賦予大氣歷以外之測試壓力。作為測試壓力 賦予機構’作為一例，包含壓力源、調整器(調節器卜供 給用閥門、及主容器側閥門（MV)與工作容器側閥門（WV) 以及連接該等之配管等而構成β χ，工作容器不僅只有容 器，亦具有配管等可收容氣體之體積，且具備可密封之構 造’亦即進行浅漏檢查所必須者。又，本發明中之測試麼 力係對大氣壓以外之壓力進行加壓或減壓者，以下以加壓 160768.doc 201237385 為中心進行說明。 本發月之壓差計測裝置為直接測定工作溶：g之内部麼 力，具備工作容器内壓力測定機構（WP)。又，於必要時， 為測定主容器之内部壓力，亦可具備主容器内；1力測定機 構（MP)。進而，藉由未圖示之控制機構控制壓力源（加壓 泵）、調整器、及各種閥門，向該控制機構輸入來自壓差 感測器、工作容器内壓力測定機構（WP)或主容器内壓力測 定機構（MP)之檢測信號，而實施必要之處理。 (溫度補償值之計算方法） 如專利文獻2或專利文獻3中亦有揭示，以大氣壓狀態密 封主容器與工作容器，觀測兩者之壓差變化，並計測溫度 影響作為特定時間之壓差值變化（壓差值之時間變化量）。 將此作為溫度補償值，自測試壓力狀態下之壓差變化減去 相當於s亥溫度補償值之變化量，而消除溫度變化之影響。 使用圖1之壓差計測裝置使主容器與工作容器成為大氣 壓狀態之程序為，首先’使大氣壓調整機構動作，打開主 容器側閥門（MV)與工作容器側閥門（wv)，進而開放減壓 用閥門’使主容器内及工作容器内之内部壓力成為大氣壓 狀態。又’其後關閉減壓用閥門。儘量縮小主容器内及工 作容器内之内部壓力之差，藉由搭載於工作容器側之壓力 感測器’開始大氣壓狀態下之壓力計測。又，其後亦關閉 主容器側閥門（MV)及工作容器側閥門（WV)，以大氣壓個 別密封主容器及工作容器之作業結束。其後，雖會有伴隨 閥門關閉作業之過度反應，然而其後根據主容器本身或工 160768.doc -10- 201237385 作容器本身之溫度變化，各自之壓力產生變化，兩者之壓 差值亦隨之產生變化。藉由以壓差感測器測定該壓差值之 變化，計算出特定時間（單位時間）之壓差值變化量作為溫 度補償值。 ' (Μ差值之測定時序之設定） 本發明之Μ差計測方法及裝置之特徵為，作為測定時序 設定機構，直接計測工作容器之内部壓力，並基於其變化 而設定主容器與工作容器之壓差值之測定時序。作為計測 〇 工作容器之内部壓力之工作容器内壓力測定機構（wp)，可 使用單壓式感測器。 先前’作為洩漏檢查對象之工作容器，在受到鱗造或溶 接等之熱處理後’容器本身之溫度隨即產生劇烈變化，故 難以藉Μ差式進行尚精度測定’因此，須將檢查對象在室 溫下放置至少數小時，等待溫度穩定。相對於此，本發明 之壓差計測方法則如圖2所示，由工作容器内壓力測定機 構觀測工作容器内之内部壓力變化，確認壓力變化達到特 〇 ， 定之狀況（即使進行壓差測定亦無阻礙之狀況），而觸發壓 差值之測定時序。 如圖2所示之圖表所示，通常工作容器内之内部壓力為 一旦上昇後即轉變為下降趨勢。該内壓之下降趨勢係為容 器之溫度變化及内部氣體之溫度變化為一致之期間，即使 在該等之狀態下測定壓差值變化，使用本發明所採用之溫 度補償值，亦可以相當高精度檢測洩漏所致之壓力變化。 如此，藉由設定工作容器内之内部壓力成為下降趨勢之 160768.doc 201237385 時序作為壓差值之測定時序，可將先前之以「現狀之壓差 式計測開始」所示、即待機數小時直至工作容器之溫度變 化穩定為止才進行測定，改為以「開發之壓差式計測開 始」所示、自數分鐘後即可進行測定。如此，可縮短在高 溫環境下可開始對工作容器進行差壓式线漏檢查之等待時 間，而能夠提高茂漏檢查之作業效率。 (有關氣體之密度變化之修正） 本發明之壓差計測方法及裝置之特徵為，在大氣壓狀態 與測試壓力狀態下測定主容器與工作容器之間之壓差值， 但兩者之狀態之間存在氣體密度差異。藉由亦考慮此種氣 體之密度變化，可更加正確地除去溫度變化之影響。 在大氣壓之氣體密度與測試壓力狀態之氣體密度之間， 氣體密度會產生與經填充測試壓力後所增加之空氣量對應 的程度之變化。因此，藉由計算出對應於密度變化之修正 係數，可修正先刖之溫度補償值或測試壓力狀態下之壓差 值，而檢測正確之洩漏量。 以下顯示相對於測試壓力（例如設為45 kPa(G))之密度修 正係數之計算方法。 使用如下之參數，定義理想氣體之狀態方程式ρν=ρΚΘ : • Ρ :壓力[Pa] • V :容器容積 [m3] • P :空氣密度 [kg/m3] • R :氣體常數[J/(kg.K)] • θ :溫度 [Κ] I60768.doc -12· 201237385 根據上述狀態方程式，壓力以P=pR0/v表示。由於是自 測試壓力狀態（45 kPa(G))下之壓差值（溫度變化與洩漏引 起之壓差值）減去大氣壓調整狀態（例如〇 kpa(G))之壓差 [kPa](溫度變化引起之壓差值）來表示將溫度修正納入考量 之泡漏引起之壓差[kPa]，故將洩漏引起之壓差以下之算式 (1)表不。此處，假想為主容器與工作容器處於不同之溫度 影響下之情形。 [數1] 〇 ρχΚΘ V ~~V~~......(1) 根據上述算式（1)，由各Ρ2及Pi定義測試壓力（45 kPa(G)) 與大氣壓之氣體密度。該等數值為已知，且例如為如以下 之數值。 •標準2(TC下之大氣壓之密度（pi)=12()5kg/m3 標準2〇 C下之測試壓力（45 kPa(G))之密度（()2)=1740 〇 kg/m3 又大氣壓s十算為101.325 kPa(Abs)(容器内壓力〇 kPa(G))。 考量大氣壓測定時間帶與測試壓力（45 kpa(G))時之氣密 試驗為相同溫度變化，且以倍率計算修正係數之情形時， 以pVpi求得大氣壓狀態之溫度補償值之修正係數為 1.444。 、、w據此’相對於測試壓力⑷kPa(G))氣密試驗之壓差值之 /皿度修正量[kPa]為域厘狀態之差壓（溫度補償值）[叫乘 160768.doc -13- 201237385 以 1.444。 如此，藉由測定大氣壓與測試壓力，可容易地計算出氣 體密度之修正係數。本發明中’作為壓力測定機構，可使 用測定工作容器之内部壓力之工作容器内壓力測定機構 (WP)。又，亦可另設置測定主容器之内部壓力之主容器内 Μ力測定機構（MP) ’取代工作容器内壓力測定機構（Wp)所 測定之壓力值’而藉由該主容器内壓力測定機構（Μρ)測定 主谷器内之大氣壓及測試壓力。由於可相較於工作容器主 容器更加正確地測定内部之壓力值，故可藉由使用主容器 内壓力測定機構，更加正確地計算出氣體之密度變化。 (測試壓力狀態之前後之溢度評估） 本發明之差壓計測方法及裝置，不僅在測試壓力狀態之 前階段進行溫度修正之溫度補償值之檢測，亦可在後階段 進行。藉此’即使測試壓力狀態之溫度變化自檢測測試壓 力狀態前之溫度補償值時之溫度變化有所變化之情形時， 因於測試壓力狀態之前後判斷溫度變化狀態，故可更加正 確地判斷測試壓力狀態令之溫度變化。 圖3係模式化描繪溫度變化引起之壓差值Δρ產生變化之 情形之圖表’於測試壓力狀態（加壓[測試壓力])之前後， 將主容器及工作容器設定為大氣壓狀態’藉由計測壓差值 之時間變化而評估溫度影響。表示溫度影響之溫度補償值 為大氣壓狀態下之每特定時間（單位時間）之壓差值之變化 量’故可由在測試壓力狀態之前後所測定之溫度補償值 (圖3之曲線趨勢）而正確推定測試壓力狀態之溫度變化。通 160768.doc 14· 201237385 常可利用前後計測之平均值。假設於大氣壓狀態下評估溫 度影響之時序與於測試壓力狀態下計測壓差之時序之時間 間隔為前後相異之情形時，亦可考慮該時間間隔而進行加 權平均。 圖4係顯示如圖3所示於壓力狀態之前後評估溫度變化之 影響時之主容器與工作容器之壓差之時間變化的圖表。時 間帶Α係於測試壓力狀態之前階段評估溫度影響，主容器 及工作容器内設定為大氣壓狀態。在大氣壓狀態下之計測 〇 開始前，壓差感測器進行零位調整。於溫度上昇之情形 時’上昇趨勢如虛線所示β ^ 接著，時間帶Β顯示測試壓力狀態中之主容器與工作容 器之間之壓差變化，在有洩漏或溫度變化之情形時，出現 具有如虛線所示之斜率的圖表。若將主容器與工作容器進 行對照，因容積、熱傳導率及溫度等些微之不均衡，使得 填充測試壓力後（加壓後）之壓差自零位偏離。例如，加壓 ◎ I之開始壓差值變為10 Pa〜4〇 Pa左右。惟因洩漏計測為計 算隨時間經過而產生之壓差變化，故無自零位偏離之 題。 —時間帶c基本上與時間帶入相同…在直到成為可測 疋之開始時間之期間内，將壓差變化狀態成為穩定為止之 =間作為「整料間」，圖4之圖表中以「整定」表示「整 定時間」結束（測定開始時序）。 (流量特性之改善） 本發明之壓差計測裝置之特徵為，以使藉由測試壓力賦 160768.doc -15- 201237385 予機構對主谷器及工作容器賦予測試壓力之各配管路徑成 為具有等價之有效剖面積之限流孔之方式，設定配管路徑 上之開口剖面積或長度。 藉由使主容器或m有效率地填充或排放氣體可 縮-整定時間。藉此，可縮短大氣塵狀態或測試麼力狀態 下之虔差值之敎特時間，而可提高料檢查之作業: 率到達主谷器等之氣體之移動經路_介有g己I、管件及 電磁閥等，氣體之流人或排放時之氣體流量受到所使用之 配管之口徑或電磁閥之口徑左右。 因此，為在短時間内一併實現對主容器及工作容器之氣 體填充或排放，有必要沿藉由測試壓力賦予機構對主容器 及工作容器賦予測試壓力之各配管路徑，具有相互等價之 有效剖面積。因此，理想上雖為將配管口徑或電磁閥口徑 等全部設為相同，但較佳以至少將該等之配管路徑置換為 一個節流孔之情形之有效剖面積在主容器側與工作容器側 為相同之方式設定。 若以阻流為前提，可由以下算式（2)表示質量流量 G[kg/s]。又’各記號表示如下之内容。 • se ·縮流部之剖面積及有效剖面積。可由縮流係数 表示。 • Α〇 :流路之實際剖面積及電磁閥孔口之剖面積㈦2]。 可使用孔口之内徑d計算出π<12/4。 • Ρ!:上流壓力[Pa]。上流壓力係對容器内加壓時閥入口 附近之壓力。 160768.doc -16- 201237385 • P2 :下流壓力[Pa]。下流壓力係進行填充前之容器内壓 力（大氣壓）。 • Θ!:上流溫度（填充之空氣溫度）[κ] • κ : 空氣之比熱比 • R :氣體常數 [J/kg.K] [數2]201237385 VI. Description of the Invention: [Technical Field] The present invention relates to a differential pressure measuring method and apparatus, and more particularly to determining a leakage in a working container based on a pressure difference (pressure difference) between a main container and a working container. Differential pressure measurement method and device. - [Prior Art] As a method of inspecting the leakage from a pipe or a container, the inside of the inspection object such as a container is always pressurized or decompressed, and the internal pressure of the inspection object is measured by a single-pressure sensor. , based on the measurement results to determine the leakage. However, in the state where the container or the like has just been subjected to heat treatment such as casting or welding, the temperature of the gas inside the inspection object is also changed in the case where the temperature of the barium sputum itself changes, or the ambient temperature changes during the inspection. When there is a change, the internal pressure of the container or the like is subject to temperature changes and is easily changed, so that it is difficult to make an accurate leak judgment. Patent Document i proposes a method and apparatus for performing accurate leak inspection, which is to measure the change of internal pressure in an atmospheric pressure state for an object to be inspected by a container, etc., and to calculate the influence of a change in the difference of /jm·degree, and self-addition The change in internal pressure at pressure or decompression excludes the effect of the calculated temperature change. On the other hand, as shown in Patent Document 2 or 3, the container is used as a reference (hereinafter referred to as "main container") and a pipe or container (hereinafter referred to as "work container") to be inspected. The difference sensor detects the leakage of the working container based on the change in the difference between the two. Compared with the single-pressure type sensor, since the pressure difference between the main container and the working container is measured and the pressure difference is measured, the measurement range can be reduced, and the accuracy is also increased at the same time. Therefore, the leak check method and apparatus using the differential pressure sensor are expected to be interspersed. Further, in Patent Document 2 or 3, in order to eliminate the influence of the temperature change, it is proposed to measure the pressure difference change in the atmospheric pressure state to remove the influence of the temperature change in the test pressurization state. In recent years, the industry has pursued a review to improve the efficiency of t or to improve the accuracy of inspection. However, for example, after the reduction of the container for the (4) inspection object, such as prayer or stunning, the & leak check is performed immediately. For the implementation of the precision inspection, the container must be placed at room temperature. At least a few hours, this becomes an obstacle to the efficient (four) leak inspection of multiple working containers. Further, in the force leak inspection method of Patent Document 2 or 3, since the temperature change in the large (four) state is assumed to be the temperature change in the state in which the test is performed, the influence of the gas state difference or the time deviation is not considered at all. Therefore, it is difficult to achieve a correct leak check. [Patent Document 日本] Japanese Patent No. 3,834, 533, and the like. [Patent Document 2] Japanese Patent No. 3,133, 275 [Patent Document 3] Japanese Patent No. 3133275 (Summary of the Invention) [Method to be Solved by the Invention] Measurement method and The device, its operational efficiency, and the problem to be solved by the present invention provide a pressure difference that can solve the above problems, improve the leak detection, and improve the inspection accuracy. [Technical means to solve the problem] Two methods for solving the above-mentioned problems, including: temperature compensation value detection] A differential pressure meter is used to measure the main container and the main container and work I60768.doc 201237385 Sealing the gas, determining a change in the pressure difference generated between the main container and the working barn, and determining a temperature compensation value; and a pressure difference change measuring step of imparting atmospheric pressure to the main container and the working container Testing the pressure to determine a change in the pressure difference generated between the main container and the working container; and 'correcting the change in the pressure difference measured by the differential pressure change measuring step with the temperature compensation value, and based on the result Determining a leakage of the working container; comprising: a measurement timing setting mechanism that measures a pressure change related only to an internal pressure of the working container, and determines a timing of determining a pressure difference value of the temperature compensation value; And determining, according to the pressure difference between the main container and the working container, a pressure difference value of the atmospheric pressure measured in the temperature compensation value detecting step, and the pressure difference change The pressure difference of the test pressure measured in the measuring step is used to determine the density change of the gas, and the temperature compensation value or the pressure difference value measured in the differential pressure change measuring step is corrected by the density change. The invention of claim 2 is the differential pressure measurement method according to the technical solution i, wherein the temperature compensation value detecting step is performed before the differential pressure change measuring step, and is corrected based on the temperature compensation value before and after the detection. The change in the pressure difference measured by the differential pressure change measuring step. The invention of claim 3 is a differential pressure measuring method according to the technical solution or 2, characterized in that the main container can use a container having a common volume even in a case where the volumes of the working containers are different. The invention of claim 4 is a differential pressure measuring device comprising: a main container, a working container; a differential pressure sensor that measures a pressure difference between the main container and the working container; and an atmospheric pressure adjusting mechanism that is at atmospheric pressure a gas seal 160768.doc 201237385 the main container and the working container; a test pressure imparting mechanism that imparts a test pressure other than atmospheric pressure to the main container and the working container; and a control mechanism that causes the atmospheric pressure adjusting mechanism to operate, and based on Calculating a temperature compensation value of the measured value of the air pressure sensor, and operating the test pressure applying mechanism, and correcting the measured value of the differential pressure sensor with the temperature compensation value, and determining the leakage of the working container based on the result The method includes: a pressure measuring mechanism in the working container, wherein the internal pressure of the working container is measured; and the control mechanism is configured to determine the temperature compensation value based on the measured value of the pressure measuring mechanism in the working container The measurement timing of the differential pressure sensor, and based on the atmospheric pressure detected from the pressure measuring mechanism in the working container Adjusting the pressure value of the atmospheric pressure obtained by the action of the adjusting mechanism and the differential pressure value of the test pressure obtained by the action of the test pressure applying mechanism, determining the density change of the gas, and correcting the temperature compensation value by the density change or The test pressure imparts to either the action of the mechanism and the measured differential pressure. The invention of claim 5 is the differential pressure measuring device according to claim 4, characterized in that the pressure measuring mechanism in the main container is configured to measure the internal pressure of the main container; and the control mechanism is set to determine the density change of the gas. At this time, the pressure difference value of the atmospheric pressure measured by the pressure measuring means in the main container and the pressure difference value of the test pressure are used instead of the pressure value measured by the pressure measuring means in the working container. The invention of claim 6 is the differential pressure measuring device according to claim 4 or 5, which is characterized in that each of the piping paths for which the test pressure is applied to the main container and the working container by the test pressure applying means becomes equal For the effective cross-sectional area of the orifice, set the cross-sectional area of the pipe through the opening of the pipe 160768.doc 201237385 or length. [Effects of the Invention] According to the invention of claim 1, the measurement timing setting means includes a pressure change relating only to the internal pressure of the working container, and determines a measurement timing of the pressure difference value of the temperature compensation value. When the working container is affected by the temperature different from the main container, the measurement timing of the inspection can be optimized by minimizing the temperature difference from the main container, and the efficiency of the leak inspection can be improved. For example, in the case where the temperature change in the working container is stable and the temperature is lowered, since the leak check can be performed at any time, it is not necessary to wait for several hours until the temperature of the working container is completely stabilized and the pressure difference becomes a certain change. Further, the internal pressure of either the main container or the working container is based on the pressure difference value of the atmospheric pressure measured in the temperature compensation value detecting step and the pressure difference value of the test pressure measured in the differential pressure change measuring step. The density of the gas is changed, and the temperature difference value is corrected by the density change or the pressure difference value measured by the pressure difference difference measuring step, so that the gas density change between the atmospheric pressure state and the test pressure state can be corrected. Perform a more accurate leak check. According to the invention of claim 2, the temperature compensation value detecting step is performed before the differential pressure change measuring step, and based on the temperature compensation value before and after the detection, the change in the pressure difference value determined by the differential pressure change measuring step is corrected, Even if the temperature change state changes due to the time deviation between the temperature compensation value detecting step and the differential pressure change measuring step, since the temperature change after the pressure difference change measuring step is observed, more 160768 can be implemented. Doc 201237385 'degrees / degree compensation. Moreover, the leak inspection can be carried out even if the temperature changes in a short period of time, and the efficiency of the inspection can be improved. According to the invention of claim 3, even if the volume of the working container is different, the main container uses a container having a common volume, so that it is not necessary to replace the main container according to the type of each working container, and the reduction in work efficiency can be suppressed. And 'it is not necessary to prepare a plurality of main containers' to suppress an increase in inspection cost. According to the invention of claim 4, the differential pressure sensing mechanism is included in the inner working force of the working container, and the control mechanism is based on the value of the pressure 敎 mechanism in the working container, and the differential pressure sensing is performed when the temperature is compensated Since the measurement timing of the device is optimized, the measurement timing of the inspection can be optimized in the same manner as the above-described technical solution, and the work efficiency of the leak-free inspection can be improved. Further, since the measurement is performed based on the pressure measuring mechanism from the working container. And the differential pressure value of the atmospheric pressure obtained by the action of the atmospheric pressure adjusting mechanism and the differential pressure value of the test pressure obtained by the action of the test pressure imparting mechanism, the density change of the gas is obtained, and the temperature compensation value is corrected by the density change or Since the test pressure is applied to any one of the pressure difference measured and operated, the gas density change between the atmospheric pressure state and the test pressure state can be corrected in the same manner as the invention of the first aspect, and a more accurate leak check can be performed. The invention of claim 5 consists of a pressure measuring mechanism in the main container including the internal pressure of the main container, and the control machine The configuration is such that, when the density of the gas is changed, instead of the pressure value measured by the pressure measuring means in the working container, the pressure difference between the above-mentioned large 160768.doc 201237385 pressure measured by the pressure measuring means in the main container is used. The pressure difference of the above test pressure, so that the main container can more accurately smash the internal pressure value than the working container, so that the density change of the gas can be calculated more correctly. According to the invention of claim 6, The pipe connecting the pressure applying means pressure to the main container and the working container becomes a restricting hole having an equivalent effective sectional area, and the opening sectional area or length on the piping path is set, so that the flow can be performed at an appropriate flow rate. The filling or discharging of the gas in the container or the working container can shorten the time required for filling or discharging, and can improve the efficiency of the leak inspection. [Embodiment] Hereinafter, the device of the differential pressure measuring method of the present invention will be described in detail. 1 shows an example of a device used in the differential pressure measuring method of the present invention. The differential pressure measuring device includes a main container a reference container); a working container; and a sensor for measuring a pressure difference between the main container and the working container; and as an atmospheric pressure adjusting machine Q that seals the main container and the working container with a gas waste, The main container side valve (MV) and the working container side valve (WV), and the dust reduction and closing door are provided with a test pressure imparting mechanism that gives the main container and the working container a test pressure other than the atmospheric pressure. As an example, the mechanism includes a pressure source, a regulator (a regulator supply valve, a main container side valve (MV), a working container side valve (WV), and a piping connected thereto to constitute β χ, and the working container is not only Only the container has a volume for accommodating gas such as a pipe, and has a sealable structure, that is, a shallow leak test. Further, the test force in the present invention pressurizes or reduces the pressure other than atmospheric pressure. For the presser, the following is based on the pressure 160768.doc 201237385. The differential pressure measuring device of this month is a direct measurement of the internal working force of the working solution: g, and has a pressure measuring mechanism (WP) in the working container. Further, if necessary, in order to measure the internal pressure of the main container, the inside of the main container may be provided; and the force measuring mechanism (MP) may be provided. Further, the pressure source (pressure pump), the regulator, and various valves are controlled by a control mechanism (not shown), and the pressure difference sensor, the pressure measuring mechanism (WP) or the main container in the working container is input to the control mechanism. The detection signal of the internal pressure measuring mechanism (MP) is performed, and necessary processing is performed. (Method for Calculating Temperature Compensation Value) As disclosed in Patent Document 2 or Patent Document 3, the main container and the working container are sealed in an atmospheric pressure state, and the pressure difference between the two is observed, and the temperature influence is measured as the pressure difference at a specific time. Change (the amount of time change in the pressure difference). Taking this as the temperature compensation value, the change in the differential pressure from the test pressure state is subtracted from the change amount of the shai temperature compensation value, and the influence of the temperature change is eliminated. The procedure for making the main container and the working container into an atmospheric pressure state using the differential pressure measuring device of Fig. 1 is to first "operate the atmospheric pressure adjusting mechanism, open the main container side valve (MV) and the working container side valve (wv), and then open the decompression. The valve 'uses the internal pressure in the main container and the working container to an atmospheric pressure state. Further, the valve for decompression is turned off. The difference between the internal pressures in the main container and the working container is minimized, and the pressure sensor mounted on the side of the working container starts the pressure measurement under the atmospheric pressure state. Further, the main container side valve (MV) and the working container side valve (WV) are also closed, and the operation of sealing the main container and the working container at atmospheric pressure is completed. After that, although there will be excessive reaction accompanying the closing operation of the valve, the pressure of the container itself will change according to the temperature change of the main container itself or the work itself, and the pressure difference between the two will also be changed. There is a change. The change in the differential pressure at a specific time (unit time) is calculated as a temperature compensation value by measuring the change in the differential pressure value by a differential pressure sensor. '(The setting of the measurement timing of the difference value) The method and apparatus for measuring the difference of the present invention are characterized in that the internal pressure of the working container is directly measured as a measurement timing setting means, and the main container and the working container are set based on the change The timing of the measurement of the differential pressure. As the pressure measuring mechanism (wp) in the working container for measuring the internal pressure of the working container, a single-pressure type sensor can be used. In the previous work container, which was the object of leakage inspection, the temperature of the container itself changed sharply after being subjected to heat treatment such as scaling or welding. Therefore, it is difficult to measure the accuracy by the differential method. Therefore, the object to be inspected must be at room temperature. Leave it under for at least a few hours and wait for the temperature to stabilize. On the other hand, in the differential pressure measuring method of the present invention, as shown in FIG. 2, the internal pressure change in the working container is observed by the pressure measuring means in the working container, and it is confirmed that the pressure change is characteristic, and the condition is determined even if the differential pressure is measured. The unobstructed condition), and the timing of the measurement of the differential pressure is triggered. As shown in the graph shown in Figure 2, the internal pressure in the working container usually changes to a downward trend once it rises. The downward trend of the internal pressure is a period in which the temperature change of the container and the temperature change of the internal gas are uniform, and even if the change in the pressure difference is measured in the state, the temperature compensation value used in the present invention can be relatively high. Accuracy detects pressure changes due to leakage. In this way, by setting the 160768.doc 201237385 sequence in which the internal pressure in the working container becomes a downward trend as the measurement timing of the differential pressure value, the previous "measured by the current differential pressure type measurement" can be used for several hours until the standby The measurement is performed only after the temperature change of the working container has stabilized, and the measurement can be performed after a few minutes as indicated by "Development of differential pressure measurement by development". In this way, the waiting time for starting the differential pressure line leak inspection of the working container in a high temperature environment can be shortened, and the operation efficiency of the leak inspection can be improved. (Correction of change in density of gas) The differential pressure measuring method and apparatus of the present invention is characterized in that the pressure difference between the main container and the working container is measured under an atmospheric pressure state and a test pressure state, but between the states of the two There is a difference in gas density. By considering the change in density of such a gas, the effect of temperature change can be more accurately removed. Between the gas density at atmospheric pressure and the gas density at the test pressure state, the gas density produces a change in the degree corresponding to the amount of air added after filling the test pressure. Therefore, by calculating the correction coefficient corresponding to the density change, the temperature compensation value of the first enthalpy or the differential pressure value under the test pressure state can be corrected to detect the correct leakage amount. The calculation method of the density correction coefficient with respect to the test pressure (for example, set to 45 kPa (G)) is shown below. Use the following parameters to define the equation of state for the ideal gas ρν=ρΚΘ : • Ρ : pressure [Pa] • V : container volume [m3] • P : air density [kg/m3] • R : gas constant [J/(kg .K)] • θ : Temperature [Κ] I60768.doc -12· 201237385 According to the above equation of state, the pressure is expressed as P=pR0/v. Because it is the pressure difference under the self-test pressure state (45 kPa (G)) (the difference between the temperature change and the pressure caused by the leak) minus the pressure difference of the atmospheric pressure adjustment state (such as 〇kpa (G)) [kPa] (temperature The pressure difference caused by the change) indicates the pressure difference [kPa] caused by the bubble leakage considering the temperature correction, so the equation (1) below the pressure difference caused by the leakage is expressed. Here, it is assumed that the main container and the working container are under different temperature influences. [Number 1] 〇 ρ χΚΘ V ~~V~~ (1) According to the above formula (1), the gas density of the test pressure (45 kPa (G)) and atmospheric pressure is defined by each of Ρ2 and Pi. These values are known and are, for example, numerical values as below. • Standard 2 (density of atmospheric pressure under TC (pi) = 12 () 5 kg / m3 Standard test pressure (45 kPa (G)) at 2 ° C (() 2) = 1740 〇 kg / m3 and atmospheric pressure s ten is calculated as 101.325 kPa (Abs) (pressure inside the container 〇 kPa (G)). Considering the atmospheric pressure measurement time zone and the test pressure (45 kpa (G)), the airtight test is the same temperature change, and the correction is corrected by the magnification. In the case of the coefficient, the correction coefficient of the temperature compensation value obtained by pVpi at atmospheric pressure is 1.444. , , w According to this 'relative to the test pressure (4) kPa (G)), the pressure difference of the airtight test / the correction amount of the dish [ kPa] is the differential pressure (temperature compensation value) of the domain PCT state [called 160768.doc -13- 201237385 to 1.444. Thus, the correction coefficient of the gas density can be easily calculated by measuring the atmospheric pressure and the test pressure. In the present invention, as the pressure measuring means, a pressure measuring means (WP) in the working container for measuring the internal pressure of the working container can be used. Further, a pressure measuring mechanism (MP) in the main container for measuring the internal pressure of the main container may be additionally provided, instead of the pressure value measured by the pressure measuring mechanism (Wp) in the working container, and the pressure measuring mechanism in the main container is provided. (Μρ) Determine the atmospheric pressure and test pressure in the main bar. Since the internal pressure value can be more accurately measured than the working container main container, the density change of the gas can be more accurately calculated by using the pressure measuring mechanism in the main container. (Evaluation of the overflow before and after the test of the pressure state) The differential pressure measuring method and apparatus of the present invention can perform the temperature compensation value detection of the temperature correction not only before the test pressure state but also at a later stage. Therefore, even if the temperature change of the test pressure state changes from the temperature change value before the test pressure state is detected, since the temperature change state is judged before and after the test pressure state, the test can be judged more correctly. The pressure state causes the temperature to change. Figure 3 is a graphical representation of the situation in which the pressure difference Δρ caused by the temperature change changes. After the test pressure state (pressurization [test pressure]), the main container and the working container are set to the atmospheric pressure state. The time difference of the pressure difference is used to evaluate the temperature effect. The temperature compensation value indicating the temperature influence is the change amount of the differential pressure value at each specific time (unit time) in the atmospheric pressure state, so it can be correctly determined by the temperature compensation value (the curve trend of Fig. 3) measured before the test pressure state. Predict the temperature change of the test pressure state. Pass 160768.doc 14· 201237385 It is often possible to use the average of the pre- and post-measurement. It is assumed that the time interval between the time when the temperature influence is evaluated under atmospheric pressure and the time interval at which the pressure difference is measured under the test pressure state is different, and the weighted average can also be considered in consideration of the time interval. Fig. 4 is a graph showing the time variation of the pressure difference between the main container and the working container when the influence of the temperature change is evaluated before the pressure state as shown in Fig. 3. The time band is evaluated in the stage before the test pressure state, and the main container and the working container are set to atmospheric pressure. Measurement under atmospheric pressure 〇 Before starting, the differential pressure sensor performs zero adjustment. In the case of temperature rise, the 'upward trend is as indicated by the dotted line β ^. Next, the time band Β shows the pressure difference between the main container and the working container in the test pressure state, and in the case of leakage or temperature change, there is A graph of the slope as indicated by the dashed line. If the main container is compared with the working container, the pressure difference after filling the test pressure (after pressurization) deviates from the zero position due to slight imbalances in volume, thermal conductivity, and temperature. For example, the starting pressure difference of the pressurization ◎ I becomes about 10 Pa to 4 〇 Pa. However, since the leak measurement is a change in the differential pressure caused by the passage of time, there is no problem of deviation from the zero position. - The time zone c is basically the same as the time zone. In the period until the start time of the measurable enthalpy, the change of the pressure difference state is stabilized as "between the whole material", and the graph in Fig. 4 is " "Setting" indicates the end of the "setting time" (measurement start timing). (Improvement of Flow Characteristics) The differential pressure measuring device of the present invention is characterized in that each of the piping paths for imparting a test pressure to the main grain and the working container by the test pressure is given by the test pressure 160768.doc -15-201237385 Set the cross-sectional area or length of the opening on the piping path by the way of the orifice of the effective sectional area. The shrinkage-setting time can be made by efficiently filling or discharging the main container or m. Thereby, the special time of the difference between the atmospheric dust state and the test force state can be shortened, and the operation of the material inspection can be improved: the flow rate of the gas reaching the main valley device, etc. For pipe fittings, solenoid valves, etc., the flow rate of the gas or the gas flow when it is discharged is affected by the diameter of the pipe to be used or the diameter of the solenoid valve. Therefore, in order to achieve gas filling or discharging of the main container and the working container together in a short period of time, it is necessary to equip each piping path which gives a test pressure to the main container and the working container by the test pressure imparting mechanism, and is equivalent to each other. Effective sectional area. Therefore, it is preferable to set the piping diameter or the solenoid valve diameter to be the same, but it is preferable to replace the piping path with at least one orifice to have an effective sectional area on the main container side and the working container side. Set for the same way. If the flow restriction is premised, the mass flow rate G[kg/s] can be expressed by the following formula (2). Further, each symbol indicates the following contents. • se • The cross-sectional area and effective sectional area of the contraction. It can be expressed by the contraction coefficient. • Α〇 : The actual sectional area of the flow path and the sectional area of the solenoid valve orifice (7) 2]. π < 12/4 can be calculated using the inner diameter d of the orifice. • Ρ!: Upflow pressure [Pa]. The upflow pressure is the pressure near the valve inlet when the container is pressurized. 160768.doc -16- 201237385 • P2: Downstream pressure [Pa]. The downflow pressure is the pressure inside the vessel (atmospheric pressure) before filling. • Θ!: Upflow temperature (filled air temperature) [κ] • κ : specific heat ratio of air • R : gas constant [J/kg.K] [Number 2]
2κ 1 (at-1) Rdx2κ 1 (at-1) Rdx
f>〇·5283 .....⑵ 如上述算式（2)所示，氣體之流量即質量流量G與有效剖 面積Se成比例，以在主容器側與工作容器侧使該有效剖面 積成為等價之方式，選定配管路徑上之開口剖面積或長 度。f>〇·5283 (2) As shown in the above formula (2), the flow rate of the gas, that is, the mass flow rate G is proportional to the effective sectional area Se, so that the effective sectional area becomes the main container side and the working container side. In an equivalent manner, the cross-sectional area or length of the opening on the piping path is selected.
又，如圖5及圖6所示，氣體之填充時間對其後之整定時 間造成影響。圖5係由單壓式感測器測定主容器或工作容 器之内部壓力的圖表，且顯示自大氣壓加壓至測試壓力 (洩漏計測所需之壓力）’其後減壓至大氣壓為止之情形。 其顯不在填充時間為〇.3秒（實線）、〇5秒（虛線）、2秒（一點 鏈線）之3個階段，使用狀態方程式進行數值計算（模擬）之 結果。又，作為前提設定為如下之條件。 •電磁閥之有效剖面積：2 75xl〇-8m2 •容積[V] : 0.00026 m3 •空氣與配管壁管之熱傳導面積[Sh]: 〇 〇65m2 160768.doc 201237385 •加壓量[P] : 201325 Pa(Abs) .定容比熱[Cv] : 717[J/(kg.K)] •定壓比熱[Cp] : l〇〇7[J/(kg.K)] •氣體常數[R] : 287.1[J/(kg.K)] •室溫[θα] : 299·75[Κ] •熱傳導率[h] : 30[W/(m2_K)] 可易於理解充填時間越短則整定時間越短。因此，藉由 重視對供給空氣時所通過之配管或電磁閥選定等價之有效 剖面積，可不浪費時間地對容器内迅速進行氣體之填充❶ 惟在氣體之填充過程中關閉電磁閥之情形時，會發生因 斷熱變化引起之壓力下降。因該傾向係填充時間越短則壓 力下降越大，故在以短時間填充時間進行作業時，有必要 對調節器等之控制閥供給較測試壓力稍高之壓力量。 圖6係顯相壓差值之變化顯*自開料充起關閉電磁 閥後之壓力下降之情形。自圖6亦可易於理解填充時間越 短則整定時間越短。且自圖5亦可明確得知，該傾向與填 充時相比，排放時之縮短整定時間之效果更為顯著。其原 因在於與填充時間對應地確保有效剖面積，故排放時亦得 以縮短排放時間。 (共通主容器） 本發明之壓力計測方法及裝置之特徵在於，即使當工作 :器之面積相異之情形時，主容器亦使用容積共通之容 器作為先前之問題，壓差式茂漏檢查對象之工作容器係 因應用途而使用各種容積’在進行壓差式汽漏檢查時有 160768.doc -18- 201237385 必要準備與工作容器相同尺寸或容積之主容器。而使用本 發明，不必準備、保管複數種之主容器作為主容器，且亦 可省略檢查時之主容器之更換作業等，可降低檢查成本且 提高洩漏檢查之作業效率。 若使用氣體之狀態方程式來表示主容器與工作容器之壓 差ΔΡ，則成為以下算式（3)。其中，Wm為主容器内之氣體 質量[kg]、Ww為工作容器内之氣體質量[kg]、R為氣體常 數[m2/(s2 ·Κ)]、Θ為溫度[K]、Vm為主容器之容積[m3]， Vw為工作容器之容積[m3]。 [數3]Further, as shown in Figs. 5 and 6, the filling time of the gas affects the subsequent timing. Fig. 5 is a graph showing the internal pressure of the main container or the working container by a single-pressure type sensor, and shows the case where the pressure is pressurized from atmospheric pressure to the test pressure (pressure required for leak measurement) and then depressurized to atmospheric pressure. It is not the result of numerical calculation (simulation) using the equation of state in three stages of filling time: 秒3 seconds (solid line), 〇5 second (dashed line), and 2 seconds (one-point chain line). Further, as a premise, the following conditions are set. • Effective sectional area of solenoid valve: 2 75xl〇-8m2 • Volume [V] : 0.00026 m3 • Heat conduction area of air and piping wall tube [Sh]: 〇〇65m2 160768.doc 201237385 • Pressurization amount [P] : 201325 Pa(Abs). Constant volume specific heat [Cv] : 717[J/(kg.K)] • Constant pressure specific heat [Cp] : l〇〇7[J/(kg.K)] • Gas constant [R] : 287.1 [J/(kg.K)] • Room temperature [θα] : 299·75 [Κ] • Thermal conductivity [h] : 30 [W/(m2_K)] It is easy to understand that the shorter the filling time, the shorter the setting time . Therefore, by selecting an equivalent effective sectional area for piping or solenoid valves that are supplied when air is supplied, it is possible to quickly fill the inside of the container without wasting time, but when the solenoid valve is closed during the filling of the gas, The pressure drop caused by the heat loss change will occur. Since the tendency is such that the pressure is reduced as the filling time is shorter, it is necessary to supply a pressure amount slightly higher than the test pressure to the control valve of the regulator or the like when the operation is performed for a short time. Figure 6 shows the change in the phase-to-phase pressure difference. * The pressure drop after the solenoid valve is closed from the charge. It can also be easily understood from Fig. 6 that the shorter the filling time, the shorter the setting time. Further, it can be clearly seen from Fig. 5 that the tendency is shorter than the time of filling, and the effect of shortening the set time at the time of discharge is more remarkable. The reason for this is that the effective sectional area is ensured in accordance with the filling time, so that the discharge time can also be shortened when discharging. (Common main container) The pressure measuring method and apparatus of the present invention is characterized in that, even when the area of the working device is different, the main container uses a container having a common volume as a previous problem, and the differential pressure type leak detecting object The working container is used for various purposes. 'When performing differential pressure steam leak inspection, there are 160768.doc -18- 201237385 It is necessary to prepare the main container of the same size or volume as the working container. According to the present invention, it is not necessary to prepare and store a plurality of main containers as the main container, and the replacement of the main container at the time of inspection can be omitted, and the inspection cost can be reduced and the work efficiency of the leak inspection can be improved. When the state equation of the gas is used to express the pressure difference ΔΡ between the main container and the working container, the following formula (3) is obtained. Among them, Wm is the gas mass [kg] in the main container, Ww is the gas mass [kg] in the working container, R is the gas constant [m2/(s2 · Κ)], Θ is the temperature [K], Vm is the main The volume of the container [m3], Vw is the volume of the working container [m3]. [Number 3]
Vm=Vw之情形時 K vmWhen Vm=Vw, K vm
Vm#Vw時 Ο ΑΡ = ^.-^^〇 但是 ρ(密度）= 如上述算式（數3)所示，若主容器與工作容器之容積相 同，當溫度相等且進入相同氣體質量之情形時，壓差ΔΡ為 0。因此，若主容器與工作容器之容積相異，在快速填充 160768.doc -19- 201237385 氣體等情況下’會大幅依存於氣體之動特性（各容器内之 氣體質量之時間變化），故壓差ΔΡ不可能為〇。 又’如圖7所示’整定時間内所產生之壓差，會因填充 氣體使得主容器與工作容器之間之熱傳導率、溫度影響及 容積產生些微差異而有所不同。在大氣壓下對壓差進行最 初計測會因容積變化產生壓差，該部分可藉由乘以密度係 數進行修正。 又，計測過程中受到急劇溫度影響之情形時會對容積差 引起之壓差造成影響，但若為室溫變化程度則不會有太大 之影響。因此，即使主容器與工作容器之間容積相異，亦 可僅檢測工作容器之洩漏所引起之壓差（氣體質量之歷時 減少）即，如圖7所示，雖然會因主容器與工作容器之間之 容積差而可能引起整定時間若干延長，但並不會大幅延 長。因此，藉由於整定時間經過後進行壓差值之測定，即 使在主容器與工作容器之間之容積相異之情況下，亦可充 分進行洩漏檢查。進而，因無必要使加 縮短計測日㈣，㈣可㈣於填錢將主容器與/作為容0器 各個截斷而等待整定時間之構成。 主容器之容積相較於工作容器之容積小，主容器側之整 定時間=，就短時間進行茂漏檢查方面而言較佳。且，如 上逑’精由將通往各容器之配管路徑之有效面積兩者設為 目同，可抑制主容器側之整定時間較工作容器側為長。 且’選定之主容器與工作容器宜為相同材f ^目同形狀。 例如，工作容器若材質為銅、配管口徑為i〇mm、容積為3 I60768.doc -20· 201237385 公：，則主容器選定為材質為銅、配管口徑為ι〇 積為1公升。 谷器之合積宜設定為工作容器容積之3分之1以 上因為，若主容器之容積過度小於工作容器之容積，則 :¾漏判斷時’靜壓狀態下之空氣之質量變化大，會有 誤判之情形。即，若主交努 主合器與工作容器之容積之差異大， 會在兩者所受之環境溫度影響下使其差異變大。如此，即 ❹Vm#Vw Ο ΑΡ = ^.-^^〇 but ρ (density) = as shown in the above formula (number 3), if the volume of the main container and the working container are the same, when the temperature is equal and the same gas quality is entered The pressure difference ΔΡ is zero. Therefore, if the volume of the main container and the working container are different, in the case of rapidly filling 160768.doc -19- 201237385 gas, etc., it will depend greatly on the dynamic characteristics of the gas (time change of the gas quality in each container), so the pressure The difference ΔΡ cannot be 〇. Further, the pressure difference generated during the set time as shown in Fig. 7 differs due to the slight difference in thermal conductivity, temperature influence, and volume between the main container and the working container due to the filling gas. The initial measurement of the differential pressure at atmospheric pressure creates a pressure differential due to volume changes that can be corrected by multiplying the density factor. In addition, when the temperature is affected by the rapid temperature during the measurement process, the pressure difference caused by the volume difference is affected, but the degree of change at room temperature does not have much influence. Therefore, even if the volume between the main container and the working container is different, it is possible to detect only the pressure difference caused by the leakage of the working container (the duration of the gas quality is reduced), that is, as shown in FIG. 7, although it is due to the main container and the working container. The difference in volume between them may cause some delay in the setting time, but it will not be greatly extended. Therefore, by measuring the differential pressure value after the lapse of the set time, even if the volume between the main container and the working container is different, the leak check can be sufficiently performed. Further, since it is not necessary to shorten the measurement day (4), (4) (4) it is possible to cut off the main container and / as the container and wait for the setting time. The volume of the main container is smaller than the volume of the working container, and the setting time of the main container side is preferably in terms of leak detection for a short period of time. Further, if both the upper and lower sides of the piping path to the respective containers are made the same, it is possible to suppress the setting time on the main container side from being longer than the working container side. And the selected main container and the working container are preferably of the same shape. For example, if the working container is made of copper, the pipe diameter is i〇mm, and the volume is 3 I60768.doc -20· 201237385 mm: the main container is made of copper and the pipe diameter is 1 liter. The combination of the barn should be set to be more than one-third of the volume of the working container. If the volume of the main container is excessively smaller than the volume of the working container, the quality of the air under static pressure changes greatly when the leakage is judged by 3⁄4. There are cases of misjudgment. That is, if the difference between the volume of the main manifold and the working container is large, the difference will be increased under the influence of the ambient temperature of both. So, that is, ❹
G 使受到相同環境溫度變化，仍會因容積等使得内部之變化 狀t相異，故主容器之容積宜為工作容器之容積之3分之1 以上。 [產業上之可利用性] 如以上說明所述，根據本發明可提供可提高线漏檢查之 作業效率、且提高沒漏檢查之精度之壓差計測方法及裝 置。 【圖式簡單說明】 圖1係本發明之壓差計測裝置之概略圖。 圖2係說明本發明之壓差計測方 1』万法所利用之測定時序的 圖表。 圖3係說明於本發明之壓差計測方 』万去所利用之測試壓力 狀態之前後’評估溫度變化之影響之過程的圖表。 圖4係本發明之壓差計測方法之一眘 ^貫施例，且顯示壓差 之時間變化的圖表。 圖5係顯示本發明之壓差計測方法之办祖 d夺器之内部壓力之 時間變化的圖表，且顯示相對氣艚垃 礼篮填充時間之整定時間 160768.doc •21- 201237385 (開始檢查時序）之變化的圖表。 圖6係顯示相對於圖5之壓差變化的圖表，且顯示氣體填 充開始後緊接的過渡性變化（整定時）之圖表。 圖7係顯示使用本發明之壓差計測方法之共通容積之金 準容器時之壓力變化的圖表。 160768.doc 22-G is subject to the same ambient temperature change, and the internal change t is different depending on the volume, etc., so the volume of the main container should be more than one third of the volume of the working container. [Industrial Applicability] As described above, according to the present invention, it is possible to provide a differential pressure measuring method and apparatus which can improve the work efficiency of the line leak inspection and improve the accuracy of the leak-free inspection. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a differential pressure measuring device of the present invention. Fig. 2 is a graph showing the measurement timing used by the differential pressure measuring unit of the present invention. Fig. 3 is a graph showing the process of evaluating the influence of temperature change before and after the test pressure state utilized by the differential pressure gauge of the present invention. Fig. 4 is a diagram showing a cautious example of the differential pressure measuring method of the present invention, and showing a time variation of the pressure difference. Figure 5 is a graph showing the time variation of the internal pressure of the cadaver of the differential pressure measuring method of the present invention, and shows the setting time of the filling time of the relative smashing basket 160768.doc • 21- 201237385 (starting the inspection sequence) ) The chart of the change. Fig. 6 is a graph showing the change in the pressure difference with respect to Fig. 5, and shows a graph of the transitional change (wound timing) immediately after the start of gas filling. Fig. 7 is a graph showing changes in pressure when a standard volume of a standard container of the differential pressure measuring method of the present invention is used. 160768.doc 22-